A new fabrication technique for photonic crystals: Nanolithography combined with alternating-layer deposition

We propose two photonic crystal structures that can be created by combining nanolithography with alternating-layer deposition. Photonic band calculations suggest that a drilled alternating-layer photonic crystal combining two-dimensional (2D) alternating multilayers and an array of vertically drilled holes may achieve a full photonic bandgap. In addition, a 3D/2D/3D cross-dimensional photonic crystal, which sandwiches a 2D photonic crystal slab between three-dimensional (3D) alternating-layer photonic crystals, should provide better vertical confinement of light than a conventional index guiding slab. Fabrication techniques based on existing technologies (electron beam lithography, bias sputtering, and low-pressure ECR etching) require very few process steps. Our preliminary fabrication suggests that, by refining these technologies, we will be able to realize photonic crystals.     

基于双表面等离子激元吸收的纳米光刻

光刻技术(lithography)是微纳结构制备的关键技术之一.受限于光的衍射极限,传统光刻方法进一步缩小特征尺寸变得越来越难.表面等离子激元(surface plasmon polariton,SPP)作为光与金属表面自由电子密度振荡相互耦合形成的一种特殊电磁形式,具有波长短、场密度大、异常色散等特点,在突破传统光学衍射极限的研究和应用中具有重要的学术和实用价值.本文针对SPP在光刻胶中的非线性吸收及其在大视场纳米光刻中的应用进行了理论和实验探索.在回顾SPP概念的基础上,阐述了双SPP吸收的概念及其应用于纳米光刻的优势,明确了该效应具有与传统双光子吸收不同的内涵和特性.在800和400nm飞秒激光的作用下,实现了基于双SPP吸收效应的周期干涉条纹,同时验证了双SPP吸收的闽值效应,通过控制曝光计量实现了图形线宽的调控,最小线宽小于真空光波长的1/10.利用SPP波长短、场增强的特点,并结合非线性吸收的闽值效应,单次曝光区域比纳米图形尺度大4 5个数量级,曝光区域的直径可达1.6 mm.同时制备出较为复杂的同心圆环结构.基于双SPP吸收独有的特性以及SPP丰富的模式,有望进一步在大光刻视场、超小尺度图形光刻技术上获得突破.     

Nanolithography with metastabile helium

We have used a self-assembling monolayer of dodecanethiole molecules as the resist for a lithography technique based on a beam of metastable helium atoms. Doses as low as 3 metastable helium atoms per 10 molecules are enough to write patterns into this resist. An edge resolution of 30 nanometers is demonstrated. The writing mechanism is based on the damage of the resist due to Penning ionization.     

Carbon nanotubes as heat dissipaters in microelectronics

We review our recent modelling work of carbon nanotubes as potential candidates for heat dissipation in microelectronics cooling. In the first part, we analyze the impact of nanotube defects on their thermal transport properties. In the second part, we investigate the loss of thermal properties of nanotubes in presence of an interface with various substances, including air and water. Comparison with previous works is established whenever is possible.     

Nanolithography with an atomic force microscope

A lithographic technique, employing the vibrating tip of an atomic force microscope to mechanically pattern various materials such as photoresist, metals or semiconductors in the nanometre regime has been developed. We use this technique for the fabrication of etch masks as well as for the patterning of evaporation shadow masks.The tip quality has been found to be a crucial factor in the lithographic resolution. We therefore use ultra hard, amorphous carbon tips, which are prepared by electron beam deposition in an electron microscope. With these tips, additionally sharpened in an oxygen plasma, we now succeed in fabricating hole arrays with periods in the 10 nm regime. These hole arrays are transferred to the electron system of a GaAs–AlGaAs heterostructure, and the magneto resistance of such fabricated antidot arrays is discussed.     

Nanolithography Considerations for Multi-Passband Grating Filters

The placement accuracy and resolution of direct-write patterning tools, in particular the atomic force microscope (AFM), is considered for application to fabricating multi-passband integrated optical niters. Because of its simpler fabrication a grating structure is proposed that consists of identical stripes that are non-periodically spaced. The recently developed pseudorandom encoding method from the field of computer generated holography is modified to effectively assign analog reflectances at each point along the grating by selective withdrawal and offsetting of the stripes from a periodic spacing. An example filter designed by this method has two 1.5 nm bandwidth passbands and –23 dB of rejection for lightly coupled stripes. As with single band filters, the passbands broaden as the coupling increases. A calculation of the coupling coefficient of stripes on a fundamental mode, slab waveguide indicate that stripes on the order of 100 nm in depth and width support low insertion loss, multipassband filtering applications at visible wavelengths. Lines of these dimensions patterned with an AFM on (110) silicon indicates the feasibility of fabricating these filters. These conclusions are specific to current AFM’s that are limited to writing fields of 100 μm. Increased rejection and decreased passband widths will result from incorporating precise field stitching into future AFM’s.     

光刻对准中干涉条纹相位解析研究

针对光刻对准中双光栅产生的具有多频率的干涉条纹,提出了一种基于二维解析小波变换进行条纹分析的方法。该方法首先通过二维小波变换的多尺度对条纹的多频率进行分析,并通过解析小波基函数将条纹的幅度与相位进行分离,最终通过二维小波脊方法提取出与偏移量相关的相位。在相位提取的同时通过二维小波脊所处点的角度分布来移除封闭条纹处理中常见的相位符号不确定性。数值模拟与实验验证了该方法的可行性并与传统的基于频域的相位分析方法进行了对比分析。结果表明,该方法能在获得所需相位信息的同时较好地滤除掉由光路抖动引起的噪声,具有很强的适应性。     

From microelectronics to spintronics and magnonics

In this review, the recent developments in microelectronics, spintronics, and magnonics have been summarized and compared. Firstly, the history of the spintronics has been briefly reviewed. Moreover, the recent development of magnonics such as magnon-mediated current drag effect (MCDE), magnon valve effect (MVE), magnon junction effect (MJE), magnon blocking effect (MBE), magnon-mediated nonlocal spin Hall magnetoresistance (MNSMR), magnon-transfer torque (MTT) effect, and magnon resonant tunneling (MRT) effect, magnon skin effect (MSE), etc., existing in magnon junctions or magnon heterojunctions, have been summarized and their potential applications in memory and logic devices, etc., are prospected, from which we can see a promising future for spintronics and magnonics beyond micro-electronics.     

Enhanced Surface-Plasmon-Polariton Interference for Nanolithography by a Micro-Cylinder-Lens Array

A practical interference lithography scheme based on surface plasmon polaritions （SPPs） is suggested. In this scheme, a micro-cylinder-lens array is employed to generate the evanescent wave （EW） carrying much energy. When the top of the cylinder lenses are in close contact with a metal film coated on a resist, the energy of EW will launch strong SPPs and form enhanced interference nanopatterns in the resist. The simulation results confirm that a high quality nanopattern with a critical dimension of λ/7 can be achieved in the resistance. The anaJysis results indicate that the height of the cylinder lenses can provide a large tolerance to decrease the fabrication difficulty of this element.     

第七讲微电子技术发展与物理学

微电子学的基础是近代固体物理．微电子技术的快速发展又推动了物理学许多分支的进展．今天，当微电子的基本器件MOSFET缩小接近其终极时，作为下一代的基础，一批基于新的物理效应的纳电子器件又被提了出来．为了突破传统的二值开关系统的共同极限，新的信息处理系统，如量子信息处理，正在大力研究之中．不久的将来，可望出现一次新的信息电子革命．这次革命又将建立在现代物理学及现代生物学的基础之上．     

Nanolithography using high transmission nanoscale ridge aperture probe

Nanoscale ridge apertures provide a highly confined radiation spot with a high transmission efficiency when used in the near field approach. The radiation confinement and enhancement is due to the electric–magnetic field concentrated in the gap between the ridges. This paper reports the experimental demonstration of radiation enhancement using such antenna apertures and lithography of nanometer size structures. The process utilizes a NSOM (near field scanning optical microscopy) probe with a ridge aperture at the tip, and it combines the nonlinear two photon effect from femtosecond laser irradiation to achieve sub-diffraction limit lithography resolution.     

Multiferroics: Promising materials for microelectronics,spintronics, and sensor technique

Possible areas of application of magnetoelectric materials and multiferroics in microelectronics, spintronics, and sensor technique are considered. Criteria of practical applicability of such materials are formulated and examples of magnetoelectric materials satisfying these criteria are given.     

Nanolithography with metastable helium atoms in a high-power standing-wave light field

We have created periodic nanoscale structures in a gold substrate with a lithography process using metastable triplet helium atoms that damage a hydrophobic resist layer on top of the substrate. A beam of metastable helium atoms is transversely collimated and guided through an intense standing-wave light field. Compared to commonly used low-power optical masks, a high-power light field (saturation parameter of 10⁷) increases the confinement of the atoms in the standing wave considerably, and makes the alignment of the experimental setup less critical. Due to the high internal energy of the metastable helium atoms (20 eV), a dose of only one atom per resist molecule is required. With an exposure time of only eight minutes, parallel lines with a separation of 542 nm and a width of 100 nm (one-eleventh of the wavelength used for the optical mask) are created.PACS 32.80.Lg; 39.25.+k; 81.16.Nd     

表面等离激元体干涉制备纳米光子晶体的模拟分析

利用表面等离激元短波长和近场增强效应的特性,用多束P偏振态相干光激发表面等离激元(SPPs),并优化干涉光刻的曝光参数,可获得高分辨率、高对比度周期性纳米结构.阐述了多束SPPs干涉法制备纳米光子晶体的原理,并得到了干涉场强度分布随光束增加的关系.随着干涉SPPs数目的增加,干涉场会复杂变化,对此进行了计算机模拟.模拟了三束SPPs和六束SPPs干涉的强度分布,并分析了调制技术干涉曝光结果,该方法适合光电子器件中大范围亚波长的周期性孔阵或点阵结构的制作以及纳米量级光子晶体的的制作,并可以有效降低制作成本.     

Configurations of high-frequency ultrasonics complex vibration systems for packaging in microelectronics

Ultrasonic high-frequency complex vibrations are effective for various ultrasonic high-power applications. Three types of ultrasonic complex vibration system with a welding tip vibrating elliptical to circular locus for packaging in microelectronics were studied. The complex vibration sources are using (1) a longitudinal-torsional vibration converter with diagonal slits that is driven only by a longitudinal vibration source, (2) a complex transverse vibration rod with several stepped parts that is driven by two longitudinal vibration source crossed at a right angle and (3) a longitudinal vibration circular disk and three longitudinal transducers that are installed at the circumference of the disk.     

Multiple-scattering in radar systems: A review

Although extensively studied within the lidar community, the multiple scattering phenomenon has always been considered a rare curiosity by radar meteorologists. Up to few years ago its appearance has only been associated with two- or three-body-scattering features (e.g. hail flares and mirror images) involving highly reflective surfaces.Recent atmospheric research aimed at better understanding of the water cycle and the role played by clouds and precipitation in affecting the Earth's climate has driven the deployment of high frequency radars in space. Examples are the TRMM 13.5 GHz, the CloudSat 94 GHz, the upcoming EarthCARE 94 GHz, and the GPM dual 13-35 GHz radars. These systems are able to detect the vertical distribution of hydrometeors and thus provide crucial feedbacks for radiation and climate studies. The shift towards higher frequencies increases the sensitivity to hydrometeors, improves the spatial resolution and reduces the size and weight of the radar systems. On the other hand, higher frequency radars are affected by stronger extinction, especially in the presence of large precipitating particles (e.g. raindrops or hail particles), which may eventually drive the signal below the minimum detection threshold. In such circumstances the interpretation of the radar equation via the single scattering approximation may be problematic. Errors will be large when the radiation emitted from the radar after interacting more than once with the medium still contributes substantially to the received power. This is the case if the transport mean-free-path becomes comparable with the instrument footprint (determined by the antenna beam-width and the platform altitude).This situation resembles to what has already been experienced in lidar observations, but with a predominance of wide- versus small-angle scattering events. At millimeter wavelengths, hydrometeors diffuse radiation rather isotropically compared to the visible or near infrared region where scattering is predominantly in the forward direction. A complete understanding of radiation transport modeling and data analysis methods under wide-angle multiple scattering conditions is mandatory for a correct interpretation of echoes observed by space-borne millimeter radars.This paper reviews the status of research in this field. Different numerical techniques currently implemented to account for higher order scattering are reviewed and their weaknesses and strengths highlighted. Examples of simulated radar backscattering profiles are provided with particular emphasis given to situations in which the multiple scattering contributions become comparable or overwhelm the single scattering signal. We show evidences of multiple scattering effects from air-borne and from CloudSat observations, i.e. unique signatures which cannot be explained by single scattering theory. Ideas how to identify and tackle the multiple scattering effects are discussed. Finally perspectives and suggestions for future work are outlined.This work represents a reference-guide for studies focused at modeling the radiation transport and at interpreting data from high frequency space-borne radar systems that probe highly opaque scattering media such as thick ice clouds or precipitating clouds.     

Thiol diffusion and the role of humidity in "Dip Pen Nanolithography"

The radii of octadecanethiol spots deposited by an atomic force microscope tip onto a gold surface were studied as a function of contact time and humidity. The deposition is well described by two-dimensional diffusion from an annular source of constant concentration, with a surface diffusion coefficient of 8400 nm(2) s(-1), independent of humidity. Facile transfer is observed even after near continuous deposition for more than 24 h in a dry N2 environment, indicating that a water meniscus is not required.     

Proton conduction in oxides: A review

Solid oxides that show proton conduction at elevated temperatures may be useful materials for many applications, such as hydrogen sensors, fuel cells etc. These materials contain no structural protons and only become proton conductors if some cations are ion exchanged with H₃O⁺ or NH ₄ ⁺ or hydrogen and/or water vapour is dissolved in the oxides according to the relationships derived by Wagner. The several basic mechanisms whereby mobile protons can be introduced into oxides, and the properties of a number of examples are discussed. Paper presented at the 2nd Euroconference on Solid State Ionics, Funchal, Madeira, Portugal, Sept. 10–16, 1995