300 mm晶圆线超纯水水质浅析

基于现代超纯水系统的若干实践,浅析现今超纯水水质的难点(TOC、SiO2、微粒的达标),述评300mm线水质要求上的现实性。     

亚微米生产线中的超纯水技术

本文以统计性的数据为依据，阐述了超纯水水质对器件的影响，列出亚微米ＣＭＯＳ线上的水质检测。围绕现代超纯水水质参数中总有机碳这一中心环节，讨论了降低该值的关键和相关问题换解决要点。     

超纯水制造装置

由于超大规模集成电路的飞速发展，使超纯水水质要求不断提高。并提出了一些新的项目要求。半导体行业目前是处在64M位时代，不久即将进入256M位的新时代，集成度每前进一步，杂质要求减少到原有标准的1／2～1／10(大约)。水质要求值和水质评价技术的发展，不能超越实际，更不能提出不切实际的苛刻要求，水质分析应以生产要求的下限值做为对保证水质的标准。对水中杂质的存在和对器件影响，以及彼此之间的因果关系不清楚的情况下盲目制定降低杂质指标是不可取的。     

反渗透膜在超纯水生产中的应用

介绍了ＮＴＲ－７５９反渗透膜的结构及其脱除性能，将反渗透（ＲＯ）膜与醋酸纤维（ＣＡ）膜进行了比较，着重叙述了ＮＴＲ－７５９在双级ＲＯ中用作中间和精处理时对低浓度的盐和ＴＯＣ的脱除特性，实际应用表明，ＮＴＲ－７５９是一种性能良好的反渗透复合膜，可广泛应用于高纯水的制备。     

纳米级集成电路与超纯水

阐述美国《国家半导体技术发展战略》中存储器的发展目标对其关键材料超纯水在水质和耗量降低上的要求。以我国8英寸/0.18微米和12英寸生产线和相关数据与其对照.表明在总有机碳、溶解氧等项水质参数巳可满足该发展要求，而在SiO2、微粒限定、检测技术以及超纯水耗量降低等方面尚有差距和问题，提出相应的解决方案，讨论了超纯水等项水资源消耗的降低途径。重申了水回收的意义，关注“功能水”和高效，省能的GDI（聚合型电去离子）装置将是有益的。     

300mm半导体芯片加工中的超纯水系统

顶级超纯水系统的主要性能从对深亚微米器件性能影响的敏感性和制水技术的难度考察,TOC（总有机炭）／DO溶解氧）两参数集中体现了现今超纯水技术的水平。TOC引起薄栅氧化中缺陷密度增加,DO由于硅片表面自然氧化膜而使器件特性恶化。各项水质参数按难易依次排列和现今水平列于表豆。在线的DO、TOC、SIO。和Na离子检测仪均是全自动自校准的;ICP－MS（电荷感应耦合一等离子质谱）对超纯水中三十种金属离子的检测极限可达13～0．03ppt内。我国按0．25μm要求的系统C的设计值附于表1,已启用的二项工程的实测水质参数见表2。工程A…     

深深亚微米技术中的超纯水

以我国深亚微米水平的超纯水系统的实践经验为基础，以３００ｍｍ芯片厂和深深亚微米加工技术的需要为对象，推测其水质、水量的要求和费用能力，评述若干制水关键技术的现状，展望其发展。     

超大规模集成电路生产中的超纯水系统

随着集成电路技术的不断发展，对生产所需纯水水质要求理镐，本文系统介绍了超大规模集成电路生产中的超纯水质水质指标，典型制备流程，输送管材以及超纯水制备系统的发展。     

ELGA全自动超纯水处理系统的工艺和设备特点

在集成电路工业已经进入超大规模集成电路时代的今天,如何使超纯水这一重要基础材料的纯度达到电子级Ⅰ级水准,已成为我国净化技术中超纯水处理领域一个急待解决的技术问题。本文专题介绍英国ELGA公司全自动超纯水处理系统工艺流程和设备的特点,最后介绍了该系统生产的超纯水所达到的质量指标。     

浅析反渗透膜材料在半导体工厂超纯水工艺中的应用

就反渗透膜材料在半导体厂超纯水工艺中的应用原理,使用条件类型,具体的项目实践进行简单介绍与说明.     

Cobalt Boron Imidazolate Framework Derived Cobalt Nanoparticles Encapsulated in B/N Codoped Nanocarbon as Efficient Bifunctional Electrocatalysts for Overall Water Splitting

The development of efficient and low‐cost bifunctional electrocatalysts for oxygen evolution reaction (OER) and hydrogen evolution reaction (HER) is highly desirable for electrochemical energy conversion. Herein, this study puts forward a new Co decorated N,B‐codoped interconnected graphitic carbon and carbon nanotube materials (Co/NBC) synthesized by direct carbonization of a cobalt‐based boron imidazolate framework. It is demonstrated that the carbonization temperature can tune the surface structure and component of the resultant materials and optimize the electrochemically active surface area to expose more accessible active sites, effectively boosting the electrocatalytic activity. As a result, the optimized Co/NBC shows superior bifunctional catalytic activity and stability toward OER and HER in 1.0 m KOH solution. Furthermore, the catalyst can serve as both the anode and cathode for water splitting to achieve a current density of 10 mA cm^?2 at a cell voltage of 1.68 V. Experimental results and theoretical calculations indicate that the excellent activity of Co/NBC catalyst benefits from the synergistic effect of partial oxidation of metallic cobalt, conductive N,B‐codoped graphitic carbon and carbon nanotube, and the coupled interactions among these components. This work opens a promising avenue toward the exploration of boron imidazolate frameworks as efficient heteroatom‐doped catalysts for electrocatalysis.     

S7-200PLC在恒压变频供水系统中的应用

恒压供水是自来水生产流程中的重要环节,本文采用西门子S7-200 CPU224为主控制器,组建自动恒压变频供水系统,阐述了系统控制过程的工作原理。     

在DSP组成的多CPU系统设计中双端口RAM的应用研究

在设计多CPU及其他高速数字处理系统时 ,数据获取及交换是多CPU系统的重要组成部分。当多个CPU对共享内存进行访问时不发生冲突是系统设计能否成功的关键。双口RAM是一种性能优越、能解决访问冲突的器件。本文讨论了以CY7C144为双口RAM在深井泵多CPU并行控制系统中的具体应用     

Ru–Ru2PΦNPC and NPC@RuO2 Synthesized via Environment‐Friendly and Solid‐Phase Phosphating Process by Saccharomycetes as N/P Sources and Carbon Template for Overall Water Splitting in Acid Electrolyte

Although numerous ruthenium‐based phosphates possess high catalytic activities for hydrogen evolution reaction (HER), most of them rely on dangerous and toxic synthesis routes. Biological slices confirm that Ru ions can penetrate the cell walls of saccharomycete, which facilitates the adsorption of Ru ions. Herein, based on a green synthesis process by saccharomycete cells as the carbon template and nitrogen/phosphorus (N/P) sources, novel Janus‐like ruthenium–ruthenium phosphide nanoparticles embedded into a N/P dual‐doped carbon matrix (Ru–Ru₂PΦNPC) electrocatalyst for HER are synthesized. Electrochemical tests reveal that Ru–Ru₂PΦNPC displays remarkable performance with a low overpotential of 42 mV at 10 mA cm^?2 and demonstrates superior stability at a high current density in 0.5 m H₂SO₄. Furthermore, ruthenium oxide nanoparticles coated N/P dual‐doped carbon (NPC@RuO₂) are also synthesized with a yolk–shell structure using saccharomycete cells as the core template and RuO₂ as a shell to isolate saccharomycete cells from the oxidation reaction during calcination in air. The NPC@RuO₂ as oxygen evolution reaction electrocatalyst possesses a low overpotential of 220 mV at 10 mA cm^?2. Finally, the Ru–Ru₂PΦNPC is integrated as a cathode and NPC@RuO₂ is integrated as an anode to construct a two‐electrode electrolyzer to enable an excellent performance for overall water splitting with a cell voltage of 1.50 V at 10 mA cm^?2 in 0.5 m H₂SO₄.