基于时域小波变换相位提取的三维形貌测量

提出基于时域小波变换的连续振动物体相位提取方法,恢复连续振动物体的瞬时三维形貌。将小波变换用于序列影栅云纹相位分析中,对连续振动物体的序列影栅图像进行处理,利用小波变换的多分辨力特点,对各点的灰度变化进行连续复小波变换,通过提取小波脊所对应的相位,得到各点相对于基准光栅的完整相位调制信息,从而获取运动物体的瞬时三维形貌。利用该方法对连续振动悬臂梁进行了分析,得到连续振动悬臂梁的瞬时速度及瞬时三维形貌,再现了悬臂梁的连续振动过程。为研究动态物体瞬时特性提供了一种新的方法。     

单幅条纹图相位解调的小波分析方法

相位解调是条纹相位分析的关键问题.本文提出一种应用小波频率估计联合频率导数对变形条纹进行瞬时频率分析,从中提取参考基频,从而依靠单一变形条纹实现相位解调的方法.首先,理论上证明了当变形条纹瞬时频率空间导数等于零,该空间点的瞬时频率等于参考基频频率;其次,引入Gabor小波提取变形条纹的瞬时频率空间分布,利用变形条纹瞬时频率的空间导数分布识别提取参考基频,从而实现相位解调.利用该方法进行了三维形貌测量的实验,结果表明该方法在实现相位解调中效果良好.     

单幅条纹图相位解调的小波分析方法

相位解调是条纹相位分析的关键问题.本文提出一种应用小波频率估计联合频率导数对变形条纹进行瞬时频率分析,从中提取参考基频,从而依靠单一变形条纹实现相位解调的方法.首先,理论上证明了当变形条纹瞬时频率空间导数等于零,该空间点的瞬时频率等于参考基频频率;其次,引入Gabor小波提取变形条纹的瞬时频率空间分布,利用变形条纹瞬时频率的空间导数分布识别提取参考基频,从而实现相位解调.利用该方法进行了三维形貌测量的实验,结果表明该方法在实现相位解调中效果良好.     

利用双频外差和时空相位展开实现三维测量

为了使用高频条纹实现对物体三维形貌高精度快速测量,提出了一种利用双频外差和时空相位展开实现三维测量的方法。该方法仅投影两套高频条纹图片,利用双频外差方法计算出一个频率较低的截断相位分布,经空间相位展开得到其对应的连续相位,用于指导高频条纹截断相位展开,获得三维重建需要的绝对相位分布。该方法对双频外差后的低频截断相位上进行空间相位展开,降低了空间相位展开难度,增加了双频条纹投影三维测量的适用范围。实验结果表明该方法的STD误差为0.06 mm。该方法利用两套高频正弦条纹、不增加投影第三个频率条纹图的情况下,实现了高精度快速三维形貌测量。     

单幅彩色条纹投影的不连续物体表面三维形貌测量

提出了基于单幅彩色条纹投影的不连续物体及动态三维形貌的测量方法。该方法利用计算机产生一幅正弦条纹图和两幅单一强度图分别通过红蓝绿三个通道合成为一幅彩色条纹图,由液晶投影仪投影到被测物体表面,彩色CCD采集变形条纹图并保存在计算机中。通过三色分离,同时获得正弦条纹图和反映表面反射率分布及背景信息图,通过图像除法运算及亚像素精度归一化处理实现物体三维形貌的恢复。对于表面形貌不连续的物体,利用蓝色分量的灰度图像进行二值化处理定位阴影或暗背景,从而引导正确的相位求解。实验验证了该方法对不连续物体动态测量方面的可行性。     

一种基于结构光条纹投影的微小物体测量系统

为了通过结构光投影的方法测量微小物体,构建了一套微小物体三维形貌测量系统,视场范围可达1.8 cm×1.6 cm。这套测量系统利用了Light Crafter 4500数字投影组件的高速投影、立体显微镜的低畸变缩放、远心镜头的大景深与低畸变成像的特性。先利用立体显微镜对Light Crafter 4500投影的相移条纹图进行低畸变缩小,再投影到待测物体表面,采用配有远心镜头的相机同步记录受到物体表面形貌调制而发生形变的条纹,利用三步相移法计算出条纹对应的截断相位图,再根据可靠路径跟踪相位展开算法求取连续的相位分布,重建被测物体的三维表面形貌。实验成功重建了以BGA芯片为代表的微小物体表面三维形貌。实验结果表明,系统测量精度达到11 μm,系统的有效深度测量范围为700 μm。     

基于四步相移光栅投影的三维形貌测量系统

为了实现对具有明显跳变面物体的轮廓测量,建立了四步相移光栅投影的三维形貌测量系统,并对所采用的四步相移测量算法进行研究。在介绍四步相移原理的基础上以有明显跳变面的三棱锥橡皮块为例,建立针对明显跳变面的测量算法。通过对4幅相移图算术求和并除以4得到平均灰度图;将平均灰度图二值化处理定位明显跳变面或阴影部分;将二值化图像与包裹相位图卷积,而后对包裹相位图进行解包裹,从而得到正确的连续相位,最终获取物体三维形貌。根据上述算法测量三棱锥的三维形貌并计算其体积,测量实验表明:被测物的体积平均相对精度为0.47%。     

高精度动态白光干涉测量方法

白光干涉测量技术具有精度高和非接触式测量的优点,是超精密加工领域中的一项重要测量手段。针对白光干涉测量技术容易受环境振动影响的问题,提出了一种动态垂直扫描干涉测量方法(DVSI)。该方法将白光干涉光路分为两个成像通道,得到与白光干涉图同步移相的准单色光干涉图。通过相位-倾斜迭代方法(PTI)对准单色光干涉图进行处理得到实际的移相扫描位置,对白光干涉信号进行相干峰位置的定位,并计算出粗糙的形貌分布,之后利用局部最小二乘方法(LLS)计算出精细的相位分布,将粗糙形貌以及精细相位相结合来复原出待测件的三维形貌。本研究通过数值仿真和实验对比对该方法进行了验证,结果表明本方法具有较好的抗振性能。     

基于并行小波变换的快速三维面形测量技术

为了提高小波变换三维面形测量技术中相位信息的解调速度,依据不同的并行计算原理,提出两种基于并行一维连续小波变换的光学条纹图快速解调方法。利用多核CPU运算平台进行了计算机模拟和实验,结果表明并行一维连续小波变换光学条纹图相位解调方法相比于串行一维连续小波变换光学条纹图相位解调方法,在精度不变的同时计算速度显著提高:对850pixel×1000pixel大小实测条纹图像解调速度提高了7.5倍。并行一维连续小波变换相位解调方法为小波变换三维面形测量技术在实时/瞬态过程三维面形测量中的应用奠定了基础。     

基于平面估计的三维测量相位展开新方法

工业自动化生产中微米级的三维测量大多采用相位测量轮廓术,但其中现有的包裹相位展开方法容易受图像噪声和相位突变的干扰;在电路板贴片安装的锡膏三维测量中,利用电路板的平面区域包裹相位信息进行平面估计,然后全局相位展开向拟合平面靠拢,根据统计信息确定参数,得到连续相位;利用展开后的相位再进行电路板平面的二次曲面拟合,提高基平面的拟合精度和相对高度;对比实验证明了该方法的鲁棒性和快速性,处理时间短,不受噪声、相位突变、阴影等干扰。     

Three dimensional shape measurement using high-order instantaneous moments based fringe projection method

Fringe projection techniques are popular tools for three-dimensional shape measurement in optical metrology. In these techniques, the information about the shape or the surface profile of an object is usually encoded in the phase of a recorded fringe pattern. The paper presents a high-order instantaneous moments based method for phase estimation in fringe projection. The method employs a piecewise polynomial phase approximation approach and uses high-order instantaneous moments to determine the polynomial phase coefficients to estimate the phase. The method's working is demonstrated using simulation examples and its practical applicability is validated through a shape measurement experiment.     

Evaluation of absolute phase for 3D profile measurement using fringe projection

A new method of absolute phase evaluation for three-dimensional (3D) profile measurement using fringe projection is presented, which combines the gray code and the phase shift technique. Two kinds of fringe patterns are projected onto the object surface respectively, one is sinusoidal intensity distribution used for phase demodulation and the other is gray code fringe pattern for unwrapping. These images are acquired by camera and stored into computer. The absolute phase is obtained by analyzing these images. The validity of this method is verified experimentally. The method is superior to other phase unwrapping methods.     

Surface profile measurement of low-frequency vibrating objects using temporal analysis of fringe pattern

A simple and accurate algorithm (phase scanning method) is proposed for 3D surface contouring and dynamic response determination of a vibrating object. A sinusoidal fringe pattern is projected onto a low-frequency vibrating object by a programmable liquid crystal display projector. The fringe patterns are captured by a high-speed CCD camera with a telecentric gauging lens. Phase values are evaluated point by point using phase scanning method. From the phase values of each point on the object, the contour of the specimen at different instants of vibration can be retrieved. In this paper, a small vibrating coin is used to demonstrate the validity of the method and the experimental results are compared with test results on a stationary coin using four-step phase shifting and fast Fourier transform methods. The technique is especially useful in applications where the vibrating object has a complicated shape.     

Three-dimensional profile measurement of the blade based on multi-value coding

As the blade must have precise size and accurate shape, three-dimensional (3D) profile measurement of the blade is very important. 3D profile measurement method based on multi-value coding is proposed. This method designs a multi-value coding stripe pattern combined with the four-step phase-shifting method. Two kinds of fringe patterns are projected onto the object respectively, one is sinusoidal intensity distribution used for wrapped phase, the other is multi-value coding fringe pattern for phase unwrapping. Because this encoding method is simple, and easy to implement, the absolute phase can be quickly implemented. Experimental results demonstrated that the proposed method can achieve a high precision, high speed and low cost 3D profile measurement of the blade.     

Measurement of shock waves using phase shifting pulsed holographic interferometer

A phase shifting pulsed holographic interferometer was applied to the experimental study of the propagation of laser-induced shock waves over metal plates. A double-pulsed ruby laser was used to generate the shock waves and to make a holographic interferogram of the wave fields. The phase shifting method with a dual-reference beam solved the sign ambiguity problem in holographic fringe patterns and allowed a quantitative evaluation of the phase of the interference patterns. The transient surface profile and propagation behavior of the shock wave over plates were investigated from the holographic fringe patterns.     

基于液晶显示投影技术的数字影栅云纹相移实现方法

影栅云纹是物体离面变形和表面形貌测量常用的一种比较简单的方法,用单纯的影栅云纹法即便在最好的光学系统配置情况下测量精度也只有1~100μm左右,在影栅云纹测试方法中引进相移技术是提高测量精度的主要手段。采用液晶投影仪和数字图像处理技术实现数字影栅云纹测量的准确数字相移,避免了在影栅云纹法中使用结构比较复杂或特制的相移机构。由计算机产生相移条纹图经液晶显示投影,应用实时图像灰度算术相减技术得到数字相移影栅云纹条纹图。该方法具有“基准栅”的栅距和相移步长实时可调,配置高速图像采集系统和图像后处理软件,可将相移技术引入动态测量中,从而提高动态测量的精度的优点。最后的悬臂梁实验结果证实了该方法的有效性。     

Time-average holographic interferometry with a sinusoidally modulated laser diode

Laser diodes have the features of a single-mode operation and a frequency tunability. Holographic interferometry is described for investigating the vibrating amplitude and phase with a frequency-modulated laser diode. Sinusoidal wavelength change by varying laser injection current produces the sinusoidal phase modulation of relative phase difference between the reference and vibrating object paths. Holograms are made by time-average exposure of three-type recording modes with a laser diode. The phase of vibrating object is extracted from the measurements of Bessel-type fringe irradiances in three kinds of time-average holographic reconstruction. Experimental results of phase and amplitude for a vibrating cantilever object are shown.     

基于声光栅的变频条纹投射系统

针对三维形貌测量中结构光照明系统投影速度慢、结构复杂、在线集成困难的问题,提出了一种基于声光栅的变频条纹投射系统。该系统利用拍频信号驱动声光偏转器,在声光晶体中形成两个重叠的光栅,光源发出的激光以布拉格角入射,形成两束一级衍射光,经透镜聚焦形成光强按正弦规律分布的结构光条纹。建立了数学模型,同时提出了一种新的相位凝固技术,使条纹空间频率和相位的变化规律得到了很好的解释。该系统结构紧凑、体积小,全电控可调,无任何机械移动部件,具有条纹投影速度快、精度高、动态可编程的特点。应用该系统对石膏像形貌进行测量,获得了用于三维成像的相位图。该投射系统对于解决复杂几何形状物体的三维测量问题具有较高的工程应用价值。     

An improved stair phase encoding method for absolute phase retrieval

An improved phase unwrapping method is proposed to reduce the projection fringes in three-dimensional (3D) surface measurement. Color fringe patterns are generated by encoding with sinusoidal fringe and stair phase fringe patterns in red and blue channels. These color fringe patterns are projected onto the tested objects and then captured by a color CCD camera. The recorded fringe patterns are separated into their RGB components. Two groups of four-step phase-shifting fringe patterns are obtained. One group of the stripes are four sinusoidal patterns, which are used to determine the wrapped phase. The other group of stripes are four sinusoidal patterns with the codeword embedded into stair phase, whose stair changes are perfectly aligned with the 2π discontinuities of sinusoidal fringe phase, which are used to determine the fringe order for the phase unwrapping. The experimental results are analyzed and compared with those of the method in Zheng and Da (2012. Opt Express 20(22):24139–24150). The results show that the proposed method needs only four fringe patterns while having less error. It can effectively reduce the number of projection fringes and improve the measuring speed.