Investigations on the effect of process parameters on the growth of vertically oriented graphene sheet in plasma-enhanced chemical vapour deposition system

A multistage numerical model comprising the plasma kinetics and surface deposition sub-models is developed to study the influence of process parameters, namely, total gas pressure and input plasma power on the plasma chemistry and growth characteristics of vertically oriented graphene sheets (VOGS) grown in the plasma-enhanced chemical vapour deposition system containing the Ar + H₂ + C₂H₂ reactive gas mixture. The spectral and spatial distributions of temperature and number densities, respectively, of plasma species, that is, charged and neutral species in the plasma reactor, are examined using inductively coupled plasma module of COMSOL Multiphysics 5.2 modelling suite. The numerical data from the computational plasma model are fed as the input parameters for the surface deposition model, and from the simulation results, it is found that there is a significant drop in the densities of various plasma species as one goes from the bulk plasma region to the substrate surface. The significant loss of the energetic electrons is observed in the plasma region at high pressure (for constant input power) and low input power (for constant gas pressure). At low pressure, the carbon species generate at higher rates on the catalyst nanoislands surface, thus enhancing the growth and surface density of VOGS. However, it is found that VOGS growth rate increases when input plasma power is raised from 100 to 300 W and decreases with further increase in the plasma power. A good comparison of the model outcomes with the available experimental results confirms the adequacy of the present model.     

Effect of dust particles on the properties of low-temperature plasmas

Parameters of a low-temperature plasma containing dust particles are calculated numerically with the help of a self-consistent solution of the balance equation for production and recombination of electrons and ions, combined with the molecular dynamics method for direct simulation of processes in the vicinity of macroparticles. The relation between the charges of macroparticles and the neutral gas pressure, as well as the dependence of the low-temperature plasma parameters on the volume concentration of dust particles, is analyzed. It is shown that the plasma characteristics and composition may change noticeably relative to the case unperturbed by dust even for comparatively low concentration of dust particles.     

Study of the effects of the prefilled-plasma parameters on theoperation of a short-conduction plasma opening switch

Spectroscopic methods are used to determine the density, the temperature, the composition, the injection velocity, and the azimuthal uniformity of the flashboard-produced prefilled plasma in an 85-ns, 200-kA plasma opening switch (POS). The electron density is found to be an order of magnitude higher than that obtained by charge collectors, which are commonly used to determine the density in such POSs, suggesting that the density in short conduction POS's is significantly higher than is usually assumed. We also find that the plasma is mainly composed of protons. The spectroscopically measured plasma parameters are used here to calculate the conduction currents at the time of the opening predicted by various theoretical models for the POS operation. Comparison of these calculated currents to the measured currents indicates that the plasma behavior during conduction is governed either by plasma pushing or by magnetic-field penetration and less by sheath widening near the cathode, as described by existing models. Also, the conduction current mainly depends an the prefilled electron density and less on the plasma flux, which is inconsistent with the predictions of the erosion (four-phase) model for the switch operation. Another finding is that a better azimuthal uniformity of the prefilled plasma density shortens the load-current rise time     

Study of the impact of steady-state plasma on radiation-damaged tungsten

Experimental studies of tungsten (as a candidate plasma-facing material for a fusion reactor) whose properties will degrade as a result of its contact with near-wall plasma and irradiation with neutrons are performed. The effect of a high level of radiation damages (1–100 displacements per atom) on deuterium accumulation and erosion caused by tungsten irradiation with deuterium plasma was studied. Radiation damages are obtained as a result of the irradiation of tungsten samples with high-energy ions in an accelerator (He⁺², C⁺³, 4–10 MeV). Then the samples are exposed to steady-state deuterium plasma at the LENTA facility (National Research Centre Kurchatov Institute). The effects of the erosion of tungsten and accumulation of hydrogen isotopes in it are studied. Modification of the surface microstructure and radiation swelling is observed. The helium and deuterium concentrations were measured using the methods of nuclear elastic backscattering and elastic recoil detection analysis. An increased accumulation of deuterium in the damaged layer to a depth of about 5 μm is revealed.     

激光诱导击穿光谱机理及爆炸物研究

激光诱导击穿光谱(LIBS)技术是基于激光诱导等离子体发光探测物质成分的方法。激光诱导等离子体的发射谱线由两部分组成:一部分是电子-离子复合及自由电子相互作用辐射的宽带连续谱;另一部分是原子和离子发射的特征谱线。对这些谱线进行识别并测量其强度,给出物质成分的定性和定量信息。分别讨论了样品所附着的基质为金属和电介质的两种情况,并对ns和fs级激光脉宽的影响作了介绍。     

Simulations of the effects of density and temperature profile on SMBI penetration depth based on the HL-2A tokamak configuration

Using the trans-neut module of the BOUT++ code, we study how the fueling penetration depth of supersonic molecular beam injection(SMBI) is affected by plasma density and temperature profiles. The plasma densities and temperatures in L-mode are initialized to be a set of linear profiles with different core plasma densities and temperatures. The plasma profiles are relaxed to a set of steady states with different core plasma densities or temperatures. For a fixed gradient, the steady profiles are characterized by the core plasma density and temperature. The SMBI is investigated based on the final steady profiles with different core plasma densities or temperatures. The simulated results suggest that the SMB injection will be blocked by dense core plasma and high-temperature plasma. Once the core plasma density is set to be N_(i0)= 1.4N_0(N_0= 1 × 10~(19)m~(-3)) it produces a deeper penetration depth. When N_(i0) is increased from 1.4N_0 to 3.9N_0 at intervals of 0.8N_0, keeping a constant core temperature of T_(e0)= 725 eV at the radial position of ψ = 0.65, the penetration depth gradually decreases. Meanwhile, when the density is fixed at N_(i0)= 1.4N_0 and the core plasma temperature T_(e0) is set to 365 eV,the penetration depth increases. The penetration depth decreases as T_(e0) is increased from 365 eV to 2759 eV. Sufficiently large N_(i0) or T_(e0) causes most of the injected molecules to stay in the scrape-off-layer(SOL) region, lowering the fueling efficiency.     

大气感耦射流等离子体加工中的电子温度及激发光谱研究

大气感耦射流等离子体加工作为新型超光滑表面加工技术,其高密度等离子体激发能力为充分激发反应气体,提高材料去除率提供了有力条件。利用发射光谱仪,对加工过程中大气感耦射流等离子体激发的400~1 000 nm范围内的光谱进行了测量。并利用峰值明显,能级差较大的谱线计算电子温度。由于测量的谱线强度是等离子体发射系数沿弧长方向的积分值,且感耦射流等离子体具有回转对称性,因此可利用阿贝尔变换求取光谱发射系数,进而通过玻尔兹曼图谱法计算电子温度。计算结果表明由于趋肤效应和旋流进气的双重作用,处于加工区域的温度分布呈现出双峰形;随着距离增大,双峰效应逐渐减弱,温度分布趋于平滑。研究也表明随着加工距离的增大,等离子体边缘逐渐偏离局部热力学平衡状态,玻尔兹曼图谱法计算电子温度的适用性降低,导致等离子体边缘的温度拟合优度值逐渐降低。进一步对通入反应气体CF₄后的等离子体光谱进行了研究,通入反应气体后的等离子体呈现鲜亮的蓝绿色,是由于激发反应气体后产生的位于400~650 nm范围的带状光谱所致,分析表明谱图中的带状光谱为双原子分子C₂谱带Swan Bands,而该双原子分子是感耦氩等离子体对碳源CF₄的充分激发产生。     

Effect of electron-neutral collisions on the satellites of the Thomson scattering spectrum in arc plasmas

The effect of electron-neutral collisions on the high frequency spectrum of laser radiation scattered by the free electrons of a plasma is investigated for a partially ionized H₂ are plasma at atmospheric pressure. The calculations are carried out along Gorog's theory solving the linearized Boltzmann equation for electrons with a collision term. The collision integral is approximated by a Krook relaxation model with the collision frequency determined from experimental electron-atom scattering data. The collisions influence size, half width, and position of the high frequency satellites. In a H₂ arc plasma, the change of the satellites' position is negligible as well as the change in half width within experimentally attainable error limits. The change of size is of minor importance, since the general evaluation procedure uses only normalized scattering intensities. Thus, for laser scattering experiments in are plasmas the collision-free theory can be applied.     

大气压氩气射流等离子体的光谱特性研究

等离子体喷枪是一种重要的等离子体源,已成为近几年低温等离子体研究的一个重要课题。本文利用钨针-钨丝网电极制作了直流喷枪装置,在大气压空气中产生了稳定的等离子体羽,并采用发射光谱的方法,对等离子体羽的等离子体参数进行了研究。在钨针电极与钨丝网电极之间放出耀眼的白光,钨丝网电极出口的气流下游有火苗形状的等离子体羽喷出。在电压保持不变的条件下(13.5 kV),等离子体羽长度随气体流量增加而增大;在气体流量保持不变的条件下(10 L·min-1),羽长度随外加电压的增大而增大。在气体流量一定的条件下,放电电压和放电电流呈反比例关系,即电压随着电流的增大而减小,说明放电属于辉光放电。采集了该喷枪在300～800 nm范围内的放电发射光谱,通过玻尔兹曼方法对放电等离子体电子激发温度进行了测量。结果表明,电子的激发温度随外加电压的增大而降低,随着工作气体流量的减小而升高。利用放电的基本理论对上述现象做了解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

复杂结构自组织等离子体光子晶体光谱研究

利用双水电极介质阻挡放电装置,在气体放电中产生了一种由放电丝自组织形成的复杂结构等离子体光子晶体。该晶体结构由许多四边形的晶胞组成,每个晶胞包括大点、两种不同的小点和线,分别对应粗等离子体柱、两种细等离子体柱和等离子体片。采用发射光谱法,对不同位置处的等离子体状态进行了研究,对比了其电子密度和分子振动温度。具体方法是通过氩原子696.54 nm(2P₂→1S₅)的发射谱线测量谱线展宽进而对比电子密度,通过氮分子第二正带系(C3Π_u→B3Π_g)的发射谱线计算分子振动温度。结果发现：四种不同位置的等离子体具有不同的电子密度和分子振动温度,即它们各自处于不同的等离子体态。电子密度按照降序排列顺序依次为：中心粗等离子体柱四周的细等离子体柱、粗等离子体柱、边缘处的等离子体片、等离子体片交叉点处的细等离子体柱;分子振动温度的变化趋势与电子密度相反。由于等离子体电子密度不同,对光的折射率也不同,因此在该晶体结构中,粗等离子体柱、两种细等离子体柱以及等离子体片具有不同的折射率,它们和周围未放电的区域自组织形成具有五种折射率的复杂结构等离子体光子晶体。该等离子体光子晶体易于产生,具有结构多样、分析简单的优点,具有广泛的应用前景。     

Influence of Quantum Effects on the Magnetic Field Behavior in Overdense Plasma

We study the conditions for the anomalous transmission of electromagnetic waves through quantum overdense plasma. We show that this anomalous transmission is triggered due to the excitation of surface waves, as was observed in the classical overdense plasma. The conditions for the excitation of surface waves are obtained by studying the dispersion relation within the framework of quantum hydrodynamics. The corresponding consequences at the classical limits are consistent with the previous studies. In comparison with the classical regimes, the quantum dispersion curve exhibits an asymptotic behavior which indicates significant effects, in particular, at large wavelengths. Herein, to create the required evanescent waves, we consider the quantum plasma to be placed between two ordinary prisms and dielectrics. The effects of the main parameters, such as the permittivity of the prisms and dielectrics and the Fermi velocity, on the rate of the transmission and the magnetic field propagation are also evaluated.     

Radial evolution of the finite-width plasma sheet in a Z-pinch-aparametric analysis based on conservation laws

An algebraic method to compute the macroscopic radial-averaged quantities (thickness, density, radial velocity) of the plasma sheet in the first compression of simple z-pinches is presented. Following the snowplow model, a set of MHD equations is written in a reference system in which the internal boundary of the plasma sheet is at rest. The magnetic pressure and the energy losses are both modeled as functions of the radius of the sheet, and a time-independent algebraic equation is obtained. Finding the roots of this expression, the thickness of the plasma sheet as a function of its radius can be computed. The temporal evolution of all the quantities of the plasma sheet can also be obtained making an appropriate change to the reference system. Computed values of the temperature of the sheet are in agreement with experimental values. The ranges of validity for the numerical values of the modeling parameters are analyzed     

激光诱导等离子体LTE态判定方法研究

针对目前等离子体温度测量中常用的Boltzmann平面法和双线法的测量精度较差的问题,提出结合Boltzmann-Maxwell分布和Saha-Eggert公式来提高等离子温度的测量精度;根据高斯公式的面积与峰值关系建立了发射谱线线宽的简便算法,并通过谱线的Stark展宽计算等离子体的电子密度;建立了以McWhirter准则的等离子局部热平衡(LTE)态判据。以铝为被测样品的实验结果表明,随着激光能量的增加,等离子体温度和电子密度随之呈线性上升趋势;激光能量在127～510 mJ范围内的等离子体电子密度变化范围为1.305 32×1017～1.873 22×1017 cm-3,等离子体温度的变化范围为12 586～12 957 K,根据McWhirter准则本实验中所有等离子体均满足LTE态阈值条件;针对在光谱仪波段内可观测到的处于同一电离态谱线相对较少的铝元素,在不适合用Boltzmann平面法计算温度时,利用Saha-Boltzmann方法对100组铝等离子体光谱进行温度测量的相对标准偏差(RSD)为0.4%,相比于双线法的1.3%,大幅提高了测量精度。该计算方法可用于快速计算等离子体温度、电子密度及判断等离子体LTE态,在自由定标、光谱有效性分析、谱线的温度校正、确定最佳采光位置以及等离子体LTE分布状态等研究中都有较高的应用价值。     

Effects on RCS of a perfect electromagnetic conductor sphere in the presence of anisotropic plasma layer

Effects on RCS of perfect electromagnetic conductor (PEMC) sphere by coating with anisotropic plasma layer are studied in this paper. The incident, scattered and transmitted electromagnetic fields are expanded in term of spherical vector wave functions using extended classical theory of scattering. Co and cross-polarized scattered field coefficients are obtained at the interface of free space-anisotropic plasma and at anisotropic plasma-PEMC sphere core by scattering matrices method. The presented analytical expressions are general for any perfect conducting sphere (PMC, PEC, or PEMC) with general anisotropic/isotropic material coatings that include plasma and metamaterials. The behavior of the forward and backscattered radar cross section of PEMC sphere with the variation of the magnetic field strength, incident frequency, plasma density, and effective collision frequency for the co-polarized and the cross polarized fields are investigated. It is also observed from the obtained results that anisotropic layer on PEMC sphere shows reciprocal behavior as compared to isotopic plasma layer on PEMC sphere. The comparisons of the numerical results of the presented analytical expressions with available results of some special cases show the correctness of the analysis.     

A theoretical study of the influence of ambipolar diffusion on the population distribution of excited states in a plasma

The effect of charged particle diffusion on excitation temperature was investigated theoretically, assuming that the diffusion processes are ambipolar and that the charged particles return to the plasma in the form of ground state atoms, after recombination at the plasma boundary. An approximate expression was obtained by solving a set of balance equations for the excited state atom densities. It shows that, with increase of the plasma pressure, the excitation temperature rises and approaches the electron temperature. It was found also that, as the electron density increases, the diffusion effect on the excitation temperature diminishes. A criterion was obtained which should be satisfied so that the excitation temperature may be in agreement with the electron temperature. The theoretical results of this paper are in good agreement with experimental results.     

A note on the heat transfer to nonspherical particles from plasma

Heat transfer from plasma to a nonspherical particle in the free-molecular regime is studied in the present paper under thin plasma sheath condition. Analytical expressions for the floating potential charge and heat fluxes of an ellipsoid particle of revolution are derived and curves are given for hey parameters for arbitrary plasma flow direction. On the basis of these results, an equivalent sphere with the same surface area as the nonspherical particle is suggested to be used for calculating the total heat flux of nonspherical particle in engineering application with acceptable accuracy. Furthermore, the effects of particle rotation, which occurs in most aerosol systems, on the heat transfer are also discussed     

激光等离子体动量转换效率的实验研究

强激光与固体靶相互作用时，产生的高速喷射的等离子体对靶具有强烈的反冲作用，因此，激光等离子体可以作为一种新型的推进动力源.与传统的化学燃料推动相比，激光等离子体具有较高的比冲和有效载荷比等特点.对纳秒激光脉冲与铝、石墨、铅和碳氢靶相互作用时，等离子体对靶的冲量进行了实验测量，研究了大气与真空环境下的靶动量与激光聚焦面积的关系，并对部分实验结果与理论计算的数值进行了比较.实验结果显示，大气与真空环境下的靶动量有很大的差异，并且真空下的靶动量受材料性质的影响较大，与以往长脉冲激光的实验结果有很大的不同. 关键词： 激光等离子体 动量 动量耦合系数     

Rotating Mach Probe for Ion Flow Measurements on the CASTOR Tokamak

A rotating Mach probe is designed and used for measurement of plasma flows on the CASTOR tokamak. Measurements are performed at standard discharge conditions as well as in shots with edge plasma polarization. The one dimensional fluid model is developed to deduce the parallel and perpendicular Mach numbers from experimental data.     

Time variation of the intensity of spectral lines due to a plasma generated under the action of intense infrared laser radiation on a germanium target

The time waveforms of the intensity of spectral lines associated with a germanium laser plasma is studied by the emission spectroscopy method. The plasma is generated by irradiating a germanium target by a pulsed-periodic IR radiation from a neodymium laser, and the intensity waveforms are taken at distances of 1 and 7 mm from the target. From the intensity waveforms, the plasma parameters, such as the ion recombination time and the electron temperature and concentration, are determined. The time variation of the emission characteristics and plasma parameters is analyzed.