VHF等离子体光发射谱(OES)的在线监测

采用光发射谱(OES)测量技术，对不同制备条件下的甚高频(VHF)等离子体辉光进行了在线监 测.实验表明，VHF等离子体中特征发光峰(Si，SiH,H_α,H^*_β 等)的强度较常规的射 频(RF)等离子体明显增强，并且在制备μc-Si：H的工艺条件下(H稀释度R(H₂/S iH₄)=23 )，随激发频率的增加而增大，这些发光峰的变化趋势与材料沉积速率的变化规律较相似.Si H峰等的强度随气压的变化则因硅烷H稀释度及功率的不同而异：高H稀释(R=23)时，SiH峰强 度在低辉光功率下随反应气压的增大单调下降，在高辉光功率下随气压的变化呈现类高斯规 律；低H稀释(R=5．7)时， SiH峰随气压的变化基本上是单调下降的，下降速率也与功率有 关，这些结果表明，VHF-PECVD制备μc-Si：H和a-Si：H的反应动力学过程存在较大差异.此 外，随着激发功率的增大，Si，SiH峰都先迅速增大然后趋于饱和，并且随着H稀释率的增大 ，将更快呈现饱和现象.通过对OES结果的分析与讨论可知，VHF-PECVD技术沉积硅基薄膜可 以有效提高沉积速率，而且，硅基薄膜的沉积速率的进一步提高需要综合考虑H稀释度、气 压和功率等的匹配与优化. 关键词： 甚高频等离子体化学气相沉积 氢化硅薄膜 光发射谱     

Determination of electron temperature in low-pressure plasmas by means of optical emission spectroscopy

A simple model, allowing to determine the electron temperature in a steady-state low-pressure plasma, is proposed. The model makes use of optical cross-sections and therefore takes into account direct and cascade excitation from ground and metastable states. Spectroscopic data from Mitic et al. (New J. Phys. 11, 083020 (2009)) are used to illustrate the performance of the method.     

光纤光谱法对Ar和He辉光放电管的参量诊断

应用光纤光谱法分别对Ar和He的辉光放电等离子体的电子密度进行了诊断,并与应用朗缪尔双探针诊断法所得的结果进行了比较,两种方法的结果具有相同的变化规律,验证了光纤光谱法的正确性和适用性.     

Novel infrared differential optical absorption spectroscopy remote sensing system to measure carbon dioxide emission

A CO_2 infrared remote sensing system based on the algorithm of weighting function modified differential optical absorption spectroscopy(WFM-DOAS) is developed for measuring CO_2 emissions from pollution sources. The system is composed of a spectrometer with band from 900 nm to 1700 nm, a telescope with a field of view of 1.12?, a silica optical fiber, an automatic position adjuster, and the data acquisition and processing module. The performance is discussed,including the electronic noise of the charge-coupled device(CCD), the spectral shift, and detection limits. The resolution of the spectrometer is 0.4 nm, the detection limit is 8.5 × 10~(20)molecules·cm~(-2), and the relative retrieval error is 1.5%.On May 26, 2018, a field experiment was performed to measure CO_2 emissions from the Feng-tai power plant, and a twodimensional distribution of CO_2 from the plume was obtained. The retrieved differential slant column densities(dSCDs)of CO_2 are around 2 × 10~(21) molecules·cm~(-2) in the unpolluted areas, 5.5 × 10~(21)molecules·cm~(-2) in the plume locations most strongly affected by local CO_2 emissions, and the fitting error is less than 2 × 10~(20)molecules·cm~(-2), which proves that the infrared remote sensing system has the characteristics of fast response and high precision, suitable for measuring CO_2 emission from the sources.     

Early stage optical emission in nanosecond laser ablation

This paper describes the results of an experimental and theoretical investigation of the physical origin of the visible continuum emission usually observed in the early stages of nanosecond laser ablation of solid materials. It has been suggested, but not confirmed that the continuum is due to radiative recombination and bremsstrahlung emission. Time and space-resolved emission spectroscopy with an absolutely calibrated spectrometer was used to study the spectral emission in laser ablation of zinc in vacuum at 4.1 J?cm^?2 using a 8 ns, 1064 nm laser pulse. By modelling the spectral emission with a spectral synthesis code, it has been shown that the continuum emission is primarily due to bound-bound transitions between strongly Stark broadened energy levels. Similarly, it can be concluded that the optical absorption is primarily due to bound-bound transitions.     

Optical emission spectroscopy of thin film fabrication by pulsed laser ablation under high-gravity

We carried out the thin film deposition of iron silicide by pulsed laser ablation (PLA) on a sapphire substrate, which was placed on a high-speed rotating titanium disk. The deposited thin film exhibited a continuous composition gradient. We investigated how the continuous composition gradient was attained, because the strength of the gravity field in our experiment was far below that in the experiment on bulk crystalline compounds. In the present study, we obtain the spatial distribution of several species in the PLA plume of FeSi₂ by using an intensified charge-coupled device (ICCD) camera.     

Time evolution of emission spectra from plasmas produced by irradiation of seawater surfaces by a femtosecond laser

The spectral and temporal characteristics of plasmas produced by femtosecond laser pulses acting on seawater surfaces are studied. The time dependence of the decay in the intensities of emission lines and the continuum are determined and the electron density is estimated using the three-body recombination time. It is shown that an atomic line with a low excitation potential is the most sensitive for femtosecond laser induced breakdown spectroscopy.     

Characterization of laser induced tantalum plasma by spatio-temporal resolved optical emission spectroscopy

The spatial and temporal behavior of the tantalum plasma produced in air by third harmonic Nd:YAG laser (0.6 GW cm⁻²) has been studied using optical emission spectroscopy. Excitation temperature and electron density have been estimated from the analysis of spectral data as well as their spatio-temporal evolutions. As the delay time increases from 400 to 2000 ns, the excitation temperature has found to decrease from 10,000 K to 7900 K. The value of N_e decreases continuously from 4 × 10¹⁸ near the zero position to 5 × 10¹⁷ in a linear approach along with the propagation axe of the plasma plume. Laser-supported consumption wave regime has been proposed to explain the propagation of the plasma.     

Energy of K-momentum dark excitons in carbon nanotubes by optical spectroscopy

Phonon sideband optical spectroscopy determines the energy of the dark K-momentum exciton for (6,5) carbon nanotubes. One-phonon sidebands appear in absorption and emission, split by two zone-boundary (K-point) phonons. Their average energy locates the E11 K-momentum exciton 36 meV above the E11 bright level, higher than available theoretical estimates. A model for exciton-phonon coupling shows the absorbance sideband depends sensitively on the K-momentum exciton effective mass and has minimal contributions from zone-center phonons, which dominate the Raman spectra of carbon nanotubes.     

Plume temperature in the laser ablation of polyimide films measured by infrared emission spectroscopy

The infrared emission spectrum of the plume produced by KrF excimer laser ablation of polyimide films in air and in He was measured in the 680 to 1580 cm^–1 wavenumber range. Using 400 mJ/cm² laser pulses of 248 nm and 35 ns duration yielded a strong emission band characteristic of thev ₂ transitions of hot HCN molecules. Band counters calculations were carried out of thev ₂ emission expected from HCN in thermal equilibrium at various temperatures. They indicate that except for a slight deviation of the measured data from thermal equilibrium, the best fit of the observed results is obtained at a plume temperature of 2250±150K.     

Broadband THz emission from gas plasmas induced by femtosecond optical pulses: From fundamentals to applications

We review the generation of broadband THz radiation from femtosecond photo‐induced gas plasmas, with an emphasis on the highly efficient “AC‐bias” case where the plasma is generated and driven by a superposition of fundamental and second‐harmonic optical fields. The dependence on experimental parameters such as pulse energy, air pressure, polarization and focusing are presented, and compared to the predictions from semi‐quantitative models for the THz generation process, namely (i) a microscopic photocurrent model and (ii) a four‐wave mixing model. We also employ these models to the case of few‐cycle pulses, where the observed THz emission is related directly to the carrier‐envelope phase of the pulses, and hence provides a mechanism with which to measure this phase.}     

Characterization of laser ablation plasmas by laser beam deflection

Laser probe beam and multiple-pass deflection techniques were used for real time and in situ monitoring of laser ablation plasma plumes in the mTorr pressure regime. Intensity and transit time of shock wave fronts were studied as functions of focal lens position, laser energy and pressure. The velocity of the shock wave was determined to be up to 30 km s⁻¹ for a pressure of 40 mTorr and to drop below 4 km s⁻¹ at 1 Torr. For transparent targets rear-side shock wave velocity was on to be slower than the corresponding front one. This method promises a reliable diagnostic tool for pulsed laser deposition processing allowing an increase in the quality of coating technologies.     

Ultra-fast optical spectroscopy of micelle-suspended single-walled carbon nanotubes

We present results of wavelength-dependent ultra-fast pump–probe experiments on micelle-suspended single-walled carbon nanotubes. The linear absorption and photoluminescence spectra of the samples show a number of chirality-dependent peaks and, consequently, the pump–probe results sensitively depend on the wavelength. In the wavelength range corresponding to the second van Hove singularities (VHSs) we observe subpicosecond decays, as has been seen in previous pump–probe studies. We ascribe these ultra-fast decays to intraband carrier relaxation. On the other hand, in the wavelength range corresponding to the first VHSs, we observe two distinct regimes in ultra-fast carrier relaxation: fast (0.3–1.2 ps) and slow (5–20 ps). The slow component, which has not been observed previously, is resonantly enhanced whenever the pump photon energy resonates with an interband absorption peak, and we attribute it to interband carrier recombination. Finally, the slow component is dependent on the pH of the solution, which suggests an important role played by H⁺ ions surrounding the nanotubes. PACS 78.47.+p; 78.67.Ch; 73.22.-f     

低温氩等离子体中的单探针和发射光谱诊断技术

使用静电探针和发射光谱分析方法，测量了实验室圆柱形辉光等离子体轴向I-V曲线和发射光谱.通过电子能量概率函数方法、Fermi-Dirac模型、低气压放电的Schottky扩散理论，分别计算了等离子体的电子温度、电子激发温度和电子密度.研究了利用等离子体发射光谱计算电子激发温度、低气压放电理论估算电子密度的方法与静电探针诊断方法的内在联系，讨论了不同方法的使用特点.所研究的方法在某些特殊环境的等离子体参数诊断中具有较好的参考和应用价值. 关键词： 静电探针 发射光谱 电子能量概率函数 Fermi-Dirac模型     

Fractional ionization in plasmas produced by pulsed laser ablation

A pulsed infrared laser (Q-switched Nd:Yag) is employed to irradiate different metal targets having atomic number from Z =13 up to Z =82. The high laser fluence deposited on the metals, of the order of 100 v J/cm, produces high ablation yield and a plasma generation at the target surface. The emitted species are neutral and ionized atoms. Both components have been investigated in terms of yield emission, time-of-flight measurements and angular distribution. Results indicate that the main emission occurs mainly along the normal to the target surface, that the etching, at high fluence, is of the order of 10 v atoms/ pulse, that the atoms velocities are of the order of 10 v m/s, that the maximum ion energies are of the order of keV. During the laser irradiation, expanding and non-equilibrium plasma is produced in front of the target. The plasma has a fraction ionization depending by the metal species and generally within 10% and 80%. The plasma'temperature, at high fluence, can be theoretically calculated and reaches about 10 v K. The fractional ionization of the plasma, experimentally measured, has been investigated as a function of the laser fluence and of the energy binding of the target molecules. The ion emission yield is presented and discussed in view of the possibility to realize a laser ion source for ion accelerators.     

Gas phase kinetic and optical emission spectroscopy studies in plasma-enhanced hot filament catalytic CVD production of carbon nanotubes

Optical emission spectroscopy (OES) is used as the main experimental tool for comparison with simulations of the plasma and gas phase composition during plasma-enhanced hot filament catalytic chemical vapor deposition (PE HF CCVD) growth of carbon nanotubes (CNTs). Calculated concentration of more than 45 species in model of the CVD reactor is acquired by Chemkin™ software. Study of different conditions is performed and a close relationship can be found between the nature and the growth rate of carbon nanostructures and the concentration of the active gas phase species. Moreover it is shown that significant changes in the density and morphology of the CNTs grown in the presence of NH₃ could be mainly explained by the gas phase formation of CN and HCN.     

Linear optical absorption and photoluminescence emission properties of gold nanoparticles prepared by laser ablation technique

Gold nanoparticles of average size varying between 1.1 and 3.3?nm are prepared by 1064?nm Nd:YAG laser ablation of solid gold target kept in ethylene glycol medium. The measured UV-Visible absorption spectra showed the presence of sharp absorption peaks in the UV and in the visible regions due to the interband transition and surface plasmon resonance (SPR) oscillations in Au nanoparticles, respectively. The increase in linewidth of the SPR peaks with the reduction in particle sizes is observed due to intrinsic size effects. The prepared samples exhibit photoluminescence (PL) emissions in the UV-Visible region peaked at ??354?nm due to the recombination of electrons with holes from sp conduction band to d-band of Au. The peak PL intensity in the sample prepared with 60 minutes of laser ablation time is enhanced by a factor of ??2.5 compared to that obtained in the sample prepared with a laser-ablation time duration of 15 minutes.     

高速微晶硅薄膜沉积过程中的等离子体稳态研究

通过光发射光谱监测高速沉积微晶硅薄膜过程中I(H_α^*)/I(SiH^*) 随沉积时间的变化趋势, 分析高速率微晶硅薄膜纵向晶化率逐渐增大的原因. 通过氢稀释梯度法, 即硅烷浓度梯度和氢气流量梯度法来改善材料的纵向均匀性.结果表明: 硅烷浓度梯度法获得的材料晶化率从沉积300 s时的53%增加到沉积600 s时的62%, 相比于传统方式下纵向晶化率从55%到75%的变化有了明显的改善. 在硅烷耗尽的情况下, 增加氢气流量一方面增加了气体总流量, 使得电子碰撞概率增加, 电子温度降低, 从而降低氢气的分解, 抑制SiH_x基团的放氢反应, 同时背扩散现象也得到了一定的缓解, 使得I(H_α^*)/I(SiH^*) 在沉积过程中逐渐增加的趋势有所抑制, 所制备的材料的纵向晶化率在240 s 后维持在53%-60%范围内, 同样改善了薄膜的纵向结构. 关键词： 光发射光谱 高速沉积 微晶硅 纵向结构均匀性