Photolithographic surface micromachining of polydimethylsiloxane (PDMS)

A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS to activate its surface to overcome the challenge of poor photoresist adhesion on PDMS for photolithography. Our photolithographic PDMS surface micromachining technique is compatible with conventional soft lithography techniques and other silicon-based surface and bulk micromachining methods. To illustrate the general application of our method, we demonstrated fabrication of large microfiltration membranes and free-standing beam structures in PDMS.     

Photodefinable polydimethylsiloxane (PDMS) for rapid lab-on-a-chip prototyping

In this paper, we introduce a new and simple method of patterning polydimethylsiloxane (PDMS) directly using benzophenone as a photoinitiator. The photodefinable PDMS mixture (photoPDMS) is positive-acting and only sensitive to light below 365 nm, permitting processing under normal ambient light. Features of the order of 100 microm, which are sufficiently small for most microfluidic applications, were successfully fabricated using this novel process. A parametric study of process parameters was performed to optimize the fabrication. As a demonstration, microfluidic channels of varying dimensions were successfully fabricated using this process and experimentally characterized using fluorescence microscopy. To further demonstrate photoPDMS potential, thin (<30 microm) free-standing films with through patterns were fabricated and successfully used as shadow masks. The photoPDMS process completely eliminates the need for a master, permits processing under normal ambient light conditions, and makes fabrication fast and simple. This process for rapid prototyping of low-cost, disposable LOCs can be accomplished without cleanroom facilities and thus can be employed for a wide range of applications.     

Phospholipid biotinylation of polydimethylsiloxane (PDMS) for protein immobilization

Polydimethylsiloxane (PDMS) surfaces can be functionalized with biotin groups by adding biotinylated phospholipids to the PDMS prepolymer before curing. The addition of beta-D-dodecyl-N-maltoside (DDM) in the solution blocks non-specific protein binding on these functionalized PDMS surfaces. We characterize the surface by measuring fluorescently labeled streptavidin binding. Single molecule tracking shows that the phospholipids are not covalently linked to PDMS polymer chains, but the surface functionalization is not removed by washing. We demonstrate the immobilization of biotinylated antibodies and lectins through biotin-avidin interactions.     

A radiofrequency plasma in a polydimethylsiloxane (PDMS) microchip

This is the first report of an analytical plasma in a polymer (polydimethylsiloxane, PDMS) microchip. The plasma channel has dimensions 2 mm diameter × 50 mm long, is operated at atmospheric pressure in Ar, 27.12 MHz and 70 W, and is viewed axially through a purged fiber optic cable. CF₄ gas at 0.1% in argon yields mainly C₂ emission bands. This PDMS microchip is manufactured easily, inexpensive, and more tolerant to fluorocarbons than microchip plasmas in silica. Based on these initial results, this PDMS microchip plasma could become useful as a sensor for the fluorocarbon gases emitted in semiconductor process or as a gas chromatography (GC) detector for potential application.     

Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography

Microstructuring of polydimethylsiloxane (PDMS) is a key step for many lab-on-a-chip (LOC) applications. In general, the structure is generated by casting the liquid prepolymer against a master. The production of the master in turn calls for special equipment and know how. Furthermore, a given master only allows the reproduction of the defined structure. We report on a simple, cheap and practical method to produce microstructures in already cured PDMS by direct UV-lithography followed by chemical development. Due to the available options during the lithographic process like multiple exposures, the method offers a high design flexibility granting easy access to complex and stepped structures. Furthermore, no master is needed and the use of pre-cured PDMS allows processing at ambient (light) conditions. Features down to approximately 5 μm and a depth of 10 μm can be realised. As a proof of principle, we demonstrate the feasibility of the process by applying the structures to various established soft lithography techniques.     

The [ν]-M relationship for linear polydimethylsiloxane (PDMS)

Weight-average molecular weights for PDMS fractions were determined by light scattering and the Archibald method in the range of 3000–300,000; the [ν]-M? relationship for toluene, 25°, was found to be

$\text{[?]=1.87 × 10}{}^{\mathrm{?2}}\text{M}{}_{\mathrm{<mtext>w</mtext>}}{}^{03658}\text{,}\text{cm3/g}$

This relationship was compared with those previously used. No upward curvature of the linear relation, log $\text{[ν] = ?(}\text{M}\text{)}$, at lower molecular weights was observed. Over the whole range of molecular weights, the [ν]-values in toluene were higher than [ν]_θ-values in bromocyclohexane at 28°.     

Zeolite filled polydimethylsiloxane (PDMS) as an improved membrane for solvent-resistant nanofiltration (SRNF)

Due to the shape-selectivity of the pores and the induced polymer crosslinking, zeolite filled elastomers are excellent solvent-resistant nanofiltration membranes with enhanced fluxes and retentions compared to commercial membranes, allowing use in non-polar solvents and at high temperatures.     

Experimental study on mechanical performance of polydimethylsiloxane (PDMS) at various temperatures

The Abrasive Jet Machining (AJM) of Polydimethylsiloxane (PDMS) is very slow or even impossible at room temperature due to its ability to absorb the energy of the impacting particles. Cryogenic Abrasive Jet Micromachining (CAJM) can enhance the material removal rate, and accordingly, the mechanical performance of PDMS can critically affect its processability. The goal of this study is to investigate the physical properties of PDMS at different temperatures. For this, PDMS samples were fabricated for compressive, hardness, X-ray Diffraction and linear expansion coefficient testing, according to GB standards. The results showed the following values: compressive modulus of 17.31–1160.1 MPa; ultimate compressive strength of 160.25–224.50 MPa; hardness of 43 Sh_A–90.67 Sh_D, coefficient of thermal expansion (CTE) of 247E-06 1/K (103 K to RT, 3 K/min) at different temperatures, over the range of room temperature at, RT = 298 to 123 K. Moreover, the influence of temperature on the compressive fraction surface microstructure was analyzed with scanning electron microscopy (SEM). The results showed that with the decrease of temperature, the failure mode of PDMS material changed from ductile to brittle, and the material exhibited evident brittle characteristics until 123 K.     

Transient deflection response in microcantilever array integrated with polydimethylsiloxane (PDMS) microfluidics

We report the integration of a nanomechanical sensor consisting of 16 silicon microcantilevers with polydimethylsiloxane (PDMS) microfluidics. For microcantilevers positioned near the bottom of a microfluidic flow channel, a transient differential analyte concentration for the top versus bottom surface of each microcantilever is created when an analyte-bearing fluid is introduced into the flow channel (which is initially filled with a non-analyte containing solution). We use this effect to characterize a bare (nonfunctionalized) microcantilever array in which the microcantilevers are simultaneously read out with our recently developed high sensitivity in-plane photonic transduction method. We first examine the case of non-specific binding of bovine serum albumin (BSA) to silicon. The average maximum transient microcantilever deflection in the array is -1.6 nm, which corresponds to a differential surface stress of only -0.23 mN m(-1). This is in excellent agreement with the maximum differential surface stress calculated based on a modified rate equation in conjunction with finite element simulation. Following BSA adsorption, buffer solutions with different pH are introduced to further study microcantilever array transient response. Deflections of 20-100 nm are observed (2-14 mN m(-1) differential surface stress). At a flow rate of 5 μL min(-1), the average measured temporal width (FWHM) of the transient response is 5.3 s for BSA non-specific binding and 0.74 s for pH changes.     

A fast and simple method to fabricate circular microchannels in polydimethylsiloxane (PDMS)

A simple method to fabricate circular microchannels in polydimethylsiloxane (PDMS) is presented. A coating of liquid PDMS is applied on the walls of rectangular microchannels, fabricated using standard soft-lithography, by introducing a pressurized air stream inside the PDMS filled microchannels. Surface tension of the liquid PDMS forces the coating to take a circular cross-section which is preserved by baking the device to cure the coated layer. Diameters ranging from a few micrometres to a few hundreds of micrometres were achieved. The method was verified to work on microchannel networks as well as in straight channels. Different coating conditions were systematically tested. Design curves are reported for one to choose appropriate coating conditions for obtaining a desired diameter. A comparison between the performance of square and circular microchannels in trapping SiHa cells (cervical cancer cell line) is shown.     

An enzyme derivatized polydimethylsiloxane (PDMS) membrane for use in membrane introduction mass spectrometry (MIMS)

Membrane introduction mass spectrometry (MIMS) provides direct measurement of volatile and semivolatile analytes in condensed and gas-phase samples without sample preparation steps. Although MIMS has numerous advantages that include direct, on-line, real-time analysis with low detection limits, current applications of MIMS are predominantly limited to volatile and semivolatile analytes that permeate hydrophobic membranes (e.g., polydimethylsiloxane; PDMS). We report the first enzyme modified PDMS membrane for use with MIMS. This was achieved by immobilizing Candida rugosa lipase directly onto the surface of oxidized PDMS. These surface immobilized enzymes catalyze ester hydrolysis, releasing an alcohol product at the membrane interface that is readily detected. We have successfully used an enzyme modified membrane for the analysis and quantification of low-volatility and hydrophilic esters. We report the quantification of several carboxylic acid esters in dilute aqueous solutions, including a phthalate monoester carboxylate that is not readily detected by conventional MIMS. This new interface demonstrates the potential for extending the range and versatility of MIMS.     

Effect of pendent chains on the interfacial properties of thin polydimethylsiloxane (PDMS) networks

The interfacial properties of end-linked polydimethylsiloxane (PDMS) films on silicon are examined. Thin cross-linked PDMS films (～10 μm thick) were synthesized over a self-assembled monolayer supported on a silicon wafer. By systematically varying the concentration of monofunctional PDMS in a mixture with telechelic precursor molecules, structures ranging from near-ideal elastic networks to poorly cross-linked networks composed of a preponderance of dangling/pendent chains were synthesized. Lateral force microscopy (LFM) employing bead probes was used to quantify the effect of network structure on the interfacial friction coefficient and residual force. Indentation measurements employing an AFM in force mode were used to characterize the elastic modulus and the pull-off force for the films as a function of pendent chain content. These measurements were complemented with conventional mechanical rheometry measurements on similar thick network films to determine their bulk rheological properties. All networks studied manifested interfacial friction coefficients substantially lower than that of bare silicon. PDMS networks with the lowest pendent chain content displayed friction coefficients close to 1 order of magnitude lower than that of bare silicon, whereas networks with the highest pendent chain content manifested friction coefficients about 3 times lower than that of bare silicon. At intermediate sliding velocities, a crossover in the interfacial friction coefficient was observed, wherein cross-linked PDMS films with the least amount of pendent chains exhibit the highest friction coefficient. These observations are discussed in terms of the structure of the films and relaxation dynamics of elastic strands and dangling chains in tethered network films.     

超疏水性聚二甲基硅氧烷膜的制备及其表面吸附性研究

采用简单的激光刻蚀方法制备了具有类“菜花”状多级结构的粗糙聚二甲基硅氧烷(PDMS)膜, 并用CCD与高敏感性微电力学天平观察和测量PDMS表面对水的吸附情况. 结果表明, 该膜表面具有超疏水性, 同时对水滴具有超低的吸附力. 还对其表面特殊多级结构产生的机理进行了分析, 并探讨了在化学组成和表面结构对超疏水性以及吸附性产生的影响.     

Microfluidic sequential injection analysis system based on polydimethylsiloxane (PDMS) chip with integrated pneumatic-actuated valves

A sequential injection analysis (SIA) system based on polydimethylsiloxane (PDMS) chip with integrated pneumatic-actuated valves was developed. A novel SIA operation mode using multiphase laminar flow effect and pneumatic microvalve control was proposed. The sample and reagent solutions were synchronously loaded and injected in the chip-based sample injection module instead of multi-step sequential injection by a multiposition valve and a reciprocating pump as in conventional SIA system. The sample and reagent injection volumes were reduced to ca. 1.1 nL. The present system has the advantages of simple structure, fast and convenient operation, low sample and reagent consumption, and high degree of integration and automation. The system operation conditions were optimized using fluorescein as model sample. Its feasibility in biological analysis was preliminarily demonstrated in enzyme inhibition assay.     

Synthesis and characterization of poly（phthalazinone ether nitrile） （PPEN）-polydimethylsiloxane （PDMS） block copolymers

Block copolymers with different backbone compositions have been prepared by the condensation of dimethylamino terminated poly（dimethylsiloxane） （PDMS） and hydroquinone terminated poly（phthalazinone ether nitrile） （PPEN） in the presence of chlorobenzcne/N-methyl pyrrolidone （NMP） as solvents. The products were characterized by FTIR, ^1H NMR and gel permeation chromatography. Differential scanning calorimetry analysis indicated that the block copolymers showed separated microphase.     

Rapid prototyping of polydimethylsiloxane (PDMS) microchips using electrohydrodynamic jet printing: Application to electrokinetic assays

Polydimethylsiloxane (PDMS) based microfluidic devices have found increasing utility for electrophoretic and electrokinetic assays because of their ease of fabrication using replica molding. However, the fabrication of high-resolution molds for replica molding still requires the resource-intensive and time-consuming photolithography process, which precludes quick design iterations and device optimization. We here demonstrate a low-cost, rapid microfabrication process, based on electrohydrodynamic jet printing (EJP), for fabricating non-sacrificial master molds for replica molding of PDMS microfluidic devices. The method is based on the precise deposition of an electrically stretched polymeric solution of polycaprolactone in acetic acid on a silicon wafer placed on a computer-controlled motion stage. This process offers the high-resolution (order 10 $\mu$m) capability of photolithography and rapid prototyping capability of inkjet printing to print high-resolution templates for elastomeric microfluidic devices within a few minutes. Through proper selection of the operating parameters such as solution flow rate, applied electric field, and stage speed, we demonstrate microfabrication of intricate master molds and corresponding PDMS microfluidic devices for electrokinetic applications. We demonstrate the utility of the fabricated PDMS microchips for nonlinear electrokinetic processes such as electrokinetic instability and controlled sample splitting in ITP. The ability to rapid prototype customized reusable master molds with order 10 $\mu$m resolution within a few minutes can help in designing and optimizing microfluidic devices for various electrokinetic applications.     

Study on surface structure of plasma‐treated polydimethylsiloxane (PDMS) elastomer by slow positron beam

In this paper, the variations in surface structure of polydimethylsiloxane elastomers before and after argon plasma treatments have been investigated by X‐ray photoelectron spectroscopy, slow positron beam, and scanning electron microscope. An inorganic silica‐like layer was probed by X‐ray photoelectron spectroscopy after 3 minutes or longer time of treatments, and the sample surface turned into totally hydrophilic. Short time (1 and 2 min) plasma exposure mainly removed preexisting low molecular weighted (LMW) siloxanes on sample surface. By using slow positron beam, the thicknesses of silica‐like layer for 3‐, 5‐, and 10‐minute–treated samples were estimated to be around 30, 66, and 91 nm, respectively. Beneath the silica‐like layer, a loose polymeric structure was also detected, which was ascribed to the accumulation of LMW siloxanes. Scanning electron microscope images showed that the silica‐like layer cracked after 10 minutes of plasma treatment, which provided direct diffusion pathways for LMW siloxanes. Hence, 10‐minute–treated sample showed rather low organic composition near surface. Slow positron beam provides valuable depth profile information for evaluating the surface aging condition of polydimethylsiloxane composite.     

Zeta potentials of PDMS surfaces modified with poly(ethylene glycol) by physisorption

Controlling zeta potential of PDMS surface coated with a layer of PEG is important for electroosmosis and electrophoresis in PDMS made microfluidic chips. Here, zeta potentials of PDMS surfaces modified by simple physisorption of PEG of different concentrations in phosphate buffer solutions, pure water, and PEG solution were reported. Coating PEG on PDMS surfaces was achieved by immersing a PDMS layer into the PEG solution for 10 min and then taking it out and placing it in an oven at 80℃ for 10 h. To avoid damaging the PEG layer on the PDMS surface, an induction current method was employed for zeta potential measurement. Zeta potentials of PEG modified PDMS in electrolyte solutions were measured. The results show that 2.5% PEG can effectively modify PDMS surface with positive zeta potential value in phosphate buffer solutions, pure water and 10% PEG solution. Further increase in PEG solution beyond 5% for surface modification has no obvious effect on zeta potential change.     

Completely superhydrophobic PDMS surfaces for microfluidics

This study presents a straightforward two-step fabrication process of durable, completely superhydrophobic microchannels in PDMS. First, a composite material of PDMS/PTFE particles is prepared and used to replicate a master microstructure. Superhydrophobic surfaces are formed by subsequent plasma treatment, in which the PDMS is isotropically etched and PTFE particles are excavated. We compare the advancing and receding contact angles of intrinsic PDMS samples and composite PTFE/PDMS samples (1 wt %, 8 wt %, and 15 wt % PTFE particle concentration) and demonstrate that both the horizontal and vertical surfaces are indeed superhydrophobic. The best superhydrophobicity is observed for samples with a PTFE particle concentration of 15 wt %, which have advancing and receding contact angles of 159° ± 4° and 158° ± 3°, respectively.