用准对称波导法测量薄膜参数

本文指出了在棱镜耦合状态下降低平板波导基模截止厚度的途径,用文中提出的准对称波导法测量了薄的MgO膜的折射率和厚度,并给出了测量结果.     

Three-component hybrid-integrated optical accelerometer based on LiNbO_3 photoelastic waveguide

A novel three-component hybrid-integrated optical accelerometer based on LiNbO3 photoelastic waveguide is presented. The photoelasitcity of LiNbO3 due to three-dimensional stress states is obtained analytically. We analyze the level of sensitivity to cross-axis accelerations which is a very important parameter for three-component accelerometer. Theoretically, the designed three-component hybrid-integrated optical accelerometer has a transverse sensitivity ratio （TSR） of zero. The sensor has a high natural frequency of 3.5 kHz and a linear broad working freauency.     

薄膜体声波谐振器性能模型参数的提取方法北大核心CSCD

薄膜体声波谐振器(FBAR)性能模型包含两个关系式:一个是FBAR有效机电耦合系数与其形状因子(面积与周长之比)的关系式,另一个是FBAR品质因数与其形状因子的关系式。前一个关系式中的参数为FBAR边缘区域的等效宽度,后一个关系式中的参数为表征FBAR横向声能泄漏的因子。为使性能模型用于不同膜层结构、材料及制备工艺的FBAR,建立FBAR性能模型参数的提取流程。以一种5层复合结构的FBAR为例,在同一晶片上,制备多个不同形状因子的FBAR。针对其中一个五边形FBAR,在ADS软件中通过Mason电路模型仿真得到其性能值(有效机电耦合系数和品质因数);再使用矢量网络分析仪和射频探针台实测其性能值。将仿真与实测得到的性能值代入FBAR性能模型,解算出这两个参数。确定参数之后,使用FBAR性能模型预测同一晶片上其它不同性能因子FBAR的有效机电耦合系数和品质因数,预测值的相对误差在3%之内,验证了该参数提取流程的有效性。     

薄膜体声波谐振器性能模型参数的提取方法

薄膜体声波谐振器(FBAR)性能模型包含两个关系式：一个是FBAR有效机电耦合系数与其形状因子(面积与周长之比)的关系式,另一个是FBAR品质因数与其形状因子的关系式。前一个关系式中的参数为FBAR边缘区域的等效宽度,后一个关系式中的参数为表征FBAR横向声能泄漏的因子。为使性能模型用于不同膜层结构、材料及制备工艺的FBAR,建立FBAR性能模型参数的提取流程。以一种5层复合结构的FBAR为例,在同一晶片上,制备多个不同形状因子的FBAR。针对其中一个五边形FBAR,在ADS软件中通过Mason电路模型仿真得到其性能值(有效机电耦合系数和品质因数);再使用矢量网络分析仪和射频探针台实测其性能值。将仿真与实测得到的性能值代入FBAR性能模型,解算出这两个参数。确定参数之后,使用FBAR性能模型预测同一晶片上其它不同性能因子FBAR的有效机电耦合系数和品质因数,预测值的相对误差在3%之内,验证了该参数提取流程的有效性。     

Visualization of surface acoustic wave scattering by dislocations

Stroboscopic X-ray topography at the synchrotron beam line was used to visualize the propagation of a 580 MHz surface acoustic waves (SAW) in LiNbO3 crystals. For this purpose, the X-ray bursts coming from the synchrotron storage ring with periodicity of 5.68 MHz were synchronized with the SAW frequency in a phase-locked mode. This method allowed us to "stop" the SAW in time and to observe the X-ray diffraction contrast caused by the dynamic deformation field of SAW. The X-ray topographic images showed well-resolved individual acoustic wave fronts of 6 microm SAW as well as their distortions due to SAW scattering by linear dislocations. Some of the images revealed an exceptional contrast of the concentric rings about the dislocation line, which is caused by coherent interaction of the secondary elastic waves. This contrast is similar to the Fresnel zones in optics, and this conclusion is confirmed by direct summation of secondary waves emitted by local elements of a vibrating dislocation string.     

Field transformation in a multimode optical waveguide with random irregularities of the film surface

A self-consistent mathematical model for the transformation of the average intensity of the mode spectrum I(z) of a waveguide field in a multimode planar optical waveguide with a step profile and rough surface is developed. This model is based on the matrix model for multiple scattering of modes in an optical waveguide. The elements of the intermode scattering matrix are found, which describe the process of mutual transfer of the energy of modes along a waveguide and their transformation into radiation modes. The transformation of the I(z) modes in waveguides with large-and small-scale inhomogeneities is investigated. It is shown that the largest qualitative differences in the noted dependences manifest themselves only in the initial portions of the optical waveguide. The length z of these portions is much smaller than the characteristic scale length L _k at which the fundamental energy of the kth mode excited in the optical waveguide is renewed. The effect of self-filtration of the mode spectrum I(z) is described, as a result of which a stable (normalized), independent of distance z, distribution I* is formed. It is established that irregularities of the optical waveguide boundaries exert a depolarizing effect on a guided light beam. The specific features of the normalization of the radiative dissipation of a group of modes I_i(z) in an optical waveguide are investigated. It is ascertained that, in the case of small-scale irregularities, the attenuation coefficient is described by a nonlinear monotonic dependence α(z), which asymptotically converges to the value α*, characteristic of the normalized field I*. When the optical-waveguide film has large irregularities, the dependence α(z) is characterized by a pronounced maximum due to the formation of alternative channels of radiative dissipation of the energy of waveguide modes.     

BK7玻璃保护层掺钕磷酸盐玻璃波导特性

实验研究了基于KNO3稀释AgNO3混合熔盐离子交换法制备的镀有BK7玻璃保护层的N31型掺钕磷酸玻璃平面波导。采用棱镜耦合技术测试了其波导的有效折射率,应用IWBK方法拟合了其折射率分布。实验结果表明:在一定的扩散时间(5～7h)和交换温度(360～380℃)范围内,KNO3与AgNO3混合熔盐比对波导制备的影响起主导作用,引起的表面折射率的变化可达到0.025;BK7玻璃保护层对热离子交换掺钕磷酸盐玻璃表面起到了很好的保护作用,获得了良好的导模传输特性,其光传输损耗约为0.9dB/cm。     

Complex surface pinning parameter and quasi-localized surface spin wave modes in a magnetic thin film

For the first time, the surface pinning parameter is considered in complex form within the framework of the surface inhomogeneity model of magnetic thin films.The complex form of the parameter is shown to be associated with the existence of quasi-localized surface modes (of amplitude decaying in oscillatory manner from the surface into the bulk). These modes emerge within the bulk mode band and their lifetime is finite; the damping is directly related to the imaginary part of the surface pinning parameter.     

A modulated ellipsometer for studying thin film optical properties and surface dynamics

A modulated ellipsometer has been constructed for the study of the optical properties of thin films deposited and maintained in a variety of controlled environments. The ellipsometric technique involves a photoelastic device which modulates the state of polarization of the light beam. Quantities related to the ellipsometric parameters ψ and Δ are extracted simultaneously by synchronous detection of reflected light intensities in two different frequency channels. Signal processing is completed by an on-line computer which samples data at a repetition rate of approximately one data set per second. Once the optical system is aligned, all elements remain rigidly in place; hence, the precision and stability are high. In terms of ψ and Δ, the precision is of the order of 0.001° and stability over one hour is of the order of 0.01°. Various systematic uncertainties limit the absolute accuracy of the measured optical constants to a few percent for high reflectivity materials. Because of its speed, precision, and stability, this ellipsometer is suited both to comparison measurements of samples prepared under different conditions and to time-lapse measurements of a single film in order to observe annealing, gas adsorption, or surface corrosion in process. Preliminary experimental results are presented.     

椭偏透射法测量氢化非晶硅薄膜厚度和光学参数

针对多角度椭偏测量透明基片上薄膜厚度和光学参数时基片背面非相干反射光的影响问题,报道了利用椭偏透射谱测量等离子增强化学气相沉积法(PECVD)制备的a-Si:H薄膜厚度和光学参数的方法,分析了基片温度T_s和辉光放电前气体温度T_g的影响.研究表明,用椭偏透射法测量的a-Si:H薄膜厚度值与扫描电镜(SEM)测得的值相当,推导得到的光学参数与其他研究者得到的结果一致.该方法可用于生长在透明基片上的其他非晶或多晶薄膜. 关键词： 椭偏测量 透射法 光学参数 氢化非晶硅薄膜     

Fabrication of defocus graded-index optical waveguide for evanescent wave optical amplifier

This is the first report on an evanescent wave optical amplifier with a plastic waveguide that can amplify a CW signal transmitted by a plastic optical fiber. The waveguide with a concave refractive index distribution was fabricated by an interfacial-gel polymerization technique. Since the waveguide increases the number of reflections at the boundary surface of the waveguide and the laser dye solution, the enhancement of amplification efficiency can be realized. The function of the fabricated waveguide was confirmed by calculations and experiments. The obtained results indicate that the fabricated fiber generated a larger evanescent field than the waveguide without a refractive index distribution.     

Cerium dioxide thin film optical waveguides

Cerium dioxide thin film optical waveguides were fabricated by an RF magnetron sputtering process. The films were deposited on glass substrates and on silicon dioxide layers grown on silicon substrates. Optical loss measurements for the fabricated waveguides are reported. It is seen that the volume losses in the films were fairly high compared with the surface losses.     

Estimation methodology for amplitude of second-order harmonic in nonlinear surface acoustic wave measured by optical diffraction method

An estimation methodology for amplitude from the fundamental to fourth-order harmonic composed of nonlinear surface acoustic waves on a LiNbO₃ substrate with a 128° Y-X propagation axis was demonstrated. First, equations for estimation of amplitudes from diffracted light intensity were shown and then numerical simulations of main factors were carried out. Normalized diffraction light intensities due to components of nonlinear surface acoustic waves were measured and their amplitudes were obtained from measured values. Finally, the amplitude of the second harmonic propagating on a gold thin film of about 50 nm thickness was estimated. It was found that the amplitude of the second harmonic increased continuously from 0.8 to 2.0 Å with propagation distance in the thin film.     

Defect assisted coupled resonator optical waveguide: Weak perturbations

Coupled resonator optical waveguides (CROW) comprised of only a few resonators including one defective element are investigated analytically and numerically. The defect is introduced by perturbing weakly the resonator at the center of the chain, creating a ‘cavity’ in what is an analogue of a Fabry-Pérot resonator or a defect-assisted photonic crystal structure. The device is found to have a very narrow resonance within the original stopband of the unperturbed CROW, and an accompanying extremely large group velocity excursion, that extends over both the subluminal and the superluminal ranges. The properties of the resonance and the magnitude of the group velocity dispersion are found to be conveniently controllable by coupling strength and by the number of resonators used. The perturbation can be caused thermo-optically or electro-optically. The complex effects of waveguide loss are extensively discussed.     

Enhancement of optical absorption in amorphous silicon thin film solar cells with periodical nanorods to increase optical path length

In this paper, we demonstrate an amorphous silicon (a-Si) thin film solar cell (TFSC) with a homogeneous layer of a-Si to absorb short wavelength photons and periodical a-Si nanorod structures for light trapping enhancement for longer wavelength photons. In such a design, the total absorption can be greatly improved. The periodicity and duty ratio of the nanorods were optimized to enhance the total optical absorption within 500 nanometer (nm) to 1000 nm in the hybrid TFSC structure. The best overall absorption can be achieved when period of nanorods is about 500 nm. When the duty ratio of nanorods is 0.6, the average absorption can reach 80% which represents an improvement by 40% compared to the conventional thin film a-Si solar cell without nanorod structures.     

Four-layer metal-clad thin film optical waveguides

An investigation of the low order modes supported by an asymmetrical four-layered metal-clad optical waveguide is presented showing the attenuation characteristics and the field profiles. The attenuation and phase constants are examined as functions of both the thickness and refractive index of the buffer layer as well as the mode order. The results for small and large buffer layer thicknesses are discussed in terms of the modes supported by simpler asymmetrical three-layered metal-clad and dielectric-clad waveguides respectively. It is shown that the coupling of the TM polarized modes to the lossy surface plasma wave depends upon the buffer layer thickness, the refractive indices of the buffer layer and dielectric cladding and the mode order. This coupling is very dependent upon the mode order with the TM₀ mode exhibiting far weaker coupling than the higher order TM modes. Methods of controlling the amount of coupling and hence the attenuation of the TM modes are discussed.This work was performed while the author was with the Department of Electrical Engineering, University of Queensland, Brisbane, Australia, 4067.     

Optical transmission loss in tin oxide thin film waveguide

This paper reports the optical transmission loss of tin oxide thin film waveguide. The effect of oxidation temperature, thickness and air ageing (40 days at room temperature) was studied. The vapour chopping technique has been used successfully to reduce the optical transmission loss. The vapour chopped tin oxide thin film waveguide (2.90-3.60 dB/cm) showed smaller transmission loss than those of nonchopped tin oxide thin film waveguide (4.16-4.74 dB/cm). Transmission loss was found to be a function of oxidation temperature and thickness. Due to increased oxidation temperature, transmission loss was found to decrease. The effect of increase in thickness was to increase the transmission loss. The air ageing effect caused the increase in transmission loss whereas the effect was found lesser in the vapour chopped tin oxide thin film waveguide.     

Computations for the design of an integrated surface acoustic wave controlled semiconductor optical source

A superluminescent diode monolithically integrated with a surface acoustic wave Bragg-cell to operate as a beam deflector is proposed. The analysis procedures for determining the acoustic and optical modes, and modal diffraction of the optical beam are employed to develop a practical model for the integrated device. Results from this model are used to assess the operational characteristics of the proposed integrated device and to provide design guidelines.     

The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering

Zinc oxide (ZnO) thin films were deposited on unheated silicon substrates via radio frequency (RF) magnetron sputtering, and the post-deposition annealing of the ZnO thin films was performed at 400 °C, 600 °C, 800 °C, and 1000 °C. The characteristics of the thin films were investigated by X-ray diffractometry (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). The films were then used to fabricate surface acoustic wave (SAW) resonators. The effects of post-annealing on the SAW devices are discussed in this work. Resulting in the 600 °C is determined as optimal annealing temperature for SAW devices. At 400 °C, the microvoids exit between the grains yield large root mean square (RMS) surface roughness and higher insertion losses in SAW devices. The highest RMS surface roughness, crack and residual stress cause a reduction of surface velocity (about 40 m/s) and increase dramatically insertion loss at 1000 °C. The SAW devices response becomes very weak at this temperature, the electromechanical coupling coefficient (k²) of ZnO film decrease from 3.8% at 600 °C to 1.49% at 1000 °C.