Elastic friction drive of surface acoustic wave motor

Importance of elastic deformation control to obtain large output force with a surface acoustic wave (SAW) motor is discussed in this paper. By adding pre-load to slider, stator and slider surfaces are deformed in a few tens nanometer. Appropriate deformation in normal direction against normal vibration displacement amplitude of SAW existed. By moderate deformation, the output force of the SAW motor was enlarged up to about 10 N and no-load speed was 0.7 m/s. To produce this performance, the transducer weight and slider size were only 4.2 g and 4 x 4 mm(2).By traveling wave propagation, surface particles of the SAW device move in elliptical motion. Due to the amplitude of the elliptical motion is 10 or 20 nm order, the contact condition of the slider is very critical. To control the contact condition, namely, the elastic deformation of the slider and stator surface in nanometer order, a lot of projections were fabricated on the slider surface. The projection diameter was 20 micro m. In static condition, the elastic deformation and stress were evaluated with the FEM analysis. From this calculation and the simulation result, it is consider that the wave crest is distorted, hence the elasticity has influence on the friction drive condition.Elastic deformation of the stator surface beneath the projection from the initial position were evaluated. In 4 x 4 mm(2) square area, the sliders had from 1089 to 23,409 projections. Depression was independent to the contact pressure. However, the output force depended on the depression although the projection density were different. From the view point of the output power of the motor, the proper depression was independent to the projection density. Around 25 nm depression, the output force and output power were maximized. This depression value was almost same as the vibration displacement amplitude of the stator transducer.     

Optimum contact conditions for miniaturized surface acoustic wave linear motor

This paper reports the successful operation of a 70 MHz driving surface acoustic wave (SAW) linear motor with a miniaturized stator transducer. This paper also deals with an investigation into an optimized slider design for the miniaturized SAW linear motor. The performance of three silicon type sliders, with different projection size, was compared. Output forces of the three sliders were measured with change of pre-load. It was found that the slider with smaller projection tended to produce greater output force.     

Performance of Non-Contact Linear Actuators Driven by Surface Acoustic Waves*

A new kind of non-contact linear actuator （motor） driven by surface acoustic waves （SAWs） is presented, in which the stators are made from SAW delay lines using 128° YX-LiNbO3 substrates. A fluid layer is introduced between the slider and the stator of the actuator, and the slider is a circular aluminum disk suspended on the surface of the liquid （water） layer. As the SAW is excited on the stator, the SAW is converted to a leaky wave in the interface of the stator and the liquid, and then propagates into the liquid. Owing to the nonlinear effect of wave propagation, acoustic streaming is generated, which pushes the slider to move. By the experiments, the relations between the slider velocity and the experimental parameters, such as the exciting voltage of the SAWs, the thickness and the kinematic viscosity of the liquid layer, are obtained.     

Two-Dimensionally Self-Holding Deflection Mirror Using Surface Acoustic Wave Motor

We have developed a two-dimensionally deflecting mirror actuating system with a deflection angle of 20°, which takes full advantage of the characteristics of a two-dimensional surface acoustic wave (SAW) motor. A magnetic slider moves with frictional drive by the Rayleigh mode of the SAW and deflects the mirror by the force of magnetic attraction. For the actuation of a 20° deflection angle, only a 10 ms duration of driving voltage is required owing to the high-speed characteristic of the motor, followed by an additional 10 ms for damping of the mirror structure produced in order to complete holding of the angle. No power supply is necessary to hold the angle. Furthermore, the resolution of the angle is 0.0015° because of the high-resolution capability of the motor. The mirror deflection system showed a 10⁴ dynamic range of angle positioning ability.     

Miniaturization of surface acoustic waves rotary motor

This paper presents the experimental study of a miniaturized surface acoustic waves (SAWs) rotary motor and the theoretical calculation. After the first success in SAW rotary motor operating at 9.85 MHz, a smaller rotary motor is designed. With the operating frequency of 30 MHz and the driving voltage of 120 V(p-p), the motor can rotate at a speed of 270 rpm.     

Performances estimation of a rotary traveling wave ultrasonic motor based on two-dimension analytical model

The understanding of ultrasonic motor performances as a function of input parameters, such as the voltage amplitude, driving frequency, the preload on the rotor, is a key to many applications and control of ultrasonic motor. This paper presents performances estimation of the piezoelectric rotary traveling wave ultrasonic motor as a function of input voltage amplitude and driving frequency and preload. The Love equation is used to derive the traveling wave amplitude on the stator surface. With the contact model of the distributed spring-rigid body between the stator and rotor, a two-dimension analytical model of the rotary traveling wave ultrasonic motor is constructed. Then the performances of stead rotation speed and stall torque are deduced. With MATLAB computational language and iteration algorithm, we estimate the performances of rotation speed and stall torque versus input parameters respectively. The same experiments are completed with the optoelectronic tachometer and stand weight. Both estimation and experiment results reveal the pattern of performance variation as a function of its input parameters.     

在C70固体/p-GaAs结构中的甚深深能级

发展了恒温电容瞬态数据处理方法，称新方法为恒温电容瞬态时间积谱(ICTTS).用ICT TS方法测量分析了C₇₀固体/p GaAs异质结的深能级，结果发现在C₇₀固体中存在两个很深的空穴陷阱，H C₁和H₂，它们的能级位置分别为Ev⁺⁰856eV和 Ev+1037eV. 关键词： 70')" href="#">C₇₀ 深能级 恒温电容瞬态     

An emerging reactor technology for chemical synthesis: Surface acoustic wave-assisted closed-vessel Suzuki coupling reactions

In this paper we demonstrate the use of an energy-efficient surface acoustic wave (SAW) device for driving closed-vessel SAW-assisted (CVSAW), ligand-free Suzuki couplings in aqueous media. The reactions were carried out on a mmolar scale with low to ultra-low catalyst loadings. The reactions were driven by heating resulting from the penetration of acoustic energy derived from RF Raleigh waves generated by a piezoelectric chip via a renewable fluid coupling layer. The yields were uniformly high and the reactions could be executed without added ligand and in water. In terms of energy density this new technology was determined to be roughly as efficient as microwaves and superior to ultrasound.     

MOCVD法生长SAWF用ZnO/Diamond/Si多层结构

使用等离子体辅助MOCVD系统在金刚石,硅衬底上成功地制备了氧化锌多层薄膜材料,通过两步生长法对薄膜质量进行了优化。XRD测试显示优化后的样品具有c轴的择优取向生长,PL谱测试表明样品经优化后不仅深能级发射峰消失,同时紫外发射峰增强。对优化后的样品的表面测试显示出较低的表面粗糙度。比较氧化锌多层薄膜结构的声表面波频散曲线,ZnO薄膜声表面滤波器受膜厚和衬底材料的影响较大。当ZnO薄膜较薄时,在它上面的传播速度将与衬底上的传播速度接近,与其他衬底上生长的薄膜相比,以金刚石这种快声速材料为衬底的ZnO多层薄膜结构,声表面波滤波器的中心频率将提高1倍左右。     

基于绝缘体上硅的一种改进的Mach-Zehnder声光调制器

传统的基于绝缘体上硅的Mach-Zehnder(MZ)声光调制器中,叉指换能器位于两臂的同一侧.为实现高的调制效率,声表面波的波峰和波谷分别调制MZ干涉仪的两臂,这要求控制MZ干涉仪两臂之间的距离为奇数倍声波半波长.但实际上由于传播过程中衬底材料的变化,声波波长会变大,这会导致两臂的间距难以准确设置.另一方面,声波在传播过程中经过MZ干涉仪的一臂后会发生衰减,降低了对另一臂的调制效果,影响了整体的调制效率.本文针对这些问题给出了一种解决方案,把叉指换能器放在MZ波导两臂之间,确保MZ干涉仪两臂到叉指电极中心距离相等.采用有限元法,首先对新提出的结构进行分析,然后通过声光互作用原理得到了材料的折射率变化;进而研究了波导类型、波导宽度、氧化锌厚度及叉指对数等因素对声光调制效率的影响,并对声光调制器的结构参数进行了优化以提高其性能.基于COMSOL Multiphysics的仿真结果表明,当条波导宽度为6μm,氧化锌只覆盖有叉指电极的部分且厚度为2.2μm,控制叉指电极数目为50对时,波导有效折射率变化在驱动电压为1 V时可以达到4.08×10~(-4),比传统结构提高了12%.     

基于AlN声表面波滤波传感器器件的有限元仿真

声表面波器件是一种利用压电材料的压电效应与逆压电效应工作电子器件, 文章首先详细描述了声表面波器件的设计与仿真过程,运用有限元分析的方法分别计算了利用声表面波的 SAW 器件与利用体波的 BAW 器件的性能与各项参数,对相关的器件进行了计算分析,分别用上述方法研究了基于 AlN 薄膜的声表面波器件和悬臂梁结构的体波器件,推导得出了器件的电学导纳与频率之间的关系, 通过分析器件的导纳-频率曲线,推导出器件内部声波的模式以及合适的工作频率,最终得出在 IDT 周期为 8 微米的情况下,SAW 器件的理想工作频率是 0.7-1.95GHz,BAW 器件的理想工作频率在 0.6-3.2GHz 的结果。     

A Novel Rotation Speed Measurement Method Based on Surface Acoustic Wave

This paper presents an original passive wireless rotation speed measurement method based on surface acoustic wave (SAW) technology. A theoretical analysis was conducted on the principle of SAW rotation speed measurement and a numerical analysis on the SAW response energy pulses with different rotation angles and resonance frequencies was performed. Numerical calculation results showed that when the distance and the effective length of the antenna connected to SAWR vary with the rotation angle, the energy of acquired SAW response varies periodically. The rotation speed was estimated by searching the crossing points of the SAW response energy pulses and its mean value line. The SAW rotation speed measurement system was set up and the high performance SAW resonators were fabricated on a quartz substrate. The proposed measurement system was tested with a maximum error of 0.6 rpm, indicating that the system is capable of measuring rotation speeds from 10 to 100 rpm. Experimental results verified the validity and feasibility of presented rotation speed measurement method.     

Applications of Acoustic Wave Devices for Sensing in Liquid Environments

Abstract

Acoustic wave devices such as thickness shear mode (TSM) resonators and shear horizontal surface acoustic wave (SH‐SAW) devices can be utilized for characterizing physical properties of liquids and for chemical sensor applications. Basic device configurations are reviewed and the relationships between experimental observables (frequency shifts and attenuation) and physical properties of liquids are presented. Examples of physical property (density and viscosity) determination and also of chemical sensing are presented for a variety of liquid phase applications. Applications of TSMs and polymer‐coated guided SH‐SAWs for chemical sensing and uncoated SH‐SAWs for “electronic tongue” applications are also discussed.     

Rapid concentration of particle and bioparticle suspension based on surface acoustic wave

A method of rapid particle concentration in a droplet has been developed using surface acoustic wave (SAW) technology. A droplet was partially placed on a surface acoustic wave propagation path, and particles were concentrated at the center of the droplet due to the asymmetry. The device consists of two IDTs and two reflectors. The one IDT is used for generating SAW and the opposite IDT is used for detecting output voltage signal amplitude, and then for calculating acoustic power density of a droplet. To investigate concentration effect of the device, starch suspension and rabbit blood cells were used in this paper. Different acoustic power density was applied ranging from 6.13 mw mm⁻² to 210.9 mw mm⁻². The concentration process occurs within 15 s under appropriate acoustic power density put on the droplet, which is much faster than currently available particle concentration mechanisms, and the method is also efficient, which concentrating the particles into an aggregate about one-fifth the size of the original droplet. Additional, the concentration process is no damage to bioparticles. This concentration method can improve greatly SAW biosensor system sensitivity.     

Development of human IgE biosensor using Sezawa-mode SAW devices

This paper reports Sezawa-mode surface acoustic wave (SAW) devices with via-isolated cavity to construct the allergy biosensor. To fabricate Sezawa-mode SAW devices, the RF magnetron sputtering method for the growth of piezoelectric ZnO thin films are adopted and influences of the sputtering parameters are investigated. The optimal substrate temperature of 300 °C, RF power of 120 W and sputtering pressure of 2 Pa were used to deposit piezoelectric ZnO films with a smooth surface, uniform grain size and strongly c-axis-orientated crystallization. A back-etched SAW resonator is used in this study. The wet etching of (100)-oriented silicon wafers is used to form a back-side cavity which is critical to the formation of a hopper cavity for holding bio-analytes. The remaining membrane structure silicon thickness was 25 μm. In this report, the chrome (Cr, 12 nm)/gold (Au, 66 nm) layer was initially deposited onto the sensing area of SAW devices as the binding layer for biochemical sensor. The resonance frequency of the Sezawa-mode SAW device is 1.497 GHz. The maximum sensitivity of the Sezawa-mode is calculated to be 4.44 × 10⁶ cm²/g for human immunoglobulin-E (IgE) detection. The stability for human IgE detection is calculated to be 80% and the variation of the stability ±3% was obtained after several tests.     

Scanning tunneling microscopy of RF oscillating surfaces

Amplitude and phase of high frequency surface acoustic wave (SAW) fields are investigated by a novel scanning tunneling microscopy technique. The gap voltage is modulated at a slightly detuned high frequency. Due to the nonlinearity of the tunneling process a frequency mixing appears. For scanned areas with dimensions much smaller than the wavelength of the SAW a remarkable local variation of amplitude and phase of the tunneling current at the difference frequency is observed. Depending on the local morphology different components of the particle displacement vector are detected. Model calculations of amplitude and phase images are presented for a real topography.     

High-frequency single-electron transport in a quasi-one-dimensional GaAs channel induced by surface acoustic waves

We report on an experimental investigation of the direct current induced by transmitting a surface acoustic wave (SAW) with frequency 2.7 GHz through a quasi-one-dimensional (1D) channel defined in a GaAs - AlGaAs heterostructure by a split gate, when the SAW wavelength was approximately equal to the channel length. At low SAW power levels the current reveals oscillatory behaviour as a function of the gate voltage with maxima between the plateaux of quantized 1D conductance. At high SAW power levels, an acoustoelectric current was observed at gate voltages beyond pinch-off. In this region the current displays a step-like behaviour as a function of the gate voltage (or of the SAW power) with the magnitude corresponding to the transfer of one electron per SAW cycle. We interpret this as due to trapping of electrons in the moving SAW-induced potential minima with the number of electrons in each minimum being controlled by the electron - electron interactions. As the number of electrons is reduced, the classical Coulomb charging energy becomes the Mott - Hubbard gap between two electrons and finally the system becomes a sliding Mott insulator with one electron in each well.     

Laser-generated surface acoustic waves in a ring-shaped waveguide resonator

Surface acoustic wave (SAW) waveguide resonator is formed by a ring-shaped strip of copper 10 μm wide and ∼130 μm in diameter embedded into a 0.8 μm thick layer of silica on a silicon wafer. SAWs are excited at one side of the copper ring by a short laser pulse focused into a spatially periodic pattern and detected via diffraction of the probe laser beam overlapped with the excitation spot. SAW wavepackets with central frequency 460 MHz travel around the ring and are detected each time they make a full circle and pass trough the probe spot. Potential applications of ring resonators for SAWs are discussed.     

大气压放电等离子体柱的光谱研究

大气压放电等离子体柱在飞行器隐身技术方面具有非常重要的应用。利用同轴介质阻挡放电水电极装置,大气压下在氩气中放电产生了长达65 cm的均匀等离子体柱。利用光学方法研究了等离子体柱的放电机理为发光子弹传播。通过测量发现该子弹的传播速度约为0.6×105 m·s-1。采用发射光谱法测量了等离子体柱的发射光谱中谱线强度比随外加电压和驱动频率的变化关系,其相对强度之比表征了电子平均能量。结果表明电子平均能量随外加电压和驱动频率的增加而增加。本工作对大气压下气体放电的工业应用具有一定的意义,在军事飞行器隐身方面具有广阔的应用前景。     

Scanning Michelson interferometer for imaging surface acoustic wave fields

A scanning homodyne Michelson interferometer is constructed for two-dimensional imaging of high-frequency surface acoustic wave (SAW) fields in SAW devices. The interferometer possesses a sensitivity of ~10(-5)nm/ radicalHz , and it is capable of directly measuring SAW's with frequencies ranging from 0.5 MHz up to 1 GHz. The fast scheme used for locating the optimum operation point of the interferometer facilitates high measuring speeds, up to 50,000 points/h. The measured field image has a lateral resolution of better than 1 mu;m . The fully optical noninvasive scanning system can be applied to SAW device development and research, providing information on acoustic wave distribution that cannot be obtained by merely electrical measurements.