激光纳米振动测量技术研究

本文通过对电子散斑小振幅振动测量的线性分析,实施一系列特殊算法、散斑平均技术及特殊图象处理等工作,使得纳米振动测量系统的测量精度得到较大提高.该系统将具有全场、非接触、测量速度快、测量精度高等优点,目前它也是纳米全场振动测量的唯一方法.     

The system of double-optical-path ESPI for the vibration measurement

In this paper, a system of double-optical-path electronic speckle pattern interferometry (ESPI) for measuring larger vibration is proposed. This system combines the conventional ESPI optical path for measuring out-of plane vibration and the de-sensitized optical path. It can be used to observe qualitatively and analyze quantitatively the vibration mode. At the same time, the phase unwrapping is avoided. The anti-disturbance capability of this system is high, so it can be used to analyze the vibration characteristics of complex and discontinuous structure in actual engineering.     

Fringes demodulation in time-averaged digital shearography using genetic algorithms

This paper presents a phase recovery method, based on genetic algorithms, in time-average shearography. It is proved that a single Bessel fringe pattern obtained under a subtraction operation could be enough to calculate the phase. A merit function is solved iteratively using genetic operator like selection, reproduction and mutation. Experimental results are presented in this paper using a simple shearing system based on a Fresnel biprism.     

双光路电子散斑振动测量系统

本文给出了一种双光路电子散斑振动测量系统,该系统结合了普通ESPI离面振动测量光路和退敏感光路,既能对较大振幅范围的振动进行定性观测,又能实现全场自动定量分析,同时避免了相位去包裹处理.系统具有较高的抗干扰能力,可以应用于实际工程中复杂非连续结构的振动特性分析.     

The separation of out-of-plane displacement from in-plane components by fringe carrier method based on large image-shearing ESPI

A fringe carrier method for separating out-of-plane displacement from in-plane components based on large image-shearing electronic speckle pattern interferometry (ESPI) is presented. If the test object is respectively illuminated by two expanded symmetric illuminations in large image-shearing ESPI, two interferometers are formed. Carrier fringe patterns can be introduced by tilting reference surface a small angle. The carrier fringe patterns are demodulated after deformation of the object. Two phase maps, which include out-of-plane and in-plane displacement, can be obtained by using Fourier transform. Then out-of-plane displacement can be easily separated from in-plane displacement by simple operation between two unwrapped phase distributions. The principle of spatial carrier frequency modulation in large image-shearing ESPI is discussed. A typical three-point-bending experiment is completed. Experimental results are offered. The results show that the method offers high visibility of carrier fringes. And the system presented does not need a special beam as a reference light and has simple optical setup.     

Matched data storage in ESPI by combination of spatial phase shifting with temporal phase unwrapping

We combine the spatial phase-shifting technique with the real-time fringe counting capability of temporal phase unwrapping to provide simple solutions for some practical tasks in ESPI. First, we develop a method for automatically matched data storage intervals and apply this technique to a long-term observation of a biological object with strongly varying deformation rate. Second, we easily obtain on-line displacement and deformation data during the observation of a complexly structured discontinuous object.     

Improved evaluation of electronic speckle pattern interferograms by photogrammetric image analysis

Electronic speckle pattern interferometry (ESPI) is a well-established tool for non-destructive testing. It allows the quantitative determination of surface deformations and micro-movements with a sub-micrometer resolution. In the case of objects which are extended in depth, however, the evaluation and interpretation of the resulting correlation fringe patterns can be affected by perspective image distortions as well as by a varying image size. In this paper a method for combination of ESPI with a photogrammetric 3D coordinate measurement is presented. In this way, interferogram data are precisely allocated in 3D-space. Furthermore, it is possible to take into account a spatially varying sensitivity vector. The utilizability of the method is demonstrated by a deformation measurement on a stone sculpture.     

Noise reduction in electronic speckle pattern interferometry fringes by merging orthogonally polarised speckle fields

The noise in sawtooth fringes generated by electronic speckle pattern interferometry (ESPI) is investigated. When deformations of depolarising objects are studied, the scattered object light can be decomposed into two orthogonal linearly polarised speckle patterns which are partially decorrelated. Their correlation coefficient decreases with increasing depolarisation coefficient of the object. By suitable merging of the phase distributions of these two speckle fields on the basis of a modulation depth analysis, the rms phase error in the ESPI sawtooth fringes can be reduced significantly.     

用电子散斑干涉法测量材料热膨胀系数

 利用双光束电子散斑干涉法（ESPI）对试件受热变形进行了实时观测，针对一次实验过程中得到的图片较多（300～500幅）的特点，在图像处理时摒弃了以往的手动识别等位移线的办法，用MATLAB语言编写了批处理程序，能够在采集的大量散斑图片中自动快速准确地标定等位移线，得到相应的位移和应变，并结合实时测量的温度值，获得了45钢和LY12铝合金在不同温升率下的热膨胀系数及其随温度的变化。实验结果表明，在涉及的温升率范围内，温升率的改变对材料热膨胀系数的影响不明显，材料的热膨胀系数随温度的升高略有上升。     

激光全场模态测量技术研究

详细阐述了电子散斑时间平均法振动测量技术的原理,通过对影响测量精度的诸因素进行理论和实验分析,提出通过应用连续相位扫描技术克服相移系统相移不准确所带来的误差.通过散斑平均技术的实施,消除散斑对测量精度的影响.在实验中得到了满意的测量结果.通过线性近似法,解决了振幅低于30nm的振动测量问题,从而使系统分辨率达到亚纳米级,测量精度达到纳米级.     

Separation of vibration fringe data from rotating object fringes using pulsed ESPI

In industrial and other types of non-controlled environments, an unbalanced rotating object may present characteristic out-of-plane vibration amplitude at a specific frequency. For this type of cases and as a first step towards a complete evaluation, it is only desired to visualize the effect of the vibration on the rotating object, or vice versa, for instance to achieve object balancing. Real time optical non-intrusive measurement techniques such as pulsed electronic speckle pattern interferometry (ESPI), are well suited to study this rotating-vibrating object. The advantage offered by ESPI is that real-time fringe data is qualitatively analyzed while being observed on a TV monitor. The present paper proposes a qualitative method, based on pulsed ESPI, to separate rotation fringes from fringes solely related to vibration. The method relies on a high precision scheme that synchronizes and fixes an object point during rotation, without the use of an optomechanical object derotator.     

单幅对称变形相位图分离二维变形分量的相移电子散斑干涉技术

提出了利用相移电子散斑干涉测量物体二维变形分量的方法.单光束照明的传统电子散斑干涉技术,测量得到的是一幅物体变形的混合相位场.当物体具有对称变形时,可由这一幅相位图求得二维变形分量.方法是将该相位图镜像翻转得到第二幅相位图,通过二幅相位图的叠加、复位和分离运算,获得物体的二维变形场的分量值.利用三点加载的简支梁进行了实验,给出了实验结果,并与对称光照明实验结果进行了对比,验证了该方法的正确性.     

The design of a non-cube beam-splitter used for electronic speckle pattern interferometry

A non-cube beam-splitter (NCBS) is proposed, by which an incident beam can be separated largely in a direction and then the lights from the test object and the lights from a reference surface placed adjacently to the test object can be combined to construct a simple electronic speckle pattern interferometry (ESPI) system. Two mainly useful quantitative ways, to calculate the phase change of the test object, the phase-shift and the fringe carrier method with Fourier transform, can be achieved in the ESPI system with the NCBS. Experiments with phase-shifting and fringe carrier method are completed. The experimental results show that the monolithic design of the proposed NCBS is effective in ESPI measurement and immunity to vibrations.     

Measuring thickness change of transparent plate by electronic speckle pattern interferometry and digital image correlation

The thickness change of transparent plates was measured by electronic speckle pattern interferometry (ESPI) method and digital image correlation (DIC) method. An out-of-plane ESPI system was developed based on the Michelson interferometer, and a new thickness measurement method was designed, which is on the basis of Snell's law of refraction and DIC. The main principles and experimental procedures of these two methods were presented. The thickness change of polymethyl specimens under uniaxial tensile loading were measured by the optical techniques and compared with each other. The results reveal that the data obtained with DIC method achieve better linearity than ESPI.     

Normalization and noise-reduction algorithm for fringe patterns

This paper presents a fringe pattern normalization and noise-reduction algorithm. Locally the background noise is suppressed, the modulation normalized and the noise smoothed. An expression to calculate the cosine-only term is formulated. It is related to the directional derivatives of the intensity fringes. Two-dimensional Fourier series are used to calculate the parameters needed for the algorithm. Experimental work is presented using diffraction and ESPI images. The programming is relatively simple and involves mainly local convolutions. The processing time using a 2 GHz computer to normalize an image of 256 × 256 pixels is approximately one second.     

电子散斑干涉载频调制形貌测量方法的分析

根据电子散斑干涉载频调制测量物体形貌的基本原理,物体表面的微小偏转可引入包含物体高度信息的载波干涉条纹。将物体的偏转视为变形,对物体变形与载波干涉条纹之间的关系进行了讨论,得出了离面位移引入载波和面内位移引入含有物体高度信息相位的结论。发现利用典型电子散斑干涉系统测量物体形貌效果最好,并通过实验得到了验证。     

Modulation analysis in spatial phase shifting electronic speckle pattern interferometry and application for automated data selection on biological specimens

In electronic speckle pattern interferometry (ESPI), for a fast and objective analysis of measurement data which occur with a high repetition rate, an automated data processing is of particular advantage. For this reason, investigations were carried out to determine if the modulation of speckle interferograms can be applied as a quality parameter for the selection of suitable interferogram data for further evaluation e.g. phase unwrapping when spatial phase shifting (SPS) is performed. Six methods for determining the modulation of speckle interferograms are characterised and compared. The applicability of the speckle interferogram modulation as a parameter for mask generation in the unwrapping process of the phase difference is demonstrated by the evaluation of measurement data obtained from experiments with a spatial phase shifting endoscopic ESPI system on a technical surface and on a human gastrectomy specimen.     

ESPI solution for non-contacting MEMS-on-wafer testing

Rapid progress in the field of micro-electro-mechanical systems (MEMS) makes the development of appropriate measuring and testing means timely. Characterizing the mechanical properties of MEMS structures at a very early stage of manufacturing is a challenging task for quality assurance in this field. The paper describes a new solution that is based upon the vibration analysis of the microparts. The nanometer amplitudes are detected by advanced electronic speckle pattern interferometry (ESPI). A specific signal processing technique has been applied to make the solution robust. Comprehensive numerical simulations provide the theoretical base for the HNDT concept. A laboratory system for 4″ wafer has been built, and extensive tests show that such key properties as e.g. the thickness of springs or membranes can be determined exactly. Automated frequency scanning and corresponding digital image processing open the way to reliable and fast industrial systems for MEMS testing on wafer level.     

相移测量技术中相移器研究

本文介绍一种用于相移测量技术的相移器。该相移器由计算机通过Ｄ／Ａ接口板自动控制输出电压幅度，其电路采用闭环控制，位移由压电晶体产生，具有很高的电压稳定度（０１％）和较小的相移误差（小于３°）。描述相移器的结构、驱动源工作原理及相移器标定方法     

一种可实现电子散斑干涉的新型大错位方棱镜

设计了一种可实现电子散斑干涉的大错位方棱镜.将普通方棱镜的一个面磨去一个楔角后变为斜面,该斜面和相邻的一个面镀反射膜,其他二个面镀增透膜.垂直入射的光线经过分光后变成二束光,分别经过平面反射和斜面反射,出射的二束光线就分开了.将该大错位方棱镜置于CCD镜头前,一个物体可以成二个错位的像;相邻的二个物体可叠加成像.错位量由楔角决定,错位量足够大,可实现大错位电子散斑干涉.根据试件大小和成像距离,楔角的大小可选择在1°到10°之间.对中心加载周边固定圆盘进行了电子散斑载频干涉实验,证明了大错位方棱镜能够高质量地实现电子散斑干涉,实现位移场测量.