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1.
微机电系统(Micro-Electro-Mechanical Systems,MEMS)的力学性能是研究MEMS可靠性的一个重要部分。目前,微结构片外拉伸测试的难点在于如何在实现较高精度的夹持和测试的同时能够较好地控制成本,这是本文着重解决的问题。首先,针对单晶硅各向异性湿法体硅工艺的特点,设计了一种新颖而经济的试样结构,利用力学分析确定其结构尺寸,通过有限元分析验证其合理性;其次,设计了一种简单经济的微结构片外拉伸测试系统;最后,加工出样本并进行准静载拉伸强度测试。结果表明:微梁尺寸增大,拉伸强度降低,同时验证了本装置在微结构拉伸准静载测试中的适用性。  相似文献   

2.
微构件材料力学性能测试方法   总被引:7,自引:0,他引:7  
随着MEMS的商业化进程,微构件材料力学性能的研究成为越来越重要的一个课题。微小试件的制备、安装、夹持、微驱动、高分辨率的载荷和位移测量等技术问题都是对微构件材料力学性能测试的很大挑战,很多传统的测试方法和装置已经不再适用了。近十几年,国内外学者发展了一些微构件材料力学性能的研究方法,来测量微构件的弹性模量、屈服强度、断裂强度、残余应力和疲劳强度等。本文从实验系统的集成度出发,将这些测试方法大致分为片外测试和片上测试两类。本文对单轴拉伸法、纳米压痕法、鼓膜法、微梁弯曲法和衬底曲率法等典型的片外测试方法和一些典型的片上测试方法进行了介绍,并比较了各自的优缺点。  相似文献   

3.
形状记忆合金(Shape Memory Alloys, SMAs)因其具有形状记忆效应和超弹性,在航空航天、生物医疗、微机电系统领域中得到了广泛的应用.当微结构尺度达到微纳米,表面效应对微结构力学性能的影响是十分显著的.本文基于梁弯曲变形理论以及Gurtin-Murdoch表面弹性理论,考虑拉压不对称、温度对于SMA纳米梁的影响,建立了考虑表面效应的SMA纳米梁相变力学模型.分析了弯曲载荷、温度、表面残余应力以及表面弹性模量对SMA纳米梁力学性能的影响规律.研究表明在SMA纳米梁相变阶段,忽略和考虑表面效应所得的截面应力及应变相对误差较为明显;在相同弯矩下,随温度的增加SMA纳米梁的截面应力随之增加,并且表面效应对其影响有减小趋势;表面残余应力对SMA纳米梁的影响显著.该文研究结果为SMA纳米梁在微机电领域的设计以及应用提供了一定基础与依据.  相似文献   

4.
MEMS材料力学性能的测试技术   总被引:30,自引:0,他引:30  
微电子机械系统(MEMS)技术的迅速崛起,推动了所用材料微尺度力学性能测试技术的发展.首先按作用方式将实验分成压痕/划痕、弯曲、拉伸、扭转四大类,系统介绍检测MEMS材料微尺度力学性能的微型试样、测试方法及其实验结果.测试材料主要有硅、氧化硅、氮化硅和一些金属.实验结果主要包括基本的力学性能参数如弹性模量、残余应力、屈服强度、断裂强度和疲劳强度等.最后,简要分析了未来的发展需求.   相似文献   

5.
1.引言在结构构件或机器部件中,当几何形状突变时,如孔、洞或槽口,突变处将发生应力集中(应力跃升),在矫形外科手术中,常把螺孔或其他形式的几何突变引入骨中,应力集中用理论上的应力集中系数,即最大应力与名义应力之比来表示,它可由经典弹性理论算出,众所周知,对某些材料的视在疲劳强度和断裂强变起作用的是应变梯度,在弯曲疲劳试验中,试样或晶粒尺寸越小,即通过试样的应变梯度越大,疲劳极限或疲劳强度就越高,同样   相似文献   

6.
SHPB冲击加载下四种岩石的复合型动态断裂实验研究   总被引:1,自引:0,他引:1  
分别用绿砂岩、黄砂岩、灰砂岩、大理岩制作了三种几何相似的(φ80mm、φ122mm、φ155mm)中心直裂纹平台巴西圆盘(CSTFBD)试样;利用分离式霍普金森压杆加载,进行了I型和I-II型复合动态断裂实验,并由实验结合有限元分析得到了四种岩石材料的I、II型动态断裂韧度KId、KIId。研究表明:动态断裂韧度均存在尺寸效应,试样尺寸对I-II型复合比和纯II型加载角均会产生影响,复合比随尺寸的增大而减小,大尺寸试样II型加载的加载角比小尺寸试样的小。同时,由于负值的T应力显著减小了裂纹的起裂角,用广义最大拉应力准则预测的起裂角更符合实验结果。  相似文献   

7.
小冲杆试验(Small Punch Test,SPT)技术是一种新型微试样试验技术,通过极少量材料就能得到材料的许多力学性能。本文以压力容器常用钢材Q345R为研究对象,通过ABAQUS有限元软件模拟小冲杆试验过程,得到了小冲杆试样最先失效单元的应力三轴度;然后根据ASME防止局部失效的应变限制准则中求解多轴应变极限的方法,对小冲杆试验的等效断裂应变进行了研究。研究结果表明:基于ASME应变限制准则的等效断裂应变具有较大的保守性,作者所提出的修正应变限制准则参数的方法是可行的。此外,小冲杆试样的尺寸效应对等效断裂应变也有重要影响,使得计算的等效断裂应变比有限元模拟的应变值小。  相似文献   

8.
采用基于黏聚裂纹模型的扩展有限元方法,开展了镁铝合金结构冲击破坏过程的数值模拟研究。通过镁铝合金三点弯曲试样冲击实验,获得了不同子弹撞击速度下试样的冲击破坏模式。在此基础上,建立了实验结构的扩展有限元模型,并采用最大主应力准则,以及含损伤型的本构关系模拟材料的冲击断裂行为。对于裂纹尖端附近区域,采用黏聚裂纹模型模拟裂纹的断裂过程。对子弹速度分别为12.2、15.1、26.3 m/s的3种工况下镁铝合金试样的动态破坏过程进行了数值模拟研究,获得了与实验相一致的断裂模式。计算结果表明,试样以Ⅰ型断裂模式为主,裂纹沿初始预制裂纹方向扩展。当裂纹扩展到一定程度后,在试样韧带区域被撞击端附近,由于应力波及边界效应导致该区域处于复杂应力状态,试样出现复合型断裂模式,裂纹偏离原扩展路径,与本文实验结果相吻合。  相似文献   

9.
使用国际岩石力学协会规定的半圆盘岩石试件,加工不同倾角的直裂纹试样,通过三点弯曲加载试验得到不同I-II复合比断裂的断裂韧性和初始断裂角.传统裂纹扩展准则忽视了常数项即T应力及更高阶项的影响,导致该扩展准则的理论预测结果存在较大缺陷,本文通过考虑常数项,建立广义最大周向应力准则(GMTS).在此基础上,分别采用传统的裂纹扩展准则和考虑T应力的裂纹扩展准则预测不同复合比裂纹的断裂韧性和初始扩展角,然后对比理论预测结果和实验结果.分析可得:常数项即T应力对断裂的临界应力强度因子和初始断裂角的影响是不可忽略的,且II型断裂占比较大时影响更大,广义最大周向应力准则预测值与实验测试结果之间的误差最小.  相似文献   

10.
张双寅  王俊表 《实验力学》1992,7(4):308-316
本文对反应烧结氦化硅 Si_3N_4陶瓷的断裂韧性进行实验研究,用三种不同试件进行了测试,这三种试件是:山形切口双悬臂粱试件,山形切口三点弯曲梁试件和直穿透切口三点弯曲梁试件.用有限元方法分析了直穿透切口三点弯曲梁切口宽度对应力强度因子的影响,结合断裂载荷测定值估算了材料的断裂韧性值,指出直切口无预制裂纹试件的测定值必须用有限元法进行修正才能得到正确结果.  相似文献   

11.
The oscillation property (OP) is a fundamental and important qualitative property for the vibrations of single span one-dimensional continuums such as strings, bars, torsion bars, and Euler beams. Any properly discretized continuum model should keep the OP. In literatures, the OP of discrete beam models is discussed essentially by means of matrix factorization. The discussion is model-specific and boundary-condition- specific. Besides, matrix factorization is difficult in handling finite element (FE) models of beams. In this paper, according to a sufficient condition for the OP, a new approach to discuss the property is proposed. The local criteria on discrete displacements rather than global matrix factorizations are given to verify the OP. Based on the proposed approach, known results such as the OP for the 2-node FE beams via the Heilinger- Reissener principle (HR-FE beams) as well as the 5-point finite difference (FD) beams are verified. New results on the OP for the 2-node PE-FE beams and the FE Timoshenko beams with small slenderness are given. Through a simple manipulation, the qualitative property of discrete multibearing beams can also be discussed by the proposed approach.  相似文献   

12.
The interfacial stresses in fiber reinforced plastic (FRP)–reinforced concrete (RC) hybrid beams were studied by the finite element method. The mesh sensitivity test shows that the finite element results for interfacial stresses are not sensitive to the finite element mesh. The finite element analysis then is used to calculate the interfacial stress distribution and evaluate the effect of the structural parameters on the interfacial behavior. It is shown that both the normal and shear stresses at the interface are influenced by the material and geometry parameters of the composite beam. This research is helpful for the understanding on mechanical behavior of the interface and design of the FRP–RC hybrid structures.  相似文献   

13.
刘洋  石启印  高云  李爱群 《实验力学》2008,23(4):353-359
为了研究新型外包钢-砼T形截面组合梁在纯扭作用下的变形性能,设计了5根不同配箍率的的足尺悬臂组合梁。通过对5根悬臂梁的抗扭性能的实验研究,得到了组合梁的扭矩-扭率关系曲线。利用有限元分析软件ANSYS,对组合梁的抗扭性能进行了非线性有限元分析,得到了混凝土与外包钢在极限阶段的应力云图。根据实验以及有限元结果分析了组合梁在整个加载过程中扭转刚度的变化。基于现行砼结构设计规范,提出了组合梁从开裂到极限阶段抗扭刚度的计算公式,可供组合梁受扭设计参考。把有限元模型和公式的计算结果与实验结果进行比较,三者吻合较好。  相似文献   

14.
Bending an elastic beam leads to a complicated 3D stress distribution, but the shear and transverse stresses are so small in a slender beam that a good approximation is obtained by assuming purely uniaxial stress. In this paper, we demonstrate that the same is true for a saturated poroelastic beam. Previous studies of poroelastic beams have shown that, to satisfy the Beltrami–Michell compatibility conditions, it is necessary to introduce either a normal transverse stress or shear stresses in addition to the bending stress. The problem is further complicated if lateral diffusion is permitted. In this study, a fully coupled finite element analysis (FEA) incorporating the lateral diffusion effect is presented. Results predicted by the “exact” numerical solution, including load relaxation, pore pressure, stresses and strains, are compared to an approximate analytical solution that incorporates the assumptions of simple beam theory. The applicability of the approximate beam-bending solution is investigated by comparing it to FEA simulations of beams with various aspect ratios. For “beams” with large width-to-height ratios, the Poisson effect causes vertical deflections that cannot be neglected. It is suggested that a theory of plate bending is needed in the case of poroelastic media with large width-to-height ratios. Nevertheless, use of the approximate solution yields very small errors over the range of width-to-height ratios (viz., 1–4) explored with FEA.  相似文献   

15.
This paper presents a feasibility study for practical applications of an impedance-based real-time health monitoring technique applying PZT (Lead–Zirconate–Titanate) patches to concrete structures. First, comparison between experimental and analytical studies for damage detection on a plain concrete beam is made. In the experimental study, progressive surface damage inflicted artificially on the plain concrete beam is assessed by using both lateral and thickness modes of the PZT patches. Then, an analytical study based on finite element (FE) models is carried out to verify the validity of the experimental result. Secondly, multiple (shear and flexural) cracks incurred in a reinforced concrete (RC) beam under a third point bending test are monitored continuously by using a sensor array system composed of the PZT patches. In this study, a root mean square deviation (RMSD) in the impedance signatures of the PZT patches is used as a damage indicator.  相似文献   

16.
A novel size-dependent model is developed herein to study the bending behavior of beam-type micro/nano-structures considering combined effects of nonlocality and micro-rotational degrees of freedom. To accomplish this aim, the micropolar theory is combined with the nonlocal elasticity. To consider the nonlocality, both integral(original)and differential formulations of Eringen's nonlocal theory are considered. The beams are considered to be Timoshenko-type, and the governing equations are derived in the variational form through Hamilton's principle. The relations are written in an appropriate matrix-vector representation that can be readily utilized in numerical approaches. A finite element(FE) approach is also proposed for the solution procedure. Parametric studies are conducted to show the simultaneous nonlocal and micropolar effects on the bending response of small-scale beams under different boundary conditions.  相似文献   

17.
给出了一个对复合材料压电层合梁进行数值分析的高精度压电层合梁单元。基于Shi三阶剪切变形板理论的位移场和Layer-wise理论的电势场,用力-电耦合的变分原理及Hamilton原理推导了压电层合梁单元列式。采用拟协调元方法推导了一个可显式给出单元刚度矩阵的两节点压电层合梁单元,并应用于压电层合梁的力-电耦合弯曲和自由振动分析。计算结果表明,该梁单元给出的梁挠度和固有频率与解析解吻合良好,并优于其它梁单元的计算结果,说明了本文所给压电层合梁单元的可靠性和准确性。研究结果可为力-电耦合作用下压电层合梁的力学分析提供一个简单、精确且高效的压电层合梁单元。  相似文献   

18.
This paper was devoted to the three-dimensional nonlinear finite element analysis of inflatable beams. The beams under consideration are made of modern textile materials and can be used as a load-bearing beams or arches when inflated. A 3D Timoshenko beam with a homogeneous orthotropic woven fabric (OWF) was proposed. The model took into account the geometric nonlinearities and the follower force resulting from the inflation pressure. The use was made of the usual total Lagrangian form of the virtual work principle to perform the nonlinear equilibrium equations which were discretized by the finite element method. Two kinds of solutions were then investigated: finite elements solutions for linearized problems which were obtained by the means of the linearization around the prestressed reference configuration of the nonlinear equations and nonlinear finite element solutions which were performed by the use of an optimization algorithm based on the Quasi-Newton method. As an example, the bending problem of a cantilever inflated beam under concentrated load was considered and the deflection results improve the existing theoretical models. As these beams are made from fabric, the beam models were validated through their comparison with a 3D thin-shell finite element model. The influence of the material effective properties and the inflation pressure on the beam response was also investigated through a parametric study. The finite elements solutions for linearized problems were found to be close to the theoretical results existing in the literature. On the other hand, the results for the nonlinear finite element model were shown to be close to the results for the linearized finite elements model in the case of high mechanical properties and the nonlinear finite element model was used to improve the linearized model when the mechanical properties of the fabric are low.  相似文献   

19.
An analytical model is developed to classify the impulsive response of sandwich beams based on the relative time-scales of core compression and the bending/stretching response of the sandwich beam. It is shown that an overlap in time scales leads to a coupled response and to the possibility of an enhanced shock resistance. Four regimes of behaviour are defined: decoupled responses with the sandwich core densifying partially or completely, and coupled responses with partial or full core densification. These regimes are marked on maps with axes chosen from the sandwich beam transverse core strength, the sandwich beam aspect ratio and the level of blast impulse. In addition to predicting the time-scales involved in the response of the sandwich beam, the analytical model is used to estimate the back face deflection, the degree of core compression and the magnitude of the support reactions. The predictions of the analytical model are compared with finite element (FE) simulations of impulsively loaded sandwich beams comprising an anisotropic foam core and elastic, ideally plastic face-sheets. The analytical and numerical predictions are in good agreement up to the end of core compression. However, the analytical model under-predicts the peak back face deflection and over-predicts the support reactions, especially for sandwich beams with high strength cores. The FE calculations are employed to construct design charts to select the optimum transverse core strength that either minimises the back face deflections or support reactions for a given sandwich beam aspect ratio or blast impulse. Typically, the value of the transverse core strength that minimises the back face deflection also minimises the support reactions. However, the optimal core strength depends on the level of blast impulse, with higher strength cores required for greater blasts.  相似文献   

20.
Test method for measuring strength of a curved sandwich beam   总被引:1,自引:0,他引:1  
A fixture for testing curved sandwich beams in flexure was designed and evaluated. The test specimen is a continuous sandwich beam consisting of a central circular 90° region connected by two straight legs. The fixture was designed according to the four-point flexure principle to produce a pure bending moment in the curved region. The validity of the test fixture in producing the desired loading was examined by fitting a curved aluminum bar of similar bending stiffness as the sandwich beams considered. Strain gage readings were successfully compared to predictions from curved homogeneous beam theory. In addition, the deflection of the beam at the loading points was analyzed using straight and curved beam theory for the various sections of the beam, and predictions were compared to measured load-displacement response. Good agreement was achieved between experimental and analytical results lending confidence to the test principle. Curved sandwich beams consisting of glass/polyester face sheets over a PVC foam core were tested to failure and the loading response of the beams and their failure behavior are discussed. It was found that the beams failed at the upper face/core interface due to radial tension stress.  相似文献   

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