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1.
 利用掺钛的蓝宝石飞秒激光系统输出的单脉冲和多脉冲飞秒激光(中心波长800 nm,脉宽50 fs,靶面聚焦直径Ф 40 μm),分别对BK7玻璃基底上厚约500 nm的单层HfO2和单层ZrO2薄膜进行辐照,得到了这两种薄膜在1-on-1和1 000-on-1测试方法下的激光损伤阈值。实验发现,两种方法下HfO2单层膜的阈值均比ZrO2单层膜的阈值高。从简化的Keldysh多光子离化理论出发,认为HfO2薄膜材料的带比ZrO2的宽是导致上述结果的主要原因。同时,同一种薄膜的多脉冲下的阈值比单脉冲下的低,原因是多脉冲下,飞秒激光对光学薄膜的损伤存在累积效应。  相似文献   

2.
利用掺钛的蓝宝石飞秒激光系统输出的单脉冲和多脉冲飞秒激光(中心波长800 nm,脉宽50 fs,靶面聚焦直径Ф 40 μm),分别对BK7玻璃基底上厚约500 nm的单层HfO2和单层ZrO2薄膜进行辐照,得到了这两种薄膜在1-on-1和1 000-on-1测试方法下的激光损伤阈值。实验发现,两种方法下HfO2单层膜的阈值均比ZrO2单层膜的阈值高。从简化的Keldysh多光子离化理论出发,认为HfO2薄膜材料的带比ZrO2的宽是导致上述结果的主要原因。同时,同一种薄膜的多脉冲下的阈值比单脉冲下的低,原因是多脉冲下,飞秒激光对光学薄膜的损伤存在累积效应。  相似文献   

3.
基于电子密度演化模型,借助数值方法,研究了飞秒激光作用下光学薄膜内的电子密度演化过程,讨论了初始电子密度Ni和激光脉冲宽度τ对光学薄膜激光损伤阈值Fth的影响,分析了激光诱导薄膜损伤过程中MPI和AI的性质和作用.研究结果表明,对应于一定的脉宽,存在一个临界初始电子密度,当Ni低于这一临界密度时,Fth不受Ni影响;当Ni高于临界密度时,Fth随Ni增加而降低.临界初始电子密度随着脉宽的减小而增加。对于FS和BBS介质薄膜,Fth随脉宽的增加而升高。初始电子密度Ni对BBS中的MPI和AI基本没有影响;同样Ni对FS中的AI基本不产生影响,但当Ni>1011cm-3时,FS中MPI电子密度随Ni增加而降低.在所研究的脉宽范围τ∈[0.01,5]ps,AI是FS介质激光诱导损伤的主要机制.而对于BBS,当脉宽τ∈[0.03,5]ps,AI是激光诱导损伤的主要机制;当脉宽τ∈[0.01,0.03]ps,MPI在激光诱导损伤中占主导地位.  相似文献   

4.
激光诱导损伤阈值是大功率光学系统中重要参数,其数值大小对激光系统的输出功率与稳定性具有重要影响。为了突破损伤阈值对激光光学系统输出功率的限制,科研人员主要从制备薄膜工艺、激光特性、薄膜特性以及薄膜后工艺等方面开展研究。本文介绍了高反膜理论、制备工艺;综述了近十年来国内外对高反膜损伤研究的成果;阐述了激光特性、薄膜特性以及薄膜后工艺对薄膜损伤阈值的影响。在此基础上,对提高高反膜损伤阈值的研究和发展趋势进行了分析与展望。  相似文献   

5.
多脉冲激光对光学薄膜的损伤   总被引:4,自引:1,他引:3  
李仲伢  李成富 《光学学报》1991,11(3):64-268
本文报道了1.06μm和0.35μm的多脉冲激光对光学薄膜损伤的积累效应,研究了损伤几率与激光能量和重复频率的关系。  相似文献   

6.
林圆圆  姜有恩  韦辉  范薇  李学春 《物理学报》2015,64(15):154207-154207
针对波长1053 nm, 0°高反介质膜元件, 采用有限时域差分法, 模拟分析了损伤修复点边缘与法线的夹角对膜层内电场强度分布的影响, 该角度越小, 修复点的损伤阈值越高. 通过优化飞秒激光微加工过程中的焦斑尺寸、脉冲能量、扫描步长和扫描次数等参数, 获得了夹角为25°、深度为14 μm的修复点. 该修复点典型的损伤阈值为21 J/cm2, 是修复前的2.3倍, 50个修复点的测试结果表明该修复参数具有非常好的可重复性. 修复点的测试结果还验证了修复点边缘与法线的夹角大小与其损伤阈值的关系, 45°的电场强度最大值约为25°的2.5倍, 而45°的损伤阈值约为25°的1/2, 模拟和实验结果一致性较好. 同时, 实验验证了微加工的激光脉宽对修复点损伤阈值的影响, 在只改变脉宽的情况下, 脉宽越长, 损伤阈值越低.  相似文献   

7.
采用PECVD技术在BK7玻璃基底上沉积了不同厚度的单层SiO2(折射率为1.46)和SiNx(折射率为1.84)光学薄膜,并对这2种膜层进行抗激光损伤阈值(LIDT)测试,分析讨论了PECVD技术制备的单层光学薄膜与抗激光损伤特性之间的关系。实验结果表明:PECVD技术制备的单层SiO2薄膜有较高的LIDT,薄膜光学厚度在o/4~o/2之间时,在光学厚度为350 nm时,LIDT有最小值21.7 J/cm2,光学厚度为433 nm时,LIDT有最大值27.9 J/cm2。SiNx薄膜的LIDT随着光学厚度增加而减小,在光学厚度为o/4时,LIDT有最大值29.3 J/cm2,光学厚度为o/2时,LIDT有最小值4.9 J/cm2。  相似文献   

8.
9.
用I类匹配BBO晶体对近红外波段钛宝石飞秒脉冲激光做倍频实验,取得近30%的转换效率,对飞秒脉冲激光倍频的有关问题进行了分析讨论。  相似文献   

10.
用互类匹配BBO晶体对近红外波段钛宝石飞秒脉冲激光做倍频实验,取得近30%的转换效率,对飞秒脉冲激光倍频的有关问题进行了分析讨论.  相似文献   

11.
Laser micromachining on 1000 nm-thick gold film using femtosecond laser has been studied. The laser pulses that are used for this study are 400 nm in central wavelength, 150 fs in pulse duration, and the repetition rate is 1 kHz. Plano-concave lens with a focal length of 19 mm focuses the laser beam into a spot of 3 μm (1/e2 diameter). The sample was translated at a linear speed of 400 μm/s during machining. Grooves were cut on gold thin film with laser pulses of various energies. The ablation depths were measured and plotted. There are two ablation regimes. In the first regime, the cutting is very shallow and the edges are free of molten material. While in the second regime, molten material appears and the cutting edges are contaminated. The results suggest that clean and precise microstructuring can be achieved with femtosecond pulsed laser by controlling the pulse energy in the first ablation regime.  相似文献   

12.
Laser drilling is one of the basic, most frequently performed, material removal processes. The drilling aspect ratio is theoretically limited by the size and the focal depth of the machining laser spot. The aspect ratio can be improved by using dual focus. In this paper we describe a focus of two different frequencies based on the longitudinal chromatic aberration arisen when polychromatic collimated light is incident on a positive lens element. In the experiments, a Ti:Sapphire laser of 800 nm wavelength and 150 fs pulse duration was used as a source. Two tightly focused laser spots few hundred micrometers apart from each other were formed by focusing a combined collimated laser beam which contains the fundamental optic frequency and the second harmonic optic frequency. The focus of dual-frequency beam was used to drill a 3 mm thick PMMA plate. The drilling aspect ratio of a dual-frequency beam was compared to that of a focus of single frequency beam. Experimental results reveal that dual-frequency beam increases the aspect ratio and improves the drilling quality in terms of profile of the produced features.  相似文献   

13.
采用数值方法研究静电场和不同的激光脉冲对氢原子的电离率和高次谐波的影响.结果表明脉冲形状和电离率之间有着确定的关系,电离率反过来又影响了谐波谱的性质;另外,随着所加的静电场强度的增大,电离率呈上升的趋势,而谐波谱出现一个双平台的结构.  相似文献   

14.
    
We report on the joining of transparent thermoplastic polymers using infrared femtosecond laser pulses. Due to nonlinear absorption, the developed micro-welding process for cyclo-olefin copolymers does not require any intermediate absorbing layers or any surface pre-processing of the welding partners. In view of an optimized and stable micro-welding process, the influence of the welding speed and focal position on both, the quality and shear force strength are investigated. We highlight that welding seam widths of down to 65 µm are feasible for welding speeds of up to 75 mm/s. However, a variation of the welding speed affects the required focal position for a successful joining process. The shear force strength of the welding seam is determined to 37 MPa, which corresponds to 64% of the shear strength of the bulk material and is not affected by the welding speed.  相似文献   

15.
 采用溶胶-凝胶工艺制备了聚乙二醇(PEG)改性SiO2单层增透膜,用输出波长1.06 μm,脉宽3 ns的调Q激光系统产生的强激光进行辐照实验。观察了添加PEG前后的膜层的微结构、表面形貌以及激光损伤行为的变化,讨论了PEG对薄膜激光损伤行为产生影响的机制。结果表明:添加的PEG可以修饰、导向溶胶簇团的生长和交联,并使之有序,由此制备的薄膜结构规整,微缺陷减少,这就提高了膜层的激光损伤阈值;在激光辐照过程中,膜料吸收激光能量,膜层温度升高,膜层的PEG分子受热逐步分解挥发,膜层产生损伤。  相似文献   

16.
In this paper we revisit the third harmonic generation from a femtosecond laser filament in air and its significant enhancement (~ 100 times) with a intercepting pump pulse, which has been reported very recently. The enhanced third harmonic is studied as a function of the pulse polarization, time delay between the pump and signal pulses, laser pulse energy, etc. We provide an explanation for the enhancement of third harmonic based on a quenching of interference effects present near filamentation threshold. Simulations based on a two-color propagation code reproduce well the experimental observations and confirm our interpretation.  相似文献   

17.
不同宽度脉冲激光对白宝石损伤的结构特征   总被引:2,自引:1,他引:1  
程光华  王屹山  赵卫  陈国夫  刘青 《光子学报》2006,35(8):1121-1125
研究了白宝石(〈0001〉切割)晶体在800nmns、ps和fs激光脉冲作用下的损伤形态.实验发现,在纳秒脉冲作用下,损伤外型与晶体的结构参量一致,呈“米”字形;在皮秒激光脉冲作用下,损伤外型呈“十”字形;而在飞秒激光脉冲作用下,损伤外形呈“一”字形;说明白宝石晶体结构损伤与应力作用下晶体缺陷的择优取向有关.  相似文献   

18.
许艳 《光子学报》2017,46(4):414002-414002
利用色散脉冲传播理论和空气折射率Ciddor公式,推导了空气中飞秒脉冲激光器的互相关函数;根据互相关函数结果表达式取决于激光器光源的光谱分布,建立了在空气中不同光程路径差及环境参量变化下,不同光谱分布的飞秒脉冲激光器的脉冲之间互相关模式的数值模型.结果表明:随着传播距离的增大,互相关模型具有稳定啁啾及线性加宽;环境参量的变化只引起互相关图案的移动,并不产生任何额外线性加宽或啁啾.  相似文献   

19.
    
Laser-Induced Periodic Surface Structures (LIPSS) can be widely used in different processing fields, involving various materials such as semiconductors, dielectrics, metals, polymers. They have great potential in micro-nano processing. LIPSS are divided into two categories: Near-Subwavelength Ripples (NSRs) with period Λ larger than λ/2 and Deep-Subwavelength Ripples (DSRs) with period Λ smaller than λ/2, where λ is the incident laser wavelength. LIPSS can improve the surface properties of materials and can be used for modulation of the surface wettability of materials; enhanced surface Raman scattering; surface coloring; birefringence and optical storage, etc. They can be widely applied in many fields such as data storage, industrial manufacturing, and biomedicine.The formation of LIPSS is a complex process. Within a few nanoseconds after the femtosecond laser irradiation on the material surface, a series of ultrafast processes such as carrier excitation, carrier heating, lattice heating, plasma ejection, and nanoparticle ejection occur, which greatly increases the difficulty of processing regular NSRs. Therefore, how to improve the quality of NSRs has been an important research direction for femtosecond laser processing.Pulse shaping can regulate the distribution of laser energy in the time domain, which can then regulate the ultrafast process of laser-matter interaction. In order to fabricate high-quality LIPSS, we built a Fabry-Perot (F-P) cavity femtosecond laser pulse train processing system to conduct femtosecond laser time-domain shaping. The central wavelength of the laser is 1 030 nm, and we output femtosecond laser pulse train with flexible sub-pulse intervals in the range of 1~300 ps to fabricate NSRs on the silicon surface. The laser scanning velocity is altered by moving the sample through a 3D electronically controlled translation stage. By adjusting the distance between beam splitter and zero-degree mirror, we changed the sub-pulse interval and investigated NSRs induced by pulse trains with different sub-pulse intervals.After the samples were processed, we tested the surface morphology of the samples using a Scanning Electron Microscope (SEM). The NSRs induced by a Gaussian laser were slightly curved and had rough edges. However, the NSRs induced by the shaped pulse with a sub-pulse interval of 100 ps were uniformly oriented with smooth and straight edges. The peak of the spectrum obtained by its Fourier transform was (0.992±0.008) μm-1, corresponding to the period Λ=(1 008±8) nm. The laser fluence window of the NSRs induced by the shaped pulse with a sub-pulse interval of 100 ps was 0.08 J/cm2, which was four times as large as the NSRs induced by the Gaussian laser pulse. As the sub-pulse interval increased, regular NSRs could also be induced, but the width of single ripples was not uniform and the ripples started to become curved with inconsistent orientation. The surface morphology and depth of the sample were measured using a white light interference confocal microscope. The depth of regular NSRs induced by Gaussian laser pulse was (22±3.2) nm, and the depth fluctuation reached 14.4%. In contrast, the depth of regular NSRs induced by the pulse train of 100 ps was (45.7±2.7) nm, and the depth fluctuation was only 5.9%. The depth of NSRs induced by shaping pulse train was about twice that of the original Gaussian laser pulse. Meanwhile, the depth fluctuation was greatly reduced and the ripples were more regular. We used the ImageJ plug-in OrientationJ to measure the Divergence of Structure Orientation Angle (DSOA) of NSRs induced by Gaussian laser pulse and F-P cavity shaping pulses, and then analyzed the local orientation. The DSOA of the NSRs induced by Gaussian laser pulse was 7.9°, while the DSOA of the NSRs induced by pulse train of 100 ps was only 2.8°. The straightness and regularity of NSRs induced by all pulse trains were better than those induced by Gaussian laser pulse in the experimental range, which indicated that the NSRs induced by pulse trains were straight and regular. To quantitatively calculate the line edge roughness of the NSRs, we performed edge detection on the NSRs induced by different conditions. We obtained the one-dimensional straight line of the sample-averaged boundary by least-squares fitting and calculated the standard error of the line edge. The best NSRs induced by pulse train of 100 ps had an edge roughness of 3.9 nm, which could meet the standard of lithography process.In summary, NSRs induced by the femtosecond laser pulse train is superior to the NSRs induced by Gaussian laser pulse. The flatness, depth, and edge roughness of NSRs are significantly improved. Femtosecond laser pulse train can improve the quality of NSRs. Laser pulse shaping is expected to overcome the thermal effects, ejected particles and insufficient energy deposition during femtosecond laser processing and improve the processing accuracy.  相似文献   

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