A lateral super-resolution differential confocal technology with phase-only pupil filter

In order to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, phase-only pupil filtering differential confocal microscopy (PFDCM), a new approach is proposed based on the differential confocal microscopy (DCM), which uses a three-zone phase-only pupil filter with lateral super-resolution capability obtained through optimized design to change the distribution of DCM three-dimensional point spread function, so that the DCM lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFDCM are better than 0.2 μm and 2 nm, respectively, when wavelength of incidence laser beam , numerical aperture of measuring lens NA=0.85, and lateral spot size with a three-zone phase-only pupil filter G_T=0.65. It is therefore concluded that PFDCM is a new approach to further improvement of lateral resolution in laser probe measurement systems.     

位相型光瞳滤波器对共焦系统离焦工作状态横向分辨特性的影响

分析了共焦显微系统(CMS)离焦状态工作时分辨特性的变化,指出了离焦状态是导致CMS横向分辨特性变差的主要影响因素之一。提出并采用了位相型超分辨光瞳滤波技术来改善CMS工作在离焦状态下的横向分辨特性,分析了超分辨光瞳滤波器位置变化对CMS横向分辨特性的影响。理论分析和实验验证表明,位相型超分辨光瞳滤波技术的引入,显著抑制了CMS工作在离焦状态时艾里斑旁瓣的增长,克服了CMS因工作在离焦状态而引起的横向分辨特性下降的缺点。     

Improved axial resolution in confocal fluorescence microscopy using annular pupils

The axial image of a thick fluorescent layer is studied in a confocal microscope consisting of either circular or annular pupils. The response for circular pupils is sharper than that for annular pupils if a small pinhole detector is used. But when the size of the pinhole is larger than a certain value, the response in the latter case can become sharper than that in the former. This result implies that for a given detector of finite size, axial resolution in confocal fluorescence microscopy can be improved when an annular lens is used. Our experimental results qualitatively demonstrate the theoretical prediction. The strength of optical sectioning and the axial cross-section of the three-dimensional optical transfer function are also derived from the measured data.     

具有高空间分辨力的整形环形光式差动共焦测量法

提出一种新的具有高空间分辨力的整形环形光式差动共焦测量方法。该方法通过整形环形光式共焦测量法和锐化爱里斑主瓣，改善系统横向分辨力；通过差动共焦测量法改善系统的轴向分辨力，最终达到提高系统空间分辨能力的目的。理论分析和实验表明：整形环形光内孔归一化半径ε越大，横向分辨力改善越明显，量程扩展范围越宽；当入射光波长λ=632.8nm，物镜数值孔径取NA=0.85，ε=0.5时，该系统的横向分辨力优于0.2μm，轴向分辨力优于2nm。该方法为光触针测量系统空间分辨力的提高提供了1种新的方法，可广泛应用于超精密三维微细结构工件的超精密测量。     

Sub-diffraction-limit imaging based on the topographic contrast of differential confocal microscopy

Using the nanometer depth sensitivity of differential confocal microscopy, we detect surface features of lateral dimensions smaller than the diffraction limit without fluorescence labeling. The lateral resolution of the topographic images is further enhanced by a maximum-likelihood estimation algorithm. Based on the comparison of signal and noise at high spatial frequency, we estimate the best lateral resolution of the enhanced images to be 0.15 lambda. In addition, on composite samples this technique can simultaneously display sub-diffraction-limit topographic features and reflectivity heterogeneity.     

三环位相型光瞳滤波器的横向超分辨与轴向焦深扩展

用矢量衍射方法分析了线偏振光入射到带有三环位相型光瞳滤波器的高数值孔径物镜时,焦点的轴向和横向光强分布.数值模拟结果表明,高数值孔径物镜聚焦时需同时考虑光强的轴向和横向分布.通过加入三环位相光瞳滤波器,在实现横向超分辨的同时实现了光学系统轴向焦深扩展和轴向光强分布平坦化,并且位相调制深度变化时,会出现轴向焦移现象.对三环位相光瞳滤波器结构进行了优化,得出了优化结果. 关键词： 光学超分辨 扩展焦深 位相型光瞳滤波器 矢量衍射方法     

微分干涉差共焦显微膜层微结构缺陷探测系统

多层膜极紫外光刻掩模"白板"缺陷是制约下一代光刻技术发展的瓶颈之一,为提高对掩模"白板"上的膜层微结构缺陷的分辨能力,提出了一种微分干涉差共焦显微探测系统方案。基于标量衍射理论,计算了系统横向和轴向分辨率。利用MATLAB建模仿真,在数值孔径为0.65、工作波长为405 nm时,分析比较了微分干涉差共焦显微系统、传统显微系统和共焦显微系统的分辨率。结果表明微分干涉差共焦显微系统具有230 nm的横向分辨率和25 nm轴向台阶高度差的分辨能力(对应划痕等缺陷形式)。此外,仿真和分析了实际应用中探测器尺寸、样品轴向偏移等的影响,模拟分析了膜层微结构缺陷的探测,结果表明本系统可以探测200 nm宽、10 nm高的微结构缺陷,较另外两种系统有更好的探测能力。     

Effect of fabrication errors on axial super-resolution property of a three-zone pupil filter

Two models have been established using the basic definitions of super-resolution characteristic parameters for normalized spot size G_A and Strehl ratio S_A, of a three-zone axial super-resolution pupil filter with fabrication errors, to quantitatively analyze the effect of these fabrication errors on the axial super-resolution property. These new models established to describe the analytic relationship of G_Ae and S_Ae of a pupil filter with its fabrication errors and its transmission function A(ρ), phase function φ(ρ) and structural parameters, directly relate the super-resolution parameters of a three-zone axial super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design and fabrication of a three-zone axial super-resolution pupil filter. The models established for G_Ae and S_Ae have been used to analyze the effect of the fabrication errors of a pupil filter on its super-resolution property, with a three-zone phase-only pupil filters as example.     

Effect of fabrication errors on lateral super-resolution property of a three-zone pupil filter

Two models have been established using the basic definitions of super-resolution characteristic parameters for normalized spot size G_T and Strehl ratio S_T of a three-zone lateral super-resolution pupil filter with fabrication errors to quantitatively analyze the effect of these fabrication errors on the lateral super-resolution property. These new models established to describe the analytic relationship of G_Te and S_Te of a pupil filter with its fabrication errors and its transmission function A(ρ), phase function φ(ρ) and structural parameters directly relate the super-resolution parameters of a three-zone lateral super-resolution pupil filter to its fabrication errors to make the quantitative analyses of the effect of fabrication errors easier, thereby providing a theoretical basis for the analysis, design and fabrication of a three-zone lateral super-resolution pupil filter. The models established for G_Te and S_Te have been used to analyze the effect of the fabrication errors of a pupil filter on its super-resolution property with a three-zone phase-only pupil filter as an example.     

Dual-axes differential confocal microscopy with high axial resolution and long working distance

We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours.     

差动共焦显微成像高稳定三维扫描技术与系统

激光差动共焦显微镜具备高空间分辨率特点,但因其逐点扫描成像方式,扫描时间长,易受三维扫描系统不稳定和环境干扰等影响,产生系统漂移,影响仪器的空间分辨率。利用楔块机构高稳定特点,结合刹车机构的自由抱闸特性,设计了一种新型的轴向升降机构,由此构建了结构更具稳定特性的电动三维扫描系统。稳定性实验验证在搭建的激光差动共焦显微镜上进行,经过监测系统在90min内的轴向位置,轴向漂移小于50nm,与原三维扫描系统漂移140nm对比,漂移速度明显减慢,稳定性有显著提升,进而明显改善了差动共焦显微成像效果。     

激光差动共焦显微成像中的轴向快速定焦方法

提出了一种基于光强信号实时判断的快速定焦方法,在对样品进行横向扫描的同时,驱动测量物镜轴向移动,对前焦探测器和后焦探测器采集到的光强信号进行实时处理,通过实时判断测量面与样品的位置关系迅速找到焦面位置,可实现快速、准确的轴向定焦,极大地提升了定焦速度。理论分析和初步的实验表明,该方法在一副图像的采集周期内能够实现轴向定焦,在同等定焦精度条件下,与清晰度定焦方法相比,可节省90℅以上的定焦时间。     

A lateral differential confocal microscopy for accurate detection and localization of edge contours

Common path noise and disturbance in light source and ambient lighting affect detection accuracy of edge contours greatly in optical microscopy. In order to solve this problem, a lateral differential confocal microscopy is proposed based on principle of lateral difference and confocal microscopy. The approach proposed uses confocal dual-receiving light path arrangement and real-time heterodyne subtraction of two signals with lateral offsets by a differential detector to improve the system′s accuracy and detection sensitivity. Theoretical analyses have been presented. In addition, a simple prototype system has been built based on theoretical analyses. Related experiments have been performed under laboratory conditions. Different from former image processing methods, common path noise and additive disturbance in light source and ambient lighting are eliminated before they are recorded. Theoretical analyses and experimental results indicate a more accurate and sensitive result.     

Differential confocal technology based on radial birefringent pupil filtering principle

In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76 nm when measuring a standard grating of period 3 μm; the axial resolution up to 3 nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.     

共焦显微扫描探测技术的发展

传统的共焦显微探测多是采用单点机械扫描方式完成的,存在着扫描效率低的缺点,针对于此,一种多光束共焦显微系统成为当前的研究热点,通过不同方式对光束进行分割,使单点检测变为多路并行检测,提高了测量速度,减少了扫描过程中光源和振动噪声的影响,实现多光束的同步测量。介绍了几种典型的单光束和多光束共焦显微测量系统的原理、研究进展、发展方向及作者在该方面的研究。     

Improvement of confocal microscope performance by shaped annular beam and heterodyne confocal techniques

In order to further improve the performance of a confocal microscope (CM) used for measurement of surface profiles and 3D microstructures, a shaped annular beam heterodyne confocal measurement method based on annular pupil filter technique and reflection confocal microscopy, is proposed to expand the measurement range and to improve the defocused property of CM. The approach proposed uses a confocal dual-receiving light path arrangement and a heterodyne subtraction of two signals received from detectors with axial offset to enable CM to be used for bipolar absolute measurement and to improve the defocused property of CM, and it uses the annular pupil filter technique to produce a binary optical shaped annular beam, which expands the measurement range by expanding the full-width at half-maximum of intensity curve received from two detectors in a heterodyne confocal microscopy system. Theoretical analyses and experimental results indicate that a shaped annular beam heterodyne microscope has a measurement range expanded from 4 to 14 μm, achieved an axial resolution of 2 nm and improved the defocused property, when ε=0.5 and NA=0.65. It can be therefore concluded that the shaped annular beam heterodyne confocal measuring method proposed is a new approach to ultraprecision measurement of surface profiles and 3D microstructures.     

Effect of annular apodization and pupil beam parameter in the focal region of high NA lens

Focusing properties of the radially polarized axisymmetric Bessel-modulated Gaussian beam with quadratic radial dependence (QBG beam) and annular aperture are investigated theoretically by vector diffraction theory. Simulation results show that the intensity distribution in the focal region of the radially polarized axisymmetric QBG beam can be adjusted considerably by small beam parameter (μ) and annular aperture (δ). When μ increases, the focal spot may change to focal hole and changes focal pattern remarkably. On introducing annular aperture, focus can split or extends along the optical axis for different μ. In this paper, we have shown the generation of the focal spot, dark focal spot, focal split and increase in focal depth in the axial direction of the incident beam propagating through the aligned optical system.     

等宽圆环光瞳滤波器的超分辨性能研究

设计一种等宽圆环光瞳滤波器 ,并研究了它的超分辨性能。分析了光瞳中心半径和圆环数对斯特耳比、超分辨能力和旁瓣强度的影响 ,讨论了设计等宽圆环光瞳滤波器时中心半径和圆环数的优化问题。表明圆环数为奇数和偶数时 ,光瞳具有不同的超分辨性能 ;圆环数分别取 1和 2时 ,综合考虑超分辨性能较佳