单晶硅表面稀土复合纳米膜的制备与摩擦特性

利用分子自组装技术,在单晶硅表面制备了稀土复合纳米自组装膜.运用原子力显微镜(AFM)观察了薄膜的表面形貌,使用X射线光电子能谱仪(XPS)分析了薄膜表面典型元素的化学状态,并运用静-动摩擦系数测定仪评价了薄膜的摩擦磨损性能.研究结果表明:通过硅烷偶联剂3-巯丙基三甲氧基硅烷(MPTS)的磺酸基化学吸附功能,稀土元素可以成功组装到氧化后的硅烷化表面.当组装稀土复合膜后,基片表面的摩擦系数由无膜时的0.8降到了0.08,表明复合膜可以降低基片的摩擦系数,并且在较低载荷下具有较好的耐磨性能.     

硅基表面稀土改性碳纳米管/氨基硅烷自组装复合膜的摩擦磨损性能

配置稀土溶液对碳纳米管进行表面改性,采用自组装膜技术在单晶硅表面制备了稀土改性碳纳米管复合薄膜,考察了其表面形貌、化学组成和摩擦学性能。扫描电子显微镜观察发现单晶硅表面附着了大量不规则排列碳纳米管,X射线光电子能谱仪分析发现稀土元素与薄膜表面的磷酸基发生了化学反应,从而使碳纳米管组装到基片表面。UMT-2MT摩擦试验机测试结果表明在给定的试验条件下,复合薄膜的摩擦系数较低,随载荷和速度的增加变化不大。由于稀土改性碳纳米管复合薄膜的存在,与未处理碳纳米管复合薄膜、硅烷薄膜相比,基片表面摩擦系数显著降低,并表现出了优异的耐磨性及摩擦稳定性。     

γ-甲基丙烯酰氧丙基三甲氧基硅烷自组装膜的制备及其摩擦学性能

利用分子自组装方法在羟基化的玻璃基片表面制备了γ-甲基丙烯酰氧丙基三甲氧基硅烷单层膜,采用接触角测定仪考察了其成膜速率,采用X射线光电子能谱仪分析了自组装单层膜表面典型元素的化学状态,采用原子力显微镜观察薄膜的表面形貌,并采用静-动摩擦系数测定仪评价了单层膜的摩擦磨损性能.结果表明:当成膜时间达到15 min后,相应的自组装单层膜与水的接触角达到103°,此后接触角随成膜时间的继续延长基本保持不变;γ-甲基丙烯酰氧基三甲氧基硅烷自组装单层膜可以降低基片的摩擦系数,并且在较低载荷下具有较好的耐磨性能.     

硅烷自组装膜及硅烷／二氧化钛复合膜的XPS表征与摩擦性能研究

利用分子自组装膜技术制备了有机硅烷／纳米ＴｉＯ２复合膜,并用ＸＰＳ进行了表征。摩擦磨损试验结果表明,硅烷自组装膜可以降低基片的摩擦系数,但其强度较弱,这可能是由于硅烷与结合强度较弱、硅烷／ＴｉＯ２复合膜的摩擦系数比硅烷自组装膜的摩擦系数小,而且耐磨寿命大幅度较高。摩擦５０次以后,硅烷／ＴｉＯ２复合膜的摩擦系数突然增大并超过干净基片的摩擦系数,这可能是由于ＴｉＯ２微粒磨损脱落并团聚所致。     

二甲基—γ—全氟辛酰氧丙基硅烷自组装膜的制备及其摩擦学性能研究

利用分子自组装技术 ,用含有全氟烷基的氯硅烷作为前驱体 ,在活化玻璃表面制备了二甲基 -γ-全氟辛酰氧丙基硅烷单分子膜 ;用 X射线光电子能谱仪对组装膜表面的几种特征元素及其化学环境进行了表征 ;采用接触角测定仪测定了蒸馏水在自组装薄膜表面的接触角 ,在动静摩擦磨损试验机上评价了薄膜同 GCr1 5钢球对摩时的摩擦磨损性能 .结果表明 :所制备的自组装膜的表面自由能很低 ,具有很好的疏水 -疏油性 ,其对水的接触角高达 1 1 0°;二甲基 -γ-全氟辛酰氧丙基硅烷组装膜可以降低基片的摩擦系数 ,而且在较低负荷下具有很好的耐磨性     

硅表面聚苯乙烯自组装超薄膜的制备及摩擦磨损性能研究

研究了苯乙烯 -乙烯基三乙氧基硅烷共聚物在羟基化基片上的自组装行为及聚合物超薄膜的摩擦磨损性能 .结果表明 ,自组装聚合物薄膜的厚度和均匀程度取决于聚合物成膜溶液的浓度 .与空白基底相比 ,自组装膜修饰的基底在低载荷下同钢对摩时的摩擦系数更低 ,耐磨寿命更长 .因此 ,自组装聚合物薄膜可以作为低载荷下硅基材料的减摩抗磨防护层     

Ti-6Al-4V钛合金表面疏水性复合膜的制备及其微摩擦磨损性能

通过自组装分子膜（SAMs）方法和有机镀膜技术在Ti-6Al-4V钛合金表面成功制备了三嗪硫醇三乙基硅烷（TES）自组装分子膜（TES-SAMs）和含氟官能团的三嗪硫醇（ATP）复合膜（TES-ATP）.采用X射线光电子能谱仪、接触角测量仪、椭圆偏振光谱仪、原子力显微镜、超景深三维显微镜和UMT-2型摩擦磨损试验机评价薄膜结构及其微摩擦学特性.研究结果表明：TES-SAMs自组装分子膜和TES-ATP复合膜的膜厚分别为3.9和22.2 nm,其对蒸馏水的接触角分别为94.5°和130.5°,呈疏水性.TES-SAMs自组装分子膜和TES-ATP复合膜均能有效降低基体的摩擦系数,TES-SAMs自组装分子膜的摩擦系数稳定在0.23,TES-ATP复合膜的摩擦系数为0.17,而空白基体的摩擦系数为0.50;同时TES-ATP复合膜还表现出良好的抗磨性能.     

碳纳米管改性聚四氟乙烯复合材料的摩擦磨损性能研究

评价了用不同含量碳纳米管(CNTs)改性聚四氟乙烯(PTFE)复合材料的力学性能,利用MM-200型摩擦磨损试验机研究了CNTs含量对PTFE复合材料摩擦磨损性能的影响,借助于扫描电子显微镜观察分析了试样磨损表面及磨屑形貌,并探讨其磨损机理.结果表明:CNTs能够提高PTFE复合材料的硬度和冲击强度,在本文研究范围内,当CNTs的质量分数为7%时,PTFE复合材料的力学性能最佳;CNTs能够增加PTFE复合材料的摩擦系数、降低其磨损量,当其质量分数为10%时,PTFE复合材料的耐磨损性能最佳.纤维状碳纳米管可以阻止PTFE带状结构的大面积破坏,以及在摩擦过程中于偶件表面能够形成转移膜并隔离复合材料与偶件的直接接触是其减摩耐磨作用的主要原因.     

PF/CNTs-Cu复合材料的制备及其载流摩擦磨损机理研究

以酚醛树脂(PF)、碳纳米管(CNTs)和泡沫铜(Cu)为原料,在反应釜内经无压浸渗和加压固化技术,制得一种新型PF/CNTs-Cu复合材料.在CSM摩擦磨损仪上,对不同CNTs含量的PF/CNTs-Cu复合材料进行了载流摩擦磨损测试.结果表明:未经CNTs改性的PF/Cu复合材料,摩擦系数和磨损率均最大,摩擦表面存在大量的犁沟痕迹,表现为典型的磨粒磨损.经CNTs改性后的PF/CNTs-Cu复合材料,载流摩擦磨损性能获得较大程度的改善.当CNTs质量分数在0.25%~1.0%范围内时,随着CNTs含量的增加,摩擦系数和磨损率逐渐减小,并在质量分数为1.0%时达到最小值.摩擦磨损机制则由最初的磨粒磨损逐渐转变为黏着磨损.当CNTs达到1.5%时,由于CNTs的团聚作用,导致复合材料的摩擦磨损性能急剧下降,摩擦磨损机制转变为磨粒磨损和黏着磨损共同作用形式.     

纳米弹性复合DLC薄膜的制备及其摩擦性能研究

利用磁过滤阴极真空弧沉积系统在硅片及以硅片为基底的2种弹性体材料表面沉积厚度为2.7 nm的DLC膜,采用原子力显微镜和拉曼光谱仪对薄膜的形貌及成分进行分析,用纳米力学测试系统测量薄膜的弹性模量和硬度,用UMT-2型多功能微摩擦磨损试验机考察其摩擦性能.结果表明,以γ-缩水甘油醚氧丙基三甲氧基硅烷(187)为偶联剂的薄膜试样表面比以γ-氨丙基三乙氧基硅烷(APS)为偶联剂的薄膜试样表面更致密且粗糙度更低,薄膜的最上层为DLC膜.在硅表面沉积DLC薄膜可以显著降低其表面的摩擦系数(0.117～0.137),在低载荷条件下,含偶联剂及弹性体的DLC薄膜的摩擦系数低于硅表面沉积DLC的薄膜,且以187为偶联剂的薄膜试样的摩擦性能更佳;在高载荷条件下,硅表面沉积DLC的薄膜具有更优异的摩擦性能.     

Stress and Moisture Effects on Thin Film Buckling Delamination

Deposition processes control the properties of thin films; they can also introduce high residual stresses, which can be relieved by delamination and fracture. Tungsten films with high 1–2 GPa compressive residual stresses were sputter deposited on top of thin (below 100 nm) copper and diamond-like carbon (DLC) films. Highly stressed films store large amounts of strain energy. When the strain energy release rate exceeds the films' interfacial toughness, delamination occurs. Compressive residual stresses cause film buckling and debonding, forming open channels. Profiles of the buckling delaminations were used to calculate the films' interfacial toughness and then were compared to the adhesion results obtained from the superlayer indentation test. Tests were conducted in both dry and wet environments and a significant drop in film adhesion, up to 100 times was noticed due to the presence of moisture at the film/substrate interface.     

表面溶胶-凝胶法制备TiO2薄膜的微观结构及其摩擦磨损性能研究

采用表面溶胶-凝胶法在普通载玻片上制备TiO2纳米结构薄膜,用X射线光电子能谱仪(XPS)、X射线衍射仪(XRD)和原子力显微镜(AFM)分析薄膜组成结构及其表面形貌,用UMT-2型摩擦磨损试验机考察表面溶胶-凝胶法和传统体溶胶-凝胶法制备的TiO2薄膜的摩擦磨损性能,用扫描电子显微镜(SEM)观察分析薄膜表面及其磨痕表面形貌.结果表明,与传统体溶胶-凝胶法相比,表面溶胶-凝胶法制备的薄膜摩擦磨损性能得到明显改善.这是由于多次干燥过程在一定程度上避免了传统体溶胶-凝胶工艺的后续干燥和热处理过程中大量残留溶剂瞬时溢出而导致的结构缺陷,从而使得薄膜具有更高的致密性,降低了薄膜表面粗糙度,提高了抗磨性.     

离子液体/织构化类金刚石碳复合润滑薄膜的构筑及其摩擦学性能的研究

分别采用激光织构、磁控溅射和浸渍-提拉技术在单晶硅片表面成功构筑了具有离子液体纳米薄膜的织构化类金刚石碳复合润滑薄膜,采用三维轮廓仪和SEM观察了织构化类金刚石碳表面,通过X射线光电子能谱证实了织构化类金刚石碳膜表面离子液体纳米薄膜的存在,并利用微摩擦试验机重点考察和理论分析了这种复合润滑薄膜在较大和微载荷下的摩擦学性能.研究结果表明:这种离子液体/织构化类金刚石碳复合润滑薄膜在微载荷下能够有效地缩短磨合时间、降低摩擦系数,然而其在小载荷下摩擦学性能欠佳.     

磁控溅射Al靶功率对类金刚石薄膜的结构和摩擦学性能影响

本文采用中频磁控溅射金属Al靶,以CH4为反应气体,通过调整Al靶溅射功率,在p(100)单晶硅片和不锈钢基底上成功制备出不同Al含量的Al/a-C:H纳米复合薄膜。并利用HR-TEM、XPS、纳米压痕仪和摩擦磨损试验机等手段分析和研究了Al/a-C:H薄膜的结构、机械及摩擦学性能。结果表明：金属Al以纳米晶颗粒形式镶嵌在非晶碳网络中,使得所制备Al/a-C:H薄膜呈现出典型的纳米晶/非晶复合结构;同时,Al掺杂促进薄膜中sp2杂化碳形成,且有效地释放残余内应力。Al靶溅射功率为800 W时所制备的Al/a-C:H薄膜具有结构致密、内应力低、硬度高的特性;在大气环境中,该薄膜与Si3N4陶瓷球干摩擦时显示出优越的摩擦学性能,其摩擦系数约为0.055,磨损率约为2.9×10-16 m3/(N?m)。     

Nanomechanical Property and Nanowear Measurements for Sub-10-nm Thick Films in Magnetic Storage

In the magnetic storage industry, thin film carbon overcoats play a critical role in reducing magnetic and physical spacing between the recording slider and the rotating disk so that the information stored per unit area is maximized. Thin film carbon overcoats have been improved such that they exhibit higher hardness with lower thickness of few nanometers and still being able to perform reliably. In this paper, nanoindentation and nanoscratch techniques to measure nanomechanical properties, namely hardness, elastic modulus and shear strength of thin solid films were presented along with a recently developed high resolution force transducer. Nanowear behavior characterization techniques were also examined and were applied to commercially available magnetic disks to characterize their wear behavior. It was shown that the properties and wear behavior of sub-10-nm thick film carbon overcoats were reliably measured. These techniques could be applied to different thin solid films on substrates, and they are not restricted to magnetic storage systems.     

Finite width effect of thin-films buckling on compliant substrate: Experimental and theoretical studies

Buckling of stiff thin films on compliant substrates has many important applications ranging from stretchable electronics to precision metrology and sensors. Mechanics plays an indispensable role in the fundamental understanding of such systems. Some existing mechanics models assume plane-strain deformation, which do not agree with experimental observations for narrow thin films. Systematic experimental and analytical studies are presented in this paper for finite-width stiff thin films buckling on compliant substrates. Both experiments and analytical solution show that the buckling amplitude and wavelength increase with the film width. The analytical solution agrees very well with experiments and therefore provides valuable guide to the precise design and control of the buckling profile in many applications. The effect of film spacing is studied via the analytical solutions for two thin films and for periodic thin films.     

nc-TiC/a-C纳米复合多层薄膜的制备及其摩擦学性能的研究

采用磁过滤阴极弧等离子体沉积技术,在单晶硅片上制备了不同亚层厚度和亚层弹性模量匹配的nc-Ti C/a-C纳米复合多层薄膜,采用X射线粉末衍射仪、扫描电子显微镜和透射电子显微镜对其微观结构进行表征,利用激光扫描仪对其内部应力进行测试,采用微摩擦磨损试验机表征薄膜的摩擦磨损性能,以考察多层结构设计对于薄膜机械性能的影响.结果表明:多层薄膜相对于单层薄膜可以有效降低膜层内应力,同时薄膜的减摩抗磨性能也得到了提高.亚层厚度为40 nm和相邻亚层弹性模量差距较小的nc-Ti C/a-C纳米复合多层薄膜的抗磨性能最佳.     

相对湿度对类金刚石薄膜摩擦磨损性能的影响

利用等离子体增强化学气相沉积技术在单晶硅表面制备了含氢类金刚石薄膜,在球-盘摩擦磨损试验机上考察了相对湿度对薄膜摩擦磨损性能的影响,利用扫描电子显微镜和X射线光电子能谱仪观察和分析其磨损表面形貌和化学状态的变化情况.结果表明,随着相对湿度增加,DLC薄膜的摩擦系数和磨损率增加.这主要是由于薄膜表面氧化作用所致.     

A Variational Model of Disjoining Pressure: Liquid Film on a Nonplanar Surface

Variational methods have been successfully used in modelling thin liquid films in numerous theoretical studies of wettability. In this article, the variational model of the disjoining pressure is extended to the general case of a two-dimensional solid surface. The Helmholtz free energy functional depends both on the disjoining pressure isotherm and on the shape of the solid surface. The augmented Young–Laplace equation (AYLE) is a nonlinear second-order partial differential equation. A number of solutions describing wetting films on spherical grains have been obtained. In the case of cylindrical films, the phase portrait technique describes the entire variety of mathematically feasible solutions. It turns out that a periodic solution, which would describe wave-like wetting films, does not satisfy Jacobi’s condition of the classical calculus of variations. Therefore, such a solution is nonphysical. The roughness of the solid surface significantly affects liquid film stability. AYLE solutions suggest that film rupture is more likely at a location where the pore-wall surface is most exposed into the pore space, and the curvature is positive.