三倍频熔石英激光损伤的吸收前驱体

 在三倍频熔石英激光损伤研究中,吸收前驱体的存在是造成熔石英材料表面损伤阈值远低于体损伤阈值的主要原因。以吸收作为主线,建立吸收前驱体引起的熔石英表面损伤模型,并讨论吸收前驱体与熔石英表面损伤的联系。针对金属元素微粒残留理论模拟了激光辐照过程中微粒周围温度场的变化,结果表明在脉冲时间内微粒周围温度很快到达损伤判据所给出的临界温度,通过激光损伤实验,证实吸收性微粒含量与损伤密度有密切联系。针对亚表面裂纹,建立一维模型计算受激后裂纹表面附近自由电子密度分布。计算结果和实验结果均表明：金属元素微粒和亚表面裂纹是熔石英激光损伤中重要的吸收前驱体,金属元素微粒对激光能量的吸收致使周围材料温度在脉冲时间内达到损伤判据温度2 000 K;受激后裂纹表面的自由电子密度达到1021 cm-3的水平,可导致对后续激光的强烈吸收;两种吸收前驱体极大降低了熔石英材料的表面抗损伤性能。     

杂质诱导熔石英激光的损伤机理

发展了355 nm纳秒激光下亚波长杂质粒子引起熔石英损伤的基本模型。通过Mie散射理论和热传导方程,计算了粒子与熔石英边界处的温度随粒子尺寸的变化关系,并分析了达到临界温度时,不同粒子诱导损伤所需的关键能量密度,讨论了各粒子最易引起熔石英损伤的尺寸。实验采用355 nm纳秒激光脉冲作用熔石英及其HF刻蚀样品,测得两者的损伤概率。研究表明:粒子吸收激光能量,随着粒子半径的增加,其边缘温度先增大后减小,一定尺寸范围内的粒子才会引起熔石英的损伤;关键能量密度所对应的粒子半径为最易引起熔石英损伤的关键粒子半径;经刻蚀后,熔石英样品表面杂质数密度降低,损伤概率降低,损伤阈值提高。     

超声波辅助酸蚀提高熔石英损伤阈值

为了提高熔石英元件表面抗激光损伤阈值,利用超声波辅助HF酸研究平滑光学元件表面缺陷形貌和去除刻蚀后残留物效果,通过扫描电子显微镜电镜和原子力显微镜记录表面形貌结构,以及单脉冲激光辐照测试抗损伤阈值确定实验参数。研究表明,超声波场的引入能催化HF酸的刻蚀速率、提高钝化效果并且更易剥离嵌入的亚μm级杂质粒子。经过实验测试,获得了熔石英类元件相匹配的超声辅助HF酸刻蚀实验参数,研究结果对应用超声波辅助HF酸研究熔石英表面抗激光损伤有重要意义。     

表面Al膜污染物诱导熔石英表面损伤特性

在熔石英表面人工溅射一层Al膜污染物,分别测试污染前后熔石英基片在355 nm波长激光辐照下的损伤阈值,并采用透射式光热透镜技术、椭偏仪和光学显微镜研究了污染物Al膜的热吸收、厚度以及激光辐照前后熔石英的损伤形貌。用355 nm波长的脉冲激光分别辐照位于污染的熔石英和洁净的熔石英前后表面的损伤点,并用显微镜在线采集损伤增长图样,测试损伤点面积。实验表明:熔石英前表面的金属Al膜污染物导致基片损伤阈值的下降约30%,后表面的污染物导致基片下降约15%,位于熔石英样片后表面损伤点面积随激光辐照次数呈指数增长,而位于前表面的损伤点面积与激光脉冲辐照次数呈线性增长关系;带有污染的熔石英样片的增长因子比洁净的熔石英样片的增长因子高30%。     

静/动态刻蚀对熔石英表面质量和激光损伤的影响

为了研究静/动态刻蚀过程中熔石英表面质量和抗激光损伤性能的演变规律,优化化学刻蚀工艺,使用HF酸缓冲液对熔石英分别进行了不同时间的静/动态刻蚀处理。实验表明,由于兆声场辅助搅拌作用,熔石英动态刻蚀的刻蚀速率快于静态刻蚀。动态刻蚀后熔石英表面均方根(RMS)粗糙度和反射面形分别为 < 1 nm和0.46λ,其3倍频透射率先小幅增加后保持稳定,相比初始表面增加约0.1%。而静态刻蚀使得表面RMS粗糙度和反射面形分别增加至~5 nm和0.82λ,其3倍频透射率先基本不变后下降,相比初始表面下降约0.4%。二者损伤阈值呈现明显不同变化规律:静态刻蚀使熔石英损伤阈值先小幅增加约30%后逐渐降低,动态刻蚀使熔石英损伤阈值增加近一倍后保持相对稳定。结果表明,动态刻蚀后熔石英光学元件性能明显优于静态刻蚀。     

化学刻蚀过程中熔石英表面沉积物的形成及其对激光损伤的影响

化学刻蚀是提升熔石英光学元件抗激光损伤性能的重要后处理技术之一,但刻蚀后熔石英表面附着的沉积物对其表面质量、透射性能和抗激光损伤性能有很大影响。使用光学显微镜和原子力显微镜表征了化学刻蚀后附着于熔石英表面的沉积物的微观形貌,并分析了其形成机理;X射线能谱分析表明化学刻蚀后熔石英表面沉积物主要由Fe,Ni,Al等元素的金属盐组成。损伤阈值测试结果表明熔石英表面高密度沉积物区域的损伤阈值明显低于非沉积物区域,沉积物对熔石英光学元件的抗激光损伤性能产生严重影响,它们是诱导熔石英激光损伤的前驱体。     

熔石英表面铜膜污染物诱导损伤实验研究

 在熔石英元件表面溅射一层厚度小于10 nm的金属铜膜污染物,并测试元件的透过率。测试355 nm熔石英元件的激光损伤阈值,并用光学显微镜观测损伤形态。实验结果表明：污染后的熔石英元件的损伤阈值降低20%左右,元件表面的金属污染物薄膜经强激光辐照,在熔石英表面形成很多坑状微损伤,分布不均的热应力导致表面起伏,并有明显的烧蚀现象,导致基底损伤阈值下降。建立的光吸收和热沉积传输模型初步解释污染物膜层导致熔石英元件损伤的机理。     

酸蚀与紫外激光预处理结合提高熔石英损伤阈值

采用HF酸刻蚀和紫外激光预处理相结合的方式提升熔石英元件的负载能力,用质量分数为1%的HF缓冲溶液对熔石英刻蚀1~100 min,综合透过率、粗糙度和损伤阈值测试结果,发现刻蚀时间为10min的熔石英抗损伤能力最佳。采用355 nm紫外激光对HF酸刻蚀10 min的熔石英进行预处理,结果表明:紫外预处理能量密度在熔石英零损伤阈值的60%以下时,激光损伤阈值单调递增;能量到达80%时,阈值反而低于原始样片的损伤阈值。适当地控制酸蚀时间和紫外激光预处理参数能有效提高熔石英的抗损伤能力。     

355 nm纳秒紫外激光辐照下熔石英前后表面损伤的对比研究

为了理解前后表面损伤不对称性的物理内涵, 利用阴影成像技术研究了纳秒紫外激光诱使熔石英光学元件表面损伤的时间分辨动力学过程.研究表明,纳秒紫外激光与熔石英作用过程中前后表面损伤的物理机理是完全不同的.前表面处空气中等离子体和冲击波较强, 等离子体的屏蔽作用抑制了余脉冲能量的沉积, 降低了元件损伤程度.而后表面处等离子体吸收激光能量膨胀, 对后表面冲击作用更为严重, 形成的等离子体电子密度可达到10²³cm^-3以上, 反射部分激光能量与入射的激光余脉冲干涉, 使得 关键词： 熔石英 激光诱使损伤 阴影成像技术 光学元件表面     

熔石英元件HF刻蚀的实验研究

为深入了解熔石英元件化学刻蚀过程,研究了HF刻蚀反应机理、HF刻蚀工艺参数以及刻蚀对表面质量的影响规律。通过控制变量法,获得刻蚀速率随HF浓度、刻蚀温度以及NH4F浓度的变化规律。对刻蚀不同深度后的元件表面粗糙度、形貌、杂质含量以及激光损伤阈值进行了检测,实验结果表明:刻蚀速率受多种因素共同影响,其中HF浓度的促进作用最为显著;刻蚀后的熔石英表面形貌复杂,有横向、纵向、拖尾等形式的划痕,以及坑点、杂质等缺陷,其中横向划痕和纵向划痕占据了缺陷部分的主体,主要杂质铈元素随刻蚀时间的增长不断减少;激光损伤阈值测量实验表明,通过HF刻蚀将元件损伤阈值提高了59.6%。     

一种大入射角容差宽带薄膜偏振器

通过组合长波通和短波通膜堆的方法,设计并制备了一种大入射角容差宽带薄膜偏振器。该薄膜为HfO_2/SiO_2结构,采用无离子束辅助的电子束蒸发工艺,蒸发金属铪和SiO_2制得。对该膜的透射率光谱、激光损伤阈值和形貌进行了研究,结果显示其不仅在1044~1084 nm波段内都具有很高的对比度,而且在1064 nm波长、53°~60°的入射角范围内具有很大的消光比和激光损伤阈值,且损伤特性基本不随入射角变化。该偏振器的P光损伤阈值约为20 J/cm~2,损伤主要由基板与薄膜界面处的纳米级缺陷所引起;S光损伤阈值约为45 J/cm~2,损伤主要由激光辐照下薄膜表面的等离子烧蚀现象引起。     

Photoacoustic cavitation in spherical and cylindrical absorbers

Photomechanical damage in absorbing regions or particles surrounded by a non-absorbing medium is investigated experimentally and theoretically. The damage mechanism is based on the generation of thermoelastic pressure by absorption of pulsed laser radiation under conditions of stress confinement. Principles of photoacoustic sound generation predict that the acoustic wave generated in a finite-size absorbing region must contain both compressive and tensile stresses. Time-resolved imaging experiments were performed to examine whether the tensile stress causes cavitation in absorbers of spherical or cylindrical shape. The samples were absorbing water droplets and gelatin cylinders suspended in oil. They were irradiated with 6-ns-long pulses from an optical parametric oscillator. Photoacoustic cavitation was observed near the center of the absorbers, even if the estimated temperature caused by absorption of the laser pulse did not exceed the boiling point. The experimental findings are supported by theoretical simulations that reveal strong tensile stress in the interior of the absorbers, near the center of symmetry. Tensile stress amplitudes depend on the shape of the absorber, the laser pulse duration, and the ratio of absorber size to optical absorption length. The photoacoustic damage mechanism has implications for the interaction of ns and sub-nslaser pulses with pigmented structures in biological tissue. Received: 9 October 1998 / Accepted: 5 January 1999 / Published online: 31 March 1999     

The impact of point thermal absorbers in ablation of poly(methyl methacrylate)

Molecular dynamics (MD) simulations are used to study the interactions of photons with a poly(methyl methacrylate), or PMMA, substrate and point thermal absorbers. The point thermal absorbers are embedded within the polymer matrix which can be excited and transfer energy to the surrounding particles through an internal vibrational mode. Using a fluence above the ablation threshold, two excitation channels are studied—one includes a direct heating of the polymer and the other includes the excitation of the thermal absorbers. Although the yield of ejected particles is similar for both simulations, the plume composition differs. For the simulation of the excitation of the point thermal absorbers, the plume consists of a greater number of smaller substrate fragments due to local high temperature regions.     

阶梯反射锥型高能激光能量计温度场控制技术

高能激光会造成吸收体材料表面的温度急剧升高甚至损坏,同时造成吸收体上长期存在较大的温度梯度,这给温度的准确测量造成了很大的难度,为解决上述问题,提出了一种阶梯状镀金反射锥和V型槽结构的吸收体,通过对镀金锥的设计将能量分配到吸收体各部分上,研究了V型槽的几种设计方法对温度场和表面温度的影响,研究表明通过对吸收体各部分的质量和V型槽的参数控制可以大幅降低吸收体各部分的温度梯度、吸收体表面温度和吸收体的平衡时间,从而提高高能激光能量计的激光损伤阈值,并降低温度准确测量难度和减少热损失,最终达到提高准确度的目的。     

金属杂质粒子诱导薄膜的损伤机理研究

薄膜内的杂质粒子极易诱导薄膜损伤,研究了金属粒子诱导HfO₂薄膜损伤的特征,并基于金属粒子的热力学过程进行了分析。金属粒子对激光的强烈吸收将引起薄膜的熔化、气化以及电离,从而引起薄膜的剥离和脱落,形成圆状坑点;金属粒子对激光的吸收、热扩散以及热膨胀效应与其尺寸等密切相关;从温升规律分析,在相同激光能量辐照下,粒子大小引起的温升不同,从而形成大小不一的点坑状破坏点,且存在一个温升效应最强的粒径,最易引起薄膜的损伤;从金属粒子激光等离子体的辐射效应分析,金属粒子的辐射谱主要集中在紫外部分,辐射光子能量比入射激光光子能量强,具有更强的电离能力,从而加剧了薄膜的去除。     

Microperforated insertion units: An alternative strategy to design microperforated panels

Microperforated panels (MPPs) coupled to a rigid wall have been proposed recently as an alternative to porous absorbers in situations having concerns with bacterial contamination and small particles discharge, like food, pharmaceutical and microelectronic industries. There exists also an increasing interest for MPP absorbers in the transportation industry and civil engineering. In general, an optimally designed MPP with good broadband absorption requires many submillimetric holes distributed over a panel of also submillimetric thickness. Such thin plates or foils become so fragile that they need to be protected from mechanical damage. In this paper, an alternative strategy is investigated which allows the design of MPPs with panels of millimetric thickness while maintaining their acoustic performance. These absorbers, named microperforated insertion units (MIUs), avoid the structural problems of the classical MPPs. An assessment of the sound absorption properties of these structures is presented. Comparisons between calculations and measurements are also made under two experimental conditions: plane waves at normal incidence (impedance tube) and free field (anechoic room).     

Porous metal absorbers for underwater sound

Rubber has traditionally been used for underwater sound absorption. Porous metal is a relatively lightweight material and also has higher strength than rubber. However, exactly how porous metals can be used as effective underwater sound absorbers remains unclear. This paper shows how to use porous metal absorbers so that they work well under water, even under fairly constrained conditions. A method of nondimensional analysis is proposed that allows identification of vital characteristics. This means that such characteristics can be varied and the absorbers themselves filled with different types of viscous fluids. Such analysis suggests that the sound absorption coefficient of porous metals does not always increase when there are either increases in porosity or decreases in average pore size. The same method of analysis can show how, by choice of the right characteristics to choose a suitable viscous fluid, a porous metal absorber can be built that takes up little space but still effectively absorbs underwater sounds at low frequencies.     

Desorption of metal atoms with laser light of different polarization

Laser-induced desorption of metal atoms from the surface of small metal particles has been investigated as a function of the shape of the particles and the polarization of the incident laser light. The particles were supported on LiF, quartz or sapphire substrates. In a first set of experiments, the shape of the particles was determined by recording optical transmission spectra with s- and p-polarized light incident under an angle of typically 40° with respect to the surface normal. The metal particles turn out to be oblate, the ratio of the axes perpendicular and parallel to the substrate surface being on the order of 0.5. This ratio decreases with increasing particle size. Also, the particles change shape if the temperature is raised. In further experiments, s- and p-polarized light has been used to stimulate desorption of atoms via surface plasmon excitation. It is found that the desorption rate markedly depends on the polarization of the light. This is explained by excitation of the collective electron oscillation along different axes of the non-spherical particles.     

Optimization of constrained composite absorbers using simulated annealing

Sound reverberation is an important problem in some industrial environments. As indicated by the Occupational Safety and Health Act of 1970, noise is responsible for the psychological and physiological ills of workers. Therefore reduction of reverberation becomes essential. For maintenance and other reasons, the thickness of sound absorbers used for reverberation control may be constrained. Consequently there is interest in minimizing noise using sound absorbers with constrained thickness. Optimization of a composite absorber using a simulated annealing algorithm is presented. Simulated annealing is a stochastic relaxation technique based on analogy with the physical process of annealing metal. The algorithm requires a mathematical model for the acoustical properties of the absorber. Before optimization, the accuracy of the mathematical model was checked against experimental data. A program for optimizing in respect of broad band noise at a specified receiver has been created and run. Results prove that SA optimization provides a quick and efficient approach in designing constrained thickness composite sound absorbers.     

Wideband perfect light absorber at midwave infrared using multiplexed metal structures

We experimentally demonstrate a wideband near-perfect light absorber in the midwave IR region using a multiplexed plasmonic metal structure. The wideband near-perfect light absorber is made of two different size gold metal squares multiplexed on a thin dielectric spacing layer on top of a thick metal layer in each unit cell. We also fabricate regular nonmultiplexed structure perfect light absorbers. The multiplexed structure IR absorber absorbs more than 98% of the incident light over a much wider spectral band than regular nonmultiplexed structure perfect light absorbers in the midwave IR region.