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AZO薄膜刻蚀形貌优化及其在硅基薄膜双结太阳能电池中的应用 总被引:1,自引:0,他引:1
采用磁控溅射结合酸腐蚀法制备掺铝氧化锌透明导电氧化物薄膜,研究关键溅射工艺参数对AZO薄膜腐蚀后性能的影响.研究发现,在较低沉积温度和较大溅射压强条件下,样品腐蚀后可以形成粗糙度和雾度更大的表面形貌,有利于提高电池性能;而溅射功率增加,虽然能提升样品腐蚀后的粗糙度,但雾度的增加则呈现饱和趋势.将具有优良光电性能、不同雾度的AZO薄膜作为前电极制备非晶/微晶硅薄膜双结太阳能电池,发现雾度越大,电池的短路电流密度越大,特别是底电池电流密度越大,从而电池的光电转换效率也获得提高.这一发现有助于通过优化溅射工艺参数来改进AZO薄膜表面形貌和电池性能. 相似文献
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采用电子束蒸发法在不同衬底温度下,150℃、200℃、250℃和300℃,制备了ZnS薄膜;用X射线衍射仪、原子力显微镜、膜厚仪和紫外-可见光-近红外分光光度计分别表征ZnS薄膜的晶体结构、表面形貌和光学特性;并分析了不同衬底温度对薄膜的结构和光学特性的影响.结果表明:在硅衬底上制备的ZnS都为多晶薄膜,具有闪锌矿β-ZnS结构;随衬底温度升高呈(111)晶面高度择优取向,平均晶粒尺寸有所增大,内应力、位错密度、折射率和吸收系数有所减小,禁带宽度随之增大;衬底温度为300℃时制备的薄膜表面均匀致密,呈现较优的结构和光学性能. 相似文献
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采用稀盐酸对磁控溅射法制备的平面掺铝氧化锌(ZnO∶Al,AZO)薄膜表面进行湿法刻蚀制绒,分析了盐酸浓度和刻蚀时间对AZO薄膜表面的形貌特征和光电特性的影响。研究发现,湿法刻蚀导致AZO薄膜表面呈现大尺度的陨石坑形貌特征,随刻蚀时间增加,薄膜在大于500 nm的长波范围内光学透过率可维持在70%~75%,且800nm处雾度值可高达48%,陷光能力快速增加,而面电阻率呈现逐渐增加趋势。高的盐酸浓度可以导致薄膜表面呈现较快凹型形貌特征,并可给出较高的雾度值。为了在保持高雾度值的条件下改善薄膜导电性,在2%盐酸刻蚀30 s所制备绒面沉积300 nm AZO薄膜进行厚度补偿,所获得薄膜的表面方块电阻小于10Ω/sq,以其作为前电极所制成的单结薄膜电池转换效率达到9.24%。结果表明,采用酸性刻蚀+厚度补偿方法所制备的绒面AZO薄膜可兼顾高雾度和低电阻的性能要求,是用作硅基薄膜太阳电池前电极的理想材料。 相似文献
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采用射频磁控溅射TiO2陶瓷靶的方法在硅和石英衬底上制备纳米TiO2薄膜,并经950℃退火1h.通过X射线衍射(XRD)、原子力显微镜(AFM)、紫外可见光谱(UV-Vis)和接触角仪对薄膜相结构、表面形貌、光学性能和亲水性能进行表征.结果表明,与950℃退火1h相比,未退火薄膜是无定形结构并呈现较高的光致亲水性能.退火薄膜是锐钛矿和金红石混合相,其中锐钛矿相质量分数是11.34%.未退火和950℃退火1h的薄膜样品的能隙分别是3.03 eV和3.11 eV.未退火薄膜具有较高的光致亲水性能主要归因于其较低的光学能隙.退火薄膜的热致亲水性能与其相结构、表面清洁度和粗糙度有关. 相似文献
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设计了一种带有Ag纳米蛾膜结构阵列的薄膜硅太阳能电池背反射器.采用时域有限差分(FDTD)法,系统仿真研究了Ag纳米蛾膜阵列的底部直径、高度、阵列周期常数对薄膜硅太阳能电池光吸收的影响.仿真结果表明,Ag纳米蛾膜结构最佳结构参数为:d=60 nm,a=120 nm,h =100 nm.吸收光谱表明带有Ag纳米蛾膜结构的薄膜硅太阳能电池可有效增加700~ 1200 nm波段范围的光,同带有Ag层的薄膜硅太阳能电池相比,光吸收平均增强53.8;,这是因为Si/Ag界面产生表面等离子体共振现象所致. 相似文献
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采用氯化镉,氯化锌,硫脲,柠檬酸钠和氨水构成的溶液体系通过化学浴沉积法合成CdxZn1-xS薄膜,采用SEM、EDS、XRD和紫外可见近红外分光光度计等表征手段研究了CdxZn1-xS薄膜的形貌、组分、相结构和光学性能,测试了薄膜的光电流响应曲线进而对薄膜的光电性能进行了分析.结果表明,在65 ~ 85℃水浴温度下均可以制备CdxZn1-xS薄膜,随着水浴温度升高,薄膜中Zn的原子比例相对增加,光学带隙增大;制备的薄膜均显示了明显的光电导现象.75℃制备的薄膜的表面最为平整致密,结晶性最好,光学带隙为2.72 eV,光暗电导比为1.20;光源关闭后电流下降过程最快,关闭10 s后电流下降了约69.39;. 相似文献
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采用直流磁控溅射法在室温玻璃基片上制备出了掺硅氧化锌(ZnO∶ Si)透明导电薄膜.研究了溅射功率对ZnO∶ Si薄膜结构、形貌、光学及电学性能的影响.结果表明,溅射功率对ZnO∶ Si薄膜的生长速率、结晶质量及电学性能有很大影响,而对其光学性能影响不大.实验制备的ZnO∶Si薄膜为六方纤锌矿结构的多晶薄膜,且具有垂直于基片方向的c轴择优取向.当溅射功率从45 W增加到105 W时,薄膜的晶化程度提高、晶粒尺寸增大,薄膜的电阻率减小;当溅射功率为105 W时,薄膜的电阻率达到最小值3.83×10-4 Ω·cm,其可见光透过率为94.41;.实验制备的ZnO∶ Si薄膜可以用作薄膜太阳能电池和液晶显示器的透明电极. 相似文献
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Measurements of thermophysical properties of Si melt and supplementary study of X-ray scattering/diffraction by the authors' group were reviewed. The values obtained differed variously from those of literature. Density was 2–3% larger, surface tension 20–30% smaller, viscosity up to 40% larger, electrical conductivity 8% smaller, spectral emissivity more or less in good agreement with literature values, and thermal diffusivity a few percent larger. An anomalous density jump was found near the melting point. Surface tension and viscosity also showed anomaly. A strange time-dependent change of density was observed over 3 h after melting. X-ray analyses suggested a slight change in local atom ordering, but showed no sign of cluster formation. An addition of 0.1 at% gallium caused the density jump to disappear, while that of boron caused no change. An EXAFS study of the former melt indicated a strong interaction between Ga and Si atoms as if molecules of GaSi3 existed. The implications of the measured properties are a possibility of soft-turbulence in an Si melt in a relatively large crucible, a more complicated manner of intake of oxygen depleted molten Si from the free surface region to underneath the growing crystal, and a relaxation of the melt after melting arising from trapped gas species. 相似文献
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P.J. Lezzi 《Journal of Non》2011,357(10):2086-2092
The enthalpy of mixing of mixed alkali (Na2O and K2O) silicate glasses containing various concentrations of alumina was determined using an ion-exchange equilibrium method. For glasses with a constant alkali concentration, the enthalpy of mixing was found to become less negative with alumina addition. Consistent with our previous results on the enthalpy of mixing of alumina-free mixed alkali silicate glasses, the magnitude of enthalpy of mixing exhibited a good correlation with the molar volume mismatch of the corresponding two single alkali glasses as well as with the extent of conductivity mixed alkali effect, e.g. excess activation energy of conductivity, ΔE. The reduction of the magnitude of the enthalpy of mixing with alumina addition can be attributed to the reduction of non-bridging oxygen and ionic field strength. Combining the present results with results obtained earlier, the magnitude of the enthalpy of mixing for all mixed alkali (Na2O and K2O) silicate glasses with and without alumina was expressed by a simple function of a modified Tobolsky parameter, which takes into account the alkali concentration and the difference in cation-to-effective anion distances. The enthalpy of mixing data of the mixed alkali glasses was then compared with reported experimental data on the conductivity of mixed alkali aluminosilicate glasses. What appears to be conflicting experimental data can be understood in terms of the magnitude of the enthalpy of mixing and we can conclude that the mixed alkali effect is closely correlated with the negative enthalpy of mixing. 相似文献
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A novel homologous series of ethylene derivatives of thermotropic liquid crystals has been synthesized. The methoxy to octyloxy derivatives are nematogenic, the decyloxy to tetradecyloxy derivatives are smectogenic, in addition to nematogenic, and the hexadecyloxy homologue is smectogenic only. All the members of the series are enantiotropically mesogenic. Thermotropic behavior was determined by an optical polarizing microscope equipped with a heating stage and Differential Scanning Calorimetry (DSC) study. Analytical and spectral data confirm the molecular structures of homologues (infrared, nuclear magnetic resonance, mass spectra, X-ray, and DSC data). Textures of the nematic phase are threaded or Schlieren and that of smectic phase are focal conic fan-shaped of smectic A or C. Transition curves of the phase diagram behave in a normal manner except one or two deviations from the normal trend. The mesophase range (Sm+N) varies from 3°C to 44°C. The average thermal stability for smectic is 93°C and that for nematic 117.4°C. The LC behavior of the novel series is compared with a structurally similar known series. 相似文献
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原位氮化法制备TiN纳米粉体 总被引:3,自引:0,他引:3
用溶胶凝胶法合成的纳米TiO2粉体作为原料,将该粉体在氨气中进行原位氮化制备了TiN纳米粉体.用XRD,TEM,化学分析等手段对合成的TiN纳米粉体的物相组成、形貌、成分进行了分析.实验分析表明:在1000℃和1100℃下分别氮化5h,可以制备粒径大约为40nm和80nm的TiN粉体,其TiN的含量分别为95.40;和98.37;;而在1000℃条件下氮化时间减少到2h时,TiN的含量仅为58.36;.氮化温度和氮化时间是合成纳米TiN的重要因素,提高合成温度和延长氮化时间均可形成纯度较高的TiN纳米粉体,但延长氮化时间更有利于获得粒径小的氮化钛粉体. 相似文献
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On the influence of structural features of DNA on the possibility of metabolic transfer of electrons
A. D. Suprun 《Molecular Crystals and Liquid Crystals》2020,701(1):28-39
AbstractA fragment of a DNA molecule is considered as one of the channels of metabolic electron transfer. The heterogeneity of the complementary chains is effectively taken into account. This made it possible to find the speed of the electron injected into the DNA conduction band and the current density that it creates. Estimates of electron mobility in nucleic acid chains are made. They were an order of magnitude smaller than that of typical semiconductors. For the specific conductivity of nucleic acid chains, estimates provide a conductivity of one to two orders of magnitude lower than in graphite. 相似文献
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O. Dryuchko D. Storozhenko A. Vigdorchik N. Bunyakina I. Ivanytska K. Kytaihora 《Molecular Crystals and Liquid Crystals》2018,672(1):199-214
AbstractThe complex study provides a reliable idea of ??the trends in the joint behavior of structural components in the water-salt systems of nitrate precursors of REE, alkaline, alkaline earth metals in the preparatory stages of the processes of forming multicomponent oxide polyfunctional materials on their basis with thermal activation. Stages of such transformations are revealed; The regularities of complex and phase formation in systems and factors influencing them are determined; A number of physicochemical properties of the intermediate phases formed - coordination lanthanides nitrates: their composition, types of compounds, atomic-crystalline structure, regularities of transformations during heat treatment were studied. 相似文献
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K. Sethuraman R. Ramesh Babu N. Vijayan R. Gopalakrishnan P. Ramasamy 《Crystal Research and Technology》2006,41(8):807-811
A new organic single crystal of semicarbazone of cyclohexanone (SCCH) has been synthesized and grown as a bulk single crystal by low temperature solution growth technique for the first time in the literature. The grown crystal has been confirmed by X‐ray diffraction and proton nuclear magnetic resonance spectral analyses and also characterized by FT‐ir and FT‐Raman studies. Thermal properties of the grown crystals were studied by thermogravimetric and differential thermal analyses. Optical transmittance was studied by ultraviolet‐visible spectrum and the second harmonic generation property was tested by using Q switched Nd: YAG laser as a source. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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M. Thamilselvan K. Premnazeer D. Mangalaraj Sa. K. Narayandass Junsin Yi 《Crystal Research and Technology》2004,39(2):137-142
A systematic investigation on the effect of substrate temperature on the structure, optical absorption and density of states of vacuum evaporated gallium monoselenide (GaSe) thin films is reported. The X‐ray diffraction analysis shows an occurrence of amorphous to polycrystalline transformation in the films deposited at higher‐temperature substrates (573K). The compositional analysis is made with Auger Electron Spectroscopy (AES). The thickness of the film (175nm) is measured by a multiple beam interferometery. Optical characteristics of the GaSe sample have been analyzed using spectrophotometer in the photon energy range of 1.0 ‐ 4 eV. The absorption mechanism has been recognized and the allowed indirect as well as forbidden direct transitions have been found. As‐deposited films show two indirect and allowed transitions due to spin‐orbit splitting of the valence band, as reported here for the first time. Low field conduction have enabled us to determine the density of states in amorphous and poly‐GaSe films. The amorphous and polycrystalline GaSe thin films have localized states density values of N (EF) = 1.686 × 1017 cm‐3 eV‐1 and 1.257 × 1015 cm‐3 eV‐1 respectively. The experimental results are interpreted in terms of variations in the density of localized states due to progressive decrease of the unsaturated bonds during deposition. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献