液相电化学法制备类金刚石薄膜及其摩擦性能研究

采用自行设计的液相法沉积装置,以甲醇有机溶剂作为碳源,利用液相电化学沉积技术在不锈钢及Si基底上制备了类金刚石薄膜;用扫描电镜、Raman光谱仪表征了沉积薄膜的表面形貌和结构;用UMT-2M摩擦磨损试验机对两种沉积薄膜进行了摩擦性能测试。结果表明：经电化学沉积的类金刚石薄膜均匀、致密,表面粗糙度小;Raman光谱在1332 cm-1处有强的谱峰,与金刚石的特征峰相吻合,其中不锈钢基底上薄膜的sp3含量更高;不锈钢基底沉积膜的摩擦系数为0.12,Si片基底沉积膜的摩擦系数为0.10;不锈钢基底沉积膜的耐磨性较Si片沉积膜高。     

电化学方法制备ZnO纳米颗粒掺杂类金刚石薄膜及其场发射性能研究

采用液相电化学沉积技术制备了ZnO纳米颗粒掺杂的类金刚石(DLC)薄膜, 研究了ZnO纳米颗粒掺杂对DLC薄膜场发射性能的影响. 利用X射线光电子能谱、透射电子显微镜、Raman光谱以及原子力显微镜分别对薄膜的化学组成、 微观结构和表面形貌进行了表征. 结果表明: 薄膜中的ZnO纳米颗粒具有纤锌矿结构, 其含量随着电解液中Zn源的增加而增加. ZnO纳米颗粒掺杂增强了DLC薄膜的石墨化和表面粗糙度. 场发射测试表明, ZnO纳米颗粒掺杂能提高DLC薄膜的场发射性能, 其中Zn与Zn+C的原子比为10.3%的样品在外加电场强度为20.7 V/μm时电流密度达到了1 mA/cm². 薄膜场发射性能的提高归因于ZnO掺杂引起的表面粗糙度和DLC薄膜石墨化程度的增加.     

射频功率对类金刚石薄膜性能的影响

在不同射频功率条件下,实验研究了射频等离子体化学气相沉积类金刚石薄膜的金刚石相分数、光学常数和硬度。利用Raman光谱仪、椭圆偏振仪、数字式显微硬度计分别测试了不同条件下单层类金刚石薄膜的金刚石相分数、光学常数和硬度。实验表明,随着功率的增加,金刚石相的相对分数减少,薄膜的折射率先减小再增加然后减小,射频功率大于910 W时,沉积速率急剧增大。而薄膜的硬度先增加后减小,在射频功率为860 W处获得最大值。     

射频功率对类金刚石薄膜性能的影响

在不同射频功率条件下,实验研究了射频等离子体化学气相沉积类金刚石薄膜的金刚石相分数、光学常数和硬度。利用Raman光谱仪、椭圆偏振仪、数字式显微硬度计分别测试了不同条件下单层类金刚石薄膜的金刚石相分数、光学常数和硬度。实验表明,随着功率的增加,金刚石相的相对分数减少,薄膜的折射率先减小再增加然后减小,射频功率大于910 W时,沉积速率急剧增大。而薄膜的硬度先增加后减小,在射频功率为860 W处获得最大值。     

类金刚石和碳氮薄膜的电化学沉积及其场发射性能研究

利用电化学方法在室温下成功地沉积了类金刚石(DLC)薄膜和非晶CN_x薄膜，并 对制备条件进行了讨论.通过扫描电子显微镜、傅里叶变换红外光谱技术，分析了薄膜的表面形貌和化学结合状态.场发射测量结果表明：DLC膜和非晶CN_x的开启场分别为88和 10V/μm；并且在23V/μm的电场下，DLC膜和非晶CN_x膜的发射电流密度分别达到10 和037mA/cm². 关键词： 电化学沉积 类金刚石薄膜 x薄膜')" href="#">CN_x薄膜 场致电子发射     

射频反应磁控溅射法制备的氟化类金刚石薄膜摩擦特性研究

以高纯石墨做靶,CHF3和Ar气为源气体,采用射频反应磁控溅射法在不同流量比条件下制备了氟化类金刚石(F-DLC)薄膜.利用原子力显微镜、纳米压痕仪、拉曼光谱和红外光谱、摩擦磨损测试仪对薄膜的表面形貌、硬度、键结构以及摩擦性能做了具体分析.表面形貌测试结果表明,制备的薄膜整体均匀致密,表现出了良好的减摩性能.当CHF3与Ar气流量比r为1:6时,所得薄膜的摩擦系数减小至0.42,而纳米压痕结果显示,此时薄膜的硬度也最高.拉曼和红外光谱显示,随着r的增加,薄膜中的F浓度呈上升趋势,薄膜中的芳香环比例减小.研究表明,F原子的键入方式是影响F-DLC薄膜摩擦系数的一个重要因素,CF2反对称伸缩振动强度的减弱和CC中适量碳氢氟键的形成都能导致薄膜具有相对较低的摩擦系数.     

射频等离子体法制备类金刚石薄膜

利用射频等离子体化学气相沉积法，以丁烷、氢气和氩气的混合气体为原料，在Ф200mm锗基片上沉积出均匀的类金刚石薄膜。研究类金刚石薄膜的特性及工艺参数对其性能的影响规律，给出应用于红外装置中的类金刚石薄膜镀膜元件光谱性能。     

掺硅类金刚石薄膜摩擦过程的分子动力学模拟

掺硅类金刚石(Si-DLC) 薄膜表现出优异的摩擦学性能, 在潮湿空气和高温中显示出极低的摩擦系数和很好的耐磨性, 但是许多实验表明Si-DLC膜的摩擦性能受其硅含量的影响很大. 因此, 本文采用分子动力学模拟的方法分别研究干摩擦和油润滑两种情况下不同硅含量的Si-DLC膜的摩擦过程. 滑移结果表明干摩擦时DLC膜和掺硅DLC膜之间生成了一层转移膜, 而油润滑时则为边界膜. 因此干摩擦时的摩擦力明显大于油润滑时的摩擦力. 少量添加硅确实能降低DLC膜的摩擦力, 但是硅含量大于20%后对DLC膜的摩擦行为几乎无影响. 干摩擦时硅含量对转移膜内键的数量影响很大, 转移膜内CC键和CSi键都先增加后减少, 滑移结束时几乎不含CSi键.     

Understanding the friction behavior of sulfur-terminated diamond-like carbon films under high vacuum by first-principles calculations

Generally, the repulsive force was a key factor account for superlow friction of H or F doped diamond-like carbon (DLC) films under high vacuum. As we known, H or F doped DLC usually exhibited superlow friction under high vacuum. However, the superlow friction of S doped DLC under high vacuum was not found so far. This phenomenon was desirable to be well investigated. In this work, S-terminated diamond interfaces also exhibited strong repulsive force, however, the estimated friction coefficient was variable for S-terminated diamond interfaces. The lowest and largest friction coefficient was about 0.003 and 0.4 respectively, which indicated that the superlow friction of S doped DLC could achieve in theory. In order to well probe the unusual friction behavior of S doped DLC under high vacuum, using first-principles method, the repulsive interaction between sliding surfaces was well investigated in order to understand the unusual friction behavior of S doped DLC films.     

Influence of crystalline diamond nanoparticles on diamond-like carbon friction behavior

Crystalline diamond (CD) particles have been incorporated in diamond-like carbon (DLC) film structure in order to improve DLC electrochemical corrosion resistance. This paper shows the investigation of CD-DLC friction behavior according to the CD average sizes and concentration. The films were growth over 304 stainless steel using plasma enhanced chemical vapor deposition. The response surface methodology was used to develop a mathematical modeling of friction for these films, using the experimental results, in order to identify parameters that control friction and construct tribological maps according to the CD average sizes. The presence of bigger CD particles (250 and 500 nm) increased the film roughness. Films with CD particles of 4 nm presented the most homogeneous friction map, with minor variation in friction coefficient with the increase/decrease of load and sliding speed even when the CD concentration increase. This result suggests that in CD-DLC films containing CD particles of 4 nm average size, the nanoparticles are better incorporated in DLC structure due to its average size (4 nm) that is near than DLC grain size and could occupy the nanospaces between DLC grains.     

Fabrication of ZnO nanoparticles-embedded hydrogenated diamond-like carbon films by electrochemical deposition technique

ZnO nanoparticles-embedded hydrogenated diamond-like carbon (ZnO-DLC) films have been prepared by electrochemical deposition in ambient conditions. The morphology, composition, and microstructure of the films have been investigated. The results show that the resultant films are hydrogenated diamond-like carbon films embedded with ZnO nanoparticles in wurtzite structure, and the content and size of the ZnO nanoparticles increase with increasing deposition voltage, which are confirmed by X-ray photoelectron spectroscopy (XPS), Raman, and transmission electron microscope (TEM). Furthermore, a possible mechanism used to describe the growth process of ZnO-DLC films by electrochemical deposition is also discussed.     

Laser-induced spallation in diamond-like carbon films

Laser-induced multilevel spallation in diamond-like carbon films is observed and studied for a wide range of laser parameters (=539, 800, 1064, and 1078 nm; =100 fs, 300 ps, 10 ns, and 150 ns; E>0.1 J/cm²). Laser irradiation causes the detachment and removal of material layers, whose lateral size is comparable with the irradiated area and whose thickness of 10–200 nm is much less than the DLC film thickness. The influence of the laser parameters on the thickness, size, and number of removed layers is examined. A qualitative explanation of laser-induced spallation in DLC films is proposed, which is based on the fact that the absorbed laser pulse produces a rapidly expanding surface layer of modified structure and reduced density. PACS 42.62.Cf; 61.80.Ba; 81.40.Wx     

Raman study of W-doped diamond-like carbon films

Amorphous diamond-like carbon (DLC) films prepared by the plasma chemical method on glass substrates SiO₂-Al₂O₃-TiO₂ have been studied by Raman spectroscopy. W-doped DLC films show a considerable increase in the G-band frequency up to 1592 cm^?1 and an enhanced surface hardness. The DLC films doped with W and atoms of semiconductors exhibit high transparency and a higher G-band shift to the high-frequency range (up to 1611 cm^?1).     

Study of colors of diamond-like carbon films

Reflective and transmissive film interference colors were calculated for DLC films on the Si and SiO 2 substrates.The calculated interference colors were compared with photographed colors of the prepared DLC samples.The observed film colors were found to match reasonably well with the corresponding calculated colors,indicating that DLC film colors come from interference instead of color center effects.Color charts for DLC films on the Si and SiO 2 substrates with various optical gaps were constructed,and the relationship between interference color and film properties such as optical gap,thickness and substrate were investigated.Usefulness of the calculated color charts in estimating optical gap or thickness of DLC films were demonstrated.     

Wettability and antibacterial activity of modified diamond-like carbon films

Diamond-like carbon (DLC) films can be used in a numerous industrial applications, including biomedical coatings with bactericidal properties. It has been demonstrated that DLC surface can be modified with oxygen plasma treatment. The purpose of this paper is to study the wettability and bactericidal activity of oxygen plasma-treated DLC films produced by plasma enhanced chemical vapor deposition technique. The sp³/sp² ratio increased after the treatment due to the increase in the generation of the unstable carbon bonds caused by the energetic ions, especially O-H group. The treated DLC surface becomes superhydrophilic and rougher, although the roughness values are still lower. DLC antibacterial activity did not increased with plasma treatment. Therefore, oxygen plasma treatment can be used to make superhydrophilic DLC but not to increase its bactericidal properties.     

Nanoindentation measurements on modified diamond-like carbon thin films

In the present study, we explored the effect of metallic interlayers (Cu and Ti) and indentation loads (5-20 mN) on the mechanical properties of plasma produced diamond-like carbon (DLC) thin films. Also a comparison has been made for mechanical properties of these films with pure DLC and nitrogen incorporated DLC films. Introduction of N in DLC led to a drastic decrease in residual stress (S) from 1.8 to 0.7 GPa, but with expenses of hardness (H) and other mechanical properties. In contrast, addition of Cu and Ti interlayers between substrate Si and DLC, results in significant decrease in S with little enhancement of hardness and other mechanical properties. Among various DLC films, maximum hardness 30.8 GPa is observed in Ti-DLC film. Besides hardness and elastic modulus, various other mechanical parameters have also been estimated using load versus displacement curves.