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《光学学报》2020,(6)
采用微波等离子体化学气相沉积法通过控制痕量杂质制备了高质量单晶金刚石材料,并对其结构与光学性能进行综合评价。通过紫外可见吸收光谱和光致发光谱分析了晶体的杂质及含量;采用拉曼光谱、摇摆曲线及X射线白光形貌束分析了不同质量单晶体的晶体结构及结晶质量;通过偏光显微镜综合评价了不同质量单晶金刚石的晶体结构和缺陷。结果证明:获得的高纯单晶金刚石含有少量的缺陷、杂质,其位错应力场以聚集状均匀分布,高纯单晶金刚石与微掺氮单晶金刚石在紫外可见近红外波段的透过率最高可分别达到71.58%和71.27%,接近单晶金刚石的理论透过率(71.6%),且在本征红外吸收波段,高纯金刚石晶体相对微掺氮单晶金刚石,对称性较好,样品吸光度较小。控制痕量杂质制备的高质量单晶金刚石膜有望应用于光探测器探头和光学窗口。 相似文献
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脉冲激光电化学复合加工可以有效去除激光辐照区域内的电解产物, 提高加工效率, 改善加工质量. 针对高性能金属材料的微细加工要求, 采用脉冲激光电化学复合的应力刻蚀加工方法对铝合金的刻蚀特性进行理论和试验研究. 通过比较激光直接刻蚀加工和激光电化学复合加工的特点, 应用扫描电子显微镜、光学轮廓仪等检测技术分析了刻蚀区域的形貌特征. 根据力学电化学原理, 探讨了金属材料微结构加工的应力去除机理. 通过加工试验, 研究了工艺参数和加工方式对加工质量的影响, 采用优化的工艺参数, 加工出了质量较好的微结构. 试验结果表明, 激光电化学复合的连续扫描加工稳定性好, 可以有效地降低表面粗糙度, 提高加工质量.
关键词:
激光电化学
应力刻蚀
加工质量
工艺参数 相似文献
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飞秒激光微加工作为一种新型微纳制造技术,在复杂三维构型制作方面具有其独特的优势,但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用,提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口,通过调控激光与物质相互作用获得材料的目标靶向改性,进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工,采用这一方法制作出的微透镜尺寸为80 m,球冠高6.7 m,表面粗糙度小于10 nm。利用这种方法,实现了不同结构与特性的高质量微透镜阵列的超精密制备,在石英内部也实现了螺旋微通道的复杂三维结构,螺旋通道直径为20 m,长径比超过100。 相似文献
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利用波长为351 nm的半导体抽运全固态脉冲激光器,采用双光束干涉方法,对金属镍板表面直接刻蚀形成微光栅结构的方法进行了实验研究.通过改变激光功率和激光脉冲数等实验参量,研究其对制备的微光栅结构槽形和一级衍射效率的影响.利用扫描电镜和原子力显微镜测量光栅槽形,测得光栅周期为1.25 μm,光栅槽深为10~280 nm,并测量了相应的衍射效率.发现当采用激光单脉冲能量为1.2 mJ,采用10个脉冲加工时,测得槽深为280 nm,一级衍射效率最高(18%)的微光栅结构.利用光栅的衍射理论对衍射效率变化进行了分析.该研究拓展了纳秒激光在加工微结构方面的应用,为在金属材料表面制作纳米压印模版提供了一种新方法. 相似文献
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飞秒激光微加工作为一种新型微纳制造技术,在复杂三维构型制作方面具有其独特的优势,但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用,提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口,通过调控激光与物质相互作用获得材料的目标靶向改性,进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工,采用这一方法制作出的微透镜尺寸为80 μm,球冠高67 μm,表面粗糙度小于10 nm。利用这种方法,实现了不同结构与特性的高质量微透镜阵列的超精密制备,在石英内部也实现了螺旋微通道的复杂三维结构,螺旋通道直径为20 μm,长径比超过100。 相似文献
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分析了脉冲激光烧蚀材料等离子体等温膨胀阶段的物理特性,建立了脉冲激光烧蚀材料等离子体压力三维方程与动力学模型.应用所建模型,数值分析了单脉冲激光烧蚀青铜金刚石砂轮等离子体相关特性,得到等离子体的反冲压力最大值870 Pa出现在约25 ns后,距离砂轮表面距离约0.05 mm处.相关条件下开展脉冲激光烧蚀青铜金刚石砂轮试验,采用高速相机观测烧蚀砂轮过程中的飞溅现象;采用光栅光谱仪测量等离子体空间发射光谱,计算了等离子体电子温度、电子密度以及反冲压力.实验表明脉冲激光烧蚀青铜金刚石砂轮等离子体反冲压力可以不计,同时也验证了气体方程与动力学模型的正确性和可行性,对脉冲光纤激光烧蚀工艺优化具有启示意义. 相似文献
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Diamond-like carbon (DLC) films were fabricated by pulsed laser ablation of a liquid target. During deposition process the growing films were exited by a laser beam irradiation. The films were deposited onto the fused silica using 248 nm KrF eximer laser at room temperature and 10−3 mbar pressure. Film irradiation was carried out by the same KrF laser operating periodically between the deposition and excitation regimes. Deposited DLC films were characterized by Raman scattering spectroscopy. The results obtained suggested that laser irradiation intensity has noticeable influence on the structure and hybridization of carbon atoms deposited. For materials deposited at moderate irradiation intensities a very high and sharp peak appeared at 1332 cm−1, characteristic of diamond crystals. At higher irradiation intensities the graphitization of the amorphous films was observed. Thus, at optimal energy density the individual sp3-hybridized carbon phase was deposited inside the amorphous carbon structure. Surface morphology for DLC has been analyzed using atomic force microscopy (AFM) indicating that more regular diamond cluster formation at optimal additional laser illumination conditions (∼20 mJ per impulse) is possible. 相似文献
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Transverse phonon relaxation according to the Landau-Rumer mechanism is considered for an isotropic medium and crystals of germanium, silicon, and diamond possessing a cubic symmetry. The energy of elastic deformation caused by the anharmonicity of vibrations of the cubic crystal lattice is expressed via the second-and third-order moduli of elasticity. Using the known values of these elastic moduli, parameters determining the frequencies of the transverse phonon relaxation in the Landau-Rumer mechanism are evaluated for the germanium, silicon, and diamond crystals. It is shown that the dependence of the relaxation frequency on the wavevector of thermal and high-frequency phonons sharply differs from the classical Landau-Rumer relationship both in the isotropic medium and in the cubic crystals. It is established that the observed peculiarities in the relaxation frequency are related to the angular dependence of the probability of anharmonic scattering and the anisotropy of elastic properties of the germanium, silicon, and diamond crystals. A new method is proposed for the experimental determination of the relaxation frequency of high-frequency phonons as a function of the wavevector using the temperature dependence of the coefficient of absorption of high-frequency ultrasound. 相似文献
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R.J. Lade F. Claeyssens K.N. Rosser M.N.R. Ashfold 《Applied Physics A: Materials Science & Processing》1999,69(7):S935-S939
The pulsed laser ablation of chemical vapor deposition (CVD) diamond and graphite samples in vacuum has been investigated by the use of an ArF excimer laser operating at 5=193 nm. The composition and propagation of both ablation plumes has been probed via wavelength and spatially and temporally resolved measurements of the plume emission and found to be very similar. Electronically excited C atoms and C+ and C2+ ions are identified among the ablated material. Plume expansion velocities are estimated from time-gated imaging of specific C and C+ emissions. Langmuir probe measurements provide further insight into the propagation of the charged components in both ablation plumes. Diamond-like carbon (DLC) films grown by 193-nm laser ablation of both target materials on Si substrates maintained at room temperature have been investigated by laser Raman spectroscopy (325 nm and 488 nm excitation) and by both optical and scanning electron microscopy, and their field emission characteristics investigated. Again, similarities outweigh the differences, but DLC films grown from ablation of the diamond target appear to show steeper I/V dependencies once above the threshold voltage for field emission. 相似文献
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A new design of the U-type resonator is described. In this way, a laser beam with symmetrical intensity profile (regarding to a symmetry plane) can be extracted from an active medium that exhibits gain asymmetry along one of the transverse directions. The whole area of the active medium cross-section can be used, and consequently the laser efficiency will be increased. This resonator structure was applied for efficiency power extraction (as a low order TEM modes laser beam) from a DC excited transverse flow CO2 laser with cylindrical geometry. Although the cross-section area of the discharge was entirely used (including the cathode fall region), a symmetrical intensity profile of the laser beam (regarding to the two orthogonal symmetry planes) was obtained in the near field as well as in the far field; the gain asymmetry along the flow direction was compensated by the gas circulation fluidodynamical circuit with two counterflowing discharge channels. A double-U optical resonator was introduced in order to provide a laser beam with axial symmetry.For the practical construction of these two types of optical resonators we have developed two new types of 90° deflection elements: the first one, which does not reverse the image (and which has the properties of the pentaprism), and the second one, which rotates the image with 90° angle. Both elements exhibit good focusability if they are equipped with two concave mirrors. 相似文献
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Multiple pulse laser ablation of stretched PET is performed with an ArF excimer laser (193 nm) in order to produce micro channels. The surface structure remaining after "scanning ablation", in which the sample is moved during irradiation, is compared to the known results upon "static ablation". We observed that the debris contribution is enhanced upon scanning ablation, which has a major impact for the channels used in micro-fluidic applications. A more fundamental change of the channel floor structure, as seen by SEM, occurs at high fluences and short mask lengths. The channel floor structure originates from the structure on the irradiated ramp at the end of the channel. The "scanning structure" appears only if the irradiated end ramp forms an angle higher than 10.55(ǂ.15)° with the non-irradiated sample surface. The angle of light incidence is not responsible for the structure changes, in agreement with literature reports. Other possible mechanisms are briefly discussed. 相似文献
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A real-time and real-space time-dependent density functional is applied to simulate the nonlinear electron-photon interactions during shaped femtosecond laser pulse train ablation of diamond. Effects of the key pulse train parameters such as the pulse separation, spatial/temporal pulse energy distribution and pulse number per train on the electron excitation and energy absorption are discussed. The calculations show that photon-electron interactions and transient localized electron dynamics can be controlled including photon absorption, electron excitation, electron density, and free electron distribution by the ultrafast laser pulse train. 相似文献
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Laser polishing of diamond plates 总被引:5,自引:0,他引:5
S.M. Pimenov V.V. Kononenko V.G. Ralchenko V.I. Konov S. Gloor W. Lüthy H.P. Weber A.V. Khomich 《Applied Physics A: Materials Science & Processing》1999,69(1):81-88
Results are reported on laser polishing of 150–400-μm-thick free-standing diamond films with either a copper vapor laser (510 nm
wavelength) or an ArF excimer laser (193 nm wavelength). Studies were focused on three particular goals. First, we aimed at
a choice of optimum conditions for laser polishing of thick diamond films. It was shown that the laser polishing conditions
and the resulting surface roughness were controlled by varying the angle of incidence of a scanning laser beam and by polishing
time. Second, the laser ablation technique was applied to remove a defective layer from the “substrate” side of the diamond
plates in order to reduce optical losses due to absorption in this layer. Third, the structure of the laser-graphitized diamond
surface was studied using UV, visible, and IR optical spectroscopy techniques in the course of the “step-by-step” oxidative
removal of the graphitic layer with increasing temperature of the oxidation in ambient air. Once the graphitic layer was removed,
the optical transmission in the UV-visible-IR spectral range of the diamond films polished under optimum conditions was measured
and compared with the optical transmission of the mechanically polished diamond films. It was shown that the optical quality
(in the long-wave infrared region) of the laser-polished diamond plates was sufficient to reach the transmittance value very
close to the theoretical limit.
Received: 20 October 1998 / Accepted: 8 March 1999 / Published online: 5 May 1999 相似文献