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1.
Improved laser output is demonstrated in KrF and XeCl lasers with x-ray preionization. The influence of gas composition, preionization geometry, x-ray dose,E/p value and temporal delay between x-ray pulse and laser discharge is discussed. In XeCl lasing has been achieved with an x-ray dose of 0.2 mR whereas approx. 3 mR are required for KrF. For both systems, the highest output energy and the lowest possibleE/p ratio were observed with Ne buffered gas mixtures. Dissociative attachment to halogen molecules on a ns time scale supported by a relatively slow laser voltage rise is recognized as the main electron loss channel preventing a long lifetime of the preionization electrons. High preionization intensity is thus desirable at the moment of voltage breakdown.  相似文献   

2.
Increasing the preionization electron density is found to be an effective method for improving the output performance of discharge-pumped excimer lasers at high gas pressures when the power-supply voltage becomes a limiting factor. In a small volume (2 cm3), x-ray preionized discharge, orders of magnitude improvement in XeCl laser power output (up to 400 kW) and pulse energy (up to 26 mJ) over previously reported results have been found possible using this method. Modifications to the low energy x-ray source and discharge system leading to these improvements are described. Various laser output characteristics are also presented and discussed.  相似文献   

3.
Improvements in output pulse energy and efficiency of a conventional capacitor-transfer-type discharge excimer laser with automatic preionization have been achieved by extending the discharge volume and resulting moderate pumping of the active medium. The discharge laser produces a pulse energy of more than 1 J for XeCl, KrF, and ArF lasers in square beams of about 2×2 cm2, and the maximum overall efficiency observed is 2.9% for XeCl, 3.2% for KrF and 1.8% for ArF. The laser device has been involved in a picosecond ( 32 ps) XeCl laser amplification system, and was operated as an amplifier at a repetitive frequency of 10 Hz. Saturation fluence for XeCl laser was measured to be 1.4 mJ/cm2, and the picosecond pulse energy of 40 mJ was extracted from the amplifier.On leave from Ebara Corp., 6-6-7, Ginza, Chuo-ku, Tokyo 104, JapanOn leave from Mitsubishi Heavy Industries, LTD., 4-6-22, Kan-on shinmachi, Nishi-ku, Hiroshima 733, Japan  相似文献   

4.
A short pulse (35 ns), high energy X-ray source, driven by a coaxial Blumlein pulser, has been used to preionize a 2.5 × 3 × 30 cm3 active volume XeCl avalanche discharge laser. A maximum output energy of 1 J has been extracted at 0.9% efficiency (including X-ray preionization). Measurements have been performed to investigate the influence of the X-ray pulse timing on laser output and discharge quality.  相似文献   

5.
The results of the experimental study of UV lasers and laser systems pumped by different methods are presented. Two lasers were pumped by electron beams from Marx generators. Three lasers were pumped by transverse discharge with UV preionization. An XeCl laser pumped by electric discharge using a generator with inductive energy storage and semiconducting opening switch is investigated. The highest laser radiation energies of 2000, 90, and 0.7 J have been obtained at 5=308, 249, and 222 nm, respectively. The amplification of the laser beam from the master oscillator under conditions of strong amplified spontaneous emission is considered. In particular, formation of the output from an amplifier in the wings of the XeCl laser band and in the case of a large-aperture XeCl amplifier are investigated. The output beam divergence in these experiments was measured to be ~10-4 rad.  相似文献   

6.
Organic polymer (PES: PolyEther Sulphone and PEEK: PolyEther Ether Ketone) ablation with oscillation-line selected TEA CO2 lasers is successfully demonstrated. With different irradiation conditions the ablative etch-rate slopes were varied, which means that the ablation process is dependent on the ablation conditions such as incident laser intensity and ambient gas. In perforation processing of the PEEK film, the TEA CO2 laser had a higher etch rate of 42 m/pulse at a fluence of 70 J/cm2 in vacuum than the XeCl laser.  相似文献   

7.
In GaAsP lasers operating at 1.5 to 1.6 m were pumped optically with a pulsed 1.06 m source. The temperature dependence of the pump energy at laser threshold has been measured for temperatures from 170 to 330 K. Pump pulse widths of 300 ns and 150–300 ps were employed, long and short compared to the carrier life-time in the laser material. Over the high-temperature range of 260 to 330 K short pulse excitation gives a considerable reduction of the threshold temperature sensitivity with a characteristic temperatureT 0 =85 K compared to T 0 h =45 K for long-pulse excitation. This is in qualitative agreement with previous results on electrically excited lasers although the temperature sensitivity of the optically excited lasers is larger. At temperatures between 170 to 260 K no reduction of the temperature sensitivity was observed.  相似文献   

8.
With a high uniformity of x-ray preionization, a long pulse duration and a high specific energy (9 J l-1), an XeCl excimer laser output has been obtained by using a compact low inductance capacitor bank as the laser excitation circuit. The superior features of the low inductance capacitor bank (LICB) compared to the water transmission line (WTL) are attractive for repetitively pulsed XeCl excimer lasers.  相似文献   

9.
In order to check the predictions of 0D-models experimentally, a small coaxial discharge configuration for the generation of homogeneous high pressure glow discharges (diameter 11 mm, length 20 mm) in rare gas halogen excimer laser gas mixtures under accurately controlled conditions has been developed. It uses X-ray preionization and a special pulse-forming network (PFN) delivering fast rising (8 ns) single square pulses (U 0=25 kV; I=300 A; =100 ns). Discharge current and voltage are measured precisely by a capacitive voltage divider and a shunt integrated into the discharge chamber. All circuit data needed for the model calculations have been evaluated. Interferometric and spectroscopic diagnostics of the bulk of the discharge and of the cathode sheath have been performed. First results for Ne/Xe/HCl mixtures are compared with model calculations.  相似文献   

10.
This paper presents a complete study of the temporal and spatial characteristics of the preionization of a XeCl rare-gas halide laser. The detailed study was made possible using the technique of laser-induced preionization which utilizes the uv radiation from a KrF laser to preionize a second rare-gas halide laser. In addition to the preionization study, high spatial and temporal resolution framing camera photographs have been used to investigate the growth of discharge instabilities which can lead to the premature termination of the XeCl optical pulse. The roles played by HCl, Xe, the buffer gas as well as the discharge energy loading in the development of discharge instabilities have been determined experimentally.  相似文献   

11.
Experiments on homogeneous initiation of pulsed avalanche discharges in typical XeCl laser mixtures show that the x-ray preionization pulse remains effective after a time delay of the order of 20 s even at very high gas pressures (15 atm). Detailed kinetics analyses indicate that dissociative attachment of HCl is relatively slow during and after the preionization period so that the long effective delay time cannot be attributed to the storage effect of Cl ions. Instead, the observed phenomenon can be attributed to the long survival time of the free electrons due to relatively slow diffusion and electron-ion recombination. Some problems arising from quantitative interpretation of the experimental results are also noted and discussed.Paper partially presented at the 7th Intern. Conf. on Lasers and Applications, San Francisco, CA, USA (November 26–30, 1984)  相似文献   

12.
Polycrystalline SiC layers were synthesized through nanosecond pulse heating of thin carbon films deposited on single-crystalline silicon wafers. The samples were submitted to electron beam irradiation (25 keV, 50 ns) at various current densities in vacuum (10–4mbar) and to XeCl excimer laser pulses (308 nm, 15ns) in air. Rutherford backscattering spectrometry (RBS) showed that in the e-beam annealed samples mixing of the elements at the interface starts at current densities of about 1200 A/cm2. The mixed layer thickness increases almost linearly with current density. From the RBS spectra a composition of the intermixed layers close to the SiC compound was deduced. Transmission electron microscopy (TEM) and electron diffraction studies clearly evidenced the formation of SiC polycrystals. Using the XeCl excimer laser, intermixing of the deposited C film with the Si substrate was observed after a single 0.3 J/cm2 pulse. Further analysis evidenced the formation of SiC nanocrystals, embedded in a diamond film.  相似文献   

13.
A set-up of the CO2 SKATE and its output characteristics are described. The system is based on a self-sustained gas discharge module with x-ray preionization that ensures reliability and stable repetition rate operation at 1 Hz for a long time. Measurement of the initial electron density in the discharge volume produced by an x-ray gun is presented for different gases and their mixtures, which is of independent interest for some applications of x-ray preionization. Data on measurements of the low-intensity signal gain and laser parameters for a free-running generator configuration are presented as well as long-term operation characteristics. This laser system has been used as a CO2 generator with gigawatt peak intensity and high spatial–temporal characteristics. In particular, the laser can be used as a driver for a source of multicharged ions in contrast to the laboratory prototypes previously investigated.  相似文献   

14.
TEA CO2 laser preionization by plasma sheet formed by discharge sliding over a dielectric surface is described. The preionization electron number density in order of 109cm–3 was measured in the CO2 N2 He=113 gas mixture. The plasma sheet was also tested as a main discharge electrode in TEA CO2 laser.The authors would like to acknowledge with thanks the current interest and the help of P. Gavrilov and V. Krajíek in experiments.  相似文献   

15.
Interactions of a transversely excited atmospheric (TEA) CO2 laser and an excimer XeCl laser, pulse durations ∼2 μs (initial spike FWHM ∼100 ns) and ∼20 ns (FWHM), respectively, with polycrystalline titanium nitride (TiN) coating deposited on high quality steel AISI 316, were studied. Titanium nitride was surface modified by the laser beams, with an energy density of 20.0 J/cm2 (TEA CO2 laser) and 2.4 J/cm2 (XeCl laser), respectively. The energy absorbed from the CO2 laser beam is partially converted to thermal energy, which generates a series of effects such as melting, vaporization of the molten material, shock waves, etc. The energy from the excimer XeCl laser primarily leads to fast and intense target evaporation. The calculated maximum temperatures on the target surface were 3770 and 6300 K for the TEA CO2 and XeCl lasers, respectively. It is assumed that the TEA CO2 laser affects the target deeper, for a longer time than the XeCl laser. The effects of the XeCl laser are confined to a localized area, near target surface, within a short time period.Morphological modifications of the titanium nitride surface can be summarized as follows: (i) both lasers produced ablation of the TiN coating in the central zone of the irradiated area and creation of grainy structure with near homogeneous distribution; (ii) a hydrodynamic feature, like resolidified droplets of the material, appeared in the surrounding peripheral zone; (iii) the process of irradiation, in both cases, was accompanied by appearance of plasma in front of the target.Target color modifications upon laser irradiation indicate possible chemical changes, possibly oxidation.  相似文献   

16.
External-laser-induced preionization of excimer lasers was investigated. A discharge XeF laser was preionized by two different UV lasers [a KrF laser (λ=249 nm) and an ArF laser (λ=193 nm)], and the improvements in performance of the XeF laser were compared. The XeF laser beam profiles were measured by an intensified CCD (ICCD) camera with temporal resolution of 10 ns. Striated XeF laser profiles were obtained with 249 nm laser preionization, whereas there was no striation in the profiles for 193 nm laser preionization. These striations originated from discharge in the XeF laser induced by laser preionization. The influence of excited rare-gas atoms on the discharge instability was examined.  相似文献   

17.
From the capacitance–voltage curves and current–voltage characteristics of the In0.17Al0.83N/AlN/GaN heterostructure field-effect transistors (HFETs) with side-Ohmic contacts and normal-Ohmic contacts, two-dimensional electron gas (2DEG) electron mobility was calculated. It is found that the polarization Coulomb field scattering (PCF) is closely related to the normal-Ohmic contact processing, and the PCF was weakened by side-Ohmic contact processing in In0.17Al0.83N/AlN/GaN HFETs, similar to that in AlGaN/AlN/GaN HFET devices. Further, due to the stronger spontaneous polarization in the thinner In0.17Al0.83N barrier layer, the influence of the gate bias on the PCF in In0.17Al0.83N/AlN/GaN HFETs is greater than that in AlGaN/AlN/GaN HFETs. As a result, the PCF in In0.17Al0.83N/AlN/GaN HFETs with side-Ohmic contacts is stronger than that in AlGaN/AlN/GaN HFETs with side-Ohmic contacts. Moreover, the 2DEG electron density in the In0.17Al0.83N/AlN/GaN HFETs with side-Ohmic contacts is increased by more than twice compared with the 2DEG electron density in the In0.17Al0.83N/AlN/GaN HFETs with normal-Ohmic contacts.  相似文献   

18.
We report on a simple and stable pulse tunable CO2 laser suitable for many investigations in the region around 10m. The pulsed discharge when combined with the passiveQ-switching technique provides pulses of 100 ns duration with a peak power of few kilowatts.Due to the interest in pulsed low-pressure CO2 lasers as useful irradiation sources, extensive investigations have been carried out. In particular, various Q-switching techniques have been developed to generate short CO2 laser pulses [1–4].  相似文献   

19.
We investigate the ablation process in SiO2 by the superposition of 180 fs laser pulse (center=800 nm) with a 15 ns laser pulse (center=532 nm). Compared to femtosecond laser pulses alone, we measured an increase of 270±30% in volume of the ejected material with only a total increase of 40% of lasers fluences. This increase of ablation is the result of thermal and incubation effects generated by the femtosecond laser pulse. PACS 78.20.Nv; 61.80.Ba  相似文献   

20.
Intensity-induced variations in the energy transmittivity and temporal shape of pulses emerging from a 200-m-diameter core silica fibre have been investigated with a single-pulse XeCl laser. By coupling an XeCl laser pulse of 3mJ with a temporal width of 20 ns into a 30-m-long all-silica fibre, a total laser pulse of 1 mJ and 3 ns duration has been extracted at the fibre end. A pulse shortening larger than 80% has been observed. It is shown that the shape variations in the transmitted laser pulses are mainly due to stimulated Raman scattering processes. Substantial shape variations have been observed even at energy conversion efficiencies to the Stokes radiation of lower than 10%. The drop in energy transmittivity at higher fluences seems mainly due to two-photon absorption processes.  相似文献   

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