Strain relaxation in InGaAs/GaAs quantum wells grown on GaAs (111)A substrates

We have grown In_0.2Ga_0.8As strained quantum wells (SQWs) on GaAs (111)A just and off-angled substrates by molecular beam epitaxy (MBE). The photoluminescence (PL) peak energy of SQWs grown on (111)A related substrates shows a large redshift as compared with the calculated values. The red-shift observed in SQWs grown on a (111)A 5° off toward [001] substrate can be explained by the presence of a built-in electric field E = 154 kV/cm due to piezoelectric effect. The larger red-shift observed in samples grown on the other substrates is partially due to strain relaxation. A strain relaxation mechanism that consists of coherently grown islands when InGaAs growth begins and the generation of misfit dislocations when these islands coalesce, gives a qualitative explanation of the observed results.     

In-situ X-ray imaging of III-V strained-layer relaxation processes

The important value of the X-ray topography (XRT) technique for the investigation of III-V strained-layer relaxation processes is described. In addition to post-growth ex-situ XRT studies, a unique combined XRT/MBE growth facility has been constructed which allows the generation, motion and interaction of misfit dislocations to be monitored in-situ during epilayer growth, for the first time. The in-situ data already obtained for (100) InGaAs strained-layer growth on both Czochralski- and vertical-gradient freeze-grown GaAs substrates indicates technologically important differences in the initial relaxation process, including, in the latter case, the observation of a previously unreported secondary relaxation phase. Initial results relating to the influence of both post-growth annealing and the subsequent cool-down process are also described.     

Precise thickness measurement within a few monolayers by X-ray diffraction from InGaAs/GaAs strained-layer superlattices

We propose a technique to measure the thickness of a GaAs layer with a precision of a few monolayers (MLs) by high-resolution X-ray diffraction (HRXRD) from InGaAs/GaAs strained-layer superlattices (SLSs) on GaAs substrates. Using this technique to monitor the GaAs growth rate, we have successfully controlled the Ga beam flux within ±1% in molecular beam epitaxy (MBE) growth for continuous 40 runs during four days by increasing the Ga cell temperature to compensate the decrease of the Ga beam flux caused by the consumption of the Ga source. Precise thickness measurements are also demonstrated in the growth on InP substrates by using InAlGaAs/InGaAs SLSs and InAlGaAs/InAlAs SLSs.     

X-ray diagnostics of P-HEMT AlGaAs/InGaAs/GaAs structures

The structural characteristics of the P-HEMT AlGaAs/InGaAs/GaAs heterostructure have been studied by high-resolution X-ray diffractometry. The parameters of the heterostructure layers were determined by simultaneous analysis of the X-ray reflection curves for the (004) and (113) crystallographic planes. Interface diffusion has been established for the In_yGa_1?yAs quantum well and the Al_xGa_1?x As spacer layer, which are characterized by reconstructed profiles of the lattice parameter distribution and anisotropic distribution of random displacements in the layer plane and in the perpendicular direction.     

Interdiffusion phenomena in InGaAs/GaAs superlattice structures

We have studied structural properties of InGaAs/GaAs superlattice sample prepared by Molecular Beam Epitaxy (MBE) using high resolution X‐ray diffractometer (HRXRD). Increasing strain relaxation and defect generations are observed with the increasing Rapid Thermal Annealing (RTA) temperature up to 775 °C. The higher temperatures bring out relaxation mechanisms; interdiffusion and favored migration. The defect structure and the defects which are observed with the increasing annealing temperature were analyzed. Firstly, the in‐plane and out‐of‐plane strains after the annealing of sample were found. Secondly, the structural defect properties such as the parallel X‐ray strain, perpendicular X‐ray strain, misfit, degree of relaxation, x composition, tilt angles and dislocation that are obtained from X‐ray diffraction (XRD) analysis were carried out at every temperature. As a result, we observed that the asymmetric peaks especially in asymmetric (224) plane was affected more than symmetric and asymmetric planes with lower polar or inclination angles due to c‐direction at low temperature. These structural properties exhibit different unfavorable behaviors for every reflection direction at the increasing temperatures. The reason is the relaxation which is caused by spatially inhomogeneous strain distribution with the increasing annealing temperature. In the InGaAs superlattice samples, this process enhances preferential migration of In atoms along the growth direction. Further increase in the annealing temperature leads to the deterioration of the abrupt interfaces in the superlattice and degradation in its structural properties. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Diffusion constant of Ga adatom on GaAs (001) surface: Molecular dynamics calculations

A valence force field to reproduce both the phonon dispersion curves of crystalline GaAs and first principle derived interaction energies of Ga adatom on GaAs (001) surface has been optimized. Calculations of diffusion constant of isolated Ga atoms on the GaAs surface have been performed by molecular dynamics classical trajectory simulations.     

Structural Characteristics of Epitaxial Low-Temperature Grown {InGaAs/InAlAs} Superlattices on InP(100) and InP(111)A Substrates

Crystallography Reports - The structural characteristics of {InGaAs/InAlAs} superlattices, grown by molecular-beam epitaxy (MBE) at a temperature of 200°C on InP substrates with the...     

Metamorphic InAs(Sb)/InGaAs/InAlAs nanoheterostructures grown on GaAs for efficient mid-IR emitters

High-efficiency semiconductor lasers and light-emitting diodes operating in the 3–5?μm mid-infrared (mid-IR) spectral range are currently of great demand for a wide variety of applications, in particular, gas sensing, noninvasive medical tests, IR spectroscopy etc. III-V compounds with a lattice constant of about 6.1?Å are traditionally used for this spectral range. The attractive idea to fabricate such emitters on GaAs substrates by using In(Ga,Al)As compounds is restricted by either the minimum operating wavelength of ～8?μm in case of pseudomorphic AlGaAs-based quantum cascade lasers or requires utilization of thick metamorphic In_xAl_1-xAs buffer layers (MBLs) playing a key role in reducing the density of threading dislocations (TDs) in an active region, which otherwise result in a strong decay of the quantum efficiency of such mid-IR emitters. In this review we present the results of careful investigations of employing the convex-graded In_xAl_1-xAs MBLs for fabrication by molecular beam epitaxy on GaAs (001) substrates of In(Ga,Al)As heterostructures with a combined type-II/type-I InSb/InAs/InGaAs quantum well (QW) for efficient mid-IR emitters (3–3.6?μm). The issues of strain relaxation, elastic stress balance, efficiency of radiative and non-radiative recombination at T?=?10–300?K are discussed in relation to molecular beam epitaxy (MBE) growth conditions and designs of the structures. A wide complex of techniques including in-situ reflection high-energy electron diffraction, atomic force microscopy (AFM), scanning and transmission electron microscopies, X-ray diffractometry, reciprocal space mapping, selective area electron diffraction, as well as photoluminescence (PL) and Fourier-transformed infrared spectroscopy was used to study in detail structural and optical properties of the metamorphic QW structures. Optimization of the growth conditions (the substrate temperature, the As₄/III ratio) and elastic strain profiles governed by variation of an inverse step in the In content profile between the MBL and the InAlAs virtual substrate results in decrease in the TD density (down to 3?×?10⁷ cm^?2), increase of the thickness of the low-TD-density near-surface MBL region to 250–300?nm, the extremely low surface roughness with the RMS value of 1.6–2.4?nm, measured by AFM, as well as rather high 3.5?μm-PL intensity at temperatures up to 300?K in such structures. The obtained results indicate that the metamorphic InSb/In(Ga,Al)As QW heterostructures of proper design, grown under the optimum MBE conditions, are very promising for fabricating the efficient mid-IR emitters on a GaAs platform.     

Molecular beam epitaxy growth and properties of GaAs/(AlGa)As p-type heterostructures on (100), (011), (111)B, (211)B, (311)B, and (311)A oriented GaAs

We report on a series of Be-doped GaAs/AlGaAs two-dimensional hole gas (2DHG) structures grown on (110), (111)B, (211)B and (311)B oriented substrates and compare their properties with high-mobility samples grown on (311)A using Si doping. The samples were prepared and grown under the same conditions so as to render them comparable. They are found to have mobilities which are strongly anisotropic within the plane. The highest mobility is found on the (110) surface with 100,000 cm² V⁻¹ s⁻¹, while the (211) surface gave the lowest values 10,000 cm² V⁻¹ s⁻¹. However, the later samples are found to have quantum Hall effect critical currents of >70 μA: an exceptionally high value for a hole gas which makes them suitable for metrology. All the samples show strong low-field positive magnetoresistance with resistance increases of up to 30% at magnetic fields of only 0.1 T. The presence of this feature on all the different planes shows that it does not depend upon the details of the band structure. It is identified with the lifting of the degeneracy of the spin sub-bands by the asymmetrical potential giving rise to a classical two-band magnetoreresistance.     

High-quality CdTe(100)/GaAs(100) grown by hot-wall epitaxy using gold tube radiation shield

High-quality CdTe(100) layers grown on GaAs(100) substrates by hot-wall epitaxy using a gold tube radiation shield are reported for the first time. From the investigation of thermal properties, we find that the gold tube radiation shield is more effective in heat confinement and temperature stability than a stainless steel tube radiation shield. The CdTe lattice parameters perpendicular to the interface decrease as the layer thickness increases by strain relaxation. We obtain 89 arc sec full width at half maximum of the X-ray double-crystal rocking curve for a 15 μm thick CdTe layer which is the smallest value reported to date. Exciton emission and donor-acceptor pair emission along with longitudinal optical (LO) phonon replicas are obtained from PL measurements, confirming the good quality of the crystal.     

Anisotropy in InGaAs/GaAs heterostructures grown by low-pressure MOVPE and CBE

InGaAs/GaAs heterostructures grown on (001) substrates by low-pressure MOVPE exhibit a measurable anisotropy in their structural, optical and electrical properties. This anisotropy occurs in structures which have undergone partial or complete strain relaxation and it can be strongly reduced by using slightly misoriented substrates. A comparison with similar structures grown by CBE indicates that this anisotropy is less important. This study suggests that strain relaxation is achieved by a combination of several mechanisms whose relative importance depends on the orientation of the substrate and on growth temperature which varies with the growth technique.     

Molecular dynamics simulation of radiation damage in glasses

Molecular dynamics simulations of the ballistic effects arising from displacement cascades in glasses have been investigated in silica and in a SiO₂-B₂O₃-Na₂O glass. In both glasses the T-O-T′ angle (where T and T′ are network formers) diminishes, despite radiation causes opposite effects: while the ternary glass swells and silica becomes denser. We show that radiation-induced modifications of macroscopic glass properties result from structural change at medium/range, reflecting an increasing disorder and internal energy of the system. A local thermal quenching model is proposed to account for the effects of ballistic collisions. The core of a displacement cascade is heated by the passage of the projectile, then rapidly quenched, leading to a process that mimics a local thermal quenching. The observed changes in both the mechanical and structural properties of glasses eventually reach saturation at 2 10¹⁸ α/g as the accumulated energy increases. The passage of a single projectile is sufficient to reach the maximum degree of damage, confirming the hypothesis postulated in the swelling model proposed by J.A.C. Marples.     

Molecular dynamics simulation of premelting effect in AgBr

The effect of premelting in silver bromide crystals has been simulated for the first time. It is shown that at the temperature about 150°C lower than the melting point of silver bromide, a considerable increase in the mobility in the cationic sublattice is observed, whereas the (self-)diffusion coefficient of silver ions attains values exceeding 10^?6 cm²/s. The assumption about the superionic nature of conductivity in the region of premelting is confirmed by the break of the long-range order in the cationic subsystem, which, in turn, is confirmed by the comparison of the pair cation-cation correlation functions far from and in the vicinity of the melting point. It is established that the premelting effect correlates with the experimentally observed effect of a considerable increase in ionic conductivity in the vicinity of the melting point. It is shown that the premelting effect in AgBr is similar to the diffuse superionic phase transition in anionic conductors of the MF₂ family (M = Ca, Ba, Sr, and Pb).     

Growth of InGaAs/GaAs heterostructures with abrupt interfaces on the monolayer scale

Segregation processes entail severe deviations from the nominal composition profiles of heterostructures grown by molecular beam epitaxy for most semiconductor systems. It is, however, possible to compensate exactly these effects, as shown here for InGaAs/GaAs. The deposition of a one-monolayer-thick indium-rich prelayer of InGaAs (or of a sub-monolayer amount of InAs) prior to growth of In_xGa_1−xAs allows forming a perfectly abrupt In_xGa_1−xAs-on-GaAs interface. Thermal annealing can furthermore be performed at the GaAs-on-InGaAs inter face, so as to desorb surface indium atoms and suppress In incorporation in the GaAs overlayer. This powerful approach has been validated from a detailed study of the surface composition at various stages of the growth of InGaAs/GaAs quantum wells, as well as from high-resolution transmission electron microscopy and photoluminescence investigations.     

采用MOCVD方法在GaAs衬底上生长ZnO(002)和ZnO(100)薄膜

采用金属有机化学汽相沉积生长法（MOCVD）,在不同的衬底表面处理条件和生长温度下,在GaAs衬底上生长出了ZnO薄膜。随着化学腐蚀条件的不同,可生长出优先定位不同的ZnO（100）和ZnO（002）薄膜。该薄膜的晶体结构特性是由X光衍射谱仪（XRD）所获得的,而其光学特性是由光荧光谱仪（PL）来测的。与ZnO（002）相比,ZnO（100）薄膜具有更优越的晶体结构特性,并且在同样的生长温度下都具有相似的光学特性。对于腐蚀条件不同的GaAs衬底所进行的XPS分析结果表明,ZnO薄膜优先定位变化的主要原因在于腐蚀过程中形成的富As层。     

Molecular dynamics simulation of high-pressure densification of fluorozirconate glass

Molecular dynamics simulations have been performed for a fluorozirconate glass and its model crystals in order to investigate the mechanism of the peculiar high-pressure densification phenomenon of the glass. All the polymorphs and the pressure-induced phase-transition of the model crystals were satisfactorily reproduced. The changes in the density, the F⁻ coordination number and the connectivity of ZrF_n polyhedra during the compression-decompression process are investigated under the glassy state. The density increases under high pressure, accompanying the increases in the coordination number and the connectivity. The effect of annealing treatment near T_g is also investigated. The effect was significant around 20 GPa, around which a maximum was found in the treatment-pressure dependence of density after decompression, only for the samples with the annealing treatment before decompression.     

Ion-Beam Crystallization of InGaAs Island Nanostructures on GaAs Substrates

Crystallography Reports - The possibility of growing arrays of InxGa1 – xAs nanocrystals on GaAs substrates by ion-beam deposition is experimentally shown. The influence of...     

InxGa1−xAs/GaAs quantum wire structures grown on GaAs (100) patterned substrates with [001] ridges

In_xGa_1−xAs/GaAs (x = 0.12-0.23) quantum well (QW) structures were grown by molecular beam epitaxy (MBE) on [001] ridges with various widths (1.1-12 μm) of patterned GaAs (100) substrate. The smallest lateral width of the InGaAs/GaAs quantum wire (QWR) structures was estimated to be about 0.1 μm by high-resolution scanning electron microscope (SEM). The In contents of the grown InGaAs/GaAs QWs on the ridges were studied as a function of ridge top width (ridge width of the MBE grown layer) by cathodoluminescence (CL) measurements at 78 K. Compared to the InGaAs QW grown on a flat substrate, the In content of the InGaAs/GaAs QW on the ridge increases from 0.22 to 0.23 when the ridge top width decreases to about 2.9 μm, but it decreases steeply from 0.23 down to 0.12 with a further decrease of the ridge width from 2.9 to 0.05 μm. A simulation of MBE growth of InGaAs on the [001] ridges shows that this reduced In content for narrow ridges is due to a large migration of Ga atoms to the (100) ridge top region from {110} side facets.     

In situ monitoring of CdTe nucleation on GaAs (100) using spectroscopic ellipsometry

In situ spectroscopic ellipsometry was used to monitor the nucleation behavior of CdTe grown on vicinal GaAs (100) substrates by organometallic vapor phase epitaxy. CdTe was grown on GaAs (100) substrates of exact and 2° off towards 110 orientations. A spectroscopic ellipsometer was used to collect in situ data at 44 wavelengths from 4000–7000 Å. The Bruggeman's effective medium approximation was employed to determine the variation of the epilayer volume fraction with thickness, which was an indirect way of monitoring the expected island growth behavior. The Stranski-Krastonov (layer plus island) mode of growth was clearly observed for CdTe growth. The growth on the 2° off substrate was also “denser” than that on exact (100), which implied that coalescence of the islands occurred at lower thickness. This was expected since island nucleation is most favored along the ledges on the surface whose spacing decreases with increasing misorientation. A simple nucleation model, assuming cylinder-like islands, was able to fit the experimental data quite well, lending support to the island growth model.