光学元件表面缺陷的显微散射暗场成像及数字化评价系统

根据国际ISO10110-7的表面缺陷标准及惯性约束聚变(ICF)工程标准,提出了一种新颖的光学元件表面缺陷的光学显微散射成像及数字化评价系统,多束光纤冷光源呈环状分布并以一定角度斜入射到数毫米视场的被检表面,形成适合数字图像二值化处理的暗背景上的亮疵病图像。对X,Y两方向进行子孔径图像扫描成像,利用模板匹配原理对获得的子孔径图像进行拼接得到全孔径表面疵病图像信息。基于数学形态学建立了可用于大口径表面检测扫描的图像处理的模式识别软件体系,并应用二元光学制作了标准对比板,以获得疵病正确的评价依据。最终利用该变倍光学显微镜散射成像系统得到能分辨微米量级表面疵病的图像,其单个子孔径物方视场约为3 mm,对X,Y两方向进行5×5子孔径图像扫描成像,并给出了与标准比对的定量数据结果。实验结果表明,本系统完全可以实现光学元件表面缺陷的数字化评价。     

球面光学元件表面疵病视觉检测方法研究

球面光学元件由于其光学结构的影响,采用机器视觉的方法对其表面疵病进行检测时,无法将被测面都成像在一个像平面上并且在成像的过程中丢失了疵病的三维信息,造成了检测的误差。为了解决这些问题,提出了一种机器视觉与三维重构相结合的检测方法。首先,根据球面光学元件的特性设计了图像采集平台,以获得高质量的疵病图像。然后,通过图像处理算法对疵病图像进行预处理与疵病识别。最后,基于计算机视觉图像重构技术与球心投影技术,对疵病图像进行三维重构。实验表明,该方法提升了机器视觉对球面光学元件表面疵病检测的精度,可达99%,具有可行性和研究价值。     

大口径光学元件表面疵病在位检测与评价研究

精密光学元件在加工过程中如果工艺控制不当,产生的划痕、麻点等疵病分布范围虽然较小,但对整个光学系统的性能影响却很大,破坏力非常强,目前的表面疵病检测仪基本上针对平面或球面光学元件进行离线检测。文章以光学加工机床为运动平台,采用暗场散射成像方法,设计多光束均匀照明系统,研究表面疵病微细特征的识别算法,实现大口径光学表面疵病的在位检测与评价;标定结果表明,表面疵病宽度偏差为2.05%,长度偏差为2.39%,满足指标要求;在此基础上针对Φ280 mm平面硅镜进行自动化在位检测,给出了不同类型疵病的统计数据,解决了离线检测中非加工时间长与多次装夹引起定位误差等问题。     

相干滤波成像系统测量光学元件表面疵病

本文利用相干高通滤波成像系统对光学元件表面疵病进行了测量 ,提出了等效疵病面积的概念及计算公式 ,由等效疵病面积可计算出与 GB1185 - 89对应的疵病等级 J。实验装置的分辨率为 10μm,并具有可靠的表面疵病等级评价     

基于高分辨力CCD的大口径光学元件疵病检测

 介绍了一种利用高分辨力CCD快速检测大口径光学元件表面和体内疵病的方法。利用侧照明方式对大口径光学元件进行均匀掠射照明,表面和体内疵病因为散射在暗室成像过程中影像被放大。对比研究了疵病示踪尺寸和真实尺寸,得出近似数学关系,利用高分辨力CCD,通过一次性成像获得光学元件疵病尺寸近似值、2维空间位置等定量描述表面特征的信息。     

基于深度学习的光学元件表面疵病识别北大核心CSCD

精密光学元件表面疵病的人工检测分类方法效率低,且准确率易受疲劳等人工因素影响,而基于传统机器学习方法的分类准确率有待进一步提高。提出了一种基于深度学习卷积神经网络的光学大尺寸元件表面疵病识别方法。首先,通过现场实验采集并整理了大尺寸镜面疵病样本;接着,基于单通道灰度图像构建融合梯度的三通道图像,挖掘更深入的特征表达;最后,基于经典的LeNet网络,提出了面向激光惯性约束聚变(ICF)的光学元件表面疵病识别网络ICFNet,该网络不需要复杂的手工特征设计和提取,仅使用原始灰度图像就实现高效的疵病识别。实验结果表明:针对包含麻点、划痕和灰尘的三类疵病数据,ICFNet相较于使用多项特征和支持向量机的传统方法拥有较好的分类准确率。     

基于背景校正和图像分割定量分析光学元件表面疵病的新算法

针对基于机器视觉的大口径光学元件表面疵病检测系统在成像过程中存在因照明不均匀等因素造成的图像背景不均匀等问题,采用了基于形态学的图像背景校正算法,提出了结合图像梯度和最大类间方差法的图像分割算法,实验结果表明,所提算法对于一定模糊程度的疵病图像具有较好的抗噪性能以及较高的提取精度。     

国外光学表面疵病标准综述

<正> 光学零件表面疵病标准是光学零件生产的一项基础标准,我国“光学零件表面疵病标准”(GB1185—74)采用目视主观评定检验方法,在生产实践中常常发生争议,其原因大致有: 1.对疵病尺寸的主观估计误差,引起对表面疵病等级评定的争论; 2.标准中规定不够明确,易产生似是而非的理解。     

基于BRDF的光学表面疵病散射特性的仿真研究

为了研究精密光学元件表面微弱疵病的散射特性,基于矢量散射理论和双向反射分布函数,建立了光学表面微弱疵病的散射理论模型。通过仿真计算了双向反射分布函数随散射角的变化情况,分析了入射角度、入射光波长以及疵病自身尺寸等因素对疵病散射光特性的影响。基于仿真数据分析,针对光源参数对散射特性的影响进行仿真分析,为使用暗场成像法进行精密表面疵病检测的系统参数选择提供理论参考,疵病检测入射角范围为30°～50°最佳;在可见光范围内时,380～500 nm的波长范围更有利于疵病检测。另外还通过研究疵病尺寸发生改变时散射场变化的规律,为分辨疵病的形状大小等信息提供了参考依据。     

基于总散射测量的表面质量检测新方法

光学元件在加工及使用过程中引入的麻点或擦痕会严重影响其表面质量。基于Peterson疵病散射理论,将麻点或擦痕引起的散射光分为两部分,即对麻点(或擦痕)内部表面的散射光作漫反射分析,对麻点或擦痕外围轮廓引起的散射光作衍射分析。进一步考虑麻点和擦痕的挡光效应,以及麻点衍射消失的边界条件,通过将疵病散射理论与国家标准GB/T 1185—2006相结合,推导出麻点、擦痕的双向反射分布函数的解析表达式,进而分析了不同疵病级数下的角分辨散射和总散射。研究结果表明:表面疵病的总散射与疵病面积近似成线性正比,进而据此提出了一种基于总散射测量的表面质量检测新方法,并分析了光学元件表面疵病的阈值。     

Polarized light propagation through tissue phantoms containing densely packed scatterers

We demonstrate that polarized light is maintained differently in densely packed versus dilute suspensions of polystyrene microspheres. The degrees of linear and circular polarization were measured versus scatterer concentration in aqueous suspensions of 0.48-, 0.99-, 2.092-, and 9.14-mum-diameter polystyrene microspheres. The results indicate that, for dilute suspensions of microspheres where independent scattering is assumed, the degrees of linear and circular polarization decrease as the scatterer concentration increases. For dense suspensions, however, the degree of polarization begins to increase as the scatterer concentration increases. The preferential propagation of linear over circular polarization states in dense suspensions is similar to results seen in biological tissue.     

Model of the transmitted current oscillations in a dielectric capillary

In this work, we suggest a theoretical model that explains the interesting phenomenon of the regular oscillations of the current of ions transmitted through a dielectric capillary. The model is based on the assumption that upon the collision of ions with capillary wall, defects having a vacant state of electrons are generated on its surface. If the concentration of these defects reaches the value at which the wave functions of the electron vacancies overlap, a vacant zone of nonlocalized states appears, and the charge allowing noncontact transmission of ions drains quickly. In other words, the capillary closes.     

First-principles study on anatase TiO2（101） surface adsorption of NO

In this paper, the stable structure and the electronic and optical properties of nitric oxide （NO） adsorption on the anatase TiO2 （101） surface are studied using the plane-wave ultrasoft pseudopotential method, which is based on the density functional theory. NO adsorption on the surface is weak when the outermost layer terminates on twofold coordinated oxygen atoms, but it is remarkably enhanced on the surface containing O vacancy defects. The higher the concentration of oxygen vacancy defects, the stronger the adsorption is. The adsorption energies are 3.4528 eV （N end adsorption）, 2.6770 eV （O end adsorption）, and 4.1437 eV （horizontal adsorption）. The adsorption process is exothermic, resulting in a more stable adsorption structure. Furthermore, O vacancy defects on the TiO2 （101） surface significantly contribute to the absorption of visible light in a relatively low-energy region. A new absorption peak in the low-energy region, corresponding to an energy of 0.9 eV, is observed. However, the TiO2 （101） surface structure exhibits weak absorption in the low-energy region of visible light after NO adsorption.     

Holding characteristics of planar objects suspended by near-field acoustic levitation

The authors have found the acoustic levitation phenomenon where planar objects of 10 kg weight can be levitated near a vibration surface. This phenomenon has been studied for non-contact transportation. A circular planar object can be suspended without contacting a circular vibration plate. We have studied the holding force which acts horizontally on the levitated objects. The horizontal position of the object is stabilized by this force. In this paper, we discuss the effect of the radius of a levitated object, levitation distance, displacement amplitude of the vibration plate and the vibration mode on the suspending force.     

Characterization of GaSb/InAs type II infrared detectors at very long wavelengths: carrier scattering at defect clusters

We report a systematic study into carrier scattering by isovalent defects within GaSb/InAs superlattices. The heterostructure system which we investigate has attracted recent interest as the active region of a photodetector for very long wavelength infrared (VLWIR) (12 μm) radiation. To achieve our objective, we employed models of the electronic band structure and scattering cross-section. We considered isolated, substitutional defects at each atom site throughout the unit cell in turn and found that the scattering magnitude generally follows the carrier envelope function, being greatest where the overlap of charge with the defect is highest. We scrutinized the contribution of lattice relaxation around defects to the overall scattering, by comparing calculations where this effect was, in turn, included and excluded. We identified some anomalous contributions of relaxation to both qualitative and quantitative features of the cross-section. Physical mechanisms to explain these effects must be arrived at in order to attain satisfactory characterization of these materials, highlighting the need for both microscopic models and further research. Additional modelling of islands of such defects indicated that the cross-section is proportional to the square of the number of constituent atoms, for both carrier types (holes and electrons) and each defect type. This article demonstrates important links between key growth issues and the dynamical properties of these novel semiconductor devices.     

在线轨面伤损检测软件系统优化设计与实现

针对实际应用中轨面伤损检测系统检测速度较慢的问题，在保证检测精度的前提下，结合轨面图像特点及软件工程的思想，提出了面向算法、编程技术和存储介质3个层面的优化方法。算法优化通过重新设计算法流程，合理取舍步骤，实现算法到CPU的高效映射；编程技术优化使用多线程编程，通过并行运算充分利用处理器的多核优势；存储介质优化通过使用读写快、质量轻、能耗低、体积小的固态硬盘进行图像读写，有效地提升了硬件效率。实验结果表明，优化后平均每幅轨面图像检测耗时由17.94 ms降低到仅8.33 ms，速度提升了53.57%，在分辨率为1 mm的精度下换算成车速约为207 km/h，可以满足铁路轨面伤损在线检测需求。     

Fuzzy Entropy-Based Spatial Hotspot Reliability

Cluster techniques are used in hotspot spatial analysis to detect hotspots as areas on the map; an extension of the Fuzzy C-means that the clustering algorithm has been applied to locate hotspots on the map as circular areas; it represents a good trade-off between the accuracy in the detection of the hotspot shape and the computational complexity. However, this method does not measure the reliability of the detected hotspots and therefore does not allow us to evaluate how reliable the identification of a hotspot of a circular area corresponding to the detected cluster is; a measure of the reliability of hotspots is crucial for the decision maker to assess the need for action on the area circumscribed by the hotspots. We propose a method based on the use of De Luca and Termini’s Fuzzy Entropy that uses this extension of the Fuzzy C-means algorithm and measures the reliability of detected hotspots. We test our method in a disease analysis problem in which hotspots corresponding to areas where most oto-laryngo-pharyngeal patients reside, within a geographical area constituted by the province of Naples, Italy, are detected as circular areas. The results show a dependency between the reliability and fluctuation of the values of the degrees of belonging to the hotspots.     

Change in the structural state of III–V semiconductor compounds under mechanical stresses

The metallographic method is used to investigate the structural state of subsurface indium antimonide and arsenide layers under local static elastic stress of varying magnitude and exposure time. It is demonstrated that at low stresses, the concentration of etch figures on the semiconductor surface decreases in the vicinity of the region of stress application, which provides cleaning of a large area from structural defects. At high elastic stresses, the concentration of etch figures increases in the region of stress application. We believe that the examined changes are caused by two opposite mechanisms, namely, a decrease in the defect concentration due to their migration from the region of stress application and an increase in the defect concentration due to their generation in the elastic stress field. __________ Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 86–91, October, 2005.     

Computing Particle Surface Areas and Contact Areas from Three‐Dimensional Tomography Data of Particulate Materials

Microtomography is an emerging technique for particle and particulate‐materials characterization. To use this technology effectively, robust and accurate computational algorithms are needed to compute relevant particle properties, including particle surface area and particle‐particle contact area. However, the most accurate algorithms that have been developed for computing the exposed (void/solid) surface area in a microtomography image cannot be used directly for computing surface areas or particle‐particle contact areas for individual particles in a dense packing. This paper presents an algorithm for extracting particle contact areas from a digitized, segmented image of a packed granular material, which in turn can be used to find individual particle surface areas (even if the complete surfaces are not exposed because of contacts in the packing). Results show that small errors in the binary surface‐area computations are magnified in the course of determining particle contact areas; the total error in the computation depends mainly on the size of the contact area in voxel units.