Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts

In this paper, an improved design of a capacitive micromachined ultrasonic transducer (CMUT) is presented. The design improvement aims to address the reliability issues of a CMUT and to extend the device operation beyond the contact (collapse) voltage. The major design novelty is the isolation posts in the vacuum cavities of the CMUT cells instead of full-coverage insulation layers in conventional CMUTs. This eliminates the contact voltage drifting due to charging caused by the insulation layer, and enables repeatable CMUT operation in the post-contact regime. Ultrasonic tests of the CMUTs with isolation posts (PostCMUTs) in air (electrical input impedance and capacitance vs. bias voltage) and immersion (transmission and reception) indicate acoustic performance similar to that obtained from conventional CMUTs while no undesired side effects of this new design is observed.     

弯曲圆盘驱动的双Helmholtz共振腔换能器

使用双面同相振动的弯曲圆盘换能器驱动双Helmholtz共振腔,既放大了弯曲圆盘换能器弯曲共振频率以下频段的声输出,又利用两个Helmholtz共振腔的同相声源辐射模型实现了在Helmholtz共振频率处的"∞"字形垂直指向性,实现了低频指向性声发射。阐述了换能器实现"∞"字形低频指向性发射的机理,研究了腔体长度、金属圆片厚度及弯曲圆盘边缘简支厚度等关键结构参数对Helmholtz共振频率的影响,求解了换能器的发送电压响应、指向性等参数。依据仿真结果制作了实验样机,在消声水池中进行了电声性能测试。测试结果显示,指向性形状及液腔共振频率与仿真结果基本相符。这种由弯曲圆盘驱动的双Helmholtz共振腔水声换能器为实现水声换能器小尺寸、低频指向性发射提供了一种技术手段。      

磁致伸缩换能器辐射板形状对声场分布的影响

磁致伸缩换能器可作为热声制冷机的声源装置,辐射板的形状直接影响声压输出效率,从而影响制冷效果。为提高换能器工作效率、减小换能器体积,辐射板需在Terfenol-D棒的激励下产生大振幅、高频率的活塞振型。针对这一问题,应用ATILA软件分析了磁致伸缩换能器辐射板形状对谐振腔振动幅频特性的影响以及对谐振腔内声场分布的影响。结果表明:相同激励条件下,凹球面辐射板出现活塞振型时振幅最大,对应谐振腔中声压幅值最高;谐振腔端面形状为凹球面时,具有聚焦声压幅值的作用;端面形状为凹发射端-凸反射端组合的谐振腔内声压幅值最高。以上结论为合理设计辐射板、谐振腔两端面组合形状提供了参考。     

Helmholtz水声换能器弹性壁液腔谐振频率研究

针对传统Helmholtz水声换能器设计中刚性壁假设的局限性,将Helmholtz腔体的弹性计入到液腔谐振频率计算中,实现低频弹性Helmholtz水声换能器液腔谐振频率精确设计.基于细长圆柱壳腔体的低频集中参数模型,导出了腔体弹性引入的附加声阻抗表达式,得到了弹性壁条件下Helmholtz水声换能器等效电路图,给出了考虑了末端修正的弹性壁Helmholtz共振腔液腔谐振频率计算公式.利用ANSYS软件建立了算例模型,仿真分析了不同材质、半径、长度时的Helmholtz共振腔液腔谐振频率.结果对比表明弹性理论值与仿真值符合得很好,相比起传统的刚性壁理论计算结果,本文的弹性壁理论得出的液腔谐振频率值有所降低,与真实情况更加接近.本文的结论可以为精确设计低频弹性Helmholtz水声换能器提供理论支持.     

半导体超常媒质矩形谐振腔(英文)

设计并研究了两个有不同各向异性参数的半导体超常媒质矩形谐振腔,其中填充了部分右手半导体超常媒质和部分左手半导体超常媒质。通过作图法研究了充满非色散的右手半导体超常媒质和色散的左手半导体超常媒质的谐振腔中谐振模式的解。结果显示,谐振腔的谐振模式取决于半导体超常媒质的色散关系。讨论了每种谐振腔中包含的六种情况,分别表示两个区域的传播常数为实数和虚数的不同的组合,并且揭示了构建具有无相差特性的谐振腔的几何参数要求。     

谐振式检测器谐振腔对声表面波气相色谱仪灵敏度的影响

研究了谐振式检测器谐振腔对声表面波气相色谱仪灵敏度的影响。构建无液膜负载和有液膜负载下压电基片和金属指条结构的三维有限元模型,利用有限元方法提取不同周期结构的耦合模参量,结合P矩阵级联技术,推导出传感器灵敏度随检测器腔体结构改变的变化关系。实验制备了两种三换能器结构的声表面波谐振器,其输入换能器与输出换能器间距离分别为22.25倍波长和1.25倍波长,通过测试甲基膦酸二甲酯气体,验证理论计算结果。结果表明:缩短谐振器的谐振腔长度使器件中心处能量更为集中,有效地提高了声表面波气相色谱仪灵敏度。      

硅油介质中矩形电容式微机械超声换能器发射与接收声场特性研究*

与传统压电式超声换能器相比,基于微机电系统微加工技术制备的电容式微机械超声换能器(CMUT)具有频带宽、灵敏度高、一致性好、易于集成等优势,在医学超声成像中具有广阔的应用前景。该文针对研制的矩形CMUT器件,开展硅油介质中CMUT发射、接收声场特性的理论分析及实验验证研究。首先,针对CMUT阵元结构特征和工作原理,根据指向性函数理论和Bridge乘积原理,建立了矩形CMUT阵元指向性函数分析模型。此基础上,分析微元数目以及谐振频率对CMUT指向性的影响规律。最后,针对7 mm×7 mm二维矩形CMUT在硅油介质中的发射和接收特性进行了实验验证,测试表明发射指向性曲线与仿真理论曲线基本吻合;此外,CMUT接收与发射指向性的测试表明,收发指向性具有一致性,从而验证了声场的互易性。该文的研究对CMUT器件的封装设计以及基于CMUT阵列的乳腺超声CT成像系统的研制具有重要参考价值。     

Effective Mode Volume of Nanoscale Plasmon Cavities

The controlled squeezing of electromagnetic energy into nanometric volumes via surface plasmon-polariton excitations in plasmonic nanoresonators is analyzed using the concept of an effective electromagnetic mode volume V _eff, while taking careful account of the plasmon-polariton dispersion and the electromagnetic energy stored in the metal. Together with the quality factor Q of the cavity resonance, this enables a comparison with dielectric optical cavities, where V _eff is limited by diffraction. For a Fabry–Perot type planar metallic cavity, a one-dimensional analytic model as well as a three-dimensional finite-difference time-domain simulation reveal that V _eff is not bounded by diffraction, and that Q/V _eff increases for decreasing cavity size. In this picture, matter–plasmon interactions can be quantified in terms of Q and V _eff, and a resonant cavity model for the enhancement of spontaneous Raman scattering is presented.     

Resonant freak microwaves

The Helmholtz equation describing transverse magnetic modes in a closed flat microwave resonator with 60 randomly distributed discs is numerically solved. At lower frequencies, the calculated wave intensity spatially distributed obeys the universal Porter-Thomas form if localized modes are excluded. A superposition of resonant modes is shown to lead to rare events of extreme intensities (freak waves) at localized “hot spots”. The temporally distributed intensity of such a superposition at the center of a hot spot also follows the Porter-Thomas form. Branched modes are found at higher frequencies. The results bear resemblance to recent experiments reported in an open cavity.     

腔壁弹性对水下小型圆柱形亥姆霍兹共振器共振频率的影响

理论和实验研究了腔壁弹性对水下小型圆柱形亥姆霍兹共振器共振频率的影响.基于电-声类比理论,建立了小型共振器的简化模型,利用电路分析方法得到了便于计算的共振频率一般表达式.分别仿真分析了共振器壁面厚度和材料对共振频率的影响,得到了不同尺寸的小型共振器的近似刚性条件.在充水驻波罐中对不同壁厚、不同材料的小型圆柱形亥姆霍兹共振器的共振频率进行了测量,实验结果较好地验证了理论分析和近似刚性条件的正确性.所得结果对小型圆柱形亥姆霍兹共振器的设计和水下应用具有较好的参考价值. 关键词： 亥姆霍兹共振器 共振频率 传递函数 辐射阻抗     

All-optical switch based on photonic crystal microcavity with multi-resonant modes

We present a design of all-optical switches based on one-dimensional photonic crystals (1D PhC) doped with nonlinear optical materials. The 1D PhC switch structure is composed of a PhC cavity sandwiched by two accessional PhC microcavities. The center PhC cavity has two resonant frequencies with nearly the same quality factors (Q), while the accessional PhC cavities have the same resonant frequency, which is equal to one of the resonant frequencies of the center cavity. The two accessional PhC cavities cause reduction of Q value in this resonant frequency and result in different Q values of two modes. We realize all-optical switch effect by selecting pump light wavelength at the low Q mode and probe light wavelength at the other mode. The theoretical simulations by using the finite difference time domain method show that the pump light intensity required to realize optical switch effect in the designed switch is 50 times smaller than that in one-dimensional photonic crystals cavity with only one resonant mode.     

X波段脉冲电子顺磁共振谱仪的矩形腔与微型平面腔的设计

为了满足脉冲式电子顺磁共振谱仪的需要,设计并制作了连续波谐振腔和脉冲谐振腔. 连续波谐振腔采用矩形谐振腔的设计,而脉冲谐振腔采用了微型平面腔的设计. 在设计阶段,使用Ansoft-HFSS三维电磁仿真软件对2种谐振腔进行模拟计算. 微型平面腔的加工采用了微纳加工技术. 制作完成的谐振腔的参数指标由网络分析仪测定. 实验测得2种谐振腔的参数指标符合理论模拟值,并满足脉冲式电子顺磁共振谱仪的要求.     

An ultra-fast all-optical RS flip-flop based on nonlinear photonic crystal structures

In this paper, an all-optical RS flip-flop was proposed using nonlinear Kerr effect in photonic crystals. The proposed structure is composed of a core section and two optical switches. The core section consists of two cross-connected resonant cavities whose resonant mode are at wavelengths 1586 and 1620 nm. The cavities were designed such that the resonance of one cavity prevents the signal coupling through the other one. For designing the switch sections, a bias port was used to keep data when there is no input for the flip-flop. Therefore, when both input ports are inactive, the previous state of the flip-flop will be kept. Total footprint and maximum frequency of the proposed structure are obtained 361 μm² and 320 GHz, respectively.     

The coupling between the radial and thickness vibration of the circular resonator

The paper studies the resonant frequency dependence of radial vibration on the ratio of resonator dimensions. It was found that Rayleigh's correction does not explain the decrease of resonant frequency. This phenomenon was explained quite successfully by coupling between the radial and thickness vibrations of the plate. The calculated curves correspond very well with the measured results. Ceramic resonators manufactured from ceramics based on PbZrO₃-PbTiO₃ were used for these measurements.     

Coupled resonant modes in twisted acoustic metamaterials

Acoustic metamaterials constructed by resonant microelements in subwavelength scale were generally characterized by the effective medium approximation theory, which neglects the interaction between adjacent elements. In this paper, we show that twisting the orientation of resonators in acoustic metamaterials produces secondary coupled resonant modes by introducing internal vibration interaction. Metamaterials composed of a single-slit Helmholtz resonator arranged in two-dimensional square lattice are investigated. We rotate a portion of the resonator so that the adjacent resonators in a ??X direction have a twist angle of ??. For the system with ??=180^°, the coupling interaction produces the symmetric coupled mode in in-phase oscillation and the antisymmetric coupled mode in out-of-phase oscillation. This acoustic analog of ??hybridization effect?? leads to a sharp transparency window in the extended locally-resonant forbidden gap, which is analogous to the phenomenon of electromagnetically induced transparency. Such coupled resonant modes may have potential applications in sound wave manipulations such as acoustic filtering and imaging.     

薄板型介质材料复介电常数的无损测量

采用带法兰结构的TE01n圆柱谐振腔,用无损检测的方法测量薄板型微波介质材料的复介电常数。利用轴向模式匹配法对谐振腔内的电磁场进行了求解,给出了相对介电常数和损耗角正切的计算公式,并利用矢量网络分析仪对几种常用微波介质材料进行了测量,其结果表明:该测量方法对相对介电常数的测量误差不超过1%,而对损耗角正切的测量误差不超过10%。该方法还具备一腔多模的测试能力,测量频率可调,可用于介质材料频率特性的测量。     

面向水下应用的电容式微机械超声换能器*

电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器。该文针对图像声呐系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965 MHz,6 dB相对带宽达到109.4%,在1 MHz、2 MHz和3 MHz频率时的接收灵敏度分别为-218.29 d B、-219.39 dB和-218.11 dB。该文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。     

用于高温射频超导量子干涉器的介质谐振器的性质研究

介质谐振器是目前高温射频超导量子干涉器较常采用的一种高品质因数微波谐振器.它是由10 mm×10 mm×1 mm的SrTiO₃(STO)标准衬底及覆盖在其上的YBa₂Cu₃O_7-δ(YBCO)薄膜磁通聚焦器共同构成的.为探明磁通聚焦器构形对介质谐振器谐振频率的影响,本文采用Ansoft公司出品的HFSS高频结构仿真软件对磁通聚焦器构形不同的若干介质谐振器的谐振特性进行了仿真.结果表明:增大磁通聚焦器开     

基于同轴TM812模谐振腔的毫米波多注速调管

 研究了群聚电子注穿越同轴TM₈₁₂模谐振腔的换能效率和同轴TM₈₁₂模谐振腔中微波能量的提取方法,论证了其作为毫米波多注速调管的输出腔的可行性。研究结果表明:理想群聚电子注穿越同轴TM₈₁₂模谐振腔的换能效率可达3.29%,一般群聚电子注穿越同轴TM₈₁₂模谐振腔的换能效率可达1.86%;采用同轴TM₈₁₂模谐振腔与沿轴向的同轴线耦合可以实现微波能量的提取;在输出腔工作频率为100.945 GHz,外观品质因数为2 243情形下,根据估算,最大输出功率可达15 kW。     

Measuring the Dielectric Parameters of Frozen Sand in Microwave Resonators

We measure the dielectric parameters of frozen sand by using a rectangular cavity resonator at frequencies 5.3–8.4 GHz. The transmission spectrum of the resonator completely filled with frozen sand shows supplementary resonances absent in the case where the resonator is filled with dry homogeneous sand. The difference of the resonance curves was observed for the cases of wetting the sand by ordinary (H₂O) and heavy (D₂O) water. It is supposed that the observed effects are related to percolation due to the existence and specific properties of the conducting liquid films of water on the surfaces of mineral particles. To verify this assumption, we performed measurements for the special medium consisting of a mixture of dry sand and small metal particles. This experiment showed that supplementary resonant peaks in the transmission spectrum of the resonator arise for a certain concentration of metal particles. The same effect is also observed in the case of incomplete filling of the resonator with dry sand. These anomalies can be explained by the appearance of negative dispersion of waves in the waveguide.