High-sensitivity fiber-tip pressure sensor with graphene diaphragm

A miniature fiber-tip pressure sensor was built by using an extremely thin graphene film as the diaphragm. The graphene also acts as a light reflector, which, in conjunction with the reflection at the fiber end-air interface, forms a low finesse Fabry-Perot interferometer. The graphene based sensor demonstrated pressure sensitivity over 39.4 nm/kPa with a diaphragm diameter of 25 μm. The use of graphene as diaphragm material would allow highly sensitive and compact fiber-tip sensors.     

Integrated Optic Pressure Sensor Using Intermodal Interference between Two Mutual Orthogonal Guided-Modes

We theoretically and experimentally investigated fundamental characteristics of an integrated optic pressure sensor using intermodal interference between the lowest-order TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide along an edge of the diaphragm. Its operation is based on a difference of phase retardations produced in the two guided modes through the photoelastic effect. The sensor was fabricated by bonding two glass substrates together: a Corning 0211 glass 300 μMm thick to form a waveguide and a thick substrate with a 10 mm × 10 mm square hole to define the diaphragm. The fabricated sensor was successfully tested using a He-Ne laser at 633 nm. The halfwave pressure was measured to be 77 kPa which is almost double the theoretical estimate.     

基于平面膜片的光纤光栅传感研究

提出了一种基于平面膜片的光纤光栅压强传感器.讨论了该传感器反射谱展宽、峰值波长变化与压强之间的关系.指出将光纤光栅沿径向粘贴在膜片中心附近时,反射谱的峰值波长与压强之间具有良好的线性关系,可以通过检测峰值波长来检测压强.该传感器的压强响应灵敏度系数的实验值为0.3964 nm/MPa,是裸光纤光栅压强灵敏度系数的132.1倍.该传感器的灵敏度系数与压强测量范围可以通过改变膜片的尺寸、材料的弹性模量、泊松比等参量来调节.     

光纤光栅压力传感器的理论建模及实验研究

鉴于压力传感器为工业生产中压力监控的一种必不可少的设备,分析了光纤光栅中心波长与光纤光栅应变之间的关系,阐述了带有硬中心的圆形膜片受到均匀压之后,膜片中心的挠度与压力之间的数学关系。在此基础上设计了圆形膜片作为流体压力转化光纤光栅敏感物理量的元件,并结合辅助元件完成对光纤光栅传感器组装,建立了传感器输入输出之间的线性数学模型。通过实验验证传感器线性度和重复性,运用数学计算得出了光纤光栅压力传感器各项参数,灵敏度Km=-0.658 nm/MPa,初始波长0=1 578.441 nm,为后期传感器稳定性作好了铺垫。     

High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm

We present a fiber-optic extrinsic Fabry-Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0-50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.     

All-fiber high-sensitivity pressure sensor with SiO2 diaphragm

The design and fabrication of a miniature fiber Fabry-Perot pressure sensor with a diameter of 125 microm are presented. The essential element in the process is a thin SiO2 diaphragm that is fusion spliced at the hollow end of an optical fiber. Good repeatability and high sensitivity of the sensor are achieved by on-line tuning of the diaphragm thickness during the sensor fabrication process. Various sensor prototypes were fabricated, demonstrating pressure ranges of from 0 to 40 kPa to 0 to 1 MPa. The maximum achieved sensitivity was 1.1 rad/40 kPa at 1550 nm, and a pressure resolution of 300 Pa was demonstrated in practice. The presented design and fabrication technique offers a means of simple and low-cost disposable pressure sensor production.     

Modeling of an air-backed diaphragm in dynamic pressure sensors: Effects of the air cavity

As the key structure of most dynamic pressure sensors, a diaphragm backed by an air cavity plays a critical role in the determination of sensor performance metrics. In this paper, we investigate the influence of air cavity length on the sensitivity and bandwidth. A continuum mechanics model neglecting the air viscous effect is first developed to capture the structural–acoustic coupling between a clamped circular diaphragm and a cylindrical backing air cavity. To facilitate sensor design, close-form approximations are obtained to calculate the static sensitivity and the fundamental natural frequency of the air-backed diaphragm. Parametric studies based on this analytical model show that the air cavity can change both the effective mass and the effective stiffness of the diaphragm. One new finding is that the natural frequency of the air-backed diaphragm behaves differently in three different cavity length ranges. In particular, due to the mass effect of the air cavity being dominant, it is shown for the first time that the natural frequency decreases when the cavity length decreases below a critical value in the short cavity range. Furthermore, a finite element method (FEM) model is developed to validate the continuum mechanics model and to study the damping effect of the air cavity. These results provide important design guidelines for dynamic pressure sensors with air-backed diaphragms.     

平面圆形膜片式光纤布拉格光栅温度补偿压强传感

报道了利用光纤布拉格光栅反射波谱带宽展宽技术实现温度补偿的压强传感新方案。结合平面圆形膜片应变调谐的特点,采用膜盒式结构,将光纤光栅中心对准平面圆形膜片零应变半径并沿径向粘贴,利用反射波谱带宽对应变敏感而对温度不敏感的特性解调压强,成功地实现了温度补偿的压强传感测量。基于光谱分析仪0.05nm的光谱分辨力,实验测得带宽随压强响应灵敏度为0.34nm/MPa,压强精度为±0.15MPa,压强测量范围为0~7.5MPa。实验结果与理论分析基本一致。     

非本征F-P局部放电光纤传感器设计及灵敏度分析

为解决超声波法检测电力设备局部放电灵敏度低问题,提出一种采用石英膜片的全电介质结构的光纤法 珀超声传感器设计方法。为获得适于局放检测频响特性的法 珀传感器,根据弹性力学原理分析法 珀传感器固有频率随膜片尺寸参数变化规律,利用ANSYS有限元仿真方法设计3种不同结构尺寸的法 珀传感器。在绝缘油箱中采用信号发生器驱动压电陶瓷传感器发射50 kHz~250 kHz超声波,获得F P传感器的幅频特性曲线。F P1~F P3对板 板电极局放声信号检测实验表明,设计传感器一阶固有频率在150 kHz处可有效检测局放,且相同固有频率下F P传感器灵敏度随膜片厚度减小而显著提高。相同结构参数下腔长为130 m和100 m的F P传感器检测灵敏度前者是后者的2.47倍,实验结果表明增加F P腔长可提高传感器局放检测灵敏度。     

一种高冲击MEMS加速度传感器的仿真与优化

基于高冲击MEMS加速度传感器的冲击灵敏度、频率响应与敏感芯片的结构尺寸存在相互制约关系,提出在满足传感器结构强度和固有频率条件下,提高传感器冲击灵敏度的理论分析、仿真模拟与实验验证的方法。运用ANSYS软件对敏感芯片的弹性膜片厚度与中心岛厚度进行多次设计与仿真,通过多组仿真数据对传感器的结构尺寸进行优化。高冲击实验验证表明,优化的传感器结构尺寸、性能指标能够满足设计要求,冲击灵敏度较高。     

温度补偿式光纤光栅土压力传感器

针对现有土压力传感器无法实现长期、实时监测的要求,设计了温度补偿式光纤光栅土压力传感器。选用有硬中心的平膜片作弹性元件,选用灵敏度高、体积小、质量轻、易于波分复用和组成传感网络的光纤光栅作敏感元件;同时采用了不受力光栅法进行了温度补偿。经实验测试,该传感器的灵敏度为1.5 nm/M Pa;线性度误差为0.35%;重复性为0.06%;迟滞为2.19%;静态误差为2.21%;这些指标能够满足实际工程应用要求。     

FBG传感器在空腔爆炸压力测量中的应用研究

光纤光栅(FBG)传感器具有灵敏度高，测量量程大，抗电磁干扰能力强，耐高温能力强等诸多优点，在爆炸冲击测试领域具有广泛的应用前景。针对空腔爆炸压力变化历程对压力传感器的性能要求，设计了一种抗冲击FBG压力传感器。传感器采用圆平膜片作为承压面，利用均匀压力作用下的挠度拉伸FBG产生位移。对传感器的力学模型进行了理论计算，并进行了有限元仿真，理论分析与数值模拟计算结果误差小于2%。使用标准压力源对传感器进行了标定，获得最终的压力灵敏度为545.187 kPa/nm，线性度相关度为99.998%。根据空腔爆炸现场防护需求，设计了有效的抗爆防护装置，并将该传感器成功用于空腔爆炸爆后气体压力变化历程测量，取得很好的测试效果。     

Optical fiber sensor-based detection of partial discharges in power transformers

In this paper, a fiber optic acoustic sensor system is designed and tested for on-line detection of the partial discharges inside high voltage power transformers. The fiber optic sensor uses a silica diaphragm and a single mode optical fiber encapsulated in a silica glass tube to form an extrinsic Fabry–Perot interferometer. Test results indicate that the developed fiber optic sensors are capable of detecting the acoustic signals propagating inside the transformer oil with high resolution and high frequency.     

Miniature all-silica fiber optic pressure and acoustic sensors

We present a miniature diaphragm-based Fabry-Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only approximately 0.32 mm in diameter. By choosing different diaphragm thicknesses and effective diameters, we obtain a sensor measurement range from 5 to 10,000 psi (1 psi = 51.72 Torr) and a frequency response up to 2 MHz. In addition, the sensor's F-P cavity can be set from micrometers to millimeters with a precision of several nanometers. With the all-silica structure, the sensor is reliable, biocompatible, and immune to electromagnetic interference and has high-temperature sensing capability.     

Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes

In this paper, a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing over the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the position of the waveguide over the diaphragm. To experimentally investigate such dependence, we fabricated a sensor with a 1.2 mm 2 10 mm 2 20 w m diaphragm, over which waveguides were placed at 50 w m intervals. The measured phase sensitivity was 98 mrad/kPa for the waveguide nearest to the diaphragm edge. The measurement was also carried out for the other waveguides. As theoretically expected, the largest sensitivity was obtained for the waveguide nearest to the edge.     

Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes

In this paper, a silicon-based integrated optic pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing over the diaphragm. Its sensitivity is theoretically known to be strongly dependent on the position of the waveguide over the diaphragm. To experimentally investigate such dependence, we fabricated a sensor with a 1.2 mm ×10 mm ×20 μm diaphragm, over which waveguides were placed at 50 μm intervals. The measured phase sensitivity was 98 mrad/kPa for the waveguide nearest to the diaphragm edge. The measurement was also carried out for the other waveguides. As theoretically expected, the largest sensitivity was obtained for the waveguide nearest to the edge.     

Lead zirconate titanate cantilever for noncontact atomic force microscopy

Noncontact atomic force microscopy with frequency modulation detection is a promising technique for surface observation with true atomic resolution. The piezoelectric material itself can be an actuator and sensor of the oscillating probe simultaneously, without the need for additional electro-mechanical transducers or other measurement systems. A vertical resolution of 0.01 nm rms has been achieved using a microfabricated cantilever with lead zirconate titanate thin film in noncontact mode frequency modulation detection. The cantilever also has a sharpened pyramidal stylus with a radius of about 10 nm for noncontact atomic force microscopy.     

小孔阵列式太阳敏感器的光学系统设计

微型数字式太阳敏感器光学系统由APS CMOS图像传感器和基于MEMS工艺的小孔阵列式光线引入器组成。图像传感器的分辨率为1024×1024pixel,像素尺寸为10μm×10μm;光线引入器具有微小孔阵列结构,小孔为方形孔,30×30阵列,尺寸为60μm×60μm,间距为250μm。光线引入器采用了MEMS工艺的掩模板制备工艺。针对所设计的光学系统计算了曝光时间,并在此基础上进行了地面成像实验。实验结果表明,光学系统设计合理,保证了敏感器所具有的高精度和大视场。     

Dynamic response of sensor diaphragm with residual stress in contact with liquids

The dynamic response of a sensor diaphragm with residual stress in contact with a liquid is theoretically investigated in this paper. The liquid is assumed to be incompressible and inviscid. The acoustic radiation as the main source of energy dissipation in a medium virtually added the mass of the diaphragm and decreased the quality factor of the diaphragm. The effects of the residual stress on the added virtual mass and the quality factor of the diaphragm are presented. Finally, forced oscillations of the sensor diaphragm with residual stress in contact with a liquid are investigated. It is found that the requirements of high sensitivity and large vibration displacement are contradictory. The analysis and results are valuable for conducting the design of circular sensor diaphragms for biological applications.     

Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.