Dimensional variation in production of high-aspect-ratio micro-pillars array by micro powder injection molding

Micro powder injection molding (μPIM) is one of the potential processes for the mass production of metallic microstructures and micro components. Here, μPIM is the miniaturization of conventional PIM, which involves four processing steps: mixing, injection molding, debinding and sintering. This paper looks into the feasibility and effectiveness of μPIM as a key mass production process for the fabrication of metallic micro components. For it to be an effective re-production process, it is imperative to examine how well parts can be duplicated/fabricated from a master mold. In this work, the dimensional variation of high-aspect-ratio micro-pillars arrays, in particular the dimensional shrinkage, global warpage, and surface roughness at each stage of the μPIM process for a range of molding pressures, are quantified and compared in detail. The sensitivity of the dimensional variation of the microstructures to the packing pressure is reported. The mechanism behind the dimensional variation is analyzed. PACS 81.20.Ev; 81.20.Hy; 81.70.Fy; 07.60.Ly; 81.05.-t     

光学塑料元件低压注射成型技术的应用

光学塑料元件低压注射成型技术是相对于传统注射技术的一大改进。它包括压缩注射成型、低压高速成型、注入气体注射成型和降低模内压力成型。它的主要优点是降低压力、降低能源消耗、降低成本、提高工效、提高光学塑料元件质量。这对于我国光学塑料非球面的开发极有好处     

Wavelength-addressed intra-board optical interconnection by plug-in alignment with a micro hole array

Intra-board interconnection between optical waveguide channels is suitable for assembling high-speed optoelectronic printed wiring boards (OE-PWB). Here, we propose a novel optical interconnection method combining techniques for both wavelength-based optical waveguide addressing and plug-in optical waveguide alignment with a micro-hole array (MHA). This array was fabricated by the mask transfer method. For waveguide addressing, we used a micro passive wavelength selector (MPWS) module, which is a type of Littrow mount monochromator consisting of an optical diffraction grating, a focusing lens, and the MHA. From the experimental results, we found that the wavelength addressing operation of the MPWS module was effective for intra-board optical interconnection.     

光学微透镜阵列模压成形研究进展与展望

光学微透镜阵列在光学系统中的应用广泛,需求量大,而玻璃模压成形技术是最高效的微透镜阵列量产加工方法,具有精度高,一致性好,生产成本低等特点,有重要的应用研究价值。本文介绍了光学微透镜阵列的设计原理,模具制造技术,模压成形技术及相应检测技术;重点介绍了微透镜阵列模压成形试验与有限元仿真研究的最新进展;最后对微透镜模压成形发展前景进行了展望,包括微透镜阵列模压材料,模具表面镀层技术及超声复合加工技术在微透镜阵列模压成形中的应用等。     

一种二元光学元件阵列微芯模的工艺设计研究

提出一种二元光学元件微型芯模的工艺设计方法,该方法利用了数字调制器件（DMD芯片）的空间光调制特性。首先通过编程设计出二元光学器件的相关软件,以实现菲涅耳透镜、达曼光栅、龙基光栅等各种矢量图形,经过14倍精缩光学系统,将由DMD芯片生成的二元光学器件图像成像在涂有光刻胶的基板上。经显影、定影和坚膜后,再利用电化学蚀刻,得到一种二元光学阵列的微芯模。这种二元光学的芯模制作方法可以方便、高效、低成本地用于制作微光学器件。     

改善塑料光学零件成型质量的几个问题

从改进注射成型技术和模具制造技术的角度介绍了提高塑料光学零件的质量所采取的措施。在抑制变形的成型技术中所采用的注射压缩成型方法中，用机械的方法对熔融塑料均匀加压以减小塑件的变形及残余应力。也可采用适当的补偿方法修正模具以补偿塑件的变形。在模具制造中可以在模芯表面镀一层非电镀镍，然后用金刚石车削机床加工，而获得很好的表面粗糙度和表面面形精度。     

Design and fabrication of an optimum holographic optical element lens for a femtosecond laser pulse using a hologram computer-aided design tool

Design and fabrication of an optimum holographic optical element (HOE) lens for a femtosecond laser pulse using a hologram computer-aided design (CAD) tool is presented. The hologram CAD tool, which the authors have developed can design, analyze, and evaluate holograms fabricated by interferometrical technique. The function of the tool is extended to design and analyze a HOE lens illuminated with a femtosecond laser pulse. An optimum HOE lens for a laser pulse, which has 130 fs duration, 720 nm central wavelength, and 10 nm spectrum bandwidth, is designed by the tool. The optimum HOE lens gives both high diffraction efficiency and small amount of aberration. The designed HOE lens is fabricated and its optical characteristics have been experimentally evaluated. The reconstructed point images agree with the results of the numerical simulations by the tool. The tool demonstrates the capability of designing the optimum HOE lens for a femtosecond laser pulse.     

Closely packed micro optical fiber arrays in laser scanning system

Closely packed optical fiber arrays are used to increase the scanning speed in some laser scanning systems, but standard optical fibers are shown to be unsuitable for these systems. In this paper, a closely packing technique of micro optical fiber arrays is presented. The fabrication and properties of micro fibers, whose diameters range from several hundred nanometers to several microns, are introduced. These micro fibers are arranged side by side in V-shaped grooves, which are fabricated by photolithography and etching techniques on silicon substrate. Comparing to standard optical fiber arrays, such closely packed micro optical fiber arrays can eliminate the dark area among output light spots and can solve the problem of high accuracy demand of exposure location. This closely packing technique is also proved to be a feasible method in practical scanning systems.     

LED微阵列投影系统设计

为满足便携式投影仪的市场需求,设计了一种基于LED微型阵列的投影系统。该系统由显示单元和投影物镜构成。采用尺寸为12 mm×9 mm的自发光LED微型阵列作为系统的显示单元,利用光学设计软件设计了投影物镜。投影物镜采用反远距光学结构,全视场角为80°,焦距为8 mm,属于强光、广角镜头。在空间频率20 lp/mm处,该物镜的调制传递函数大于0. 85,畸变小于2%,符合投影系统的设计要求。该投影系统具有体积小,结构简单,投影效果好,易加工等诸多优势,可为第三代投影技术的发展提供参考。     

The Effect of Wettability of Nickel Mold Insert on the Surface Quality of Molded Microlenses

In micromolding of microlens array, it is important to prepare a mold insert of superb quality, which contains the micro-cavity of lens shape, because the geometrical quality of the mold insert defines the final quality of the molded micro-optics. In the present study, the electroforming process was used to make the metallic micro-mold insert for micro-molding of microlens array. The wettability property of the fabricated mold isnert was examined by measuring the contact angle of the polymer in the pliable state on the mold insert. Microlenses were compression-molded with the fabricated mold insert. The effects of the molding temperature and wettability property on the replication quality of the molded lenses were analyzed experimentally.     

Fabrication of a void array in dielectric materials by femtosecond laser micro-processing for compact photonic devices

We describe a systematic investigation on void structures fabricated by femtosecond laser irradiation inside dielectric materials for fabrication of a compact optical circuit. Void shapes fabricated in 5 different dielectric materials were compared and the physical constants determining the void shape were discussed. A long void array is obtainable in a material which has a low critical power for self-focusing. It was also indicated that the coefficient of thermal expansion is a dominant governing factor to fabricate a precise void which has a clear boundary. Furthermore, we propose and design a Mach-Zehnder interferometer in fused silica composed of optical waveguides and photonic crystals to verify practical application of a void array. Simulation results of the optical propagation in a Mach-Zehnder interferometer indicated that the photonic crystals using a void array have potential to fabricate compact optical circuits.     

Design and Fabrication of Microlens Array for Near-Field Vertical Cavity Surface Emitting Laser Parallel Optical Head

A GaP microlens for collecting laser light was developed in the tip of a near-field probe. It is important to realize a near-field optical probe head with high throughput and a small spot size. The design and fabrication results of the GaP microlens array are described. The most suitable GaP microlens with a probe was calculated as having a 10 μm radius using the two-dimensional finite difference time domain (2-D FDTD) method. The full width half maximum (FWHM) spot size variation and optical power density tolerance were calculated as 157 nm ± 5 nm and 7%, respectively. A spherical GaP microlens was fabricated with a radius of 10 μm by controlling the Cl₂/Ar gas mixture ratio. The difference between the theoretical spherical shape and the fabricated GaP microlens was evaluated as 40 nm at peak to valley. The FWHM spot size and optical throughput of the fabricated microlens were measured as 520 nm and 63%, respectively. The microlens was the same as a theoretical lens with a 10 μm radius. The micron-lens array fabrication process for a near-field optical head was demonstrated in this experiment.     

自由曲面光学透镜注射成型误差因素研究

自由曲面光学透镜注射成型误差对其光学性能将产生直接影响。注射成型过程中，注射工艺参数组合的优劣，直接影响成型误差的大小。为了获得高精密度的光学元件，就热塑性塑料的注射温度、模具温度、注射压力、保压压力及保压时间等主要工艺参数，对注射成型误差的影响进行综合研究,并且进行了实验验证。研究结果表明：适当提高注射温度与模具温度，同时采用高压注射、高压保压以及快速保压工艺，可显著降低注塑工件的体积收缩率，显著提高面形精密度，其光学表面面形误差小于0.1μm。可为注射工艺设计提供合理的依据。     

塑料梯折球透镜研制

本文讨论了制作工艺。从理论上分析了折射率分布,给出了测试结果,并讨论了制作塑料自聚焦复合透镜面列阵的可能性。     

Fabrication of a random convex-lens-shaped microstructure using a laser ablation

A convex-lens-shaped microstructure with a diameter of 50 μm on a metallic mold substrate was fabricated in this paper. A laser ablation process, in which the laser beam was focused and irradiated on the metallic mold substrate in order to remove a part of the substrate, was used for that. The convex-lens-shaped microstructure has not been reported in any studies of microstructure using the laser ablation process. It was proposed that the unbalanced ablation and re-adherence of the melted particles was the processing mechanism of the convex lens shape. The convex-lens-shaped microstructure fabricated in this study is smaller than the focused spot. It was expected that the same convex-lens-shaped microstructure can be fabricated even if the focused spot size is increased, so long as the fluence of the laser can be maintained. Therefore, the method proposed in this paper will improve the low processing speed, which has been the problem of a laser ablation process. The fabricated convex-lens-shaped microstructure on the metallic substrate can be used as the mold for the micro lens.     

Fabrication and verification for the small-form-factor holographic optical pickup

In this investigation, a small-form-factor (SFF) pickup head with a holographic optical element (HOE) is fabricated. The system employs a finite-conjugate object lens to focus a light beam. A holographic optical element is used to simplify the optical configuration. It provides a better means of alignment of fabrication and reduces the size of system relative to reflective light route. Micro prisms are fastened with HOE and a silicon substrate, laser diode and photodiode are integrated into the optical system. The pickup head system based on discrete components and a flip chip bonder with highly accurate alignment was to integrate it. The micro holographic optical pickup head is fabricated and tested. Experimental results including the spot diameter and the focusing error signal (FES), demonstrate that the optical system is a feasible.     

塑料透镜在光学系统中的应用

本文对塑料透镜在光学系统中的应用进行了介绍,并对塑料透镜与玻璃透镜进行了比较。着重介绍了非球面塑料透镜在各种光学系统中的应用以及它所显示出的优越性。同时对塑料透镜的原材料、塑料透镜的设计、金属模具的设计和加工、塑料透镜的成型工艺和表面处理进行了介绍。最后还介绍了克服塑料透镜各种缺点应采取的措施。     

The glass-molding process for planar-integrated micro-optical component

This paper presents a precision glass-molding process to fabricate planar-integrated micro-optical components (PIMOC) applied to a micro projection display system, optical interconnection system and optical storage system. The PIMOC was designed based on wave propagation theory, and fabricated using a glass molding process. Experimental results are discussed in this article. The experiment showed that the PIMOC fabricated in a vacuum environment meets the design value with precision glass-molding technology (PGMT) at a molding force of 2.75 kN, a molding temperature of 750 °C and a cooling rate of 49 °C/min.     

Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer

2D and 3D submicron periodic structures are first fabricated by red-induced photopolymerization using a common 635 nm semiconductor laser and specially developed red-sensitive polymer material. The principle of this new photo-polymer material fabrication is explained and the absorption spectra of the material are measured. This fabrication technique allows a deeper penetration into volume and larger interference irradiation area which is more than 1 cm². The optical design, theoretical calculations and experimental results including diffraction patterns verifying the formation of periodic structures are presented. Compared with other fabrication technologies using high-power lasers, this approach has greatly reduced the demand for laser apparatus. Therefore, it is much more accessible to most laboratories and potentially usable in holographic fabrication of photonic crystals and devices in micro electro-mechanical systems (MEMS).