飞秒激光和酸刻蚀方法制作凹面微透镜阵列

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.     

微透镜阵列反应离子束蚀刻传递研究

提出了一种微透镜阵列复制的新方法－反应离子束蚀刻法（ＲＩＢＥ）它在工作原理和参数控制等方面较传统的蚀刻方法有很大的先进性，能够实现蚀刻过程的精确控制，本文详细阐述了反应离子蚀刻过程中的蚀刻选择性的控制方法，通过对各种蚀刻参数的控制，最终实现了微透镜阵列在硅等红外材料上面形传递的深度蚀刻，口径φ１００μｍ的Ｆ／２微透镜阵列在硅基底上的传递精度达１：１．０３，无侧向钻蚀。     

飞秒激光和酸刻蚀方法制作凹面微透镜阵列

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.     

一种大F数微透镜阵列的制备方法

针对大F数(大于10)微透镜阵列难以制备的现状,提出了一种制备大F数微透镜阵列的方法.首先采用传统光刻胶热熔法及刻蚀技术制作出成形的微透镜阵列,再将一层具有较高粘滞系数的光刻胶均匀地涂覆在该微透镜阵列上,在光刻胶的粘滞作用以及烘烤过程中光刻胶自身表面张力的共同作用下,微透镜阵列的F数得到提高.采用该方法制备的二氧化硅微透镜阵列的F数达40,与传统大F数微透镜阵列的加工方法相比,该方法简便易行、制备的微透镜阵列面形良好,且只需调节光刻胶的粘滞系数,即可获得F数不同的微透镜阵列.     

控制液晶器件产生的程控透镜和微透镜阵列

研究了计算机程控光学器件的性能。通过对液晶空间光调制器进行电寻址控制,得到了振幅模式、二进制相位模式和连续相位模式的计算机程控透镜和程控微透镜阵列。实验结果和计算分析都表明,连续相位模式的程控透镜具有较好的聚焦性能和光效率。程控微透镜阵列的优点是阵列中的每一个微透镜都可以单独控制,可以得到所需要的阵列形式。实验给出了一个由这样的微透镜阵列产生的去掉了中心4×4阵列的8×8光斑阵列样式。还给出了利用程控透镜来方便有效地演示和研究透镜的像差方法。由计算机控制空间光调制器得到的光学器件虽然具有极大的灵活性,但是由于空间光调制器的像素的尺寸影响了它的精细程度,限制了它的应用。     

六角形孔径平面微透镜阵列的制作及基本特性研究

采用光刻离子交换工艺制作了六角形孔径平面微透镜阵列.离子交换后的变折射率区域有微小重叠,填充系数可达95%以上.对制作的六角形孔径平面微透镜进行了折射率分布、数值孔径和像差等光学特性测试,得到的六角形孔径平面微透镜阵列光学性能均匀,成像质量较好的结果.该透镜阵列的研制成功为制作高质量高填充系数透镜阵列及模拟生物复眼光学系统奠定了基础.     

光学微透镜阵列成像质量预测和测量

为了研究微透镜阵列成像质量的影响因素,针对慢刀伺服加工和紫外（UV）光固化工艺制备的微透镜阵列,引入微透镜阵列镜片的误差,建立基于Zemax光学软件的光学微透镜阵列成像仿真模型,分析透镜单元的高度、曲率半径、入瞳直径等误差对微透镜阵列成像质量的影响。搭建光学测试平台对评价微透镜阵列成像性能的光学参数进行检测,包括各透镜单元的焦斑大小、位置误差及其焦距值,并利用点扩散函数（PSF）曲线的半峰全宽值对光场成像结果进行成像质量评价,测量得到微透镜阵列的焦距标准误差为0.12 mm。将测量结果与仿真结果相比,可得PSF曲线的半峰全宽值误差在12%左右,证明了仿真模型的准确性。利用仿真和实验的方法建立了微透镜阵列镜片误差与其光学成像质量之间的关系,这可为基于功能实现的光学微透镜阵列的超精密加工工艺提供理论基础和指导。     

一种新型微透镜阵列成象式投影光刻系统的研究

从理论和实验两方面入手,系统地研究了微透镜阵列的形成原理和制作工艺,分析了微透镜阵列的面形结构,得到了联系微透镜阵列矢高与制作工艺参量的经验公式.并且将四片微透镜阵列耦合,形成一个深紫外光刻的1:1成象的多孔径微小光刻系统.从几何光学理论出发,分析了这个光刻系统综合成象的特点,讨论了这种光刻系统的光学性能,并给出了实验测量方法.     

凹折射微透镜阵列的离子束刻蚀制作

利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。     

折射微透镜阵列的非成象光学特性研究

本文针对微透镜阵列与红外焦平面阵列集成的应用,对折射性微透镜阵列的非成象光学特性进行了研究和总结.采用系统性能评价因子来衡量微透镜的聚能效率,分析了系统参数对会聚效率的影响,并用标量衍射方法对几何光学分析结果进行了校验,为红外焦平面阵列微镜集成的设计和制作提供了理论依据.     

Horizontal continuous casting of metals with mould excited by ultrasonic waves

The thermal and mechanical conditions which exist during continuous casting of metals at the interface between bar and mould determine the cooling of the bar as well as the friction between bar and mould.Ultrasonic excitation of a horizontally-operating, continuous casting mould increased considerably the maximum throughput. The average value of the inner wall temperature of the mould rose during ultrasonic excitation. Periodic temperature fluctuations decrease during exposure to ultrasonic waves and a more even cooling of the bars is achieved. The force of removal was also reduced. In particular, peaks in the force when the bars are stuck together are reduced.The ultrasonic treatment also improved the surface finish. There is a relation between the temperature fluctuations of the inner side of the mould and the peak-to-peak roughness height. Grain refinement occurs as well as a more even grain distribution in the casting direction.     

低压铸造充型动力学的高速摄影观察

利用高速摄影和影片运动分析技术,在透明模型上对低压铸造充型过程进行了实时观察和运动分析。结果表明:低压铸造充型的动力学特征可用二阶非线性微分方程描述。     

Ultrasonic precision casting

A new technique for precision casting of small forms as in dentistry and jewelery is described. Ultrasonic energy was applied for the first time to promote flow and improve the properties of castings from moulds prepared by the lost wax process.^1,2

Dental castings are small in sizse. To flow and fill the mould completely, the high surface tension of the molten metal must be overcome. Three methods currently in use by which surface forces are overcome are: centrifugal force; gas pressure; and, less frequently, vacuum (atmospheric pressure). The casting technique used in these experiments utilizes ultrasonic energy to increase molecular motion, thereby promoting flow. Ultrasonic energy imparts a driving force to the melt which enables the molten metal to fill the mould.     

Corrosion and passivation behavior of Mg-Zn-Y-Al alloys prepared by cooling rate-controlled solidification

Highly corrosion-resistant nanocrystalline Mg-Zn-Y-Al multi-phase alloys have been prepared by consolidation of rapidly solidified (RS) ribbons. The relation between corrosion behavior and microstructure evolution of Mg-Zn-Y-Al alloys with a long period stacking ordered phase has been investigated. In order to clarify the influence of rapid solidification on the occurrence of localized corrosion such as filiform corrosion, several Mg_96.75Zn_0.75Y₂Al_0.5 (at.%) alloys with different cooling rates are fabricated by the gravity casting, copper mould injection casting and melt-spinning techniques and their corrosion behavior and microstructures are examined by the salt water immersion test, electrochemical measurements, GDOES, XRD, SEM and TEM. To clarify the effect of aluminium addition on the improvement in corrosion resistance of the alloys, several Mg_97.25−xZn_0.75Y₂Al_x alloys with different aluminium contents are fabricated by consolidating RS ribbons and the formation of corroded films on the Mg-Zn-Y-Al alloys have been investigated. Rapid solidification brings about the grain refinement and an increase in the solid solubility of zinc, yttrium and aluminium into the magnesium matrix, enhancing microstructural and electrochemical homogeneity, which in turn enhanced corrosion resistance. The addition of aluminium to magnesium can modify the structure and chemical composition of surface films and improves the resistance to local breakdown of the films.     

枪晶石变温拉曼光谱及其固液相微结构研究

枪晶石在传统冶金连铸保护渣中起着十分重要的作用。采用紫外激光光源和电荷耦合器件(CCD)探测器,测定了枪晶石晶体和高温拉曼光谱(温度范围:298~1 723 K),观察了其在变温状态(升温和降温过程)下的特征谱变化。谱图结果显示,枪晶石熔态微结构单元与固态的相比更为多元化,表明熔体状态下多种团簇结构共存。同时,利用枪晶石晶胞结构模型,通过Dmol3密度泛函(DFT)理论计算了其分子振动频率,将其与实验值相结合,确定了特征谱峰的归属,为进一步采用拉曼光谱法原位研究保护渣中枪晶石的结构变化与行为特征提供了重要依据。     

Formation,thermal stability and mechanical properties of Ti<Subscript>42.5</Subscript>Zr<Subscript>7.5</Subscript>Cu<Subscript>40</Subscript>Ni<Subscript>5</Subscript>Sn<Subscript>5</Subscript> bulk metallic glass

Ti_42.5Zr_7.5Cu₄₀Ni₅Sn₅ bulk metallic glass with a critical diameter of 4 mm was fabricated by the conventional copper mould casting method. The supercooled liquid region ΔT _x, reduced glass transition temperature T _rg, γ parameter, and δ parameter of the alloy were measured to be 63.9 K, 0.561, 0.393, and 1.400, respectively, implying that the alloy has an excellent glass-forming ability. The bulk metallic glass exhibits high compressive fracture strength of 2162 MPa with distinct plastic strain of 0.9%. The fracture surface consists mainly of vein-like patterns, typical of bulk glassy alloys. Supported by the Program for New Century Excellent Talents in University of China and the National Natural Science Foundation of China (NSFC)(Grant No. 50771040)     

氟对连铸保护渣熔体、玻璃和晶体微结构的影响

连铸保护渣的物化性质与其结构密切相关。而氟化物对调节连铸保护渣高温物化性能具有重要作用,因此研究氟对多元硅酸盐结构影响有助于深入了解氟的作用特性,进而为环保型连铸保护渣的开发奠定理论基础。论文通过拉曼光谱研究了氟对保护渣高温熔体、玻璃及晶体中硅酸盐微结构单元的影响。结果表明：随着CaF₂含量的增加,硅酸盐微结构单元种类和相对数量发生变化,硅酸盐网络化程度降低,熔体粘度减小;在性能相近的无氟渣和高氟渣中,高氟渣晶体中硅酸盐微结构单元主要为单体结构硅酸盐,无氟渣主要为链状结构硅酸盐。论文研究结果对无氟保护渣的开发具有一定的指导意义。     

舞台用复制拼版彩虹镜的研制

对刻划光栅进行第一次浇注,经拼版第二次浇注制得电铸模板,再通过第三次特殊浇注进行批量复制,然后真空镀铝、保护而成舞台用复制硬质彩虹镜(反射型)。其特点是:衍射效率高于目前的全患彩虹镜,且价廉,适于推广使用。     

Anisotropically microstructured and micro/nanostructured polypropylene surfaces

Anisotropically microstructured and hierarchically micro/nanostructured surfaces were fabricated on polypropylene by injection moulding. Microstructured mould inserts were obtained by structuring electropolished aluminium foils with a micro-working robot, and hierarchically structured mould inserts by anodizing the microstructured aluminium foils. On both types of inserts, the microstructures were anisotropic, consisting of alternating smooth and microstructured zones. Anisotropy, and other properties of microstructures, can be controlled by adjusting the parameters of the micro-working robot. The mould inserts were used to prepare micro- and hierarchically structured polypropylene discs by injection moulding. Replication accuracy at both structure levels can be controlled through the moulding conditions. The behaviour of water on the structures was characterized by measuring the contact and sliding angles parallel and perpendicular to the microstructured zones. Surfaces with microstructures alone were highly hydrophobic, where water droplets adopted the Wenzel state and had clearly different parallel and perpendicular contact angles. Surfaces with dual structures had contact angles near 170° and sliding angles near 0°, and again the angles in parallel and perpendicular directions differed. Superhydrophobic, anisotropic Cassie-Baxter state was achieved.     

Specifics of Crystallization of Amorphous TiNiCu Alloys with High Concentrations of Copper

Physics of the Solid State - Ribbons of alloys of the quasi-binary TiNi–TiCu system with 25, 30, 35, and 40 at % copper were fabricated by planar flow casting at a cooling rate of 106 K/s....