共查询到19条相似文献,搜索用时 125 毫秒
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针对大批量球面光学元件曲率半径的快速、高精度、非接触测量难题,提出一种基于差动共焦技术的批量元件曲率半径快速测量方法。先将一已知曲率半径的样件S0在其共焦位置进行扫描定焦,获取其差动共焦曲线和线性段方程;依次装卡同批次被测元件S1-Sn并无扫描地获得其离焦量;根据样件曲率半径和被测件离焦量换算出被测样品曲率半径。仿真和实验表明,精度可达12.2ppm,同时测量速度比传统式差动共焦曲率半径扫描系统提高59倍。方法仅需1次扫描和N次快速装卡即可实现N件球面元件曲率半径的快速、高精度、非接触式检测,为大批量球面元件的高效率、高精度加工检测提供全新途径。 相似文献
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针对高精度光学系统的需求,利用立式Fizeau型干涉仪,结合双频激光测长干涉仪,实现了亚微米量级的高精度曲率半径的测量。为了验证该测量系统的可靠性,分别使用两个参考镜对一系列不同曲率半径的光学零件进行了检测。对产生测量误差的主要因素进行了详细分析,以SiC小球为例,结合不确定度理论,得到测量结果的不确定度约为0.13μm(假设是正态分布,置信水平约为95%),证明该测量系统满足亚微米测量精度要求。通过三坐标测量机对同一元件的交叉检测,验证了该系统测量结果的准确性。 相似文献
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普通共焦显微镜的轴向响应特性,因受到被测量表面的倾斜角影响引从而起轴向响应特性变化,而应用差动共焦光学系统对超精密加工的表面进行瞄准测量时,差动系统的瞄准信号也受到影响,并进而影响到测量系统对加工表面的测量精度及分辨特性。通过对差动共焦测量系统输出信号理论模型的分析得出被测量面的倾斜角变化不影响差动共焦输出信号零点位置;倾角在一定范围内变化时不影响瞄准测量分辨力的结论,并给出了实验分析结果。 相似文献
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为精确、快速测量镜组内各透镜间的轴向间隙,提出一种基于五维自动调整的差动共焦间隙测量方法。该方法根据CCD探测器实时获取的光斑信号检测被测镜组光轴的平移偏差与倾斜偏差,依据偏差信息、通过五维自动调整技术实现镜组高精度调整,再利用差动共焦高精度层析定焦和镜组内部光线追迹实现轴向间隙高精度测量。分析和实验表明,本方法可以有效提高姿态调整效率3.4倍,透镜间隙重复测量精度可达到0.53μm。该方法为实现镜组间隙的快速高精度测量提供了有效途径,同时还为透镜的中心厚度、焦距、半径等多种参数快速高精度测量提供了有效方法。 相似文献
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为实现光学透镜曲率半径的快速准确测量,设计了一种基于自动对焦技术的非接触式透镜曲率半径测量方案。测量系统分别在被测透镜表面的顶点位置和曲率中心位置自动对焦,系统所记录的两个位置之间的距离即为曲率半径。针对透镜曲率半径检测应用,对自动对焦技术进行了改进:将连通区域提取技术应用于定位目标图像,提高了清晰度评价函数的灵敏度;利用均值比较法和三点法改进了传统爬山搜索策略。实验结果表明:基于自动对焦技术的透镜曲率半径检测是有效的,测量误差低于0.196%,测量重复性好于0.109%。该方法已经成功应用于透镜曲率半径测量仪。 相似文献
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In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76 nm when measuring a standard grating of period 3 μm; the axial resolution up to 3 nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness. 相似文献
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We have proposed a configuration of an integrated multi-point differential laser Doppler velocimeter (LDV) using arrayed waveguide gratings (AWGs) as grating elements. This paper demonstrates two-point velocity measurement using the proposed configuration with diffraction grating elements. An experiment was conducted using a free-space optical setup with bulk diffraction gratings instead of AWGs. The experimental results indicate that velocities at different positions can be measured using the proposed configuration. The measured separation of the two measurement positions was about 20.5 mm, about 11% of the working distance. 相似文献
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针对目前微观三维表面形貌测量技术中存在检测效率和测量范围较小的问题,提出一种基于双线阵相机的线扫描差动共聚焦三维形貌测量方法。采用线扫描光源,利用线扫描拼接算法,分别合成焦前和焦后图像;再利用差动算法获得样本位于测量区域的差动图像,结合预先刻度的轴向响应曲线,完成样本的三维形貌还原,实现大范围高效测量。实验结果证明:基于双线阵相机的线扫描差动共聚焦三维形貌测量方法在相同时间内测量范围和测量效率分别是白光干涉仪的16.48倍和6.59倍,并且该方法在测量过程中不需要停顿,只需实现一次对焦,就可以对样品进行连续不间断的扫描检测。研究成果为满足智能制造中在线在位、实时高效、大范围测量的检测需求提供依据。 相似文献
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Shearography is a full-field non-contact optical technique used for characterisation of surface strain. In a multi-component system, the displacement derivative components are measured using a number of illumination positions. These components are then transformed into a three-dimensional coordinate system, using a knowledge of the source positions. This process is highly sensitive to errors in the knowledge of the source position. Shadow Moiré, with either linear or circular gratings, can be used to measure angle of illumination, with the measurement sensitivity and accuracy variable by changing the grating pitch. Circular gratings have a measurement range determined by multiple fringe analysis and linear gratings have a different measurement range determined by sub-fringe analysis. In this paper vertical linear, horizontal linear and circular gratings are combined to extend the measurement range and the accuracy of the measurement of the source position in two directions. Using this method the source position was measured to an accuracy of ±3%. 相似文献
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微型差动式共焦自聚焦光聚焦探测系统 总被引:1,自引:0,他引:1
为解决微小内轮廓尺寸为代表的微小尺寸的非接触式超精密测量问题,提出了将自聚焦透镜体积小的特点与共焦显微技术的高分辨率和绝对位置跟踪特性相结合的差动式自聚焦共焦微型显微技术的光探测技术,建立了相应的传感系统,介绍了系统的工作原理和构成,自聚焦透镜测头直径为1mm,两个探测器差动设置,不但消除了光源的光强漂移和探测器的电子漂移产生的共模噪声,提高了测量信噪比,而且有效地提高了系统的轴向分辨率,初步实验表明,系统轴向分辨率在倾斜率小于20度的范围内可达5nm。 相似文献