Holding characteristics of planar objects suspended by near-field acoustic levitation

The authors have found the acoustic levitation phenomenon where planar objects of 10 kg weight can be levitated near a vibration surface. This phenomenon has been studied for non-contact transportation. A circular planar object can be suspended without contacting a circular vibration plate. We have studied the holding force which acts horizontally on the levitated objects. The horizontal position of the object is stabilized by this force. In this paper, we discuss the effect of the radius of a levitated object, levitation distance, displacement amplitude of the vibration plate and the vibration mode on the suspending force.     

Review of Progress in Acoustic Levitation

Acoustic levitation uses acoustic radiation forces to counteract gravity and suspend objects in mid-air. Although acoustic levitation was first demonstrated almost a century ago, for a long time, it was limited to objects much smaller than the acoustic wavelength levitating at fixed positions in space. Recent advances in acoustic levitation now allow not only suspending but also rotating and translating objects in three dimensions. Acoustic levitation is also no longer restricted to small objects and can now be employed to levitate objects larger than the acoustic wavelength. This article reviews the progress of acoustic levitation, focusing on the working mechanism of different types of acoustic levitation devices developed to date. We start with a brief review of the theory. Then, we review the acoustic levitation methods to suspend objects at fixed positions, followed by the techniques that allow the manipulation of objects. Finally, we present a brief summary and offer some future perspectives for acoustic levitation.     

Theoretical and experimental research on a disk-type non-contact ultrasonic motor

We developed a disk-type non-contact ultrasonic motor based on B22 vibration mode. The rotors of SU-8 photoresist are fabricated by the UV-LIGA process to control their shapes and thicknesses. So the structures of them are optimized by the experiments. It is found that the revolution speed of disk-type non-contact ultrasonic motor not only depends on the vibration amplitude of the stator, but also the weight and construction of the rotors. The maximum revolution speed of the optimal rotor is 3569 rpm at the input voltage of 20 V and the driving frequency of 45.6 kHz. The exciting principle of traveling wave is presented with theoretical equations. The electric signals applied to the piezoelectric ceramic are designed by the principle. The natural frequency and corresponding vibration mode are calculated and analyzed using finite element method. It is shown that experimental results are in good agreement with simulation, which verifies the effectiveness of the finite element model. Moreover, the levitation distance between the stator and rotor is measured by a CCD laser displacement transducer.     

Dynamic Superposition and Levitation Capability of Two Confronting Ultrasonic Waves

The superposition dynamics of two confronting ultrasonic waves and their levitation capability for centimeter-sized thin disks are investigated by numerical analyses and validated by experiments. The sound pressure simulation reveals that two opposite ultrasonic waves provide a more effective standing-wave field than a single ultrasonic wave when the diameter of disk-shaped object approaches the wavelength scale. The dynamic superposition of two confronting beams facilitates the acoustic levitation of the clay disk and aluminum disk with diameters of 0.97 and 0.90. The acoustic radiation forces exerting on these thin disks are measured experimentally, which exhibit a better levitation stability for the centimeter-sized thin disks. The equilibrium levitation positions of the two disks are located near the sound pressure node, and the maximum acoustic radiation pressure on their surfaces is less than one percent of the maximum sound pressure.     

声悬浮过程的激光全息干涉研究

利用二次曝光全息干涉术实现了对单轴式声悬浮声压场的研究.分别拍摄了悬浮不同物体和 不同输出功率情况下声悬浮场的多幅全息图，并进行了对比分析.结果表明，实验中获得的 声压分布图样与由声波动方程获得的理论声压分布基本一致，其相应中轴线的强度分布也具 有很好的一致性.与以往的声场测量方法相比，二次曝光法非接触、无干扰及全场测量的优 势在声悬浮场测量中得以充分体现，该方法的引入不但简化了声悬浮场测量的实际操作，而 且可以更直观地获得全场信息，为优化声悬浮系统提供了实验依据. 关键词： 全息干涉术 二次曝光法 声悬浮 谐振     

Design of an Acoustic Levitator for Three-Dimensional Manipulation of Numerous Particles

We present a design of an acoustic levitator consisting of three pairs of opposite transducer arrays.Three orthogonal standing waves create a large number of acoustic traps at which the particles are levitated in mid-air.By changing the phase difference of transducer arrays,three-dimensional manipulation of particles is successfully realized.Moreover,the relationship between the translation of particles and the phase difference is experimentally investigated,and the result is in agreement with the theoretical calculation.This design can expand the application of acoustic levitation in many fields,such as biomedicine,ultrasonic motor and new materials processing.     

具有环形限位夹持力的单轴式超声悬浮系统

基于超声悬浮原理,通过改变单轴式超声悬浮系统的反射和发射端的几何形状,利用凸状发射、反射面在悬浮区域周围产生环形声辐射力势阱作为限位夹持力,提高悬浮样品在驻波声场中的悬浮稳定性。基于时域有限差分法,研究不同谐振腔内的声辐射力分布,以及影响声辐射力大小的因素,优化环形限位夹持力和悬浮力。理论及实验研究结果表明,具有环形限位夹持力的超声悬浮系统可以提高普通单轴式超声悬浮装置对悬浮样品的稳定性。      

Plate-shaped non-contact ultrasonic transporter using flexural vibration

We developed a plate-shaped non-contact transporter based on ultrasonic vibration, exploiting a phenomenon that a plate can be statically levitated at the place where its gravity and the acoustic radiation force are balanced. In the experiment, four piezoelectric zirconate titanate elements were attached to aluminum plates, on which lattice flexural vibration was excited at 22.3 kHz. The vibrating plates were connected to a loading plate via flexible posts that can minimize the influence of the flexure induced by heavy loads. The distribution of the vibration displacement on the plate was predicted through finite-element analysis to find the appropriate positions of the posts. The maximum levitation height of this transporter was 256 μm with no load. When two vibrating plates were connected to a loading plate, the maximum transportable load was 4.0 kgf.     

声悬浮及声速测定实验仪的设计

《声速测定》是大学物理实验中比较普遍的一个综合性实验。在声速测定实验仪的基础上,改进了信号源,并制作了声悬浮配件,使其实现既可以用多种方式测量声速,又可演示声悬浮实验现象。声悬浮及声速测定实验仪悬浮稳定性强,声速测定准确,仪器造价低,使用方便,这样设计节省了实验室资源和空间。     

Theoretical and experimental examination of near-field acoustic levitation

A planar object can be levitated stably close to a piston sound source by making use of acoustic radiation pressure. This phenomenon is called near-field acoustic levitation [Y. Hashimoto et al., J. Acoust. Soc. Am. 100, 2057-2061 (1996)]. In the present article, the levitation distance is predicted theoretically by numerically solving basic equations in a compressible viscous fluid subject to the appropriate initial and boundary conditions. Additionally, experiments are carried out using a 19.5-kHz piston source with a 40-mm aperture and various aluminum disks of different sizes. The measured levitation distance agrees well with the theory, which is different from a conventional theory, and the levitation distance is not inversely proportional to the square root of the surface density of the levitated disk in a strict sense.     

运用声悬浮现象测量声速的演示实验

介绍一个新颖的运用声悬浮现象测量声速的演示实验,详细分析讨论了声波在垂直谐振腔内使物体悬浮于空中的条件与位置。     

Development and study of novel non-contact ultrasonic motor based on principle of structural asymmetry

The article presents novel design of non-contact rotary ultrasonic motor consisting of ring-shaped stator vibrating in in-plane flexural mode and rotor provided with blades. In contrast to other motors with similar design proposed motor relies on the use of standing ultrasonic waves. This simplifies design and electronic control of motor and becomes possible due to introduction of artificial asymmetry, for example by tilting one or several blades of the rotor relative to the surface normal. Operating principle of the proposed motor is based on acoustic radiation torque exerted on rotor by ultrasonic waves propagating in air or fluid gap between rotor and stator. This torque is calculated using finite element method by means of COMSOL Multiphysics software. Dynamics of rotor is studied using MathCad software and general theory of nonlinear conservative oscillators. Role of asymmetry is explained on the basis of comparative analysis of potential functions and phase trajectories for symmetric and asymmetric cases. It is shown that direction of rotation is determined by structural parameters of motor, particularly tilting direction (clockwise or counter-clockwise) of the blades. Conceptual design of motor with bidirectional rotation is described. Direction and velocity of rotation in the proposed conceptual design can be potentially controlled by changing excitation frequency of stator.     

On the horizontal wobbling of an object levitated by near-field acoustic levitation

A circular planar object can be levitated with several hundreds of microns by ultrasonic near-field acoustic levitation (NFAL). However, when both the sound source and the levitated object are circularly shaped and the center of the levitated object does not coincide with the source center, instability problem often occurs. When this happens, it becomes difficult to pick up or transport the object for the next process. In this study, when the center of the levitated object was offset from the source center, the moving direction of the levitated object was predicted by using the time averaged potential around the levitated object. The wobbling frequency of the levitated object was calculated by analyzing the nonlinear wobbling motion of the object. It was shown that the predicted wobbling frequencies agreed with measured ones well. Finally, a safe zone was suggested to avoid the unstable movement of an object.     

Single-axis ultrasound levitation system with annular clamping forces

Based on the principle of acoustic levitation,a single-axis ultrasonic levitation system(SAULS) with convex sides was designed.A normal SAULS only provides a levitation force(LF) against the gravity of the sample.While,such systems also provide an annular clamping force(ACF) surrounding the levitated samples,and improve levitation stability of samples in the standing wave field.Using the finite-difference time-domain method,we investigated the force distributions in different resonance cavities and the factors that influence the magnitude of the levitation force in optimizing the SAULS and the ACF.The theoretical analyses and experimental results indicate that the stability of levitation in this special SAULS is improved with the ACF from its designed convex-side feature.It can be developed into a simple device in levitating and moving samples steadily in related experiments and applications.     

非线性电磁超声对铝合金拉伸变形评价研究

非线性系数是描述材料中微纳尺度损伤的特征参量,非线性系数常通过接触式压电超声进行检测,但耦合剂引起的非线性一般是未知的,针对这一问题,提出了一种非接触式电磁超声非线性纵波检测方法。该方法基于洛伦兹力机理在试件表面产生的振动弹性波,利用不同拉伸载荷下所制备的损伤试件,分别利用压电超声、电磁超声进行非线性超声系数测量。实验结果表明:利用两种非线性超声检测的相对非线性系数与铝合金的拉伸形变呈单调关系,同时也论证了电磁超声纵波基于非线性理论对塑性变形评估的可行性。      

液体薄层中的超声空化*

液体薄层中的超声空化,因其边界及所处空间的特殊性,而呈现出非常独特的空化结构和演化行为,在超声清洗、超声钎焊、表面处理、近场声悬浮、超声化学等领域都有所应用。该文梳理了近几年该课题组在液体薄层中的超声空化研究中的一些成果,力图揭示液体薄层内空泡、空化云、空化场的运动和分布规律,及其产生、发展和演化过程,以期对液体薄层中的超声空化行为有一个相对清晰和完整的认识。     

Levitation of iridium and liquid mercury by ultrasound

Single-axis acoustic levitation of the heaviest solid (iridium, rho=22.6 g cm(-3)) and liquid (mercury, rho=13.6 g cm(-3) on the Earth is achieved by greatly enhancing both the levitation force and stability through optimizing the geometric parameters of the levitator. The acoustically levitated Pb-Sn eutectic alloy melt (rho=8.5 g cm(-3)) is highly undercooled by up to 38 K, which results in a microstructural transition of "lamellae-broken lamellae-dendrites." The drastic enhancement of levitation capability indicates a broader application range of single-axis acoustic levitation.     

气体物理性质对近场超声悬浮特性的影响研究

在利用近场超声悬浮技术搬运晶圆的过程中,为提高近场超声悬浮力,该文研究了气体物理性质与近场超声悬浮力之间的关系。利用声辐射压理论与流体力学理论对不同气体介质下的悬浮力进行建模与求解。搭建了可测量不同气体环境中悬浮力的实验平台。实验发现氩气环境下超声悬浮力平均值相对空气环境下提升24.8%。结合实验与理论计算分析了气体密度、比热容比、声速与动力黏度对悬浮力的影响,推断气体的比热容比为影响近场超声悬浮力的主要参数。该方法为晶圆搬运的环境适用性提供了参考价值。     

声悬浮的实验研究和数值模拟分析

介绍了自行研制的一种磁致伸缩式单轴超声悬浮装置,用此装置实现了尺寸1—7mm的若干种金属、半导体和有机物在空气中的稳定悬浮和定位,可悬浮样品的密度高达11.3g/cm³.为了优化谐振腔设计,采用边界元方法结合两类不同结构的谐振腔模型研究了谐振腔几何形状对声场分布以及悬浮定位能力和悬浮稳定性的影响. 关键词：     

Coupling mechanism of an EMAT

Electro-magnetic acoustic transducers (EMATs) generate ultrasonic waves in metals through an electromagnetic coupling mechanism. A concept for EMAT generation, using a coil alone without a permanent magnet, but with a pulse generator and a sample, is introduced. A simplified equivalent coil circuit is given, and has been validated by experimental measurements. Such an equivalent circuit is useful for excitation current calculations, which have often been neglected in previous publications in this area but have proved to be of great importance in considering the efficiency and frequency characteristics of ultrasonic generation. Due to the coil sample coupling, the equivalent coil inductance is dependent on the electrical conductivity and magnetic permeability of the metal sample, the lift-off, the coil orientation relative to the metal sample and the coil configuration. The use of a coil alone to generate ultrasound has limited applications as a suitable ultrasonic detector must also be used, but where appropriate this type of generation source provides a robust, non-contact and inexpensive means of ultrasonic generation without worrying the permanent magnet attracting ferromagnetic particles that can prevent from practical on-line application of EMATs.