Diffraction reflection of a focused X-ray wave by a multilayer crystal

The Bragg diffraction of a narrow X-ray beam in a multilayer crystal is studied in the reflection geometry. It is shown by computer simulation of the experiment that strong integrated kinematic reflection occurs at any boundary of a multilayer crystal at the point of intersection of a narrow beam with the boundary. In contrast to the dynamic diffraction of a plane wave, attenuation of a narrow incident beam due to the reflection is small in comparison with the conventional absorption. As an example of a multilayer crystal, a Fabry-Perot interferometer is considered, which consists of two 70-μm-thick crystal Si layers separated by a 100-μm-thick air layer. The 12 4 0 reflection is studied at a photon energy of 15 keV. Three methods of formation of a narrow beam are considered: wavefront limitation by a slit, focusing with a parabolic lens, and focusing with a zone plate. It is shown that, for a local analysis of the thickness of layers and scattering parameters, the method of parabolic lens focusing has some advantages in comparison with the other methods.     

Compression of Acoustic Beams at Conversion Reflection in Hexagonal Crystals

It is shown how the entire energy of an acoustic beam incident on a boundary of a hexagonal crystal can be directed into a narrow reflected beam propagating at a small angle to the surface. This process is accompanied by mode conversion: the incident and reflected beams belong to different acoustic branches. The conversion near the total internal reflection is implemented by matching the orientations of the sagittal plane and surface and thereby eliminating the loss for parasitic wave reflection. The found conversion conditions and resonant reflection parameters are expressed in terms of the moduli of elasticity of crystal.     

Study of surface and interface roughnesses in porous silicon by high-resolution X-ray methods

The methods of triple-crystal X-ray diffractometry and the total external X-ray reflection are used to study porous silicon films on a p-type single crystal Si(111) substrate. For the first time, an increase of the pseudopeak intensity was experimentally observed for thick porous films. The following film characteristics are determined: thickness (1.8 μm), strain (3.8 × 10^?3), porosity (70%), pore size (～5 nm), roughness height of the surface (～3 nm) and the film—substrate interface (～7 nm), and correlation length (～7–10 nm). It is shown that the main contribution to the pseudopeak intensity for thin films on single crystal substrates comes from angular broadening of the incident beam formed by the exit slit of a monochromator of a finite width. It is shown that the method is very sensitive to density inhomogeneity in subsurface crystal layers.     

Grazing-incidence dynamic X-ray diffraction from a crystal with a shaped surface

The dynamic grazing-incidence X-ray diffraction from a crystal with a shaped surface in the form of one-dimensional submicron grating has been investigated. The interaction between the specularly reflected and diffracted waves and grating harmonics is taken into account for noncoplanar diffraction under the conditions of total external reflection. It is shown that this approximation exhibits good convergence in the number of harmonics taken into account. The influence of the angular divergence of the incident beam on the rocking-curve shape is shown.     

Spectrometer of Synchrotron Radiation Based on Diffraction Focusing a Divergent Beam Formed by a Compound Refractive Lens

The results of the first experimental realization of a spectrometer based on the effect of diffraction focusing of X rays by a flat single crystal are discussed. A secondary X-ray source with a relatively high angular divergence and small sizes was formed at the focus of a compound refractive lens having 50 beryllium biconcave elements with a curvature radius of 50 μm. The silicon spectrometer crystal was cut in the form of a wedge of variable thickness, oriented perpendicular to the diffraction plane. The reflection 111 was used for energies of 8.3 and 12 keV. To simulate the experiment, a computer program was developed, which takes into account accurately and for the first time the focusing of radiation by the lens and its subsequent diffraction in the crystal. A calculated curve for a monochromatic beam has made it possible to determine the monochromator spectrum with high resolution from experimental data for a polychromatic beam. It is shown that monochromator resolution increases with an increase in the distance from the compound refractive lens to the crystal.     

Supersmooth and modified surface of sapphire crystals: Formation,characterization, and applications in nanotechnologies

The results of studying the state of the surface of sapphire crystals by a complex of methods in different stages of crystal treatment are considered by an example of preparing sapphire substrates with a supersmooth surface. The possibility of purposefully forming regular micro- and nanoreliefs and thin transition layers using thermal and thermochemical impacts are considered. The advantages of sapphire substrates with a modified surface for forming heteroepitaxial CdTe and ZnO semiconductor films and ordered ensembles of gold nanoparticles are described. The results of the experiments on the application of crystalline sapphire as a material for X-ray optical elements are reported. These elements include total external reflection mirrors and substrates for multilayer mirrors, output windows for synchrotron radiation, and monochromators working in the reflection geometry in X-ray spectrometers. In the latter case, the problems of the defect structure of bulk crystals sapphire and the choice of a method for growing sapphire crystals of the highest structural quality are considered.     

Fast ultrasonic wavelength tuning in X-ray experiment

A method of tuning (scanning) X-ray beam wavelength based on modulation of the lattice parameter of X-ray optical crystal by an ultrasonic standing wave excited in it has been proposed and experimentally implemented. The double-crystal antiparallel scheme of X-ray diffraction, in which an ultrasonic wave is excited in the second crystal, is used in the experiment. The profile of characteristic line k_α1 of an X-ray tube with a molybdenum anode is recorded using both the proposed tuning scheme and conventional mechanical rotation of crystal. The results obtained by both techniques are in good agreement.     

Double-Crystal Rocking Curve Simulation Using 2D Spectral Angular Diagrams of X-Ray Radiation

A new approach to numerical simulation of double-crystal rocking curves is proposed. This approach is based on the use of experimental spectral angular diagrams of X-ray intensity distribution. Special calculation algorithms, which take into account the instrumental function of X-ray diffractometer and possible effects of dispersion and Bragg reflection asymmetry, have been developed and applied. A specific feature of the proposed approach is the possibility of visualizing the 2D spectral angular diagram of X-ray beam after its interaction with each element of the scheme. The approach makes it possible to perform calculations for a wide range of radiation sources (from an X-ray tube with any anode to a synchrotron radiation source) and X-ray optical elements (slits and monochromators). A comparison of simulation results and experimental data for a Si(110) crystal sample has confirmed adequacy of the proposed approach and its applicability for simulating diffraction patterns recorded in real experiments.     

碲锌镉晶体晶格畸变的测定与分析

在高分辨X射线衍射仪上,利用不对称布拉格衍射STD技术与单晶摇摆曲线技术相结合的方法,对碲锌镉单晶材料的晶格畸变进行了分析测定.此方法实现了一次装样,多角度、多次测定晶体的摇摆曲线,从而利用多组实验数据完成多元线性回归方程组的求解,避开了一般应变测定方法中难以确定无应力状态下衍射角的问题.所测定的生长态碲锌镉晶片晶格畸变量为10-3～10-2数量级,该畸变量是碲锌镉晶片存在成份偏析、位错和空位等缺陷以及晶片受到的应力综合作用的结果.     

A method for implementing the diffraction of a widely divergent X-ray beam

A method for implementing the diffraction of a widely divergent characteristic X-ray beam from a standard X-ray tube with a linear focal spot was improved. X rays, passing through a diaphragm 30 μm in diameter, diffract from a crystal adjacent to the diaphragm. The crystal, together with a photographic plate, rotates around the axis perpendicular to the plate. It is shown that the diffraction image is a set of hyperbolas in this case. The equations of the hyperbolas are obtained and investigated. A method for interpreting the diffraction images in the case of small crystal asymmetry is proposed.     

X-Ray-Interferometric Determination of Å-scale Lattice Shifts at the Surface of Silicon Crystals — the Analogue to Light-Optical Interference Microscopy

The paper presents a new imaging method based on a refined and better stabilised X-ray Michelson interferometer [Appel , Bonse ]. Interference fringes are detected which mark local Å-scale shifts of the lattice at the surface of the interferometer's phase-shifter crystal. Conventional double-crystal topography (DCT), lacking phase information of the beam reflected by the specimen crystal, does not detect mere lattice shifts. The new method appears to be also more sensitive to any combined lattice strain δ ≡ Δd/d + cot θ_B Δθ (θ_B: Bragg angle, d: lattice parameter) present in the crystal layer contributing to the surface Bragg reflection. δ is known to be the dominant part of the DCT image [Bonse , 1958; Bonse , Hartmann ]. The technique presented here is the X-ray analogue to the well known light-optical interference microscope. A possible application is the testing of silicon crystals for minute lattice imperfections causing lattice-incoherent positions of atoms in a surface layer of typical 1 to 10 μm thickness. For instance striations, which under certain conditions arise during crystal growth, cause such incoherence.     

Verfahren und Vorrichtung zur Bestimmung von Krümmungen einkristalliner,scheibenförmiger Körper

With the production of semiconductor devices the problem of bending of monocrystalline slices occurs, these being an expression of the reduction of the crystal perfection, increasing with each working step during the technological process. Thus the determination of the bend can give an information on the influence of each working step on the internal stresses of the crystalline body. A procedure is described which takes advantage of the Bragg reflection of an X-ray beam in the lattice planes of the crystal, in order to determine the inclination of the plane. A design is presented based on this procedure permitting a high degree of automation.     

Dynamic variation in the lattice parameter of a crystal under ultrasonic treatment in X-ray diffraction experiments

The X-ray diffraction in the Laue geometry is investigated in germanium and silicon single crystals upon excitation of long-wavelength ultrasonic elastic strain waves traveling along the sample surface. The X-ray diffraction beam is bounded by a slit 0.2 mm in size, which is considerably less than the wavelength of the ultrasonic wave. The use of this slit makes it possible to separate crystal regions with a nearly homogeneous strain. As a consequence, the rocking curves stroboscopically measured in a double-crystal dispersionless scheme at different instants of time almost coincide with those for a perfect crystal with a lattice parameter varying in time. The rocking curves measured in a time-integrated mode turn out to be broadened, but their integrated intensities remain unchanged. Possible applications of the developed method are discussed.     

The Influence of the Dispersion and Vertical Divergence on the Reflection Curve of a Double-crystal Arrangement

The influence of the dispersion and vertical divergence on the half width of the reflection curves was investigated using a double-crystal arrangement where the second crystal could be rotated about an axis parallel to the beam reflected by the first crystal. The experimentally measured dependence of the half width of the reflection curves on the angle of rotation φ is accurately confirmed by geometrical considerations.     

铜单晶的定向方法研究

采用改进的垂直布里奇曼法生长出外观完整、表面光滑、尺寸为φ15 mm×35 mm的Cu单晶体,报道了一种铜单晶定向的新方法.将生长出的铜晶锭在浓度为40;的硝酸溶液中浸蚀10 min左右,晶锭表面出现取向一致的反光面,用激光正反射法对其表面的反光面进行初步定向,再参照X射线衍射回摆谱对晶面进行修正,得到了铜晶体的(111)、(200)和(220)晶面,进而得到任意所需的晶面.该方法对于制作铜单品器件具有重要参考价值.     

X-ray specular reflection under conditions of extremely asymmetric noncoplanar diffraction from a bicrystal

The angular dependence of the intensities of X-ray specular reflection has been rigorously analyzed under conditions of noncoplanar grazing Bragg diffraction in a crystal coated with a crystalline film (bicrystal). It is shown that the anomalous angular dependence of the specular-reflection intensity is extremely sensitive to the thickness (from fractions of a nanometer up to several nanometers), deformation, and the amorphization degree of the crystalline films. The optimum conditions for recording intensities are attained at grazing angles equal to 1.5–4.0 of the critical angle of the total external reflection.