静电驱动下微观曲梁的非线性动力学特性研究

研究微机电系统中微结构的动力学特性,对确保微机电系统的稳定运行具有重要的意义。以直流、交流电压作用下的微观曲梁为研究对象,采用Euler-Bernoulli梁模型、Galerkin数值离散方法,在考虑主共振的情况下使用多尺度法研究了两端固支微梁的非线性动力学特性和可能出现的跳跃、吸合现象。结果表明:直流、交流电压越大,阻尼值越小,系统表现出更强的非线性特性;系统对交流电荷载作用下的振动响应相对于直流电荷载更加敏感;随着曲梁拱形高度的增加,系统会依次出现软化和硬化两种不同的行为;系统在分岔点附近可能出现跳跃现象。研究结果可为合理选取物理参数和控制系统振动行为提供参考。     

参数激励下静电驱动微机电系统动力特性研究

充分考虑压膜阻尼效应的影响,提出参数激励下时变电容式静电驱动微机电系统的动力学模型,采用谐波平衡法分析在参数激励和强迫激励耦合作用下系统的幅频响应特性,探讨不同控制电压和频率比对系统幅频响应的影响,分别以交流电压幅值、频率比和压膜阻尼比为控制参数研究系统的非线性动力特性,结果表明,微尺度下静电驱动微机电系统在参数激励作用下存在较为丰富的分岔与混沌行为,压膜阻尼效应对系统动力特性的影响不可忽视.      

参数激励下静电驱动MEMS共振传感器的非线性动力特性研究

静电驱动微机电系统(MEMS)共振传感器因其结构简单、应用广泛等优点引起了研究人员广泛的关注,共振传感器件耦合系统在非线性静电力、压膜阻尼、参数激励下呈现出较复杂的非线性振动、不稳定性、分岔与混沌行为.提出参数激励作用下静电驱动微机电系统中梁式微结构共振传感器的动力学模型,采用多尺度方法对微系统的动力学方程进行摄动分析,探讨直流偏置电压、压膜阻尼和交流激励电压幅值对系统频率响应、共振频率的影响规律,结果表明:直流偏置电压和交流电压幅值都具有软化效应,且使共振频率漂移到较小的数值范围,压膜阻尼对共振频率的影响较小,但是增大压膜阻尼会使稳态振幅的峰值明显下降,为静电驱动微机电系统共振传感器的动力学分析与设计提供参考.     

RLC串联电路与微梁耦合系统的吸合电压与电振荡

根据电阻电感电容RLC电路与微梁耦合系统物理模型,利用拉格朗日-麦克斯韦方程建立了反映RLC电路与微梁机电耦合特征的数学模型。此模型能够反映机电的耦合特征。当两个极板之间的电介质为石蜡、陶瓷、云母等填充物时,只需求解RLC串联电路方程;当电路中放电结束瞬间,电容器极板上电荷为零,此时系统转化为极板微梁振动系统。通过伽辽金方法推导出了极板微梁系统的非线性振动方程,并求得了极板的吸合电压;应用常微分方程理论得到了RLC串联电路方程电振荡的解析表达式,分析了系统的电振荡特性。研究结果表明:对于每一个激励电压值,极板都有两个可能的平衡位置;电路中电流在非共振情况下经过一段时间的振荡后达到稳定。     

基于尺寸效应的FG-SMA微梁非线性自由振动特性研究

形状记忆合金具有相变温度低、输出应力高、能耗小、驱动电压低、可恢复应变大、生物相容性好等特性。随着形状记忆合金制备技术的进一步发展,有学者提出将功能梯度形状记忆合金材料用于微机电系统等智能微结构,将使其具有更优良的特性。因此开展机电多场耦合功能梯度形状记忆合金微结构的非线性自由振动特性研究具有重要研究价值。本文基于冯卡门几何非线性理论,综合考虑静电力和分子间作用力的影响,考虑尺寸效应,基于修正偶应力理论,建立两端固定的功能梯度形状记忆合金微梁模型,对功能梯度形状记忆合金微梁相变前后的机电耦合非线性自由振动问题进行深入研究,分析了尺寸效应参数、几何结构参数和相变参数等对功能梯度形状记忆合金微梁自由振动特性的影响。     

基于尺寸效应的FG-SMA微梁非线性自由振动特性研究

形状记忆合金具有相变温度低、输出应力高、能耗小、驱动电压低、可恢复应变大、生物相容性好等特性。随着形状记忆合金制备技术的进一步发展,有学者提出将功能梯度形状记忆合金材料用于微机电系统等智能微结构,将使其具有更优良的特性。因此开展机电多场耦合功能梯度形状记忆合金微结构的非线性自由振动特性研究具有重要研究价值。本文基于冯卡门几何非线性理论,综合考虑静电力和分子间作用力的影响,考虑尺寸效应,基于修正偶应力理论,建立两端固定的功能梯度形状记忆合金微梁模型,对功能梯度形状记忆合金微梁相变前后的机电耦合非线性自由振动问题进行深入研究,分析了尺寸效应参数、几何结构参数和相变参数等对功能梯度形状记忆合金微梁自由振动特性的影响。     

RLC串联电路与微梁耦合系统1:2内共振分析

研究电阻电感电容串联电路与微梁耦合系统的非线性振动,应用拉格朗日-麦克斯韦方程,建立受静电激励RLC串联电路与微梁耦合系统的数学模型。根据非线性振动的多尺度法,得到了在内共振ω2≈2ω1的情况下的近似解,并进行数值计算,得到用椭圆函数表示的解析解。计算结果表明,在无阻尼情况下,振动和能量在两个态间相互转换,没有能量损失。     

屈曲型数字微镜结构的机电动力学分析

设计一种基于压杆屈曲原理的数字微镜装置，针对该装置建立机电动力学模型，应用龙格-库塔法和有限元数值方法求解其动力学模型中的隐函数。通过对该模型的完整机电动力学微分方程数值求解所作的运动仿真，得到了微镜基板的连续角位移曲线，表明该装置具有良好的光束稳定特性。     

考虑卡西米尔力的静电激励NEMS吸合特性及其尺寸效应研究

基于应变梯度理论和哈密顿原理,并考虑卡西米尔力的影响,建立了静电激励纳米机电系统(NEMS)的尺寸效应模型,并得到模型的控制方程和边界条件。然后,引入广义微分求积法和拟弧长算法,得到模型的数值解。结果表明,当考虑卡西米尔力的影响时,系统两极的吸合电压有所减小。并且,当系统尺寸达到一个临界值时(即两电极间距小于“最小间距”,或可变形电极长度超过“拉起长度”),系统会在没有外加电压的作用下自动发生吸合,这将为NEMS的优化设计和定量分析提供理论基础。     

非线性碟簧动力吸振器的宽带数值优化设计及其应用

提出了非线性碟簧动力吸振器的宽带数值优化设计，推广了前人在非线性动力吸振顺领域的研究，首先提出了计算耦合非线性动力吸振器的主系统的稳态响应的平均法，然后采用数值优化法详细的研究了非线性动力吸振器的宽带优化设计，系统讨论了质量比、主系统阴尼比、吸振器阴尼比、系统频率比、激励频率比、位移比、吸振器刚度非线性系数和吸振器阻尼非线性系数与抑带宽的关系，最后考虑了非线性动力吸振器的应用实例，指出非线性动力吸     

Input-shaping control of nonlinear MEMS

We develop a new technique for preshaping input commands to control microelectromechanical systems (MEMS). In general, MEMS are excited using an electrostatic field which is a nonlinear function of the states and the input voltage. Due to the nonlinearity, the frequency of the device response to a step input depends on the input magnitude. Therefore, traditional shaping techniques which are based on linear theory fail to provide good performance over the whole input range. The technique we propose combines the equations describing the static response of the device, an energy balance argument, and an approximate nonlinear analytical solution of the device response to preshape the voltage commands. As an example, we consider set-point stabilization of an electrostatically actuated torsional micromirror. The shaped commands are applied to drive the micromirror to a desired tilt angle with zero residual vibrations. Simulations show that fast mirror switching operation with almost zero overshoot can be realized using this technique. The proposed methodology accounts for the energy of the significant higher modes and can be used to shape input commands applied to other nonlinear micro- and macro-systems.     

Analytical modeling of static behavior of electrostatically actuated nano/micromirrors considering van der Waals forces

In this paper,the effect of van der Waals(vdW)force on the pull-in behavior of electrostatically actuatednano/micromirrors is investigated.First,the minimum potential energy principle is utilized to find the equation governing the static behavior of nano/micromirror under electrostatic and vdW forces.Then,the stability of static equilibrium points is analyzed using the energy method.It is foundthat when there exist two equilibrium points,the smaller oneis stable and the larger one is unstable.The effects of different design parameters on the mirror’s pull-in angle andpull-in voltage are studied and it is found that vdW forcecan considerably reduce the stability limit of the mirror.Atthe end,the nonlinear equilibrium equation is solved numerically and analytically using homotopy perturbation method(HPM).It is observed that a sixth order perturbation approximation can precisely model the mirror’s behavior.The results of this paper can be used for stable operation design andsafe fabrication of torsional nano/micro actuators.     

Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect

Viscoelastic phenomena widely exist in MEMS materials, which may have certain effects on quasi-static behaviors and transition mechanism of nonlinear jumping phenomena. The static and dynamic behaviors of a doubly clamped viscoelastic microbeam actuated by one sided electrode are investigated in detail, based on a modified couple stress theory. The governing equation of motion is introduced here, which is essentially nonlinear due to its midplane stretching effect and electrostatic force. Through quasi-static analysis, the equilibrium position, pull-in voltage and pull-in location of the system are obtained with differential quadrature method and finite element method. The equivalent geometric nonlinear parameter is presented to explain the influence of the scale effect on the pull-in location. Different from elastic material, there are two kinds of pull-in voltages called as instantaneous pull-in voltage and the durable pull-in voltage in viscoelastic system. Then, Galerkin discretization and the method of multiple scales are applied to determine the response and stability of the system for small vibration amplitude. A new perturbation method to deal with viscoelastic term is presented. Theoretical expressions about the parameter spaces of linear-like vibration, hardening-type vibration and softening-type vibration are then deduced. The influence of viscoelasticity and scale effect on nonlinear dynamic behavior is studied. Results show that the viscoelasticity can reduce the effective elastic modulus and make the system tend to softening-type vibration; the scale effect can increase effective elastic modulus and make the system tend to hardening-type vibration. And most of all, simulation results of case studies are used to realize parameter optimization. Then parameter conditions of linear-like vibration, which is desired for many applications, are obtained. In this paper, the results of multi-physical field coupling simulation are used to verify the theoretical analysis.     

Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback

Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon which implies the loss of reliability of micro-electromechanical systems. Therefore, it is necessary to understand its mechanism and then reduce the phenomenon. In this work, pull-in instability of a typical electrostatic MEMS resonator is discussed in detail. Delayed position feedback and delayed velocity feedback are introduced to suppress pull-in instability, respectively. The thresholds of AC voltage for pull-in instability in the initial system and the controlled systems are obtained analytically by the Melnikov method. The theoretical predictions are in good agreement with the numerical results. It follows that pull-in instability of the MEMS resonator can be ascribed to the homoclinic bifurcation inducing by the AC and DC load. Furthermore, it is found that the controllers are both good strategies to reduce pull-in instability when their gains are positive. The delayed position feedback controller can work well only when the delay is very short and AC voltage is low, while the delayed velocity feedback will be effective under a much higher AC voltage and a wider delay range.     

具有初始构型的MEMS驱动器的跳跃和吸合现象研究

在曲梁变形后以弧长为参数的自然坐标系中,利用曲梁大变形分析理论,建立了具有任意初始构型的微电驱动器大变形电动力学分析的数学模型,并采用微分求积法(DQM)进行空间离散,得到了一组具有强非线性的微分-代数系统方程,运用Petzold-Gear BDF方法进行时间域内的求解。研究了MEMS驱动器在电场力作用下的瞬态动力学特性,包括跳跃(snap-through)和吸合(pull-in)现象,并与已有实验结果进行了比较。     

Nonlinear aeroelastic stability analysis of wind turbine blade with bending–bending–twist coupling

In this study, the nonlinear aeroelastic stability of wind turbine blade with bending–bending–twist coupling has been investigated for composite thin-walled structure with pretwist angle. The aerodynamic model used here is the differential dynamic stall nonlinear ONERA model. The nonlinear aeroelastic equations are reduced to ordinary equations by Galerkin method, with the aerodynamic force decomposition by strip theory. The nonlinear resulting equations are solved by a time-marching approach, and are linearized by small perturbation about the equilibrium point. The nonlinear aeroelastic stability characteristics are investigated through eigenvalue analysis, nonlinear time domain response, and linearized time domain response.     

Nonlinear Dynamics and Stability of a Machine Tool Traveling Joint

In this work, we investigate the nonlinear dynamics and stability of a machine tool traveling joint. The dynamical system considered includes contacting elements of a lathe joint and the cutting process where the onset of instability is governed by mode coupling. The equilibrium equations of the dynamical system yield a unique fixed point that can change its stability via a Hopf bifurcation. The unstable domain is primarily governed by the cutting tool location, the contact stiffness of the joint and the depth of material to be removed. Self excited vibrations due to a mode coupling instability evolve around the unstable fixed point and one or more limit cycles may coexist in the statically unstable domain. Stability and accuracy of the approximate analytical solutions are analyzed by applying Floquet analysis. Perturbation of the dynamical system with weak periodic excitation results with periodic and aperiodic solutions.     

介电弹性作动器主动隔振模糊控制试验研究

采用模糊控制策略,开展介电弹性作动器的主动隔振性能试验研究。基于介电弹性材料的Maxwell应力模型建立了作动器的力电耦合模型,分析了作动器的非线性特性;针对隔振系统设计了Mamdani型模糊控制器,建立了控制电压信号与振动响应之间的关系;在此基础上,开展了介电弹性作动器主动隔振试验研究,并与加速度反馈控制进行了对比。试验结果表明,在相同驱动电压的情况下,基于模糊控制策略的主动隔振性能要优于加速度反馈控制,且能够显著降低由于非线性驱动力导致的倍频响应幅值,有助于提高隔振系统的稳定性。     

Global stability of equilibrium manifolds,and “peaking” behavior in quadratic differential systems related to viscoelastic models

We study a model inspired by the Oldroyd-B equations for viscoelastic fluids. The objective is to better understand the nonlinear coupling between the stress and velocity fields in viscoelastic flows, and thus gain insight into the reasons that cause the loss of accuracy of numerical computations at high Weissenberg number. We derive a model system by discarding the stress-advection and stress-relaxation terms in the Oldroyd-B model. The reduced (unphysical) model, which bears some resemblance to a viscoelastic solid, only retains the stretching of the stress due to velocity gradients and the induction of velocity by the stress field. Our conjecture is that such a system always evolves toward an equilibrium in which the stress builds up such to cancel the external forces. This conjecture is supported by numerous simulations. We then turn our attention to a finite dimensional model (i.e., a set of ordinary differential equations) that has the same algebraic structure as our model system. Numerical simulations indicate that the finite-dimensional analog has a globally attracting equilibrium manifold. In particular, it is found that subsets of the equilibrium manifold may be unstable, leading to a “peaking” behavior, where trajectories are repelled from the equilibrium manifold at one point, and are eventually attracted to a stable equilibrium point on the same manifold. Generalizations and implications to solutions of the Oldroyd-B model are discussed.     

具有裂纹-碰摩耦合故障转子-轴承系统的动力学研究

以非线性动力学和转子动力学理论为基础，分析了带有碰摩和裂纹耦合故障的弹性转子系统的复杂运动，在考虑轴承油膜力的同时构造了含有裂纹和碰摩故障转子系统的动力学模型。针对短轴承油膜力和碰摩-裂纹转子系统的强非线性特点，采用Runge-Kutta法对该系统由碰摩和裂纹耦合故障导致的非线性动力学行为进行了数值仿真研究，发现该类碰摩转子系统在运行过程中存在周期运动、拟周期运动和混沌运动等丰富的非线性现象，该研究结果为转子-轴承系统故障诊断、动态设计和安全运行提供理论参考。