一种应用于MOCVD的3波长在线红外测温方法

根据金属有机物化学气相沉积(MOCVD)在线红外测温的发展需要,提出一种3波长免探测孔有效面积校准和反射率修正的测温方法。给出了探测1 300 nm、1 150 nm、940 nm 3波长的在线测温探头设计方案和光路图,将该探头应用于THOMAS SWAN CCS MOCVD 5.08 cm (2英寸)Si(111)衬底上生长10 μm GaN外延层的在线测温。测量结果表明:在700 ℃~1 100 ℃范围内,探头多次测量的重复性误差在1.0 ℃内,在950 ℃~1 100 ℃范围内,以EpiTT红外测温仪为参考,探头测温精度在1 ℃内,距离容差性为2 mm。该探头应用于我国自主研发的MOCVD 5.08 cm Si(111)衬底上生长InGaN/GaN MQW结构蓝光LED外延片,可得最低测温量程为435 ℃,n-GaN生长过程中测量噪声为0.75℃。结果分析表明:该3波长免修正在线红外测温法对于高质量单层薄膜外延生长具有一定可行性,对于多层复杂结构外延生长需要进一步改进。     

MOCVD原位红外测温方法的比较研究

MOCVD原位红外测温方法主要有单色辐射测温法与双波长比色测温法。利用薄膜等厚干涉模型与Kirchhoff定律计算了Si (111)衬底生长10 m GaN外延片的940 nm、1 550 nm光谱发射率,以Thomas Swan CSS MOCVD为例,比较了500 ℃至1 300 ℃范围内,940 nm单色辐射测温法、1 550 nm单色辐射测温法、940 nm与1 550 nm双波长比色测温法的相对误差和相对灵敏度,以及单色辐射测温法与双波长比色测温法的校准修正,并利用940 nm与1 550 nm双波长比色测温法在线监测了Si (111)衬底生长InGaN/GaN MQW 结构LED外延片过程中的温度。研究表明:940 nm与1 550 nm双波长比色测温法在相对误差及有效探测孔径修正校准上优于940 nm单色辐射测温法和1 550 nm单色辐射测温法,该结论可为MOCVD原位红外测温设备开发提供参考。     

MOCVD法制备BGaN薄膜

利用金属有机物化学气相沉积(MOCVD)技术,在蓝宝石衬底上进行了BGaN薄膜的外延生长,研究了生长厚度、温度、压力和B/Ⅲ比等条件对BGaN薄膜中B组分的影响。X射线衍射测试结果表明,降低生长温度、压力以及增加B/Ⅲ比,更有利于提高BGaN薄膜中B的并入效率。在800℃、30 kPa及B/Ⅲ比为30%的生长条件下,制备的BGaN薄膜中B组分最高,为6.1%。     

MOCVD多功能在线监测探头的设计与实现

根据MOCVD在线监测设备的发展需要,设计了一种多功能在线监测探头,能够同时实现带反射率修正的三种红外辐射测温以及两个波长的反射率曲线监测,即:940nm/1 550nm双波长比色测温、940nm单色辐射测温、1 550nm单色辐射测温、940nm反射率曲线以及1 550nm反射率曲线监测.对探头的比色测温性能进行测试分析,并利用该探头对Si(111)衬底在我国自主研发的MOCVD系统中生长InGaN/GaN MQW结构蓝光LED外延片进行在线监测.结果分析表明:比色测温900℃~1 100℃范围内精度高于1℃;在700℃~1 100℃范围内重复性误差均在0.7℃内;距离容差性为2mm;三种红外测温最低量程均为435℃;并能有效避免探测孔有效面积变化的影响;由940nm反射率曲线得:n-GaN层的膜厚监测相对误差为3.6%.该设计能够同时实现MOCVD在线测温及膜厚测量,可为MOCVD在线监测设备开发提供参考.     

N极性GaN薄膜的MOCVD外延生长

采用MOCVD技术在c面蓝宝石衬底上外延制备了N极性GaN薄膜。通过KOH腐蚀的方法判定了GaN外延薄膜的极性。通过X射线双晶衍射(XRD)摇摆曲线和光致荧光(PL)谱测试研究了成核层生长时间对N极性GaN薄膜晶体质量和发光性能的影响。研究结果表明,成核层生长时间为300 s时,N极性GaN薄膜样品的位错密度最低,发光性能最好。采用拉曼(Raman)光谱对样品的应变状态进行了分析。     

换流站阀厅红外在线测温系统设计

为减少换流站阀厅人工测温的劳动强度,提升阀厅设备异常诊断效率,保障和提高电力设备的运行可靠性,需要对换流站阀厅在线测温系统进行设计。当前方法利用人工接触式测温,并采用固定的监控实现阀塔温度的检查,存在劳动强度大、测温仪的盲区较多,巡检人员的技能水平和责任心致使巡检质量的随机性较大等问题。很难实现巡视范围的全方位覆盖,阀塔设备运行过程中存在较大的隐患。为此,提出一种基于红外对换的流站阀厅在线测温系统。该系统利用AT89C51单片微型计算机、温度采集、测温电路、系统电源电路以及看门狗电路等模块结合组建测温系统的整体结构,通过PXA270处理器、复位电路、A/D转换器、USB接口、温度传感器、红外测温探头、RS485接口等构成系统的硬件部分。根据DS18B20对在线测温电路进行设计,通过7805三端稳压片实现系统电源电路的设计。系统的软件部分对换流站设备辐射度和温度之间的关系进行研究,并利用换流站阀厅温度异常判断方法实现换流站设备故障诊断。实验结果证明,所提方法能够有效对换流站阀厅电力设备的早期缺陷进行实时监测,提高在线测温系统的运行效率,减少各种因阀厅温度的增加而导致设备产生故障的概率。     

光辅助对MOCVD法制备ZnO薄膜性能的影响

采用光辅助金属有机化学气相沉积(MOCVD)技术在(0001)蓝宝石衬底上制备了ZnO薄膜。通过X射线衍射、透射光谱和霍尔测试等研究了光照对MOCVD法制备的ZnO薄膜的影响。实验结果表明,引入光辅助后制备的ZnO薄膜,其结晶质量和光学质量均得到改善。分析认为,这主要是由于光辅助有助于提高锌有机源的分解效率,并且高能量的光子可为反应吸附的原子提供足够高的激活能,从而易于其迁移到合适的晶格位置所致。同时我们还发现,有光照和无光照条件下制备的ZnO薄膜均呈n型导电,但有光照条件下制备的ZnO薄膜具有更低的本底载流子浓度,这将为日后通过降低自补偿实现p型掺杂提供一个很好的解决办法。     

具有多MO喷嘴垂直MOCVD反应腔外延层厚度均匀性的优化理论及应用

金属有机物化学气相淀积(metal organic chemical vapor deposition, MOCVD)作为异质结半导体材料外延的关键手段,其外延层厚度均匀性会直接影响产品的良率.本文将理论与实验相结合,针对3个MO源喷嘴的垂直反应腔MOCVD,将各MO源喷嘴等效为蒸发面源,并引入一等效高度来涵盖MOCVD的相关外延参数,建立外延层厚度与各MO源喷嘴流量间的定量关系,设计并利用EMCORE D125 MOCVD系统外延生长了AlGaAs谐振腔结构,根据实验测得的外延层厚度分布结果,利用最小二乘法对模型参数进行了拟合提取,基于提取的模型参数,给出了优化外延层厚度均匀性的方法. 4 in (1 in=2.54 cm)外延片mapping反射谱的统计结果为,腔模的平均波长为651.89 nm,标准偏差为1.03 nm,厚度均匀性达到0.16%.同时外延生长了GaInP量子阱结构, 4 in外延片mapping荧光光谱的统计结果为,峰值波长平均值为653.3 nm,标准偏差仅为0.46 nm,厚度均匀性达到0.07%.本文提出的调整外延层厚度均匀性的方法具有简单、有效、快捷的特点...     

生长温度对AlGaInN四元合金薄膜性质的影响

利用金属有机物化学气相沉积（MOCVD）方法在c面蓝宝石（α-Al₂O₃）衬底上外延生长了铝镓铟氮（AlGaInN）四元合金薄膜.合金薄膜的生长温度设置为800,850,900 ℃,对获得的样品进行对比分析发现：随着生长温度的升高,合金中的In组分单调降低,而Al组分则基本保持恒定.当合金薄膜的生长温度升高到850 ℃时,薄膜表面开始出现V型缺陷;生长温度进一步升高到900 ℃时,偏析In原子的脱吸附作用加剧,V型缺陷成核被弱化,使V型缺陷的特征尺 关键词： AlGaInN 金属有机物化学气相沉积 生长温度     

不同非均匀性校正温度的红外测温技术

为使制冷型中波红外热像仪在不同环境温度下经过非均匀性校正后保持较高的测温精度,研究了考虑非均匀性校正温度效应的中波红外热像仪标定模型。利用不同温度的面源黑体对热像仪进行非均匀性校正,然后对黑体目标进行测温实验,获得了不同校正温度下热像灰度与黑体辐射亮度之间的变化关系,建立了目标的测温数学计算模型,最后对测温结果进行误差分析。结果表明：在不同校正温度下,热像灰度相对非均匀校正辐亮度的漂移可做线性化处理,且与目标温度变化无关。在非均匀性较低的测温范围内热像仪的测温误差小于±0.22 ℃,极大减小了制冷型中波红外热像仪在不同校正温度下非均匀性校正后的测温误差。     

Universal thermometry for quantum simulation

Quantum simulation is a highly ambitious program in cold atom research currently being pursued in laboratories worldwide. The goal is to use cold atoms in optical lattices to simulate models for unsolved strongly correlated systems, so as to deduce their properties directly from experimental data. An important step in this effort is to determine the temperature of the system, which is essential for deducing all thermodynamic functions. This step, however, remains difficult for lattice systems at the moment. Here, we propose a method based on a generalized fluctuation-dissipation theorem. It does not rely on numerical simulations and gives a universal thermometry scheme for quantum gas systems including mixtures and spinor gases, provided that the local density approximation is valid.     

Global rainbow thermometry for droplet-temperature measurement

Standard rainbow thermometry connects the scattering angle of the main rainbow maximum, generated by a single droplet, to the droplet's refractive index and thus to its temperature. Droplet nonsphericity influences the rainbow position and therefore degrades the quality of the droplet-temperature measurement. We propose global rainbow thermometry, which measures the average rainbow position that is created by multiple droplets and from which a mean temperature can be derived. The new technique aims at eliminating the nonsphericity effect. The principle of this method is presented, and a typical recorded image is discussed.     

Two-wavelength differential thermometry for microscopic extended source

Sample temperature may theoretically be determined if we know or measure four quantities (two radiances at two specific wavelengths). We performed differential, continuous two-wavelength thermometry on a micro-surface element of the coiled coil filament used in tungsten lamp with a spectrometer. Results indicate that differential, continuous thermometry using a spectrometer measures temperature distribution along a short line. This method significantly enhances the capability of this established technique to new applications.     

Two-colour phosphor thermometry for surface temperature measurement

Thermographic phosphor thermometry enables surface temperatures to be measured over a wide range extending from sub 0 °C to in excess of 1400 °C by utilising the temperature-dependent luminescent properties of lanthanide-doped ceramics. The technique is particularly advantageous where surface temperatures are high due to the difficulty in applying conventional techniques and is therefore particularly well suited to the study of surface temperatures and heat transfer in gas turbines. The paper describes a two-colour implementation of the technique based on the intensity ratio of emissions from two distinct lines in the spectrum. An imaging system based on a single CCD camera has been developed and is described as are the image processing routines. YAG:Dy and YSZ:Dy phosphors were calibrated over a temperature range from 300 to 900 K with a repeatability in the data of around ±0.6%. The response of the phosphors and the performance of the imaging system were demonstrated in a transient heating/cooling study of ceramic and metallic plates.     

Fast thermometry for trapped atoms using recoil-induced resonance

We have employed recoil-induced resonance(RIR) with linewidth on the order of 10 k Hz to demonstrate the fast thermometry for ultracold atoms. We theoretically calculate the absorption spectrum of RIR which agrees well with the experimental results. The temperature of the ultracold sample derived from the RIR spectrum is T = 84 ± 4.5 μK, which is close to 85 μK that measured by the method of time-of-flight absorption imaging. To exhibit the fast measurement advantage in applying RIR to the ultracold atom thermometry, we study the dependence of ultracold sample temperature on the trapping beam frequency detuning. This method can be applied to determine the translational temperature of molecules in photoassociation dynamics.     

Multiplex polarization spectroscopy of OH for flame thermometry

2 Σ-X²Π(0,0) band system. High resolution polarization spectra were also recorded in the same flame using a conventional, frequency scanned, narrow linewidth dye laser. Absorption effects were found to produce significant systematic errors in the temperatures derived from the unsaturated spectra produced by both multiplex and narrow linewidth scanning techniques. After correction for absorption effects, temperatures were derived from the single-shot multiplex spectra with a precision of 4% which agreed well with values obtained from scanned spectra and from the calculated adiabatic temperatures. Received: 31 July 1996/Revised: 17 March 1997