Elastic friction drive of surface acoustic wave motor

Importance of elastic deformation control to obtain large output force with a surface acoustic wave (SAW) motor is discussed in this paper. By adding pre-load to slider, stator and slider surfaces are deformed in a few tens nanometer. Appropriate deformation in normal direction against normal vibration displacement amplitude of SAW existed. By moderate deformation, the output force of the SAW motor was enlarged up to about 10 N and no-load speed was 0.7 m/s. To produce this performance, the transducer weight and slider size were only 4.2 g and 4 x 4 mm(2).By traveling wave propagation, surface particles of the SAW device move in elliptical motion. Due to the amplitude of the elliptical motion is 10 or 20 nm order, the contact condition of the slider is very critical. To control the contact condition, namely, the elastic deformation of the slider and stator surface in nanometer order, a lot of projections were fabricated on the slider surface. The projection diameter was 20 micro m. In static condition, the elastic deformation and stress were evaluated with the FEM analysis. From this calculation and the simulation result, it is consider that the wave crest is distorted, hence the elasticity has influence on the friction drive condition.Elastic deformation of the stator surface beneath the projection from the initial position were evaluated. In 4 x 4 mm(2) square area, the sliders had from 1089 to 23,409 projections. Depression was independent to the contact pressure. However, the output force depended on the depression although the projection density were different. From the view point of the output power of the motor, the proper depression was independent to the projection density. Around 25 nm depression, the output force and output power were maximized. This depression value was almost same as the vibration displacement amplitude of the stator transducer.     

State-of-the-art surface acoustic wave linear motor and its future applications

Two merits of the surface acoustic wave (SAW) device are its high energy density and small size. However, the driving frequency is around 10 MHz or higher. In spite of the difficulties involved with high frequency, the high energy density is attractive for actuator applications. The SAW linear motor's no load speed and maximum output force were 1.1 m/s and 3.5 N using a silicon slider. The silicon slider dimensions were 4 x 4 x 0.3 mm3. We made a lot of 30 microns diameter projections on the silicon surface. The acceleration was 1000 m/s2. The SAW motor is expected to be a high speed, quick response, high resolution microactuator, and much more. High driving voltage was a problem. Our newly designed electrode proved that the driving voltage was reduced to less than 10 V to excite the traveling wave. For actual applications, the SAW device will be placed in a slider. This design is effective in terms of performance and cost. The nanotribology of the SAW motor is also an important and interesting subject.     

Performance of Non-Contact Linear Actuators Driven by Surface Acoustic Waves*

A new kind of non-contact linear actuator （motor） driven by surface acoustic waves （SAWs） is presented, in which the stators are made from SAW delay lines using 128° YX-LiNbO3 substrates. A fluid layer is introduced between the slider and the stator of the actuator, and the slider is a circular aluminum disk suspended on the surface of the liquid （water） layer. As the SAW is excited on the stator, the SAW is converted to a leaky wave in the interface of the stator and the liquid, and then propagates into the liquid. Owing to the nonlinear effect of wave propagation, acoustic streaming is generated, which pushes the slider to move. By the experiments, the relations between the slider velocity and the experimental parameters, such as the exciting voltage of the SAWs, the thickness and the kinematic viscosity of the liquid layer, are obtained.     

Miniaturization of surface acoustic waves rotary motor

This paper presents the experimental study of a miniaturized surface acoustic waves (SAWs) rotary motor and the theoretical calculation. After the first success in SAW rotary motor operating at 9.85 MHz, a smaller rotary motor is designed. With the operating frequency of 30 MHz and the driving voltage of 120 V(p-p), the motor can rotate at a speed of 270 rpm.     

Exactly quantized dynamics of classical incommensurate sliders

We report peculiar velocity quantization phenomena in the classical motion of an idealized 1D solid lubricant, consisting of a harmonic chain interposed between two periodic sliders. The ratio upsilon(c.m.)/upsilon(ext) of the chain center-of-mass velocity to the externally imposed relative velocity of the sliders stays pinned to exact "plateau" values for wide ranges of parameters, such as slider corrugation amplitudes, external velocity, chain stiffness, and dissipation, and is strictly determined by the commensurability ratios alone. The phenomenon is explained by one slider rigidly dragging the kinks that the chain forms with the other slider. Possible consequences of these results for some real systems are discussed.     

Sub-mm disk waviness characteristics and slider flying dynamics under thermal FH control

The flying dynamics and flying stability of a slider are the key issues at sub-5 nm flying height (FH) under thermal FH control. The resonant frequencies of current sliders are at 100 kHz level. At present linear disk velocities, the disk waviness at sub-mm level and 10 micron level can excite the resonant modes of the slider and induce FH modulation. This work uses the triple-harmonic method to monitor the dynamic FH signal during the process of thermal FH control. As the FH reduces, the same disk waviness characteristics excite larger dynamic FH modulation.     

Two-Dimensionally Self-Holding Deflection Mirror Using Surface Acoustic Wave Motor

We have developed a two-dimensionally deflecting mirror actuating system with a deflection angle of 20°, which takes full advantage of the characteristics of a two-dimensional surface acoustic wave (SAW) motor. A magnetic slider moves with frictional drive by the Rayleigh mode of the SAW and deflects the mirror by the force of magnetic attraction. For the actuation of a 20° deflection angle, only a 10 ms duration of driving voltage is required owing to the high-speed characteristic of the motor, followed by an additional 10 ms for damping of the mirror structure produced in order to complete holding of the angle. No power supply is necessary to hold the angle. Furthermore, the resolution of the angle is 0.0015° because of the high-resolution capability of the motor. The mirror deflection system showed a 10⁴ dynamic range of angle positioning ability.     

Disk clamping distortion and slider crown sensitivity induced flying height variation

The disk clamping distortion and slider crown sensitivity induced flying height (FH) variation is investigated. The experimental results which were measured with in situ method were compared with simulated numerical results. Both results indicate that the disk clamping distortion has significant influence on the FH variation. Crown sensitivity of the sliders is one of the factors that determine the amplitude of the FH variation. Higher crown sensitivity sliders exhibit greater FH variation.     

Improvement of least-squares finite difference method on simulating slider air bearings in head disk systems

Least-squares finite difference (LSFD) method, one of mesh-free methods, is used to solve slider air bearings problem through discritizing the generalized Reynolds equation into nonlinear systems of algebraic equations. Two approximation schemes for the linearization of these equations are presented and compared. And, some new techniques to search supporting points for the reference node in the mesh-free method were proposed and explored. Therefore, these improvements eliminate some potential limitation of the LSFD method previously published and further facilitate its employment in complex slider models. Advanced step slider as an example of negative pressure sliders is simulated and verified using the improved LSFD mesh-free method in head disk systems.     

Investigation of HDD Ramp Unloading Processes with an Efficient Scheme

Ramp load/unload (L/UL) mechanisms are widely used to rest sliders in hard disk drives (HDDs). Loading/unloading a slider swiftly and smoothly is crucial in a HDD design. A novel, efficient simulation scheme is proposed to investigate the behaviors of a head disk interface (HDI) in ramp unloading processes. A dual scale model is enabled by decoupling the nano-meter scale change of an air bearing and the micro- or milli-meter scale deformation of a suspension. A modified Reynolds equation governing the air bearing was solved numerically. The slider design was characterized with performance functions. Three stages in an unloading process were analyzed with a lumped parameter suspension model. Key parameters for the model were estimated with a comprehensive finite element suspension model. Finally, simulation results are presented for a commercial HDI design.     

Kink plateau dynamics in finite-size lubricant chains

We extend the study of velocity quantization phenomena recently found in the classical motion of an idealized 1D model solid lubricant - consisting of a harmonic chain interposed between two periodic sliding potentials [A. Vanossi, M. Manini, G. Divitini, G.E. Santoro, E. Tosatti, Phys. Rev. Lett. 97 (2006) 056101]. This quantization is due to one slider rigidly dragging the commensurate lattice of kinks that the chain forms with the other slider. In this follow-up work we consider finite-size chains rather than infinite chains. The finite-size (i) permits the development of robust velocity plateaus as a function of the lubricant stiffness, and (ii) allows an overall chain length re-adjustment which spontaneously promotes single-particle periodic oscillations. These periodic oscillations replace the quasi-periodic motion produced by general incommensurate periods of the sliders and the lubricant in the infinite-size model. Possible consequences of these results for some real systems are discussed.     

Visualization of surface acoustic wave scattering by dislocations

Stroboscopic X-ray topography at the synchrotron beam line was used to visualize the propagation of a 580 MHz surface acoustic waves (SAW) in LiNbO3 crystals. For this purpose, the X-ray bursts coming from the synchrotron storage ring with periodicity of 5.68 MHz were synchronized with the SAW frequency in a phase-locked mode. This method allowed us to "stop" the SAW in time and to observe the X-ray diffraction contrast caused by the dynamic deformation field of SAW. The X-ray topographic images showed well-resolved individual acoustic wave fronts of 6 microm SAW as well as their distortions due to SAW scattering by linear dislocations. Some of the images revealed an exceptional contrast of the concentric rings about the dislocation line, which is caused by coherent interaction of the secondary elastic waves. This contrast is similar to the Fresnel zones in optics, and this conclusion is confirmed by direct summation of secondary waves emitted by local elements of a vibrating dislocation string.     

应用于无线传感器的声表面波反射型延迟线的耦合模分析

基于耦合模理论对一种应用于无线传感器的声表面波(SAW)反射型延迟线的性能进行了优化模拟分析。结合混合等效电路模型推导出评价这种器件性能的时域反射系数S₁₁。典型的SAW反射型延迟线包含置于压电基片之上的一个换能器与沿声波传播方向设置的多个反射器。讨论了器件性能的各种结构性影响因素如换能器结构以及反射器类型等,并以此获得优化的器件设计参数。在理论优化分析的基础上,以41°YX LiNbO₃为压电基片,结合铝电极试验制作了采用单向单相换能器(SPUDT)与3个短路栅反射器的440 MHz SAW反射型延迟线器件,并与理论分析结果予以对比与评价分析。      

A novel optimal sensitivity design scheme for yarn tension sensor using surface acoustic wave device

In this paper, we propose a novel optimal sensitivity design scheme for the yarn tension sensor using surface acoustic wave (SAW) device. In order to obtain the best sensitivity, the regression model between the size of the SAW yarn tension sensor substrate and the sensitivity of the SAW yarn tension sensor was established using the least square method. The model was validated too. Through analyzing the correspondence between the regression function monotonicity and its partial derivative sign, the effect of the SAW yarn tension sensor substrate size on the sensitivity of the SAW yarn tension sensor was investigated. Based on the regression model, a linear programming model was established to gain the optimal sensitivity of the SAW yarn tension sensor. The linear programming result shows that the maximum sensitivity will be achieved when the SAW yarn tension sensor substrate length is equal to 15 mm and its width is equal to 3 mm within a fixed interval of the substrate size. An experiment of SAW yarn tension sensor about 15 mm long and 3 mm wide was presented. Experimental results show that the maximum sensitivity 1982.39 Hz/g was accomplished, which confirms that the optimal sensitivity design scheme is useful and effective.     

Piezoelectric linear motor concepts based on coupling of longitudinal vibrations

Classically, rotary motors with gears and spindle mechanisms are used to achieve translatory motion. In means of miniaturization and weight reduction piezoelectric linear motors are of interest. Several ultrasonic linear motors found in literature base on the use of two different vibration modes. Most often flexural and longitudinal modes are combined to achieve an elliptic micro-motion of surface points. This micro-motion is converted to direct linear (or translatory) motion of a driven slider. To gain high amplitudes of the micro-motion and thus having a powerful motor, the ultrasonic vibrator should be driven near the eigenfrequency of its modes. Additionally, low mechanical and electrical losses lead to increased efficiency and large amplitude magnification in resonance. This demands a geometrical design that fits the eigenfrequencies of the two different modes. A frequency-deviation of only a few percent leads to non-acceptable disturbance of the elliptical motion. Thus, the mechanical design of the vibrators has to be done very carefully. Within this contribution we discuss different motor designs based on the coupling of two the same longitudinal vibrations within one structure to generate an elliptic motion of surface points. Different concepts based on piezoelectric plates and Langevin transducers are compared. Benefits and drawbacks against the combination of longitudinal and bending modes will be discussed. Numerical results of the stator vibration as well as motor characteristics are validated by measurements on different prototypes.     

A Novel Rotation Speed Measurement Method Based on Surface Acoustic Wave

This paper presents an original passive wireless rotation speed measurement method based on surface acoustic wave (SAW) technology. A theoretical analysis was conducted on the principle of SAW rotation speed measurement and a numerical analysis on the SAW response energy pulses with different rotation angles and resonance frequencies was performed. Numerical calculation results showed that when the distance and the effective length of the antenna connected to SAWR vary with the rotation angle, the energy of acquired SAW response varies periodically. The rotation speed was estimated by searching the crossing points of the SAW response energy pulses and its mean value line. The SAW rotation speed measurement system was set up and the high performance SAW resonators were fabricated on a quartz substrate. The proposed measurement system was tested with a maximum error of 0.6 rpm, indicating that the system is capable of measuring rotation speeds from 10 to 100 rpm. Experimental results verified the validity and feasibility of presented rotation speed measurement method.     

Ray splitting in the reflection and refraction of surface acoustic waves in anisotropic solids

This paper examines the conditions for, and provides examples of, ray splitting in the reflection and refraction of surface acoustic waves (SAW) in elastically anisotropic solids at straight obstacles such as edges, surface breaking cracks, and interfaces between different solids. The concern here is not with the partial scattering of an incident SAW's energy into bulk waves, but with the occurrence of more than one SAW ray in the reflected and/or transmitted wave fields, by analogy with birefringence in optics and mode conversion of bulk elastic waves at interfaces. SAW ray splitting is dependent on the SAW slowness curve possessing concave regions, which within the constraint of wave vector conservation parallel to the obstacle allows multiple outgoing SAW modes for certain directions of incidence and orientation of obstacle. The existence of pseudo-SAW for a given surface provides a further channel for ray splitting. This paper discusses some typical material configurations for which SAW ray splitting occurs. An example is provided of mode conversion entailing backward reflection or negative refraction. Experimental demonstration of ray splitting in the reflection of a laser generated SAW in GaAs(111) is provided. The calculation of SAW mode conversion amplitudes lies outside the scope of this paper.     

Synergetic driving concepts for bundled miniature ultrasonic linear motors

Rotary ultrasonic motors have found broad industrial application in camera lens drives and other systems. Linear ultrasonic motors in contrast have only found limited applications. The main reason for the limited range of application of these very attractive devices seems to be their small force and power range. Attempts to build linear ultrasonic motors for high forces and high power applications have not been truly successful yet. To achieve larger force and higher power, multiple miniaturized motors can be combined. This approach, however, is not as simple as it appears at first glance. The electromechanical behaviour of the individual motors differs slightly due to manufacturing and assembly tolerances. The individual motor characteristics are strongly dependent on the driving parameters (frequency, voltage, temperature, pre-stress, etc.) and the driven load and the collective behaviour of the swarm of motors is not just the linear superposition of the individual drive's forces. Thus, the bundle of motors has to be synchronized and controlled appropriately in order to obtain an optimized drive that is not oversized and costly. We have investigated driving and control strategies of a set of linear ultrasonic motors. Our contribution will be divided into three main parts. In part I ultrasonic linear motors will be introduced. In part II driving strategies for a single motor as well as for a bundle of motors will be presented. These concepts will be verified by simulation results and experimental data. In part III a simplified model for the motor's electromechanical behaviour will be given.     

A novel matching network employing surface acoustic wave devices for W-CDMA power amplifiers

This paper describes a new approach of designing high Q surface acoustic wave (SAW) resonators as an inductive element in the matching network for W-CDMA power amplifiers (PAs). Spiral inductors based on CMOS/BiCMOS technologies presently possess relatively low Q (typically <10) and occupy a considerably large area. In order to break through the limitations of the spiral inductors, the authors attempt to apply higher Q and wideband SAW resonators employing Cu-grating/15 degrees YX-LiNbO(3)-substrate structure to the matching network for improved PA performance. An analysis was made on SAW resonators in detail, and an SAW resonator having a very small capacitance ratio of 3.28 and moderate Q of 147.8 was developed. After discussing the frequency dependence of the effective inductances, SAW resonators, which are used to be as inductive elements in the matching networks of PAs, were designed and fabricated. The PA including the matching circuit was simulated using the characteristics of the fabricated SAW resonators. The result showed that with better shape factor and good out-of-rejection, the SAW resonators definitely work as an inductive element and could replace widely used spiral inductors.     

A study on the friction of a self-correction ultrasonic stepping motor

An experiment has been carried out to investigate the self-correction function of a self-correction ultrasonic stepping motor. When a slider (rotor) is placed on a vibrating beam (stator), it will stay at a stable equilibrium position. If the slider is slightly moved off the equilibrium position, a restoring force will urge the slider back towards its equilibrium position. The experimental result shows that the position of the maximum restoring force on the slider differs from that predicted by using the linear theory. Study found that when a quadratic form is assumed for the dynamic friction coefficient, the theoretical and experimental results are in good agreement.