Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing. PACS 42.62.-b; 81.05.Kf; 42.82.Cr; 82.50.Pt; 42.79.Gn     

Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

Direct write of optical diffractive elements and planar waveguides with a digital micromirror device based UV photoplotter

A photoplotter, based on a digital micromirror device as real-time reconfigurable mask, is designed to direct-write microstructures in different photosensitive materials. Binary and multilevel elements, such as computer generated holograms with 2, 4 and 8 phase levels and planar optical waveguide structures with tapers and/or long period gratings, are fabricated in a single processing step. Direct parallel write into different photosensitive materials with attractive optical properties is proposed and first results are shown in a commercially available organic-inorganic hybrid material.     

Modified phase contrast for recording of holographic optical elements

A modified phase contrast method is described for the fabrication of holographic optical elements with in-line diffraction patterns. In this method, a liquid crystal phase modulator is addressed by computer-generated holograms to achieve variable phase gratings. The phase gratings are imaged onto photosensitive material by a phase contrast method without a Fourier filter. We show the analytical treatment of the modified phase contrast method and demonstrate the application in holographic recording.     

Fabrication of three-dimensional photonic crystal structures containing an active nonlinear optical chromophore

Direct laser writing by two-photon polymerization of photosensitive materials has emerged as a very promising technique for rapid and flexible fabrication of photonic crystals. In this work, a photosensitive silica sol-gel containing the nonlinear optical chromophore Disperse Red 1 is synthesized, and the two-photon polymerization technique is employed to fabricate three-dimensional photonic crystals with stop-gaps in the near-infrared. The composite material exhibits minimal shrinkage during photopolymerization, eliminating the need for shrinkage compensation or the fabrication of support structures.     

Three‐dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips

Internal modification of transparent materials such as glass can be carried out using multiphoton absorption induced by a femtosecond (fs) laser. The fs‐laser modification followed by thermal treatment and successive chemical wet etching in a hydrofluoric (HF) acid solution forms three‐dimensional (3D) hollow microstructures embedded in photosensitive glass. This technique is a powerful method for directly fabricating 3D microfluidic structures inside a photosensitive glass microchip. We used fabricated microchips, referred to as a nanoaquarium, for dynamic observations of living microorganisms. In addition, the present technique can also be used to form microoptical components such as micromirrors and microlenses inside the photosensitive glass, since the fabricated structures have optically flat surfaces. The integration of microfluidics and microoptical components in a single glass chip yields biophotonic microchips, in other words, optofluidics, which provide high sensitivity in absorption and fluorescence measurements of small volumes of liquid samples.     

Germanium microsphere high-Q resonator

In this Letter, the fabrication and characterization of a microsphere resonator from the semiconductor germanium is demonstrated. Whispering gallery modes are excited in a 46 μm diameter germanium microsphere resonator using evanescent coupling from a tapered silica optical fiber with a waist diameter of 2 μm. Resonances with Q factors as high as 3.8×10(4) at wavelengths near 2 μm are observed. Because of their ultrahigh optical nonlinearities and extremely broad transparency window, germanium microsphere resonators offer the potential for optical processing devices, in particular at long wavelengths, such as around 2 μm.     

Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching

Ultraviolet laser machining of a hybrid organic/inorganic material prepared via a sol–gel process has been studied for the fabrication of kinoforms or surface relief diffractive optical elements. The hybrid mixes silicon and titanium oxides and an organic network in order to improve the mechanical properties. Different material compositions have been investigated. Laser ablation of the hybrid material is observed at low laser fluence (measured threshold fluence of 125 mJ/cm² at 248 nm/6 ns) and shows that the process is well adapted to micro-patterning by laser machining means. The best observed depth resolution is 60± 20 nm and appears to be limited by the ablation setup. Finally, the fabrication of an effective diffractive optical element and its operation at 1.06 μm are described. PACS  81.20.Fw; 79.20.Ds; 42.79.-e     

Two-photon polymerization of an epoxy-acrylate resin material system

Improved material systems are of great interest in the development of two-photon polymerization techniques for the fabrication of three dimensional micro- and nano-structures. The properties of the photosensitive resin are important in the realisation of structures with submicron dimensions. In this study investigation of a custom organic resin, cross-linked by a two-photon induced process, using a femtosecond Ti:sapphire laser, is described. A structural, optical and mechanical analysis of the optimised material is presented. The influence of both material system and laser processing parameters on achievable micro-structure and size is presented as are representative structures. Parameters include: laser power, photo-initiator concentration and material composition.     

Alteration of the profile of ink-jet-deposited UV-cured lenses using applied electric fields

Microlens arrays and microoptical components in general are integral components in a wide range of high-tech products. The ability to fabricate such elements cheaply and with a high degree of accuracy is vital for the development of the next generation of optics-based technologies. There are currently a wide range of microoptical element fabrication technologies. These techniques all have advantages and disadvantages and no one technique is yet sufficient to meet all possible application criteria. One method that has been examined recently is the ink-jet deposition method. This method applies well-established ink-jet printer technology and is thus one possible candidate for large-scale fabrication of inexpensive components. The lenses fabricated using this method are normally found to have spherical profiles. In this paper, we examine the possibility of modifying the profile of these spherical lenses using an applied electric field (E-field). We note that the resulting aspheric lenses have a wide number of applications. These include beam shaping and power transfer applications including fiber coupling. In this paper we describe initial experiments involving single lenses. The single lenses produced using applied E-Fields differ significantly from lenses produced with no applied E-field.     

Single laser exposure fabrication of diamond-like 3-dimensional photonic crystal microstructures using circularly polarized light

Phase tunable multi-level diffractive optical elements define an attractive approach for single laser exposure fabrication of 3-dimensional photonic crystal microstructures. The significant advantage of these multi-level diffractive optical elements over two-level diffractive optical elements is the flexibility of fabricating a wide range of 3-dimensional periodic structures by manipulating the relative phase of different diffracted beams. Here, phase tuning was applied to demonstrate fabrication of a hybrid 3-dimensional structure intermediate between previously reported diamond-like Woodpile-type structure of tetragonal symmetry and structure having body-centered-tetragonal lattice symmetry. Circularly polarized light was applied for the first time to balance the diffraction order efficiencies and improve the structural uniformity. Design guidelines are presented for generating diamond-like photonic crystal template that possesses complete photonic bandgap when inverted with high refractive index materials.     

Sol–gel concave micro-lens arrays fabricated by combining the replicated PDMS soft mold with UV-cured imprint process

Photosensitive TiO₂/organically modified silane organic–inorganic hybrid thin films were synthesized by combining a low-temperature sol–gel process with a spin-coating method. Optical transmittance properties and the photochemical activities of the planar hybrid films were characterized by UV–Visible spectroscopy and Fourier transform infrared spectroscopy. Advantages for fabrication of the concave micro-lens arrays (MLAs) based on the photosensitive hybrid films were demonstrated by using the replicated polydimethylsiloxane (PDMS) soft mold as the imprint mold and a UV soft imprint technique. Morphological and surface profile properties of the master, the PDMS soft molds and the as-fabricated sol–gel concave MLAs were observed by scanning electron microscopy and laser confocal scanning microscopy. Contact angles of water on the PDMS soft molds baked at different temperatures were studied. Optical imaging properties of the as-fabricated concave MLAs were confirmed by a self-made optical test system. Results indicate that the as-prepared photo-patternable hybrid materials have great applicability for the fabrication of photonic components, thus providing an effective method to fabricate concave MLAs based on the as-synthesized hybrid films by combining the UV-cured imprint technique with the replicated PDMS soft mold, which has advantages of simplicity, cost-effective and mass production and potential application in industry production.     

Simultaneous multidopant investigation of rare-earth-doped optical fibers by an ion microprobe

The relative distribution of five elements present in the core area of several optical fiber samples has been obtained by utilizing nanoscale-secondary ion mass spectrometry. A strong correlation between the rare-earth (RE) ion and aluminum was observed, consistent with aluminum's improving the solubility of the RE ion. The central dip in distribution was less severe than that observed for germanium, characteristic of the collapse process during fabrication of the fiber preform.     

Uv-written in-fibre Bragg gratings

The techniques for fabrication and the properties of periodic and aperiodic fibre Bragg gratings produced by UV exposure in photosensitive optical fibres are reviwwed with an emphasis on applications.     

石墨烯-硅基混合光子集成电路

近年来硅基光子学已经慢慢走向成熟,它被认为是未来取代电子集成电路,实现下一代更高性能的光子集成电路的关键技术.这得益于硅基光子器件与现代的互补金属氧化物半导体工艺相兼容,能够实现廉价的大规模集成.然而,由于受硅材料本身的光电特性所限,在硅基平台上实现高性能的有源器件仍然存在着巨大挑战.石墨烯-硅基混合光子集成电路的发展为解决这一问题提供了可行的方案.这得益于石墨烯作为一种兼具高载流子迁移率、高电光系数和宽带吸收等优点的二维光电材料,能够方便地与现有硅基器件相集成,并充分发挥自身的光电性能优势.本文结合我们课题组在该领域研究的一些最新成果,介绍了国际上在石墨烯-硅基混合光子集成电路上的一些重要研究进展,涵盖了光源、光波导、光调制器和光探测器四个重要组成部分.     

Reflection-type confocal readout for multilayered optical memory

We present a multilayered optical memory for use in reading data with a confocal reflection microscope system. We use a recording medium in which photosensitive thin films and nonphotosensitive transparent films are stacked alternately. Since the photosensitive films are thinner than the depth of focus of the recording beam, the spatial frequency distribution of the recorded bit data is extended in the axial direction. The extended distribution overlaps the coherent optical transfer function of the reflection-type confocal microscope. Urethane-urea copolymer film is used as a photosensitive material. The recording and reading of two layers are demonstrated.     

基于干涉原理精确对中折衍混合器件的技术研究

在折衍混合光学系统的加工和装配过程中,折、衍器件间的对中精度严重影响混合器件的质量和性能,但是由于衍射器件与传统折射器件的显着差异,传统的对中手段已不再适用,如何简便实现二者的精确对中是混合光学系统实用化过程中亟待解决的问题之一.本文提出利用干涉原理简便地实现衍射器件与折射器件的高精度对中,理论分析和实验结果表明该对中装校方法是有效可行的,可以满足光学系统的对中要求。     

Na-doped optical Germanium bulk crystals

In an effort to develop a material for infrared (IR) optics with improved parameters, bulk crystals of optical germanium doped with Na have been first grown and studied. Single-crystalline and coarse-crystalline Ge:Na boules of different shapes and dimensions, up to 10 kg by weight, have been grown. Sodium was incorporated into the Ge crystal during the crystal growing from the melt. Despite the fact that Na contamination in the source material was not strictly controlled, the density of Na in the grown crystals determined by the neutron activation analysis as well as by the glow discharge mass spectrometry did not exceed 10¹⁵ cm^?3. Just this value may be supposed to be close to the solubility limit of Na incorporated in Ge in the course of bulk crystal growth. A first demonstration of donor behavior of Na in bulk Ge crystals is made by means of a thermoelectric type of testing. An interstitial location of Na impurity has been verified by experiments on donor drift in the dc electric field. The crystals are grown with free electron density in the range from 5?10¹³ to 4?10¹⁴ cm^?3 which is optimal for using Ge crystals as an optical material for fabricating passive elements of the IR technique. A comparison between the properties of Ge:Na crystals and Ge crystals doped with Sb, a conventional impurity in optical germanium, grown under the same technological conditions and from the same intrinsic Ge as a source material, revealed a number of advantages of Ge:Na crystals; among them, the higher transparency in the IR region, smaller radiation scattering and higher regular optical transmission, lower dislocation density, more uniform distribution of electrical and optical characteristics over the crystal volume, the identity of optical parameters in the single-crystalline, and coarse-crystalline boules. No degradation of optical elements fabricated from Ge:Na crystals was detected in the course of their commercial application, starting from 1998.     

Three-dimensional photofabrication with femtosecond lasers for applications in photonics and biomedicine

A status report on rapidly advancing femtosecond laser technology, three-dimensional (3D) microstructuring by multiphoton illumination technique, is given. Taking its origin from multiphoton microscopy, this technique is now becoming an important microfabrication tool. In our work we apply near-infrared Ti:sapphire femtosecond laser pulses (at 800/780 nm) for 3D material processing. When tightly focused into the volume of a photosensitive material (or photoresist), they initiate 2PP process by, for example, transferring liquid into the solid state. This allows the fabrication of any computer generated 3D structure by direct laser “recording” into the volume of photosensitive material. 2PP of photosensitive materials irradiated by femtosecond laser pulses is now considered as enabling technology for the fabrication of 3D photonic crystals and photonic crystal templates. In particular, 2PP allows one to introduce defects at any desired locations, which is crucial for the practical applications. Recently, we studied possible applications of 2PP technique in biomedicine. 2PP is a very interesting technique for the fabrication of drug delivery systems, scaffolds for tissue engineering, and medical implants. These and other biomedical applications of 2PP will be reviewed.     

Azobenzene-containing small molecules organic–inorganic hybrid sol–gel materials for photonic applications

Azobenzene-containing germania-ormosil hybrid materials are prepared by combining a low-temperature sol–gel technique with a spin-coating process, which can be used for the simple and low cost fabrication of waveguide devices for photonic applications. The planar waveguide and structural properties of the hybrid waveguide films are characterized by a prism coupling technique and Fourier transform infrared spectroscopy. The effects of azobenzene content and heat treatment temperature on the photo-responsive properties of the hybrid films are also studied by photoirradiation with UV light. The results indicate that the azobenzene in hybrid materials can undergo trans–cis–trans photoisomerization efficiently by photoirradiation with UV light, and surface pattern structure induced due to UV light photoirradiation can be easily observed on such azobenzene-doped hybrid materials. Thus, this as-prepared organic–inorganic hybrid sol–gel material shows promising candidates for optical switch applications and allows for directly integrating on a single chip waveguide device with optical data storage and optical switching devices.