PZT厚膜及高频超声换能器的研究

近年来,基于PZT厚膜的超声换能器研究受到了广泛的重视。本文综述了PZT厚膜制备技术的发展情况,简要介绍了水下声纳和医用超声领域中PZT厚膜型高频超声换能器的应用研制进展。     

Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique

Thick film broadband ultrasonic transducers (UTs) produced by a sol-gel spray technique and operated below 10 MHz are presented. These UTs are formed by dispersing PZT and LiTaO3 particles, respectively in Al2O3 and PZT sol-gel solution. The 50-100 microm thick films have been deposited on curved steel, flat steel and aluminum substrates and steel rods. Ultrasonic pulse-echo signals with a signal to noise ratio of more than 25 dB are experimentally obtained for the operating temperatures up to 250 degrees C.     

Study on the properties of Pb(Zr,Ti)O3 thin films grown alternately by pulsed laser deposition and sol-gel method

In order to prepare good quality Pb(Zr,Ti)O₃ (PZT) thin films, we consider the method of alternately growing PZT thin films on Pt (111)/Ti/SiO₂/Si (100) substrates by pulsed laser deposition (PLD) and sol-gel. In this work, we conducted comparative experiments on different film preparation methods, and 1.0 um thick PZT film was grown on platinized silicon wafers by an alternate PLD and sol-gel method. The microstructure and electrical properties of the films is analyzed. Through the study of X-ray diffraction, SEM, AFM, PFM, and ferroelectric testing, it is found that the alternating growth of a film by the alternate PLD and sol-gel method has good compactness, excellent ferroelectric properties, and smaller leakage current compared to film prepared by the sol-gel method alone.     

Preparation and application of the 3C–SiC substrate to piezoelectric micro cantilever transducers

This study examines the fabrication process and mechanical properties of piezoelectric films with the substrate, which is made from silicon carbide. After depositing the PZT thick film on silicon carbide substrate and silicon substrate respectively, it was shown that silicon carbide substrate formed a stable interface with PZT thick film up to 950?°C, compared with silicon substrate. In addition, the dielectric constant of the PZT thick film sintered at 950?°C on a silicon carbide substrate was 843, and this value was about over 25 % improved value compared with that on a silicon substrate. A thick film piezoelectric micro transducer of a micro cantilever type was fabricated by using a multifunctional 3C–SiC substrate. The fabricated micro cantilever was a micro cantilever with multiple thin films on either silicon or silicon carbide substrate. The piezoelectric thick-film micro cantilever that was fabricated by using a SiC substrate showed excellent mechanical and thermal properties. The piezoelectric micro cantilever on the SiC substrate shows an excellent sensitivity towards the change of mass compared with the piezoelectric micro cantilever on the Si substrate.     

Advantage analysis of PMN-PT material for free-flooded ring transducers

The acoustic radiation characteristics of free-flooded ring transducers made of PZT4 and PMN-PT materials are calculated and compared.First,the theoretical formulae for free-flooded ring transducers are studied.The resonant frequencies of a transducer made of PZT4 and PMN-PT materials are calculated.Then,the transmitting voltage responses of the free-flooded ring transducers are calculated using the finite element method.Finally,the acoustic radiation characteristics of the free-flooded ring transducers are calculated using the boundary element method.The calculated results show that the resonant frequencies of the free-flooded ring transducer made of PMN-PT are greatly reduced compared with those made of PZT4 with the same size.The transmitting voltage response of the transducer made of PMN-PT is much higher than that of the transducer made of PZT4.The calculated 3-dB beamwidth of the acoustic radiated far-field directivity of the free-flooded ring transducer made of PZT4 at the resonant frequency 1900 Hz is 63.6 and that of the transducer made of PMN-PT at the resonant frequency 1000 Hz is 64.6.The comparison results show that the free-flooded ring transducer made of PMN-PT material has many advantages over that made of PZT4.The PMN-PT is a promising material for improving the performance of free-flooded ring transducers.     

Wideband high-frequency line-focus PVDF transducer for materials characterization

This paper presents the design, fabrication, operating characteristics and applications of a wideband, high-frequency, line-focus beam transducer we constructed using a 9 microm thick piezoelectric polyvinylidene fluoride (PVDF) film. This transducer possesses a focal length of 2.38 mm and an aperture angle of 84 degrees. The frequency spectrum of the signal measured at the focal point indicates that the transducer has a wide frequency response which extends from 10 MHz to over 100 MHz. When compensated for the frequency-dependent attenuation of the coupling medium, the operational frequency exceeds 150 MHz. The transducer can be operated in a time-resolved pulse mode or in a radio-frequency (rf) tone burst mode. An application of the transducer to determine the anisotropic elastic property of a silicon wafer is demonstrated. The phase velocities of surface acoustic waves (SAW) propagating along various directions on the (001) surface of cubic silicon are measured and compared to computed values.     

采用单个压电传感器的单模式兰姆波激发频率的选择

考虑了压电传感器(PZT)与板之间的耦合作用,从理论上研究了单个压电传感器激发时产生单模式兰姆波的频率调节方法,实验给出了模式选择在兰姆波结构健康监测中的应用. 在板材、板厚以及PZT尺寸一定的情况下,从理论上能够预测到作为频率函数的各兰姆波模式的幅值变化. 根据某特定兰姆波模式的幅值最大而其他模式幅值相对最小时所对应的频率,即可识别出该兰姆波模式优化的激发频率. 数值仿真验证了理论的有效性以及单模式兰姆波选择的可能性. 在不同的激发频率下,分别激发了优化的A0 模式,优化的S0模式以及共存的A0和S0模 关键词： 兰姆波 压电传感器 激发频率 结构健康监测     

Miniature piezoelectric conical transducer: fabrication, evaluation and application

This paper reports a new type miniature-conical transducer for acoustic emission measurements. The transducer follows the basic idea and structure of a conventional NBS conical transducer, but is much compact in size and easier to use. The improvements are made possible by introducing an excimer laser micromachining method for fabricating smaller PZT conical elements, which play a key role in the transducer. Conical PZT elements with contact size less then 300 microm are laser-machined and the miniature-conical transducers are constructed. Standard quantitative acoustic emission testing is performed on a plate using the fabricated transducers and good results are observed. The transducers can be very useful in many applications involving quantitative measurements of transient elastic waves.     

Measurements of dispersion curves of leaky Lamb waves using a lensless line-focus transducer.

This paper presents a new method of measuring dispersion curves of leaky Lamb waves propagating in a thin plate. The measurement system is based on a lens-less line-focus transducer and its defocusing measurement technique. A new waveform processing method known as V(f, z) method is introduced for analyzing the measured waveforms and for extracting the dispersion relation. For two thin-plate samples, namely a 150 microm thick alumina plate and a 320 microm thick stainless steel plate, the dispersion curves of several lower order modes of leaky Lamb waves have been experimentally determined in the frequency range of few to 25 MHz. The experimental dispersion curves have then been compared with the theoretical ones. Excellent agreement is observed. It is then verify that this method indeed provides a convenient and accurate way for experimentally measuring dispersion curves of leaky Lamb waves of thin-plate samples.     

偏置电压对磁致伸缩/压电层合换能结构磁电性能影响

分析和测试了偏置电压调整时PZT5/Terfenol-D/PZT8层合换能结构磁电性能. 提出了一种磁致伸缩/压电层合磁电换能结构的一阶谐振频率控制方法. 通过改变压电驱动层的直流电压对磁电层合结构的预应变进行改变, 从而调整谐振频率. 分析偏置电压、 应变、 弹性模量、 谐振频率和谐振磁电电压系数之间关系. 分析表明: 在较小应变情况下, 控制电压几乎可以线性调节谐振频率, 而层合结构谐振磁电电压系数几乎与偏置电压无关. 实验研究验证: 理论与实验结果较好吻合. 在-170 V-+170 V的偏置电压时, 谐振频率可以几乎线性调整. 最大频率调整量达到1 kHz, 偏置电压对一阶纵振频率的控制率达到: 2.94 Hz/V. 在偏置磁场为0-225 Oe时, 谐振频率调整量与偏置磁场无关. 偏置磁场会改变谐振磁电电压系数, 在大于178 Oe静态磁场偏置时, 磁电电压系数最大, 达到1.65 V/Oe.     

M′型LuTaO_4∶Eu~(3+)透明闪烁厚膜的制备及性能研究

X射线成像在生命科学和物质微结构分析等许多方面有着非常重要的应用,X射线成像仪器核心部件之一为X射线-可见光转换屏。透明闪烁薄膜是实现高空间分辨率X射线成像的一条有效途径。铕掺杂M′型LuTaO_4是一种性能优越的闪烁材料,其密度高达9.75g·cm~(-3),化学性质稳定,辐照硬度大,有望制备成透明薄膜型高空间分辨率X射线转换屏。以2-甲氧基乙醇为溶剂、PVP为胶粘剂,采用溶胶-凝胶法成功制备出M′型LuTaO_4∶Eu~(3+)透明闪烁厚膜,并对透射率、光致发光、X射线激发发射光谱和空间分辨率等一系列的薄膜性能进行表征。经过8次旋涂之后,膜层均匀、无裂纹,厚度为2.1μm,发光波段的透射率为70%以上,成像空间分辨率达到1.5μm。将厚膜作为X射线-可见光转换屏,成功对果蝇进行了X射线成像,其复眼结构清晰可见。此外,紫外和X射线激发下闪烁膜的发光特性研究表明,该厚膜具有优良的发光性能,已基本满足高分辨率X射线成像的要求,有望在显微X射线成像方面获得很好应用。     

Modeling of a high frequency ultrasonic transducer using periodic structures

Solidly mounted integrated transducers with a Bragg cell inserted between the piezoelectric film and the substrate are investigated for high frequency ultrasonic applications. A numerically stable recursive one dimensional transmission/reflection model was used to analyze the behavior of the periodic structure. This theoretical analysis includes the study of the influence of the acoustic properties of the constitutive layer, the effect of the number of cells and their arrangement. A 35 MHz integrated transducer consisting in a PZT ceramic laid down on a Au/PZT Bragg cell deposited on a porous substrate was fabricated and characterized. Both theoretical and experimental results highlight the interest of using a periodic structure for high frequency ultrasonic applications.     

Leakage currents in thin ferroelectric films

The basic mechanisms of leakage current components of thin lead zirconate titanate (PZT) ferroelectric films grown by the sol-gel method have been studied. Characteristic regions of current-voltage characteristics with different charge transport mechanisms have been determined. It has been shown that there is an intermediate region which separates such regions. In one of them, the leakage current depends on properties of the contact of electrodes with PZT film at low voltages; in the other, the leakage current is controlled by intrinsic properties of the PZT film bulk, and the basic mechanism of charge transport is Poole-Frenkel emission. In the intermediate region, a stepwise change in the current has been observed, which is caused by relaxing breakdown of the Schottky barrier. Time dependences of the leakage currents have been determined. It has been shown that the leakage current decreases with increasing delay time before the Schottky barrier breakdown, and the dependence becomes opposite in character after the breakdown.     

The measurement of the diameter change of a piezoelectric transducer cylinder with the white-light interferometry

The measurement of the diameter change of a piezoelectric transducer (PZT) cylinder with the white-light interferometry is proposed and experimentally demonstrated. One arm of a Mach–Zehnder interferometer (MZI) is wrapped on the PZT cylinder, and the phase change of the interferogram of the MZI is used to determine the diameter change when a DC voltage is applied on the PZT cylinder. The Fourier transform white-light interferometry is used for recovering the phase change of the interferometer. The experimental results show that the diameter change resolution of 0.8 nm for the PZT cylinder with diameter of 40 mm is achieved.     

A KLM-circuit model of a multi-layer transducer for acoustic bladder volume measurements

In a preceding study a new technique to non-invasively measure the bladder volume on the basis of non-linear wave propagation was validated. It was shown that the harmonic level generated at the posterior bladder wall increases for larger bladder volumes. A dedicated transducer is needed to further verify and implement this approach. This transducer must be capable of both transmission of high-pressure waves at fundamental frequency and reception of up to the third harmonic. For this purpose, a multi-layer transducer was constructed using a single element PZT transducer for transmission and a PVDF top-layer for reception. To determine feasibility of the multi-layer concept for bladder volume measurements, and to ensure optimal performance, an equivalent mathematical model on the basis of KLM-circuit modeling was generated. This model was obtained in two subsequent steps. Firstly, the PZT transducer was modeled without PVDF-layer attached by means of matching the model with the measured electrical input impedance. It was validated using pulse-echo measurements. Secondly, the model was extended with the PVDF-layer. The total model was validated by considering the PVDF-layer as a hydrophone on the PZT transducer surface and comparing the measured and simulated PVDF responses on a wave transmitted by the PZT transducer. The obtained results indicated that a valid model for the multi-layer transducer was constructed. The model showed feasibility of the multi-layer concept for bladder volume measurements. It also allowed for further optimization with respect to electrical matching and transmit waveform. Additionally, the model demonstrated the effect of mechanical loading of the PVDF-layer on the PZT transducer.     

A cylindrical micro-ultrasonic motor (stator transducer size: 1.4 mm in diameter and 5.0 mm long)

Ultrasonic motors are suitable for a micro-actuator because of a direct drive, no brake and their simple construction. In order to fabricate micro-ultrasonic motors, a piezoelectric thin film is essential. In this study, a hydrothermal method was adopted to deposit a PZT thin film. The dimensions of the stator transducer were: outer diameter, 1.4 mm; inner diameter, 1.2 mm; and length, 5.0 mm. The resonance frequency of the stator transducer was 227 kHz, and the vibration amplitude was 58 nmp-p at an input voltage of 4.0 Vp-p. The maximum revolution speed was 680 rpm, and the maximum starting torque was 0.67 microNm. The experimental conditions were 20 Vp-p and 5.3 mN pre-load. The motor property versus scale was investigated using an equivalent circuit. The calculated results indicated that the output torque of the 100 microns diameter motor was 27 nNm.     

Thick aluminium nitride films deposited by room-temperature sputtering for ultrasonic applications

Materials in film form for electromechanical transduction have a number of potential applications in ultrasound. They are presently under investigation in flexural transducers for air-coupled ultrasound and underwater sonar operating at frequencies up to a few megahertz. At higher frequencies, they have the potential to be integrated with electronics for applications of ultrasound requiring high spatial resolution. However, a number of fabrication difficulties have arisen in studies of such films. These include the high temperatures required in many thick and thin film deposition processes, making them incompatible with other stages in transducer fabrication, and difficulties maintaining film quality when thin film--typically sub-1 microm--processes are extended to higher thicknesses. In this paper, we first outline a process which has allowed us to deposit aluminium nitride (AlN) films capable of electromechanical transduction at thicknesses up to more than 5 microm without substrate heating. As an ultrasonic transduction material, AlN has functional disadvantages, particularly a high acoustic velocity and weak electromechanical transduction. However, it also has a number of advantages relating to practicality of fabrication and functionality. These include the ability to be deposited on a variety of amorphous substrates, a very high Curie temperature, low permittivity, and low electrical and mechanical losses. Here, we present experimental results highlighting the transduction capabilities of AlN deposited on aluminium electrodes on glass and lithium niobate. We compare the results with those from standard simulation processes, highlighting the reasons for discrepancies and discussing the implications for incorporation of AlN into standard ultrasonic transducer design processes.     

High accuracy non-contact ultrasonic thickness gauging of aluminium sheet using electromagnetic acoustic transducers.

Aluminium sheet thickness has been calculated from ultrasonic data obtained using a send-receive, radially polarised electromagnetic acoustic transducer (EMAT). Sheets in the thickness range between 0.1 and 0.5 mm have been measured using this non-contact approach at a stand-off of up to 1.5 mm. Normal incidence shear waves generated and detected in the sheet and the resultant waveforms have been processed using transit time measurements and Fourier analysis. Two broad band EMAT systems have been used to perform the measurements with centre frequencies of approximately 5 MHz and frequency content up to 10 and 20 MHz respectively. The most accurate measurements of thickness on thin sheets have been made using Fourier analysis and have yielded measurements accurate to within 0.2% (or 0.4 microm) for 280 microm thick aluminium sheets. Discrete shear wave echoes can be observed for sheets down to a thickness of 250 microm using the higher frequency EMAT system. However temporal measurements of these signals yield lower accuracy results when compared to the Fourier analysis method which is capable of sub-micron accuracy.     

A fiber micro-vibration sensor based on single-mode fiber ring laser

A new micro-vibration sensor based on single-mode fiber ring laser is put forward. The Mach-Zehnder interferometric （MZI） detection technique is presented for interrogating laser frequency shift due to the measurand （piezoelectric transducer （PZT） is used to simulate the micro-vibration） induced laser cavity strain from both single- and multi-mode lasers. In the experiment, compared with multi-mode laser sensors, the single-mode laser sensor is proved to be a sensor with high resolution. When the PZT is driven by the analog signal （0.03 rad near 2 kHz）, the signal-to-noise ratio （SNR） of output signal from the single-mode laser sensor is close to 55 dB and the sensitivity of the sensor is about 5 ×10^-5 rad/Hz1/2.     

2-2型磁电复合薄膜CoFe2O4/Pb(Zr0.53Ti0.47)O3静磁耦合

运用溶胶-凝胶法在Pt/Ti/SiO₂/Si基片上旋涂制备了2-2型CoFe₂O₄/Pb(Zr_0.53Ti_0.47)O₃磁电复合薄膜．制备的磁电薄膜结构为基片/PZT/CFO/PZT*/CFO/PZT,通过改变中间层PZT*溶胶的浓度,改变磁性层间距以及静磁耦合的大小．SEM结果表明,复合薄膜结构致密,呈现出界面清晰平整的多层结构．制备的复合薄膜具有较好的铁电与铁磁性能．实验还研究了静磁耦合对薄膜磁电性能的影响,结果表明,随着复合薄膜磁性层间距的减小,静磁耦合效应的增加,磁电电压系数有逐渐增大的趋势.