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Dai CA Dair BJ Dai KH Ober CK Kramer EJ Hui CY Jelinski LW 《Physical review letters》1995,74(14):2837
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The experimental results indicate that the composition of our samples is homogeneous. We have explained the reason why the composition of the BCN film is influenced by the r.f. power. The Fourier transformed infrared (FTIR) and X-ray photoelectron spectroscopy (XPS) measurements suggest that the samples are atomic-level hybrids of B, C and N. 相似文献