“天光”一号MOPA系统光学元件加工与镀膜的进展

本文阐述了在中国原子能科学研究院“天光一号”ＫｒＦ激光核聚变实验装置上，ＭＯＰＡ系统光学元件加工与镀膜研究工作的进展。实验测量结果表明，加工后的基片表面均方根粗糙度对于Ｋ９光学玻璃与熔融石英玻璃来说分别为σｒｍｓ＝１．８±０．５ｎｍ，σｒｍｓ＝２．０±０．４ｎｍ。镀ＨｆＯ２／ＳｉＯ２高反射膜的光学元件的反射率与破坏阈值分别为Ｒ＞９９．５％，Ｅｔｈ＝１．３０～１．３３Ｊ／ｃｍ２。镀Ａｌ２Ｏ３／ＭｇＦ２增透膜的光学元件的透射率与破坏阈值分别为Ｔ＞９９．５％，Ｅｔｈ＝１．３～１．９７Ｊ／ｃｍ２。     

KrF Laser-induced Damage to ZrO_2/SiO_2 Coatings

ＫｒＦＬａｓｅｒ－ｉｎｄｕｃｅｄＤａｍａｇｅｔｏＺｒＯ_２／ＳｉＯ_２Ｃｏａｔｉｎｇｓ￥ＷＡＮＧＮａｉｙａｎ；ＧＡＯＨｕａｉｌｉｎ（ＣｈｉｎａＩｎｓｔｉｔｕｔｅｏｆＡｔｏｍｉｃＥｎｅｒｇｙ，Ｐ．Ｏ．Ｂｏｘ２７５－７，Ｂｅｊｉｊｎｇ１０２４１３，Ｃｈｉｎ...     

实时测量308 nm 激光对薄膜的损伤阈值

 用散射光法, 建立了一套实时监视与测量308nm 激光对全反膜和增透膜的损伤的实验装置。实时观察到了损伤从起始、加深直至饱和的整个过程的波形。用这一装置测量了全反膜和增透膜在308nm 激光作用下的损伤阈值。测得全反膜在0°与45°入射角时的损伤阈值分别为1.7与1.0J/cm²。而增透膜的阈值为1.3J/cm²。     

Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

This paper reports that SiO₂ is selected to fabricate broadband antireflection (AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition. Through accurate control of the graded index of the SiO₂ layer, transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300--1850~nm. Moreover, a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1, resulting in an average damage threshold of 17.2~J/cm$^{2}$.     

HfO_2/SiO_2高反射膜的缺陷及其激光损伤

用原子力、Normaski和扫描电子显微镜等分析仪器 ,对高损伤阈值薄膜常采用的 Hf O2 /Si O2 薄膜进行了表面显微图象研究 ,分析了薄膜常见的表面缺陷 ,如节瘤 ,孔洞和划痕等。薄膜表面缺陷的激光损伤实验表明 ,不同缺陷的抗激光损伤能力大不相同 ,节瘤缺陷最低 ,约为 1 5 J/ cm2 ,薄膜的损伤阈值主要由其决定 ,孔洞的激光损伤能力与节瘤相比较高 ,约为节瘤的 2～ 3倍。节瘤缺陷在低能量密度的激光损伤所形成的孔洞 ,与镀制过程中形成的孔洞形貌相似 ,激光再损伤能力也相似。低能量密度的激光把节瘤缺陷变为孔洞缺陷是激光预处理提高薄膜损伤阈值的原因之一     

HfO2／SiO2高反射膜的缺陷及其激光损伤

用原子力、Normaski和扫描电子显微镜等分析仪器,对高损伤阈值薄膜常采用HfO2/SiO2薄膜进行了表面显微图象研究,分析了薄膜常见的表面缺陷,如节瘤,孔洞和划痕等。薄膜表面缺陷的激光损伤实验表明,不同缺陷的抗激光损伤能力不大相同。节瘤缺陷最低,约为15J/cm^2,薄膜的损伤阈值主要由其决定,孔洞的激光损伤能力与节瘤相比较高,约为节瘤的2－3倍。节瘤缺陷在低能量密度的激光损伤所形成的孔洞,与镀制过程中形成的孔洞形貌相似,激光再损伤能力也相似。低能量密度的激光把瘤缺陷变为孔洞缺陷是激光预处理提高薄膜损伤阈值的原因之一。     

ALD氧化铝单层膜1 064 nm激光损伤特性研究

 采用原子层沉积技术(atomic layer deposition,ALD)在熔石英和BK7玻璃基底上镀制Al2O3单层膜。利用小口径损伤在线测试平台对膜层的1 064 nm激光损伤特性进行了实验测量,获得膜层损伤阈值约为10.3 J/cm2,对比了其与BK7基底损伤阈值之间的差异;利用Nomarski显微镜和原子力显微镜分析讨论了损伤形态的特点,结果表明损伤主要表现为膜层脱落和基片小孔烧蚀,其中小孔深度集中在70 nm～95 nm范围;讨论了损伤发生的诱因,得出膜基界面可能存在吸收源先驱的推断。     

熔石英亚表面划痕激光诱导损伤阈值实验研究

 用原子力显微镜和光学显微镜观测酸蚀后熔石英亚表面划痕,并根据形貌特征将其分为Boussinesq-point-force crack(BPFC)、Hertzian-conical scratch(HCS)和Plastic indent(PI)三类,测试了各类划痕的损伤阈值,讨论了激光损伤机制。结果表明锐度较大的BPFC损伤阈值不超过2.0 J/cm<>2;深度小于1 μm的 HCS阈值可达2.6 J/cm²;形变较大的PI阈值至2.8 J/cm2,形变较小的PI的激光损伤阈值与无缺陷材料相当。BPFC 和深度超过1 μm的HCS是导致熔石英损伤阈值低的主要因素。     

氧化物薄膜抗1064nm脉冲激光损伤的特性研究

对向种氧化物介质膜料的单层膜、增透膜及高反膜的激光损伤特性进行了实验研究,分别测试了单脉冲和多脉冲１０６４ｎｍ激光的损伤阈值,分析和讨论了实验的物理现象及其结果。研究表明ＳｉＯ２、Ｇｄ２Ｏ３、Ｅｒ２Ｏ３、Ｙ２Ｏ３具有激光损伤阈值高、损伤程度轻的特点,特别对１０Ｈｚ激光而言,更是明显;增透膜及高反膜加λ／２层ＳｉＯ２对其激光损伤程度和损伤几率。     

Sol-gel preparation of a silica antireflective coating with enhanced hydrophobicity and optical stability in vacuum

A new silica antireflective coating with improved hydrophobicity and optical stability in a vacuum is obtained by a two-step route. Firstly, silica sols are prepared with a sol-gel process, in which tetraethyl orthosilicate is utilized as a precursor. And by introduction of fluorine containing glycol into the sols,the porosity of silica particles and surface polarity of the coatings are decreased. Afterward, coatings are constructed with low surface roughness by modification of PMBA-PMMA. The coatings retain transmission of up to 99.6%, and laser damage threshold of about 50 J/cm2at a wavelength of 532 nm(1-on-1, 10 ns).     

Comparison of laser-induced damage in Ta2O5 and Nb2O5 single-layer films and high reflectors

Ta2O5 and Nb2O5 films are deposited on BK7 glass substrates using an electron beam evaporation method and are annealed at 673 K in the air.In this letter,comparative studies of the optical transmittance,microstructure,chemical composition,optical absorption,and laser-induced damage threshold(LIDT) of the two films are conducted.Findings indicate that the substoichiometric defect is very harmful to the laser damage resistance of Ta2O5 and Nb2O5 films.The decrease of absorption improves the LIDT in films deposited by the same material.However,although the absorption of the Ta2O5 single layer is less than that of the Nb2O5 single layer,the LIDT of the former is lower than that of the latter.High-reflective(HR) coatings have a higher LIDT than single layers due to the thermal dissipation of the SiO2 layers and the decreased electric field intensity(EFI).In addition,the Nb2O5 HR coating achieves the highest LIDT at 25.6 J/cm 2 in both single layers and HR coatings.     

大气常压等离子射流清洗溶胶-凝胶SiO_2膜表面油脂污染物

采用大气常压等离子射流技术对溶胶-凝胶SiO2膜表面的油脂污染物进行清洗。利用分光光度计、扫描电子显微镜、红外光谱仪对溶胶-凝胶SiO2膜透过率、表面形貌、化学结构进行表征,并分析清洗前后溶胶-凝胶SiO2膜的激光损伤阈值变化。损伤阈值测试表明,1064nm波长的激光损伤阈值由污染后的16.08J/cm2上升到24.41J/cm2,与污染前24.72J/cm2的损伤阈值相当。同时还获取清洗的最佳时间为10s。清洗前后,溶胶-凝胶SiO2膜保持完好,且未产生新的有机污染物。研究结果表明:大气常压等离子射流技术可对溶胶-凝胶SiO2膜表面的油脂污染物进行有效地清洗,从而提高溶胶-凝胶SiO2膜的透过率和激光损伤阈值,为高功率激光装置的稳定运行提供保障。     

Effect of λ/2 SiO_2 overcoat on the laser damage of HfO_2/SiO_2 high-reflector coatings

The effect of λ/2 SiO2 overcoat on the laser damage characteristics of HfO2/SiO2 high-reflector (HR) coatings is investigated with 1-on-l and N-on-1 laser damage test methods. The laser damage surface of 1-on-l is analyzed by a step analyzer. The surface morphologies show that laser damage makes the coating damaged area protrudent and rough for HR coating without λ/2 silica overcoat, but concave and smooth for HR coating with A/2 silica overcoat. The result of 10-on-l multi-pulse irradiation on the same point of the coating shows that there is an energy density stage on the damage curve. If the laser energy density is within the range of the stage, HfO2/SiO2 HR coatings with λ/2 silica overcoat will not be damaged more than 2 times for multi-shots, and the surface damages are very slight so that there is no impact on the coating performance. Another interesting result is that the energy density stage extends from the damage threshold to the point of about 3 times of threshold, which is similar to the     

Study on high-reflective coatings of different designs at 532 nm

Conventional HfO2/SiO2 and Al2O3/HfO2/SiO2 double stack high reflective （HR） coatings at 532 nm are deposited by electron beam evaporation onto BK7 substrates. The laser-induced damage threshold （LIDT） of two kinds of HR coatings is tested, showing that the laser damage resistance of the double stack HR coatings （16 J/cm2） is better than that of the conventional HR coatings （12.8 J/cm2）. Besides, the optical properties, surface conditions, and damage morphologies of each group samples are characterized. The results show that laser damage resistance of conventional HR coatings is determined by absorptive defect, while nodular defect is responsible for the LIDT of double stack HR coatings.     

准分子激光全固态脉冲电源设计与实验研究

针对脉冲能量5~8 mJ的ArF准分子激光器,设计了基于可控硅开关结合三级磁脉冲压缩开关的全固态脉冲电源,采用国产可控硅和磁开关材料,获得了上升时间约150 ns,电压10~14 kV,传递能量0.35~0.68 J的激励脉冲,并实现了对准分子激光器快放电激励。三级磁开关总效率35%,分析表明磁开关损耗较大主要原因为电容能量转移不充分、导线铜损及磁芯材料铁损较大,并提出了相应改进办法。     

KDP晶体增透膜和保护膜性能研究

 报道了溶胶－凝胶工艺制备的KDP晶体保护膜、增透膜和它们的性能 。多孔二氧化硅增透膜峰值透射率大于99%,膜层折射率约1.23。对1.06μm,脉宽约1ns的激光,单层膜的激光破坏阈值约10J/cm²左右,有保护膜和增透膜的膜层激光破坏阈值约5～8J/cm²。     

Modified porous silica antireflective coatings with laser damage resistance for Ti:sapphire

Porous SiO2 antireflective (AR) coatings are prepared from the colloidal silica solution modified with methyltriethoxysilane (MTES) based on the sol-gel route. The viscosity of modified silica suspensions changes but their stability keeps when MTES is introduced. The refractive indices of modified coatings vary little after bake treatment from 100 to 150 ℃. The modified silica coatings on Ti:sapphire crystal,owning good homogeneity, display prominent antireflective effect within the laser output waveband (750-850 nm) of Ti:sapphire lasers, with average transmission above 98.6%, and own laser induced damage thresholds (LIDTs) of more than 2.2 J/cm2 at 800 nm with the pulse duration of 300 ps.     

新型溶胶-凝胶二氧化硅微孔增透膜的制备及性能研究

以正硅酸乙酯为前驱体,二甲基二乙氧基硅烷为造孔剂,采用溶胶凝胶技术在酸催化条件下制备了二氧化硅溶胶;采用提拉法在K9玻璃基片上双面镀膜,经500 ℃热处理,制备得到一种新型单层微孔二氧化硅增透膜。通过改变造孔剂加入量,膜层峰值透过率可达到99.7％,而硬度仍保持在2H以上,同时具有良好的耐摩擦性及粘附性。加速腐蚀实验表明,膜层的环境稳定性是常规膜层的10倍以上。由于该新型增透膜兼具高透过率、良好的机械性能以及很强的环境稳定性,因而在改善太阳能玻璃增透性能方面有极大的应用价值。     

太阳能玻璃表面高强度双层减反膜制备研究

用膜系设计软件设计了λ/4-λ/2的W型的双层减反射薄膜,优化了薄膜的光学常量,并使用溶胶-凝胶技术在玻璃基底上成功镀制了该双层折射率梯度的减反射薄膜.用椭圆偏振光谱仪、紫外-可见-近红外分光光度计、原子力显微镜等分析表征了薄膜的性能.结果表明,镀制了该双层薄膜的玻璃在400 nm～800 nm波段平均透过率增加了近6%,同时薄膜显示出了极佳的机械强度.     

高折射率光学薄膜的化学法制备研究

 报道了一种以ZrOC₁₂·8H₂O为源,溶胶-凝胶法制备高激光负载高折射率薄膜的新方法。薄膜采用旋转镀膜法制备,对薄膜的结构、光学特性及激光损伤阈值进行了测量,有机粘接剂对薄膜折射率及机械强度的影响也作了探讨。以该薄膜与SiO₂溶胶凝胶膜交替涂覆制成的多层高反膜,剩余透过率仅0.98%,激光损伤阈值达16J/cm²（3ns）。