基于共焦原理的反射式自聚焦光纤传感技术研究

基于共焦显微成象原理,提出了一种由自聚焦透镜和X型光纤组成的高精度反射式自聚焦光纤传感器.该传感器具有绝对位置跟踪的特殊能力,并有体积小、抗干扰性强、轴向分辨率高等特点.由实验分析得,其轴向分辨率可达30nm.可用于表面微观形貌、外形尺寸、曲面轮廓等测量领域.     

自聚焦透镜列阵的色差测量

本文分析了色差的产生和表示，计算和测量了锂玻璃自聚焦透镜成像系统中的轴向色差与横向色差，讨论了色差对自聚焦透镜列阵成像的影响。     

差动共焦显微成像高稳定三维扫描技术与系统

激光差动共焦显微镜具备高空间分辨率特点,但因其逐点扫描成像方式,扫描时间长,易受三维扫描系统不稳定和环境干扰等影响,产生系统漂移,影响仪器的空间分辨率。利用楔块机构高稳定特点,结合刹车机构的自由抱闸特性,设计了一种新型的轴向升降机构,由此构建了结构更具稳定特性的电动三维扫描系统。稳定性实验验证在搭建的激光差动共焦显微镜上进行,经过监测系统在90min内的轴向位置,轴向漂移小于50nm,与原三维扫描系统漂移140nm对比,漂移速度明显减慢,稳定性有显著提升,进而明显改善了差动共焦显微成像效果。     

基于光探针技术的自聚焦透镜光斑测量方法

以扫描探针显微理论为基础,讨论了基于光学纤维探针技术的自聚焦透镜光斑测量方法,介绍了实验系统的构成和测量原理、光学探针的制作和软件控制技术,并且以日本产NSG自聚焦透镜为样品进行了光斑测量和分析.所得结果对于评价自聚焦透镜的成像性能具有重要意义.     

使用自聚焦透镜测量小位移的新方法

提出一种使用自聚焦透镜构成的光强度调制的光学位移测量原理，利用发光二极管作光源，光从第一根自聚焦透镜发出，然后受到反射镜的反射而进入第二根自聚焦透镜，当反射镜有小位移时，进入第二根自聚焦透镜的光强度被调制，用光电管检测光强度的变化，可以确定位移的大小。根据该原理，位移分辨率的理论值可达１０＾－９ｍ，实验测量的位移分辨率为１０＾－８ｍ，该原理亦可用于测量小振动和压力等量。     

差动共焦式纳米级光聚焦探测系统的研究

为解决纳米级大范围的非接触测量问题 ,提出了基于差动式共焦显微技术的光聚焦探测系统。介绍了系统的工作原理和结构装置 ,对系统中的关键技术进行了优化设计 ,通过对共焦光路的差动设计 ,可以有效地抑制光源的噪声和漂移对测量结果的影响。初步实验结果表明 ,该系统的轴向分辨率可达 2 nm     

自聚焦透镜列阵的设计原理与制造

讨论了自聚焦透镜及其列阵成像的规律.根据所需列阵的共轭距离,分辨率等确定单根自聚焦透镜的几何尺寸和光学参数,设计出复印机用的自聚焦透镜列阵.最后,对列阵的制造作了初步介绍.     

自聚焦透镜组合光学系统的光线传输分析

本文导出了自聚焦透镜组合光学系统的光线传输方程,讨论了光线传输与自聚焦透焦透镜参数关系。对几种典型自聚焦透镜组合进行了计算、从而估计自聚焦透镜参数选择。     

微分干涉差共焦显微膜层微结构缺陷探测系统

多层膜极紫外光刻掩模"白板"缺陷是制约下一代光刻技术发展的瓶颈之一,为提高对掩模"白板"上的膜层微结构缺陷的分辨能力,提出了一种微分干涉差共焦显微探测系统方案。基于标量衍射理论,计算了系统横向和轴向分辨率。利用MATLAB建模仿真,在数值孔径为0.65、工作波长为405 nm时,分析比较了微分干涉差共焦显微系统、传统显微系统和共焦显微系统的分辨率。结果表明微分干涉差共焦显微系统具有230 nm的横向分辨率和25 nm轴向台阶高度差的分辨能力(对应划痕等缺陷形式)。此外,仿真和分析了实际应用中探测器尺寸、样品轴向偏移等的影响,模拟分析了膜层微结构缺陷的探测,结果表明本系统可以探测200 nm宽、10 nm高的微结构缺陷,较另外两种系统有更好的探测能力。     

采用变焦液体透镜的共焦检测系统的设计与仿真

共焦显微技术越来越广泛地应用于微机电系统和半导体器件的三维轮廓测量。设计一种新型采用变焦透镜作为轴向扫描方式的共焦显微系统,利用变焦透镜的焦距变化来代替传统的轴向位移扫描。系统实现了无机械运动的轴向扫描,消除了传统共焦系统中由位移台移动带来的振动,不仅减小了系统的复杂度,而且降低了成本。进一步设计了基于位移台和变焦透镜的两种共焦检测系统,并且对其进行了仿真实验。实验结果表明:基于位移台和基于变焦透镜的共焦系统的聚焦成像和离焦成像结果类似,并且光强的轴向分布曲线也基本相同,表明此方法可行。     

An optical system incorporating gradient-index lens for confocal inspection

A differential confocal measurement system features high lateral resolution and depth-discriminated sections. In comparison with conventional lens, gradient-index lens is lighter in weight, smaller in volume and easy to couple. In order to facilitate the measurement of a small irregular surface in a limited space, a small optical inspection system is presented, which combines the high axial resolution and absolute position tracking capability of a differential confocal microscopy and the compact design of gradient-index lens, and uses gradient-index lens to obtain a small detector of 1 mm in diameter. The operating principle and construction of the measurement system are detailed. The differential design of the two detectors eliminates both the fluctuation of light source and the electronic noise from probes, and increases the axial resolution as well.     

Dual-axes differential confocal microscopy with high axial resolution and long working distance

We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours.     

Improved axial resolution in confocal fluorescence microscopy using annular pupils

The axial image of a thick fluorescent layer is studied in a confocal microscope consisting of either circular or annular pupils. The response for circular pupils is sharper than that for annular pupils if a small pinhole detector is used. But when the size of the pinhole is larger than a certain value, the response in the latter case can become sharper than that in the former. This result implies that for a given detector of finite size, axial resolution in confocal fluorescence microscopy can be improved when an annular lens is used. Our experimental results qualitatively demonstrate the theoretical prediction. The strength of optical sectioning and the axial cross-section of the three-dimensional optical transfer function are also derived from the measured data.     

基于CCD虚拟针孔探测的双轴共焦显微技术

双轴共焦显微技术具有独特的非共轴结构,与传统单轴共焦显微技术相比可利用较低数值孔径物镜实现较高的轴向分辨力,且具有工作距离大、信噪比高等优势。对基于CCD虚拟针孔(VPH)探测的双轴共焦显微成像系统的空间分辨特性进行了理论分析,并构建了相应的实验系统,对其轴向响应进行了实验验证。实验中照明物镜NAi=0.117,采集物镜NAc=0.106,θ=45°,得出系统轴向半高宽(FWHM)为2.63μm,比同等参数(NA=0.117)下单轴共焦显微系统的轴向FWHM高出约20倍。     

应用共焦显微镜原理测量倾斜工程表面

用基尔霍夫衍射公式分析反射式共焦光路 ,得到了被测件有一定倾斜角度表面的共焦轴向响应理论模型。由菲涅耳衍射近似公式得到的共焦轴向响应特性只是它的理论模型的一个特例。同时 ,对接收端采用差动连接的共焦测量的聚焦瞄准信号进行了分析 ,得到了表面倾斜角对聚焦瞄准信号影响的关系。应用共焦实验系统及差动测量系统对具有不同倾角的块规斜面的轴向响应信号进行了测量。理论模型的数值分析与实验结果相吻合。用差动共焦光学系统作为瞄准传感器、用电容传感器进行位移监测 ,对倾角为 10°的角规的斜面进行测量 ,得到分辨率小于 2 0nm的表面形貌图。     

In vivo dark-field reflection-mode photoacoustic microscopy

Reflection-mode photoacoustic microscopy with dark-field laser pulse illumination and high-numerical-aperture ultrasonic detection is designed and implemented in noninvasively imaged blood vessels in the skin in vivo. Dark-field optical illumination minimizes the interference caused by strong photoacoustic signals from superficial structures. A high-numerical-aperture acoustic lens provides high lateral resolution, 45-120 microm in this system. A broadband ultrasonic detection system provides high axial resolution, estimated to be approximately 15 microm. The optical illumination and ultrasonic detection are in a coaxial confocal configuration for optimal image quality. The system is capable of imaging optical-absorption contrast as deep as 3 mm in biological tissue.     

Multi-color miniature dual-axis confocal microscope for point-of-care pathology

We present a miniature microelectromechanical systems-based dual-axis confocal microscope capable of spatially coregistered fluorescence and reflectance imaging at multiple wavelengths. This device has a 10 mm diameter scan head with a 2 mm diameter tip for convenient use during surgery to guide tumor resection. The microscope has an adjustable focal depth of 20-200 micrometers and is capable of imaging with an axial resolution of 9 micrometers and in-plane resolution of 4 micrometers over a field of view of 450×450 micrometers. Simultaneous two-color imaging of individual optical sections is achieved by using a pair of grating-prism assemblies to compensate for chromatic dispersion in the 2 mm diameter gradient index relay lens at the distal tip of the device. Experimental measurements of the axial response of the microscope, as well as two-color images of a reflective bar target and fresh mouse brain tissues, demonstrate the performance of our device and its potential for multicolor in vivo optical sectioning microscopy.     

Two-photon fluorescence endoscopy with a micro-optic scanning head

A major obstacle in the race to develop two-photon fluorescence endoscopy is the use of complicated bulk optics to transmit an ultrashort-pulsed laser beam and return the emitted fluorescence signal. We describe an all-fiber two-photon fluorescence microendoscope based on a single-mode optical fiber coupler, a microprism, and a gradient-index rod lens. It is found that the new endoscope exhibits an axial resolution of 3.2 microm and is capable of imaging transverse cross sections of internal cylindrical structures as small as approximately 3.0 mm in diameter. This device demonstrates the potential for developing a real-time diagnostic tool for biomedical research without the need for surgical biopsy and may find applications in photodynamic therapy, microsurgery, and early cancer detection.