多匹配层空气耦合压电超声换能器*

该文针对超声无损检测与成像功能空气耦合换能器开展了分析计算和研制。为解决压电材料与空气间巨大的阻抗失配问题,进行了多匹配层设计,并基于有限元技术仿真设计了1-3压电复合材料参数。借助复数压电方程,导出考虑损耗的多匹配层压电复合材料换能器厚度振动等效电路,获得其等效导纳,以此计算电导谱,同时基于有限元技术数值计算相应电导谱,二者有较好的一致性。在此基础上分别设计制作复合压电材料,多匹配层材料以及由此构成的空气耦合超声换能器。换能器的实测电导谱与数值仿真结果一致。进一步的换能器回波信号测试及其谱分析结果表明,所研制的160 k Hz中心频率空气耦合换能器样品有较好灵敏度和带宽。这些结果说明,该文研制的空气耦合超声换能器的初样是成功的。     

空气耦合电容式微超声换能器设计

建立了空气耦合电容式微超声换能器(CMUT)的理论方法,分析CMUT各个结构参数对其性能参数的影响。根据理论分析结果结合无损检测应用背景设计了一个由16个阵元构成的CMUT阵列,并采用SOI晶圆键合工艺制作。该阵列每个阵元包含16个圆形CMUT敏感单元,敏感单元的半径400μm,中心频率230 kHz。建立CMUT发射和接收瞬态仿真模型分别得到CMUT发射声压和接收灵敏度与激励电压的关系,并通过实验测试验证该仿真模型的准确性。最后通过实验对CMUT与商用压电空耦超声换能器的性能进行对比,实验结果表明CMUT的发射声压和接收灵敏度与商用换能器达到相同数量级,并且能够成功激发和接收铝合金板中A_0模态Lamb波。     

Study on the compound multifrequency ultrasonic transducer in flexural vibration

A new type of compound multifrequency ultrasonic transducer is analyzed in this paper. The compound multifrequency ultrasonic transducer consists of two sandwiched ultrasonic transducers and a rectangular radiator. In virtue of the coupling between longitudinal vibration of the sandwiched ultrasonic transducers and flexural vibration of the rectangular radiator, the compound multifrequency ultrasonic transducer can produce several resonance frequencies. Some compound multifrequency ultrasonic transducers are designed and simulated by finite element method (ANSYS), and modal shapes and harmonic response are analyzed. The compound multifrequency ultrasonic transducers are designed and manufactured. The resonance frequencies are measured and compared with the numerical results. The effect of the geometrical dimensions of the compound multifrequency ultrasonic transducer and the location of two sandwiched ultrasonic transducers on the compound multifrequency ultrasonic transducer is discussed. It is shown experimentally and numerically that the compound multifrequency ultrasonic transducer has several resonance frequencies.     

An ultrasonic transducer for high power applications in gases

In the field of the generation of airborne ultrasound, we have described and analysed in a previous paper¹ a piezoelectric transducer based on a novel flexural vibrating stepped plate. This transducer has now been improved for high power applications, obtaining, with a remarkable increase in efficiency and directivity, sound pressure levels in free field greater than 160 dB.     

A new type of high power composite ultrasonic transducer

A new type of high power composite ultrasonic transducer was proposed and studied. The composite transducer consists of a sandwich longitudinal piezoelectric transducer, an isotropic metal hollow cylinder with large radial dimension, and the front and back metal radiation mass. By means of its special structure and Poisson’s effect, the composite transducer can produce vibrations both in its longitudinal and radial directions, and therefore, it can radiate sound waves in three-dimensional space. The electro-mechanical equivalent circuit of the composite transducer was derived and the resonance frequency equation was obtained analytically. Numerical methods were used to simulate the vibration of the composite transducer, and the vibrational displacement distribution, the resonance frequency and the radiation sound field are given. Some composite transducers are designed and manufactured; their resonance frequencies and the radiation acoustic field are measured and compared with the analytical and numerical results. It can be seen that the measured frequencies and acoustic field contour are in good agreement with the analytical and numerical results. It is expected that this kind of composite ultrasonic transducer can be used in more and more power ultrasonic applications, such as ultrasonic cleaning, ultrasonic extraction, ultrasonic sonochemistry and other ultrasonic liquid processing, where high ultrasonic power and large ultrasonic processing space are needed increasingly.     

多基元聚焦空气耦合超声换能器*

文中针对空气耦合超声换能器及其在表面缺陷检测中的应用开展了研究。选用1-3型压电复合材料及双匹配层结构来实现超声换能器压电材料与空气之间声阻抗的逐渐过渡,提高压电材料/空气界面的声能量透射率进而提高空气耦合超声换能器的灵敏度。在此基础上研发制作了440 kHz多基元聚焦空气耦合超声换能器,并对其性能进行了测试。其焦距、焦宽及焦深分别为41.44 mm、1.14 mm和20.30 mm,灵敏度和带宽分别为-50 d B和20.2%。测试结果表明该空气耦合超声换能器具有优良的性能,利用该超声换能器可以有效检测材料表面缺陷。     

功率超声换能器辐射声功率的激光干涉测量

利用激光干涉仪,绝对测定超声换能器表面的振动位移并由此而确定超声换能器的辐射声功率,对一增幅杆型的超声换能器辐射声功率测量的实验结果表明,在本文的声功率测量范围内,空化对换能器表面的振运移测量影响不大,而且该换能器的电声功率转换效率经实验测定可达到０．４０。     

纵-扭复合模式夹心式功率超声压电换能器的研究

本文对纵-扭复合模式功率超声换能器进行了研究,该换能器由指数型前后金属喇叭盖板以及轴向极化和切向极化的两组压电陶瓷晶片组成。文中推出了换能器中纵向及扭转两种振动模式的共振频率方程。通过改变换能器前后指数型盖板的半径减编系数,得出了换能器中纵向与扭转两种振动模式同频共振的条件。实验表明,换能器的设计频率与测试频率基本一致,而且,换能器的纵向及扭转共振频率也比较接近,该换能器可望应用于超声加工及焊接等高振幅的功率超声技术中。     

Study on the multifrequency Langevin ultrasonic transducer

Langevin ultrasonic transducers are widely used in high-power ultrasonics and underwater sound. In ultrasonic cleaning, a matching metal horn rather than a metal cylinder is used as the radiator in order to enhance the radiating surface and improve the acoustic matching between the transducer and the processed medium. To raise the effect of ultrasonic cleaning, the standing wave in the cleaning tank should be eliminated. One method to eliminate the standing wave in the tank is to use the multifrequency ultrasonic transducer. In this paper, the Langevin ultrasonic horn transducer, with two resonance frequencies, is studied. The transducer consists of two groups of piezoelectric ceramic elements: the back metal cylinder, the middle metal cylinder and the front matching metal horn. The vibrational modes of the transducer are analysed, and resonance frequency equations of the transducer in the half-wave and the all-wave vibrational modes are derived. According to the resonance frequency equations, transducers with two resonance frequencies are designed and made. The resonance frequencies, the effective electromechanical coupling coefficients and the equivalent electric impedances of the transducers are measured. It is shown that the measured resonance frequencies are in good agreement with the computed results, and the transducer can be excited to vibrate at two resonance frequencies, which correspond to the half-wave and the all-wave vibrational modes of the transducer.     

一种用于应力测量的复合型超声波探头

为了在应力测量中更好地测量超声波的纵波声速和横波声速，提高测量的精度和准确性，本文研究了一种由两种不同频率的纵波晶片和两处偏振方向相互垂直的横波晶片组成的复合型超声波探头，研究了它的几种组合的发射与接怍ＭＡＳＯＮ等效电路图，并报道了它的一些实验结果。     

用来激励高频超声换能器的电激励源

讨论了超声换能器的几种激励方法，分析了三种常用激励方法在激励高频超声换能器时的特点及其同局限性，我们雪崩ＭＡＲＸ电路制作的单极窄脉冲能地激励率高达１００ＭＨｚ的换能器并取得了较好的结果。     

A conical air-coupled capacitance transducer for surface imaging

This paper describes the construction and operation of an air-coupled capacitance transducer with a conical backplate. This was designed to produce a focal region over an extended distance along the transducer axis. Measurements were performed to examine both the frequency response of the transducer in pulse-echo mode, and the lateral resolution for imaging purposes. The radiated field was measured and compared to theory, and the extent of the focal region determined. Images of surface topography are presented, to illustrate the range of application of the transducer.     

Simple method for measuring vibration amplitude of high power airborne ultrasonic transducer: Using thermo-couple

Vibration amplitude of transducer’s elements is the influential parameters in the performance of high power airborne ultrasonic transducers to control the optimum vibration without material yielding. The vibration amplitude of elements of provided high power airborne transducer was determined by measuring temperature of the provided high power airborne transducer transducer’s elements. The results showed that simple thermocouples can be used both to measure the vibration amplitude of transducer’s element and an indicator to power transmission to the air. To verify our approach, the power transmission to the air has been investigated by other common method experimentally. The experimental results displayed good agreement with presented approach.     

PZT厚膜及高频超声换能器的研究

近年来,基于PZT厚膜的超声换能器研究受到了广泛的重视。本文综述了PZT厚膜制备技术的发展情况,简要介绍了水下声纳和医用超声领域中PZT厚膜型高频超声换能器的应用研制进展。     

声子晶体结构在功率超声换能器中的应用

该文提出了一种二维声子晶体结构模型,并将该模型应用于横向尺寸较大的功率超声换能器的前盖板中,避免了形成耦合振动对换能器的影响,从而优化了该类换能器的工作性能.首先设计了一种具有近周期性结构的圆柱形孔的前盖板,然后研究了声子晶体结构前盖板散射体的半径大小和高度对换能器共振频率以及前盖板带隙的影响.结果表明,随着散射体半径...     

Review of air-coupled ultrasonic materials characterization

This article presents a review of air-coupled ultrasonics employed in the characterization or nondestructive inspection of industrial materials. Developments in air-coupled transduction and electronics are briefly treated, although the emphasis here is on methods of characterization and inspection, and in overcoming limitations inherent in the use of such a tenuous sound coupling medium as air. The role of Lamb waves in plate characterization is covered, including the use of air-coupled acoustic beams to measure the elastic and/or viscoelastic properties of a material. Air-coupled acoustic detection, when other methods are employed to generate high-amplitude sound beams is also reviewed. Applications to civil engineering, acoustic tomography, and the characterization of both paper and wood are dealt with here. A brief summary of developments in air-coupled acoustic arrays and the application of air-coupled methods in nonlinear ultrasonics complete the review. In particular, the work of Professor Bernard Hosten and his collaborators at Bordeaux is carefully examined.     

Review of the design of power ultrasonic generator for piezoelectric transducer

The power ultrasonic generator (PUG) is the core device of power ultrasonic technology (PUT), and its performance determines the application of this technology in biomedicine, semiconductor, aerospace, and other fields. With the high demand for sensitive and accurate dynamic response in power ultrasonic applications, the design of PUG has become a hot topic in academic and industry. However, the previous reviews cannot be used as a universal technical manual for industrial applications. There are many technical difficulties in establishing a mature production system, which hinder the large-scale application of PUG for piezoelectric transducers. To enhance the performance of the dynamic matching and power control of PUG, the studies in various PUT applications have been reviewed in this article. Initially, the demand design covering the piezoelectric transducer application and parameter requirements for ultrasonic and electrical signals is overall summarized, and these parameter requirements have been recommended as the technical indicators of developing the new PUG. Then the factors affecting the power conversion circuit design are analyzed systematically to realize the foundational performance improvement of PUG. Furthermore, advantages and limitations of key control technologies have been summarized to provide some different ideas on how to realize automatic resonance tracking and adaptive power adjustment, and to optimize the power control and dynamic matching control. Finally, several research directions of PUG in the future have been prospected.     

Study of the sandwiched piezoelectric ultrasonic torsional transducer

The sandwiched piezoelectric ultrasonic torsional transducer was studied. The transducer consists of front and back metal cylinders, and coaxially segmented, tangentially polarized, piezoelectric ceramic tubes. The torsional vibration of the tangentially polarized piezoelectric ceramic slender tube was studied first and its electromechanical equivalent circuit was derived. Based on the network theory and the electromechanical equivalent circuit, the torsional vibration of the piezoelectric ceramic cylinder, formed by stacking a number of identical short piezoelectric ceramic rings, was analysed and the electromechanical equivalent circuit of the piezoelectric ceramic stack in torsional vibration was developed. Finally, the sandwiched ultrasonic torsional transducer was studied and resonance frequency equations were derived which can be used to design and calculate the torsional transducers for different applications.     

Imaging using air-coupled polymer-membrane capacitive ultrasonic arrays

Polymer-membrane capacitive ultrasonic linear and 2-D arrays have been fabricated for use in air-coupled imaging. By using arrays as receivers, there is a possibility of much faster imaging as the need for physically moving the receiver to scan a sample can be replaced by electronic multiplexing. In order to utilise this, a through-thickness air-coupled image of a composite plate has been made using a 2-D array as a receiver and a comparatively large planar source in air. This was made possible by the use of a chirp drive signal and cross-correlation on the measured waveform. Larger 2-D arrays with an increased number of elements have been simulated using a small scanned single receiver, and excellent imaging potential demonstrated. In addition two array receivers have been used in conjunction with two methods of post-processing, SAFT and ellipse crossing, to locate objects accurately.     

一种新型Cymbal换能器的研究

提出并研究了一种新型的Cymbal换能器。与传统的Cymbal换能器相比,该换能器中的压电陶瓷圆盘由一个金属圆环和压电陶瓷圆盘的径向组合体所代替。论文首先探讨了压电陶瓷圆盘和金属圆环组合体的径向振动,用解析方法得出了其径向振动的机电等效电路。在此基础上,得出了新型Cymbal换能器的机电等效电路,并得出了其共振及反共振频率方程。其次,利用数值计算方法,对这种新型的Cymbal换能器的共振频率和振动性能进行了研究。分析了Cymbal换能器的几何尺寸对其共振频率及有效机电耦合系数等参数的影响,探讨了其输入导纳的频率特性。所得结论为此类Cymbal换能器的优化设计及工程应用奠定一定的理论基础。本文提出的新型Cymbal换能器具有较大的几何尺寸、较高的机械强度以及功率容量等优点,可望在较大功率的水声及超声辐射器中获得较为广泛的应用。