Dynamics of excimer laser ablation of polyimide determined by time-resolved reflectivity

The time-dependent intensity profile of pulsed KrF excimer laser radiation reflected from polyimide is determined over a range of laser fluences, from well below to above the ablation threshold. The reflected laser beam is truncated once the incident laser radiation exceeds a threshold fluence, i.e., truncation depends on the energy per unit area and not on the intensity, analogous to results for the ablation threshold and the etch depth per pulse. The threshold fluence for pulse truncation corresponds to the onset of ablation. The results indicate that the truncation is not due to laser plasma interactions at these fluences. A general mechanism is discussed involving a time dependent index of refraction.     

Stability of thermoresponsive methylcellulose thin film: x‐ray reflectivity study

Methylcellulose (MC), a thermoreversible polymer, was fabricated as thin films into silicon substrates and characterized by x‐ray reflectivity (XRR) measurements for its stability with time and heating. XRR data from the as‐is thin films showed good agreement with the single‐layer model on top of a substrate from Parratt's formalism. Data fitting showed that the density of the thin films is slightly higher than the reported value by manufacturers. Interface roughness values indicate good wetting of the polymer onto the substrate. Heating the thin films at the phase transition temperatures and quenching them to room temperature showed no significant changes in the thin film parameters before and after heating. This showed the thermal stability and/or thermoreversibility of the film. Diffuse scattering measurements also showed no significant changes in the lateral structure of the film with heating and quenching. XRR measurements done on fabricated thin films stored for a month showed a slight increase in the film thickness which could be due to the hygroscopic nature of the polymer. Vacuum heating of the stored thin films at 100 °C for 1 h slightly decreased the thickness, but it has been found that other parameters such as density and surface/interface roughness show good thermal stability. Copyright © 2009 John Wiley & Sons, Ltd.     

Theoretical and experimental study of photo-modulated reflectivity detections for transparent film/opaque substrate structures

A photo-modulated reflectivity method is used to evaluate thermal properties of bilayered structures composed of transparent films deposited on opaque substrates. In order to calculate the photo-modulated reflectivity variations of the bilayered structures induced by focused modulated laser irradiations, a 3-D theoretical model is presented. Due to the complexity of the 3-D theory, a finite element method is used to simulate the laser-induced temperature fields, thermoelastic displacement fields and dielectric constant variations, and finally the photo-modulated reflectivities. Then a quantitative investigation of the thermal properties of the transparent films deposited on opaque substrates can be performed by the experimental measurements and theoretical simulations. As examples, the thermal conductivities of ZnO and diamond films deposited on silicon substrates are evaluated and discussed. PACS 44.10.+i; 42.55.-f; 51.70.+f; 68.60.-p     

Study of excimer laser induced melting and solidification of Si by time-resolved reflectivity measurements

In this paper we present the interpretation and analysis of time-resolved reflectivity measurements for excimer laser irradiated silicon. A nonequilibrium melting model is used to calculate the temperature distribution in the sample and the position of the solid-liquid interface. Calculations of the reflectivity of the probe beam are performed to obtain time-resolved reflectivity signals from basic principles, independent of the experiments, which can be compared with experimental data to reveal information about dynamics of the heating and cooling process. We propose more accurate methods for the determination of the melting threshold, the melt front position and the reflectivity of the sample for excimer laser light. From model calculations and experimental data we determine the reflectivity of the solid and liquid silicon for ArF excimer laser light.     

Thin film and surface characterization by specular X-ray reflectivity

We review the use of specular X-ray reflectivity (XRR) for the characterization of thin-film and surface structures. Specular X-ray scattering at small scattering vectors allows characterization of electron density profiles perpendicular to the surface on the length scale of 0.1 to 100 nm. This allows measurement of surface morphology, thin films, multilayer structures, and buried interfaces. The technique is nondestructive and can be applied in situ in a variety of processing environments. In the first half of the article, we review the theory and methods of XRR, including analysis of XRR spectra by a multilayer optical approach and a discussion of surface roughness measurements by XRR and other techniques. In the second half, we present a wide range of examples of XRR applications in thin-film structures, dynamic processes, liquid surfaces, and macromolecular structures.     

COIL腔镜薄膜参数实验研究

 利用HITACHI U-4001型分光光度计和基于光腔衰荡光谱的高反射率测量仪对氧碘化学激光器（COIL）输出镜的透过率和高反镜的反射率进行了膜层均匀性、测量重复性、激光辐照等方面的测量和实验研究。实验结果显示：离子束溅射膜的性能比电子枪蒸发膜更为稳定;只要保证镜片存放于干燥处,长时间放置对其薄膜的透过率和反射率均无明显影响。     

Experimental study of X-ray generation in laser-produced plasmas based onK-shell time-resolved spectroscopy

Summary Soft-X-ray generation in aluminium plasmas produced by Nd nano-second laser pulses is investigated analysing time-resolved spectra ofK-shell line emission. Time histories of line emission and electron temperature as well as the time-integrated X-ray yield were studied as a function of laser pulse duration and target position along the laser beam propagation axis. The experimental results suggest that X-ray emission is influenced by self-focusing of laser light in the plasma. Presently at Laboratoire pour l'Utilisations des Lasers Intenses, Ecole Polytechnique, 91128 Palaiseau Cedex, France.     

Optical absorption and reflectivity spectra of highly chromium doped CdTe alloy and layer

In the present work, a CdTe alloy doped with a relatively high concentration of chromium (1%), and a CdTe:Cr layer, have been studied. Absorption and reflectivity spectra were measured at room temperature. They indicate the presence of chromium in the divalent state, both in the alloy and in the layer.      

电容器薄膜等离子体表面改性实验研究

 建立了一套辉光放电等离子体对电容器薄膜进行表面处理的装置。采用N₂，O₂及Ar三种气体对聚丙烯、聚酯和聚苯硫醚膜进行了表面处理。红外光谱分析表明:薄膜表面的生成物与薄膜种类、气体种类和处理强度密切相关。场扫描电镜显示了薄膜表面的刻蚀现象明显。处理过的薄膜，非晶相被去除，球晶暴露。能谱分析说明了薄膜中C元素下降，N，O元素增加，但总体改变量很小。处理前后薄膜的直流击穿电压没有明显改变，但刻蚀过程造成的薄膜表面粗化可帮助电容器的浸渍过程更充分，从而可提高电容器的使用场强与储能密度。     

电容器薄膜等离子体表面改性实验研究

建立了一套辉光放电等离子体对电容器薄膜进行表面处理的装置。采用N2,O2及Ar三种气体对聚丙烯、聚酯和聚苯硫醚膜进行了表面处理。红外光谱分析表明:薄膜表面的生成物与薄膜种类、气体种类和处理强度密切相关。场扫描电镜显示了薄膜表面的刻蚀现象明显。处理过的薄膜,非晶相被去除,球晶暴露。能谱分析说明了薄膜中C元素下降,N,O元素增加,但总体改变量很小。处理前后薄膜的直流击穿电压没有明显改变,但刻蚀过程造成的薄膜表面粗化可帮助电容器的浸渍过程更充分,从而可提高电容器的使用场强与储能密度。     

水平磁场中液态锂膜流动实验装置及初步结果

设计了用于水平磁场中锂膜流动铺展性及磁流体动力学效应研究的实验装置，介绍了所用磁铁、锂循环回路、动力系统、回路温控系统和测量系统五个组成部分。各部分加工完成，进行现场组装与回路调试，最后加入锂锭熔融后完成实验台搭建工作。利用该实验台研究了锂膜在不锈钢表面的铺展情况、锂膜表面形态与流动雷诺数的关系，以及磁场对液膜表面形态的影响等方面。结果发现液态锂膜在充分锂浸润的不锈钢表面能够完全铺展，水平磁场对锂膜流动有致稳作用，并且可以抑制磁场方向的表面波动。     

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An experimental station, consisting of the magnet, the lithium flow loop, the dynamical circulation system, the heating system and the measure system, has been designed to study the liquid lithium film flow under a horizontal magnetic field. After the parts of the experimental facility are fabricated well and moved into the laboratory, the experiment station is assembled and tested on-site. At last, the experimental station is completed after the solid lithium is filled in and melted. Then, some experiments are conducted, including the lithium spreading performance on stainless-steel surface, the lithium film flow patterns under varying Reynolds numbers, and the MHD effects on the lithium film flow. The result shows that the liquid lithium film could spread well on the stainless steel which had been wetted by lithium sufficiently, and the horizontal magnetic field could steady the film flow pattern and restrain the surface wave of the film on the magnetic direction.     

ST-X石英基片上铬栅阵中单根栅条反射系数实验研究

精确的栅条反射系数对于声表面波器件的设计至关重要。本文利用网络分析仪的时域功能,采用短脉冲方法实验研究了ST-X石英基片上铬栅阵中单根栅条的反射系数。并推导出计算反射系数的公式。实验测量了不同铬膜厚度条件下单根指条的反射系数,再对实验结果作最小方差法拟合,得到反射系数随铬膜厚度变化的表达式,即反射系数中压电短路贡献和铬的力学负载贡献之和。最后将实验结果与采用有限元方法计算的理论结果比较,发现两者基本吻合。     

Three-dimensional analyses of photo-modulated reflectivity for transparent film/opaque substrate structures

For a structure consisting of a transparent film deposited on an opaque substrate radiated by a modulated focused laser beam, a 3-D model is established to calculate the temperature distributions. Then based on 3-D thermoelastic displacements and dielectric constants depended on the temperature of the bilayer structure, the photo-modulated reflectivity of the structure is calculated by using FEM method. As an example, the modulated reflectance variations with the modulation frequency of the optical beam and the thermal conductivity of the film in ZnO/Si bilayer structures are also obtained.     

Ripple formation in the chromium thin film during laser ablation

The beam of a nanosecond pulse laser tightly focused to a line was applied for the back-side ablation of the chromium thin film on a glass substrate. The stripe ablated with a single laser pulse had sharp edges on both sides and ridges of the melted metal around it. The partially overlapping pulses formed a wide cleaned area with a complicated structure made of the metal remaining from the ridges. Regular structures, ripples, were developed when laser fluence was slightly above the single-pulse removal threshold and the shift between pulses was less than half width of the line ablated with a single laser pulse. The ripples were located periodically (∼4 μm) and were orientated perpendicularly to the long axis of the beam spot. Their orientation did not depend on the laser beam polarization. Different models of the ripple formation in the thin metal film were considered, and instability of the moving vapor-liquid-solid contact line during evaporation of thin liquid films appears to be the most probable process responsible for the observed phenomena. Formation of regular gratings with the unlimited line length was experimentally implemented by using the above-mentioned technique.     

Neutron reflectivity study of adsorbed diblock copolymers

Summary In this paper, we summarize our cumulative work on neutron reflectivity studies of polystyrene-poly(vinyl-2-pyridine) (PS-PVP) and polystyrene-polyethylene oxide (PS-PEO) adsorbed at a quartz-solvent interface. Deuterated toluene was chosen as the solvent since it is a good solvent for PS and a poor one for either of the other two blocks. In this case, the polystyrene dangles into the solvent while the other block acts as an anchor. The neutron reflectivity studies reveal that the form of the polymer density profile normal to the substrate may be varied from an extended ?brush? to a condensed ?mushroom? conformation by manipulating the ratio of the molecular weights of the two blocks. In addition, we present new data on the PS-PEO system in a poor solvent, deuterated cyclohexane, under conditions of shear flow in Poiseuille geometry. We find that when the PS-PEO diblock is absorbed from cyclohexane and is allowed to relax, the PS chain takes on a ?mushroom? conformation. However, when the shear is applied, the layer shear thickens due to the PS chains extending to nearly twice their original lengths. Paper presented at the I International Conference on Scaling Concepts and Complex Fluids, Copanello, Italy, July 4–8, 1994.     

X-ray reflectivity study of hydrogen implanted silicon

The X-ray reflectivity (XRR) technique was used to study monocrystalline silicon samples implanted with H₂ ions at an energy of 31 keV and to the dose of 2 × 10¹⁶ hydrogen atoms/cm². All samples were subsequently isochronally annealed in vacuum at different temperatures in the range from 100 to 900 °C. Although the hydrogen depth distribution was expected to be smooth initially, fringes in the XRR spectra were observed already in the implanted but not annealed sample, revealing the presence of a well-defined film-like structure. Annealing enhances the film top to bottom interface correlation due to structural relaxation, resulting in the appearance of fringes in the larger angular range, already at low annealing temperatures. The thickness of the film decreases slowly up to 350 °C where substantial changes in the roughness are observed, probably due to the onset of larger clusters formation. Further annealing at higher temperatures restores the high correlation of the film interfaces, while the thickness decreases with the temperature more rapidly.     

Optical time-resolved study of the excitation dynamics*

Transient behaviour of the excited states originated from the neutral and the charged species is discussed using data from time-resolved experiments. Complex transient characteristics obtained for the slightly charged poly-(bithiophene) film during electrochemical doping were explained in terms of sequential molar fraction changes of the neutral species, the radical cation and the π-dimerized radical cations. Femtosecond transient absorption measurement carried out in time range of 0-4 ns for a two-photon excited dye reveals a multi-exponent decay with well separated relaxation times and the distinct relaxation mechanisms. At high irradiance and a sufficient fluence, the multi-photon excitation processes affect the subpicosecond response and lead to formation of the photo-products.     

Experimental study of the instability of a film flowing down a vertical fiber

The wavy dynamics of a viscous film flowing axisymmetrically on a vertical fiber is characterized experimentally. The study of the initial response of the flow to natural noise shows a well-defined transition between a convective and an absolute instability [1]. In the convective case, disturbances of controlled frequencies have been applied at inlet. The flow responds to inlet excitation at frequencies lower than a well-defined cut-off frequency. A good agreement has been found with the linear stability analysis and with the solution to a two-equation model [2] in the nonlinear regime.