具有高空间分辨力的整形环形光式差动共焦测量法

提出一种新的具有高空间分辨力的整形环形光式差动共焦测量方法。该方法通过整形环形光式共焦测量法和锐化爱里斑主瓣，改善系统横向分辨力；通过差动共焦测量法改善系统的轴向分辨力，最终达到提高系统空间分辨能力的目的。理论分析和实验表明：整形环形光内孔归一化半径ε越大，横向分辨力改善越明显，量程扩展范围越宽；当入射光波长λ=632.8nm，物镜数值孔径取NA=0.85，ε=0.5时，该系统的横向分辨力优于0.2μm，轴向分辨力优于2nm。该方法为光触针测量系统空间分辨力的提高提供了1种新的方法，可广泛应用于超精密三维微细结构工件的超精密测量。     

A shaped annular beam tri-heterodyne confocal microscope with good anti-environmental interference capability

A shaped annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a confocal microscope. It simultaneously detects far-, on-, and near-focus signals with given phase differences by dividing the measured light path of the confocal microscope into three sub-paths (signals). Pair-wise real-time heterodyne subtraction of the three signals is used to improve the anti-environmental interference capability, axial resolution, and linearity; and a shaped annular beam super-resolution technique is used to improve lateral resolution. Theoretical analyses and preliminary experiments indicate that an axial resolution of about 1 nm can be achieved with a shaped annular beam tri-heterodyne confocal microscope and its lateral resolution can be better than 0.2 $\mu $m for $\lambda =632.8$~nm, the numerical aperture of the lens of the microscope is NA $=0.85$, and the normalized radius $\varepsilon =0.5$.     

位相型光瞳滤波器对共焦系统离焦工作状态横向分辨特性的影响

分析了共焦显微系统(CMS)离焦状态工作时分辨特性的变化,指出了离焦状态是导致CMS横向分辨特性变差的主要影响因素之一。提出并采用了位相型超分辨光瞳滤波技术来改善CMS工作在离焦状态下的横向分辨特性,分析了超分辨光瞳滤波器位置变化对CMS横向分辨特性的影响。理论分析和实验验证表明,位相型超分辨光瞳滤波技术的引入,显著抑制了CMS工作在离焦状态时艾里斑旁瓣的增长,克服了CMS因工作在离焦状态而引起的横向分辨特性下降的缺点。     

An approach to achieve lateral superresolution for small probe confocal measurement system and its element

A shaped annular beam superresolution approach is proposed to improve a lateral resolution of a small probe laser confocal measurement system (LCMS). The approach proposed enables lateral superresolution measurement of LCMS to be achieved by using a binary optical diffractive element to shape a He–Ne Gaussian laser beam into an annular beam with an inner diameter of 0.87 mm and an outer diameter of 1.8 mm required for superresolution measurement, and shift the beam spatial frequency from low to high. And a binary optical element (BOE) with 16 phase levels is designed and fabricated to shape a Gaussian laser beam into an annular beam. Preliminary experimental results indicate that an intensity distribution of a shaped annular beam is in agreement with simulation results, the diffractive efficiency is 87.2%; LCMS lateral and axial resolutions of 0.2 μm and 3 nm are achieved, respectively, and its measurement range is expanded nearly to double, when BOE is used in LCMS and , NA=0.85.     

Effect of an annular pupil filter on differential confocal microscopy

Combining differential confocal microscopy and an annular pupil filter, we obtained the normalized axial intensity distribution curve of an optical system. We used the sharp slopes of the axial response curve of the optical system to measure the surface profile of a reflection grating. Experimental results prove that this method can extend the axial dynamic range and improve the transverse resolution of three-dimensional profilometry by sacrificing axial resolution.     

A lateral super-resolution differential confocal technology with phase-only pupil filter

In order to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, phase-only pupil filtering differential confocal microscopy (PFDCM), a new approach is proposed based on the differential confocal microscopy (DCM), which uses a three-zone phase-only pupil filter with lateral super-resolution capability obtained through optimized design to change the distribution of DCM three-dimensional point spread function, so that the DCM lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFDCM are better than 0.2 μm and 2 nm, respectively, when wavelength of incidence laser beam , numerical aperture of measuring lens NA=0.85, and lateral spot size with a three-zone phase-only pupil filter G_T=0.65. It is therefore concluded that PFDCM is a new approach to further improvement of lateral resolution in laser probe measurement systems.     

超分辨在共焦三维形貌检测术中的应用

通过对共焦三维形貌检测术的分析,根据超分辨理论,在共焦系统中加入环形光瞳滤波器,以期延长系统的动态检测范围,并提高系统的横向分辨率。理论和实验结果表明该方法在适当牺牲轴向分辨率的条件下,能有效地延长系统的动态检测范围,且提高其横向分辨率。     

Differential confocal technology based on radial birefringent pupil filtering principle

In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76 nm when measuring a standard grating of period 3 μm; the axial resolution up to 3 nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.     

图像复原式整形环形光横向超分辨共焦显微测量新方法

提出一种新的图像复原式整形环形光横向超分辨共焦显微测量法. 该方法首先利用二元光学器件，将高斯照明光束整形为环形光束，用于初步改善共焦显微镜的横向分辨力，然后利用基于最大似然估计法(maximum likelihood estimate, MLE)的单幅图像超分辨复原技术，重建测量图像的高频信息，来进一步改善共焦显微镜的横向分辨力. 实验表明,当λ=632.8nm，N.A. =0.85时，该方法能使共焦显微镜获得优于0.1μm的横向分辨力. 利用该方法建立的横向超分辨共焦显微系统除了具有显著的超分辨效果外 关键词： 超分辨 超分辨复原 最大似然估计 共焦成像     

Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope

We developed a heterodyne interference confocal microscope, using wavelength modulation of a laser diode to realize quick separate measurement of the refractive indices and geometrical thicknesses of multiple layers. This microscope requires only a single axial movement of the specimen. We can display the geometrical cross sections of the interfaces and the refractive indices of a three-layered object.     

Dual-axes differential confocal microscopy with high axial resolution and long working distance

We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours.     

Dual-axes confocal microscopy with post-objective scanning and low-coherence heterodyne detection

We present a dual-axes confocal microscope that employs postobjective scanning and low-coherence heterodyne detection to collect vertical cross-sectional images from biological tissue with high axial resolution, reduced noise from scattered light, deep tissue penetration, and a large dynamic range. This architecture can be scaled down to millimeter dimensions with microelectromechanical systems technology for performance of in vivo optical biopsy.     

Edge detector tolerant to object defocusing

Different methods for edge extraction have been studied in the past years. In a recent paper we have presented a rotation-invariant edge extractor based on a spiral phase filter placed in the frequency plane of a convergent correlator. In this architecture, the axial position of the output plane strongly depends on the axial position of the object. This condition limits the processing of three dimensional objects, because only a narrow axial region of the object would be correctly imaged to the output. The other axial regions of the target yield defocused results. Likewise, a rather small axial misalignment of planar scenes could produce completely inaccurate correlations. Besides, annular pupils have been widely used to regulate the depth of focus (DOF) and the transversal resolution of optical systems. In this paper we present a novel filter that combines the advantages of a spiral phase-based edge extractor and those of an axial-apodizing annular pupil. This design allows edge extraction of objects in a widened axial range. Numerical simulations and experimental results that demonstrate edge extraction with improved tolerance to defocusing are presented.     

Wavelength division multiplexed confocal microscopy using supercontinuum

We investigate both theoretically and experimentally wavelength division multiplexed confocal imaging by using white light supercontinuum. We show that with the optimized pinhole diameter an axial resolution of 0.75 μm and detection efficiency of 80% can be achieved. In addition, we applied the axial WDM confocal system to 3D surface measurement and the result agreed well with that measured by commercially available surface profilometer. The measured sensitivity of the system is 3.25 nm. Finally, we demonstrated lateral confocal imaging by using supercontinuum. An effective lateral scanning range of 130 μm was obtained.     

Resolution and contrast in confocal optical scanning microscopes

A theoretical study is made of a simple method of obstructing an amplitude pupil which results in improved microscope resolution with only a little degradation of the image contrast. Using a confocal scanning optical microscope the resultant point spread function is calculated, from which the image of a point object is deduced. The calculations are made for two different apertures — the first has four-fold symmetry and the second has eight-fold symmetry — and are compared with full circular and annular apertures.     

一种提高共聚焦显微镜信噪比算法的研究

基于共焦显微镜的成像特点,建立了Kalman滤波算法的理论模型,把Kalman滤波方法引入到系统中,提出一种基于图像像素的Kalman滤波算法,并实现了实时化的Kalman滤波器。实验结果表明:该算法能够有效地提高共焦显微镜信噪比,但是以牺牲时间为代价,提高系统分辨率的根本方法还是要着重考虑优化成像系统光路和探测电路。     

Demonstration of a no-moving-parts axial scanning confocal microscope using liquid crystal optics

For the first time, to the best of authors’ knowledge, a no-moving-parts axial scanning confocal microscope (ASCM) system is designed and demonstrated using a combination of a large diameter liquid crystal (LC) lens and a classical microscope objective lens. By electrically controlling the 5 mm diameter LC lens, the 633 nm wavelength focal spot is moved continuously over a 48 μm range with a measured 3-dB axial resolution of 3.1 μm using a 0.65 numerical aperture (NA) micro-objective lens. The ASCM is successfully used to image an Indium Phosphide (InP) twin square optical waveguide sample with a 10.2 μm waveguide pitch and 2.3 μm height and width. Using fine analog electrical control of the LC lens, a super-fine sub-wavelength axial resolution of 270 nm is demonstrated. The proposed ASCM can be useful in various precision three-dimensional (3D) imaging and profiling applications.     

Improved axial resolution in confocal fluorescence microscopy using annular pupils

The axial image of a thick fluorescent layer is studied in a confocal microscope consisting of either circular or annular pupils. The response for circular pupils is sharper than that for annular pupils if a small pinhole detector is used. But when the size of the pinhole is larger than a certain value, the response in the latter case can become sharper than that in the former. This result implies that for a given detector of finite size, axial resolution in confocal fluorescence microscopy can be improved when an annular lens is used. Our experimental results qualitatively demonstrate the theoretical prediction. The strength of optical sectioning and the axial cross-section of the three-dimensional optical transfer function are also derived from the measured data.     

改善共焦系统轴向分辨率的位相型光瞳滤波器

利用约束全局优化算法———CGO算法,设计了两种用于共焦系统的三区位相型光瞳滤波器.第一种滤波器在不改变系统的横向分辨率的同时,可以大幅度地提高轴向分辨率,提高了系统的层析能力.第二种滤波器在提高系统轴向分辨率的同时,又能提高其横向分辨率,适用于系统的三维成像. 关键词： CGO算法 光瞳滤波器 超分辨     

差动共焦式纳米级光聚焦探测系统的研究

为解决纳米级大范围的非接触测量问题 ,提出了基于差动式共焦显微技术的光聚焦探测系统。介绍了系统的工作原理和结构装置 ,对系统中的关键技术进行了优化设计 ,通过对共焦光路的差动设计 ,可以有效地抑制光源的噪声和漂移对测量结果的影响。初步实验结果表明 ,该系统的轴向分辨率可达 2 nm