无He横流CO2激光器散热器性能分析

本文分析了无He横流CO2激光器散热器传热性能,计算结果与实验吻合很好.     

横流CO2激光器的折叠式谐振腔研究

在横流ＣＯ２激光器中折叠式谐振腔,不仅能改善光束质量,而且有提高转换效率。文章地折叠式谐振腔的折数确定,转折镜的选择,谐振腔的总体结构进行了分析研究,并设计了一种七折光学折叠腔,在大功率横流激光器上取得了良好的实验效果,获得了千瓦级基模激光输出。     

2kW横流连续CO_2激光器的工作气体以Ar代He的研究

对管板式低气压放电结构、横流连续２ｋＷＣＯ２激光器以Ａｒ气取代部分Ｈｅ气进行了研究。Ｈｅ气的取代量（掺Ａｒ量）从２０％增加到６０％，工作气压在２．９３～４．２６ｋＰａ，放电电流在３～１１Ａ的范围，激光器放电稳定，运转正常，可获得良好的输出特性，如输出功率为１．７ｋＷ，电光转换效率为１６％。     

高功率横流CO2激光器集散控制系统的研究

本文研究了一种用于高功率横流CO2激光器的集散控制系统。该系统兼具监测、控制、报警、保护四大功能。同时该系统在对激光器最重要的参量输出激光功率的检测研究方面,有其重要进展,该系统研制了一种新型的围内尚未解决的尾镜取样功率檎测法,该检测方法线性度好,可实现对激光功牢的实时检测叉不影响激光输出。     

高气压电激励横流CO7连续激光器

工业用千瓦级CO2连续激光器多数采用横向电激励、快速流动气体技术。工作气压一般较低，如40-80乇。本文从理论和实验结果论述了高气压条件下激光器的工作特性。工作气压范围为80-160乇。     

无He横流连续CO_2激光等离子体化学反应对输出稳定性的影响

本文研究了等离子体化学反应对无He横流连续CO_2激光器输出稳定性的影,测定了各种工作气体及其各种条件下的CO_2分解,对加He和加Ar时输出稳定性不同的原因进行了分析 并对杂质气体的影响进行了研究.     

2.5kW横流CO2(无氦)激光器研究

在高功率横流CO2(无氦)激光器中,本文就镇流电阻对激光器输出特性的影响作了实验研究,并获得了镇流电阻的最佳数值.当总压力为60Torr,CO2:Ar:N2=1.5:10:10时,激光器的输出功率为2.5kW,光电转换效率为16.9%.在12h的运行中,输出功率漂移仅为±3%.     

高气压连续CO2激光器的输出功率

<正>随气体压力增加,单位时间流过激光器的激活介质增加,可望获得较大的输出功率,并能改善器件的封闭寿命和输出稳定性.待研究的装置见图1.在些装置中,以金属板ABCD为阳极,EFGK为阴极(可以是管、板或针状),极问距离AE=H.假定电子密度n在正柱区     

A CW CO2 laser with DC-discharge preionization

The application of the plasma-injection technique (involving DC-discharge preionization) to a CW CO₂ laser operating with recirculated gas is described. Measured characteristics of the discharges, the gain, and the output power are presented. An output of 110 W was obtained with a specific efficiency of 1.0 J/l^-1 of flowed gas at a pressure of 10 kPa. A simplified model to calculate a characteristic length of the main discharge, which is useful for design purposes, is developed. This type of laser may be scaled simply to higher output powers, requires a gas mixture with only 20% He, is compact and robust, and yet is simple in its electrical and mechanical requirements     

硅中注砷的连续CO_2激光退火的研究

利用高功率连续CO_2激光定点辐照,对砷离子注入的硅片进行退火。实验结果表明晶格损伤得到了完全恢复,注入砷原子的替位率与电激活率高,还克服了激光聚焦扫描退火时引起硅片表面变形的问题。     

Scaling of laser power with N2 partial pressure in aconvective-cooled CW CO2 laser

Diffusion-cooled and convective-cooled CW CO₂ lasers have significantly different N₂ partial pressure in their optimum laser gas mixture. While in diffusion-cooled lasers the N₂ fractional concentration is normally within 20% of the total gas pressure, it ranges up to 60% in convective-cooled lasers. By considering various effects of N₂ and solving a simplified rate-equation model analytically, the large difference in the optimum N ₂ concentrations in these two types of CO₂ laser is explained     

高效率横向电激励连续CO_2激光器的研究

报道一种工业用高气压封闭形横向电激励二千瓦级连续CO_2激光器。连续运行13小时,输出功率高于2.3kW,能量转换效率大于17％。研究了放电特性、输出特性;测量了在不同放电条件下的电子温度和电子浓度。     

CW 20-kW SAGE CO2 laser for industrial use

A CW CO₂ laser with power output of more than 20 kW is described. The laser consists of a discharge excitation system named SAGE (Silent-discharge Assisted Glow discharge Excitation) and a ZnSe or KCl transmissive window for extracting high-quality beams with axisymmetric intensity profile from a confocal positive-branch unstable resonator. SAGE is effective in forming a uniformly distributed and stable discharge in a large-volume, high-pressure gas excitation medium. Together with appropriate high-pressure gas conditions and a properly selected zeolite to adsorb water vapor in the laser chamber, the transmissive windows enable gas-sealed operations. The structure of the 20-kW SAGE laser and its performance characteristics are described. The maximum CW power of 26.5 kW with an efficiency of 16.5% is attained with the ZnSe window, and a 20.3-kW power output is extracted through the KCl window. Long-term gas-sealed operation at a CW power level of 20 kW has been demonstrated for a period of 65 h     

1kW无氦横流连续CO_2激光器的研究

本文报道我们研制的 Ikw无 He横流连续CO_2激光器的实验结果。激光器总体结构如图1所示。其放电装置采用针板放电结构，阴极由152根直径为      

Preionizer-induced pulsed-mode operation of a transverse-flowtransversely excited CW CO2 laser

A pulse-preionized, dc-excited, transverse-flow, CW CO₂ laser has been operated in pulsed mode without using a discharge power-switching scheme. The pulsation in laser power is produced by a pulsed current that flows from the dc power supply due to the collapse in the discharge impedance whenever a preionizer pulse appears. By properly choosing the preionizer-pulse repetition frequency, dc power-supply filter-capacitor value, and gas composition, the laser pulsation has been enhanced. This laser has been operated at 1-kW average laser power level in pulsed mode at 1.3-kHz pulse repetition frequency with a peak-to-average power ratio of 3.35 and laser-power modulation depth of almost 100%     

二千瓦级横向电激励CO_2连续激光器

我们研制的HGL-81型CO_2激光器输出功率达2千瓦以上,连续工作时间2小时以上,输出功率稳定度小于±5％,电光转换效率大于11％。 HGL-81型CO_2激光器采用的总体技术方案是工作气体快速流动,横向电激励、高气压、多针-板自持放电。工作气压范围为50～300托。提高工作气压的好处是:激光输出功率随气压增加而增加,有利于长时间、全封闭稳定工作,工作过程中不需要补充新鲜气体,纵模稳定;气体质量流量大,气体温度低等。提高工作气压带来的主要问题是辉光放电的不稳定性。我们采用多针-板放电结构较好地解决了这个问题。     

横流CO_2激光器的二维增益分布

用一维气流、准二维放电模型算出垂直于电极平面的等增益线二维分布。研究了放电区气体流速、放电参数以及气体成分等对小信号增益沿流动方向变化规律的影响。对于每一气体压力,有与最佳增益曲线对应的流速范围。将计算结果与实验结果进行了比较。