Influence of grain growth on the high-frequency behaviour of ferromagnetic Fe-Co-(M)-N (M=Ta, Hf) nanocomposite films

The CMOS compatible ferromagnetic Fe-Co-(M)-N (M=Ta, Hf) films were investigated with regard to their grain size-dependent frequency behaviour. Predominantly Fe₃₃Co₄₀Ta₁₀N₁₇ films were deposited by reactive r.f. magnetron sputtering. These films were compared to Fe₃₆Co₄₄Hf₉N₁₁ films. In order to induce an in-plane uniaxial anisotropy H_u as well as to investigate the grain growth behaviour, the films were annealed in a static magnetic field. The in-plane uniaxial anisotropy field of around 4 mT as well as a good soft magnetic behaviour with a saturation polarisation of approximately 1.2-1.4 T could be observed after heat treatment. Ferromagnetic resonance frequencies (FMR) of approximately up to 2.4 GHz could be achieved according to the Kittel theory. Depending on the heat treatment, high-frequency losses through energy dissipation was made conspicuous by means of the full-width at half-maximum (FWHM) Δf_eff of the imaginary part of the frequency-dependent permeability which was between 0.4 and 1 GHz. This FWHM was basically discussed in terms of two-magnon scattering theories, in combination with the Herzer random anisotropy model. In order to correlate the resonance line broadening with a phenomenological damping parameter α_eff, which ranged from about 0.0125 to 0.028, the modified Landau-Lifschitz-Gilbert equation was used to fit and describe the permeability spectra of the ferromagnetic films.     

Damping and ferromagnetic resonance linewidth broadening in nanocrystalline soft ferromagnetic Fe–Co–Hf–N films

In order to describe high-frequency damping mechanisms of ferromagnetic films by means of the imaginary part of the frequency-dependant permeability, CMOS compatible ferromagnetic Fe₃₆Co₄₄Hf₉N₁₁ films were deposited by reactive r.f. magnetron sputtering on oxidised 5×5 mm²×380 μm (1 0 0)-silicon substrates with a 6-in. Fe₃₈Co₄₇Hf₁₅ target, as well as magnetic field annealing between 300 and 600 °C. An in-plane uniaxial anisotropy of around 4.5 mT as well as an excellent soft magnetic behaviour with a saturation polarisation of approximately 1.4 T could be observed after heat treatment at the above-mentioned temperatures, which drives these films to a high-frequency suitability. Ferromagnetic resonance frequencies of approximately up to 2.4 GHz could be obtained. The frequency-dependant permeability was measured with a broadband permeameter. Depending on the heat treatment, an increase of the full-width at half-maximum (FWHM) of the imaginary part of the frequency-dependant permeability is discussed in terms of two-magnon scattering, anisotropy-type competition and local resonance generation through predominant grain growth causing magnetisation and anisotropy inhomogeneities in the magnetic films. The grain size of the films was determined by (HRTEM) imaging and amounts from a few nanometres for films heat treated at 300 °C to more than 10 nm at 600 °C where the FWHM Δf_eff and the Landau–Lifschitz–Gilbert equation damping parameter α_eff increases with d_nm² and d_nm (e.g. d_nm is the grain diameter of the nonmagnetic Hf–N phase), respectively.     

Determination of intrinsic FMR line broadening in ferromagnetic (Fe44Co56)77Hf12N11 nanocomposite films

Ferromagnetic nanocomposite (Fe₄₄Co₅₆)₇₇Hf₁₂N₁₁ films were deposited to investigate their intrinsic damping mechanisms due to scattering of itinerant electrons, which carry the magnetic moment of the ferromagnetic transition elements. The films were produced by reactive r.f. magnetron sputtering using a 6 in. Fe₃₇Co₄₆Hf₁₇ target. They were annealed at 400 °C in a static magnetic field, in order to induce in-plane uniaxial anisotropy. Subsequently, the films can be considered as uniformly magnetised. A ferromagnetic resonance frequency (FMR) of around 2.3 GHz could be attained, which was determined by measuring the real and imaginary parts of the frequency dependent permeability up to 5 GHz. The imaginary part, which represents a typical resonance curve, was utilised to obtain its full-width at half-maximum Δf_eff (FWHM) for the total damping behaviour characterisation. Thereby, it is possible to extract the intrinsic Gilbert damping parameter α_int, which in turn can be decomposed into two additional damping terms α_sf and α_os allocated to “spin-flip” and “ordinary scattering”, respectively. This result is correlated and discussed in terms of a verified theoretic model, to identify whether damping due to spin-flip scattering and/or ordinary scattering is dominant.     

Soft magnetic properties of FeCo films with Co underlayer

Bilayered Fe₆₅Co₃₅ (=FeCo)/Co films were prepared by facing targets sputtering with 4πM_s∼24 kg. The soft magnetic properties of FeCo films were induced by a Co underlayer. H_c decreased rapidly when the Co underlayer was 2 nm or more. The films showed well-defined in-plane uniaxial anisotropy with the typical values of H_ce=10 Oe and H_ch=3 Oe, respectively. High frequency characteristics of the films show the films can work at 0.8 GHz with real permeability as high as 250.     

Fabrication, magnetism and high frequency application of exchange-coupled Fe65Co35±2-SiO1.7±0.2 granular films

A series of (Fe₆₅Co_35±2)_x-(SiO_1.7±0.2)_1−x nano-granular films with various metal volume fractions (x) were fabricated by rf sputtering. In a wide range, excellent soft magnetic properties have been achieved. In the x range from 0.7 to 0.48, the films exhibit small coercivity H_c not exceeding 4 Oe and high electrical resistivity ρ up to 1.15 × 10⁴ μΩ cm. And a minimum H_c value of 1.65 Oe was obtained for the sample of x = 0.57 with ρ = 2.86 × 10³ μΩ cm. At a frequency lower than 2.0 GHz, the real part μ′ of complex permeability of this sample is more than 170 and the FMR frequency is as high as 2.6 GHz, implying a high cut-off frequency for high frequency applications. With decreasing Fe₆₅Co_35±2 volume fraction, the resistivity of films increases remarkably and the grain size decreases obviously. At the same time, the coercivity H_c decreases with grain size decreasing, which is consistent with the conclusion resulted from random anisotropy model quoted by Herzer. Study on Henkel plots shows that intergranular ferromagnetic exchange coupling exists among grains and is important for realizing soft magnetic properties.     

Effect of Co underlayer on soft magnetic properties and microstructure of FeCo thin films

High saturation magnetization soft magnetic FeCo (=Fe₆₅Co₃₅) films were prepared using a thin Co underlayer. The FeCo/Co films exhibited a well-defined in-plane uniaxial anisotropy with easy axis coercivity (H_ce) of 10 Oe and hard axis coercivity (H_ch) of 3 Oe, and a half reduction of H_c with H_ce=4.8 Oe and H_ch=1.0 Oe was obtained when the composition was adjusted to 25 at% Co. The effective permeability of the films remains flat around 250 to 800 MHz. The saturation magnetostriction was 5.2×10⁻⁵ and the intrinsic stress was 0.8 GPa in FeCo single layer, both were slightly reduced by Co underlayer. The Co underlayer changed the preferred orientation of the FeCo films from (2 0 0) to (1 1 0) but more significantly, reduced the average grain size from ∼74 to ∼8.2 nm. It also reduced the surface roughness from 2.351 to 0.751 nm. The initial stage and interface diffusion properties were examined by TEM and XPS.     

On the relation between the effective ferromagnetic resonance linewidth Δfeff and damping parameter αeff in ferromagnetic Fe-Co-Hf-N nanocomposite films

Ferromagnetic Fe-Co-Hf-N nanocomposite films were investigated concerning their microstructure-dependent frequency behaviour. To modify the composition, the films were deposited by reactive RF magnetron sputtering by using three different 6 in. targets with various Hf fractions. The films were post-annealed up to 600 °C in a static magnetic field to induce an in-plane uniaxial anisotropy and to obtain different crystal sizes. Depending on the annealing temperature, high-frequency losses were investigated by considering the full-width at half-maximum (FWHM) Δf_eff of the imaginary part of the frequency-dependent permeability which showed a resonance frequency f_FMR of 2.3 GHz for an in-plane uniaxial anisotropy field H_u of 4 mT. The FWHM in correlation with the damping parameter α_eff is discussed, e.g., in terms of two-magnon scattering. Damping occurs due to film inhomogeneity in magnetisation and uniaxial anisotropy caused by a magnetocrystalline anisotropy H_a and/or non-magnetic phases. This will result in homogenous or even inhomogeneous resonance line broadening if additional and resonance as well as precession frequencies of independent grains arise.     

Microstructure and microwave permeability of FeCo thin films with Co underlayer

Microstructure, static magnetic properties and microwave permeability of sputtered FeCo films were examined. Fe₆₀Co₄₀ films (100 nm in thickness) deposited on glass substrates exhibited in-plane isotropy and a large coercivity of 161.1 Oe. When same thickness films were deposited on 2.5 nm Co underlayer, well-defined in-plane anisotropy was formed with an anisotropy field of 65 Oe. The sample had a static initial permeability of about 285, maximum imaginary permeability of 1255 and ferromagnetic resonance frequency of 2.71 GHz. Cross-sectional TEM image revealed that the Co underlayer had induced a columnar grain structure with grain diameter of 10 nm in the FeCo films. In comparison, FeCo films without Co underlayer showed larger grains of 70 nm in diameter with fewer distinct vertical grain boundaries. In addition, the Co underlayer changed the preferred orientation of the FeCo from (1 0 0) to (1 1 0). The improvement in soft magnetic properties and microwave behavior originates from the modification of the film microstructure, which can be well understood by the random anisotropy theory.     

The exchange bias in MnPd/Co1−xFex bilayers

A systematic study of exchange bias in MnPd/Co and MnPd/Co_1−xFe_x bilayers has been carried out. Very large unidirectional anisotropy constant of 2.2 erg/cm² and the appearance of double-shifted loops, ascribed to the coexistence of positive and negative exchange bias, have been observed. The dependence of exchange bias, unidirectional anisotropy constant and coercivity on thickness, temperature, annealing regime and Fe content has been investigated and discussed.     

Effect of Ta buffer and NiFe seed layers on pulsed-DC magnetron sputtered Ir20Mn80/Co90Fe10 exchange bias

A systematic investigation has been done on the correlation between texture, grain size evolution and magnetic properties in Ta/Ni₈₁Fe₁₉/Ir₂₀Mn₈₀/Co₉₀Fe₁₀/Ta exchange bias in dependence of Ta buffer and NiFe seed layer thickness in the range of 2-10 nm, deposited by pulsed DC magnetron sputtering technique. A strong dependence of 〈1 1 1〉 texture on the Ta/NiFe thicknesses was found, where the reducing and increasing texture was correlated with exchange bias field and unidirectional anisotropy energy constant at both NiFe/IrMn and IrMn/CoFe interfaces. However, a direct correlation between average grain size in IrMn and H_ex and H_c was not observed. L1₂ phase IrMn₃ could be formed by thickness optimization of Ta/NiFe layers by deposition at room temperature, for which the maximum exchange coupling parameters were achieved. We conclude finally that the coercivity is mainly influenced by texture induced interfacial effects at NiFe/IrMn/CoFe interfaces developing with Ta/NiFe thicknesses.     

Spin-engineering in the Co75Fe25/Cu(1 1 0) system

We present results on the growth and magnetic anisotropies of Co₇₅Fe₂₅ films grown on a Cu(1 1 0) single crystal. Angular dependent MOKE measurements show a thickness dependent, in-plane rotation of the easy axis of magnetisation of up to 60° from the [0 0 1] direction (towards [−1 1 0]). For a film thickness of 5 ML, just greater than that required for the onset of ferromagnetism, uniaxial anisotropy is observed with the easy axis along the [0 0 1] direction. As the film thickness increases this is seen to rotate in-plane towards the [−1 1 0] direction as the contribution from the cubic anisotropy constant grows. At a film thickness of 9 ML there is predominantly cubic anisotropy and at 10 ML the easy axis is rotated to 150° with respect to the [1 −1 0] axis, where it is stabilised.     

Effect of thermal treatment on the magnetization processes of nanocrystalline Fe80Ge3Nb10B7 alloys

The dynamic magnetization processes of nanocrystalline Fe₈₀Ge₃Nb₁₀B₇ alloys after annealing at different temperatures are studied through the permeability spectroscopy. Three steps of crystallization are found when amorphous Fe₈₀Ge₃Nb₁₀B₇ alloys are heated from 300to 1200 K. The dominant magnetization process varies with different annealing temperatures. Domain wall bulging is the main magnetization mechanism under weak applied field. When the applied field exceeds pinning field H_p, the depinning-involved domain wall displacement occurs. Different annealing temperature results in different H_p. The lower value of μ′ and high relaxation frequency after heating at 923 and 973 K are due to the strengthened domain wall pinning and the increase of magnetocrystalline anisotropy.     

Thickness dependence of microwave magnetic properties in electrodeposited Fe-Co soft magnetic films with in-plane anisotropy

In this work, the thickness effect of Fe₅₂Co₄₈ soft magnetic films with in-plane anisotropy on static and microwave magnetic properties was investigated. The hysteresis loop results indicated that the static in-plane uniaxial anisotropy field increased from almost 0-60 Oe with increasing film thickness from 100 to 540 nm and well-defined in-plane uniaxial magnetic anisotropy can be obtained as the thickness reached 540 nm or larger. Based on Landau-Lifshitz-Gilbert (LLG) equation, the microwave complex permeability spectra were analyzed and well fitted. The LLG curve-fitting results indicated that the initial permeability increased from 106 to 142 and the resonant frequency was shifted from 4.95 to 4.29 GHz as the film thickness was varied from 540 to 1500 nm. Moreover, it was found that there was a discrepancy between the static and the dynamically determined anisotropy field, which can be explained by introducing an additional effective isotropic ripple field. The decreased ripple field was suggested to result in a significant decrease of damping coefficient from 0.109 to 0.038.     

Theoretic 3-D study of the high-frequency magnetic moment dynamics in thin ferromagnetic films with in-plane uniaxial anisotropy by considering eddy-current generation

In the present paper, theoretic investigations of polarisation vector precession trajectories represented by a macro spin in ferromagnetic films with in-plane uniaxial anisotropy were realised. For this purpose, the Landau–Lifschitz–Gilbert differential equation (LLG) in combination with the Maxwell equations were solved for three dimensions by considering a linear progression of the magnetisation or polarisation with an external field. The frequency and time dependent polarisation trajectories illustrate how a magnetic moment precesses if effective damping and eddy-currents impacts its motion. For computation, typical parameter values like the saturation polarisation J_s=μ₀·M_s=1.4 T and in-plane uniaxial anisotropy μ₀·H_u=4.5 mT were employed. The main focus of simulation was on the variation of the effective damping parameter α_eff between 0.01 and 0.05 and ferromagnetic film thickness t_m between 200 nm and 1200 nm. The frequency-dependent calculations were carried out between 50 MHz and 6 GHz. The time-dependent simulations were done for a duration between 5 and 30 ns.     

Anomalous Hall effect and perpendicular magnetic anisotropy in Sm28Fe72 and Sm32Fe68 thin films

Sm₂₈Fe₇₂ and Sm₃₂Fe₆₈ films of 100 nm thickness were grown using DC magnetron sputter deposition and their structure, magnetization, electrical and Hall resistance characteristics were investigated. An increase in electrical resistivity from 4.75×10⁻⁶ to 5.62×10⁻⁶ Ω m and from 2.26×10⁻⁶ to 2.84×10⁻⁶ Ω m for Sm₂₈Fe₇₂ and Sm₃₂Fe₆₈ films, respectively, with decrease in temperature from 300 to 40 K is attributed to the strain induced anisotropy that dominates at lower temperatures. The positive extraordinary Hall coefficients (R_S) are observed for both films at 300 and 80 K. The existence of hysteresis indicates that Sm₂₈Fe₇₂ and Sm₃₂Fe₆₈ films possess perpendicular anisotropy at 300 K. Hysteresis loop becomes narrow at 80 K for both Sm₂₈Fe₇₂ and Sm₃₂Fe₆₈ films. Magnetization measurements at 300 K exhibiting small coercive field values of 31 and 49 Oe for Sm₂₈Fe₇₂ and Sm₃₂Fe₆₈ films, respectively, confirm the existence of perpendicular anisotropy at 300 K.     

Epitaxial growth of bcc-FexCo100-x thin films on MgO(1 1 0) single-crystal substrates

Fe_xCo_100-x (x=100, 65, 50 at%) epitaxial thin films were prepared on MgO(1 1 0) single-crystal substrates heated at 300 °C by ultra-high vacuum molecular beam epitaxy. The film structure and the growth mechanism are discussed. FeCo(2 1 1) films with bcc structure grow epitaxially on MgO(1 1 0) substrates with two types of variants whose orientations are rotated around the film normal by 180° each other for all compositions. Fe_xCo_100-x film growth follows the Volmer Weber mode. X-ray diffraction analysis indicates the out-of-plane and the in-plane lattice spacings are in agreement with the values of respective bulk Fe_xCo_100-x crystals with very small errors less than ±0.4%, suggesting the strains in the films are very small. High-resolution cross-sectional transmission electron microscopy shows that periodical misfit dislocations are preferentially introduced in the film at the Fe₅₀Co₅₀/MgO interface along the MgO[1 1¯ 0] direction. The presence of such periodical dislocations decreases the large lattice mismatch of about −17% existing at the FeCo/MgO interface along the MgO[1 1¯ 0] direction.     

Influence of the nitrogen contents on the permeability characteristics and soft magnetic properties of FeHfN films

High permeability magnetic films can enhance the inductance of thin-film inductors in DC-DC converters. In order to obtain high permeability, the uniaxial anisotropy and coercivity should be as low as possible. This study employed dc reactive magnetron sputtering to fabricate nanocrystalline FeHfN thin films. The influence of the nitrogen flow on the composition, microstructure, and permeability characteristics, as well as magnetic properties was investigated. Increasing the nitrogen content can alter FeHfN films from amorphous-like to crystalline phases. The magnetic properties and permeability depend on variations in the microstructure. With the optimum N₂/Ar flow ratio of 4.8% (N₂ flow: 1.2 sccm), low anisotropy (H_K = 18 Oe), low coercivity (H_C = 1.1 Oe) and high permeability (μ′ > 600 at 50 MHz) were obtained for fabrication of a nanocrystalline FeHfN film with a thickness of around 700 nm. Such as-fabricated FeHfN films with a permeability of over 600 should be a promising candidate for high-permeability ferromagnetic material applications.     

Effect of refractory metals addition on the structural and magnetic properties of Pr3(Fe, Co, Ti)29 system

Polycrystalline refractory metal-substituted Pr₃(Fe_0.6M_0.1Co_0.3)_27.5Ti_1.5 (M=V, Ti, Zr, Mo, Nb,Cr) and Pr₃(Fe_0.5Co_0.5)_27.5Ti_1.5 have been studied for high-temperature permanent magnetic materials. X-ray diffraction showed the main phase to be the 3:29 phase. We observed the highest reported T_C (Curie temperature) of 640 °C for the 3:29 system in the Pr₃(Fe_0.5Co_0.5)_27.5Ti_1.5. In the refractory metal-substituted systems, the highest T_C of 480 °C was observed for the Nb-substituted alloy. SEM measurements showed that Ti in Pr₃(Fe_0.6Ti_0.1Co_0.3)_27.5Ti_1.5 is deposited near the grain boundary. H_A (anisotropy energy) of V-substituted alloy is as high as 72 kOe, the highest reported in the 3:29 system and is ∼200% higher than 24 kOe observed in Pr₃(Fe_0.7Co_0.3)_27.5Ti_1.5. Cr and Ti substitutions show an increase of 65% (40 kOe) and 45% (35 kOe) in H_A respectively. M_S (saturation magnetization) values were ∼100 emu/g and are lower than that observed in Pr₃(Fe_0.7Co_0.3)_27.5Ti_1.5.     

Out-of-plane low field anisotropic magnetoresistance in Nd0.51Sr0.49MnO3 thin films

A comparative study of the out-of-plane anisotropic magnetoresistance (AMR) in single crystalline and polycrystalline thin films of phase separated manganite Nd_0.51Sr_0.49MnO₃ has been carried out. On-axis DC magnetron sputtering was used to deposit the single crystalline films (30 and 100 nm in thickness) on single crystal (0 0 1) LaAlO₃ (LAO) and polycrystalline films (100 nm) on (1 0 0) Yttrium-stabilized ZrO₂ (YSZ) substrates. The in-plane and out-of-plane magnetotransport properties of these films differ significantly. A large low field AMR is observed in all the films. AMR shows a peak below the insulator-metal transition temperature in the single crystalline films, while the same increases monotonically in the polycrystalline film. Relatively larger low field AMR (∼20% at T=78 K and H=1.7 kOe) in the polycrystalline films suggests the dominance of the shape anisotropy.     

High-frequency properties of discontinuous FeCoSi/native-oxide multilayer films

Discontinuous [FeCoSi (d)/native-oxide]₅₀ multilayer films were fabricated by DC magnetron sputtering without any post-deposition treatment. The films exhibit good soft magnetic properties with initial permeability μ_i larger than 100, the saturation magnetization 4πM_s and the in-plane uniaxial anisotropy field H_k increase as the magnetic FeCoSi layer thickness d is increased from 5.5 to 20.5 Å. As a consequence, the ferromagnetic resonance frequencies f_r of the films increase from 2.0 to 3.9 GHz. The combination of high f_r and large μ_i makes these films potential candidates for magnetic devices applied in the high-frequency range. The origin of the excellent high-frequency properties in discontinuous FeCoSi/native-oxide multilayer films is discussed.