共查询到19条相似文献,搜索用时 78 毫秒
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原子层沉积氧化铝已经成为应用于钝化发射极和背面点接触(PERC)型晶硅太阳能电池优异的钝化材料.对于基于丝网印刷技术的太阳能电池,钝化材料的钝化效果及其热稳定性是非常重要的.本文在太阳能级硅片上用热原子层沉积设备制备了20nm和30nm的氧化铝,少子寿命测试结果显示初始沉积的氧化铝薄膜具有一定的钝化效果,在退火后可达到100μs以上,相当于硅表面复合速度小于100cm/s.经过制备传统晶硅太阳能电池的烧结炉后,少子寿命能够保持在烧结前的一半以上,可应用于工业PERC型电池的制备.通过电子显微镜观察到了较厚的氧化铝薄膜有气泡,解释了30nm氧化铝比20nm氧化铝钝化性能和稳定性更差的异常表现. 相似文献
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用超声水解方法制备MgO纳米颗粒,用化学沉淀法制备α-Fe2O3纳米颗粒,将MgO/α-Fe2O3混合体常温下超声活化2h,400℃固相合成制备出MgFe2O4纳米颗粒.通过X射线衍射和透射电子显微镜测试产品的化学成分、晶体结构和形貌尺寸,分析声化学反应机理及其影响因素.研究结果表明:所制备的MgFe2O4为尖晶石铁氧体,颗粒尺寸分布在20-30nm之间,粒度分布均匀;超声空化效应提高了化学反应活性、增加反应物的比表面积和反应物之间的接触面积,促进固相合成反应速度,降低反应温度,实现了一般条件下难以完成的化学反应. 相似文献
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采用聚苯乙烯小球修饰Ti片表面,并进行阳极氧化,制备出一种由纳米颗粒和纳米管构成的TiO2膜.通过数值模拟,分析了氧化表面附近的局部电场分布对TiO2膜形貌的影响.结果表明,覆盖物增强了局部电场,从而加快了O2-与Ti的反应速率,有利于TiO2的生长;与此同时,[TiF6]6-的扩散受到阻碍,使得TiO2的溶解速率减慢.可见,覆盖物打破了TiO2纳米管形成的平衡条件,导致纳米颗粒的生成.此外,通过X射线衍射和Raman光谱的测试分析发现,所制备的TiO2为锐钛矿结构. 相似文献
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采用第一性原理的计算方法, 分别研究了金红石相和锐钛矿相TiO2各种缺陷态形成的类型, 以及几何结构、生长气氛和Fermi能级位置对缺陷形成能的影响, 从理论上预测产生点缺陷的实验条件. 重点是讨论带电点缺陷的形成能, 并对结果进行适当修正. 研究发现, 本征缺陷的类型和浓度对 TiO2的性能有一定的影响: 在富O条件下, TiO2容易形成VTi(Ti空位)缺陷; 在富Ti条件下, TiO2的Tii4+和VO(O空位)缺陷将大量出现, 形成Schottky缺陷. 相似文献
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S. McDonnellD.M. Zhernokletov A.P. KirkJ. Kim R.M. Wallace 《Applied Surface Science》2011,257(20):8747-8751
GaSb(0 0 1) was treated with (NH4)2Sx and the evolution of the interfacial chemistry was investigated, in situ, with monochromatic X-ray photoelectron spectroscopy (XPS), following heat treatment and exposure to trimethylaluminum (TMA) and deionized water (DIW) in an atomic layer deposition reactor. Elemental Sb (Sb-Sb bonding) as well as Sb3+ and Sb5+ chemical states were initially observed at the native oxide/GaSb interface, yet these diminished below the XPS detection limit after heating to 300 °C. No evidence of Ga-Ga bonding was observed whereas the Ga1+/Ga-S chemical state was robust and persisted after heat treatment and exposure to TMA/DIW at 300 °C. 相似文献
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Byeol HanSeung-Won Lee Kwangchol ParkChong-Ook Park Sa-Kyun RhaWon-Jun Lee 《Current Applied Physics》2012,12(2):434-436
We produced dielectric stacks composed of ALD SiO2 and ALD Al2O3, such as SiO2/Al2O3, Al2O3/SiO2, and SiO2/Al2O3/SiO2, and measured the leakage currents through the stacks in comparison with those of the single oxide layers. SiO2/Al2O3 shows lowest leakage current for negative bias region below 6.4 V, and Al2O3/SiO2 showed highest current under negative biases below 4.5 V. Two distinct electron conduction regimes are observed for Al2O3 and SiO2/Al2O3. Poole-Frenkel emission is dominant at the high-voltage regime for both dielectrics, whereas the direct tunneling through the dielectric is dominant at the low-voltage regime. The calculated transition voltage between two regimes for SiO2 (6.5 nm)/Al2O3 (12.6 nm) is −6.4 V, which agrees well with the experimental observation (−6.1 V). For the same EOT of entire dielectric stack, the transition voltage between two regimes decreases with thinner SiO2 layer. 相似文献
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C. Li 《Applied Surface Science》2010,256(22):6801-6804
Fe2O3/Al2O3 catalysts were prepared by solid state reaction method using α-Fe2O3 and γ-Al2O3 nano powders. The microstructure and surface properties of the catalyst were studied using positron lifetime and coincidence Doppler broadening annihilation radiation measurements. The positron lifetime spectrum shows four components. The two long lifetimes τ3 and τ4 are attributed to positronium annihilation in two types of pores distributed inside Al2O3 grain and between the grains, respectively. With increasing Fe2O3 content from 3 wt% to 40 wt%, the lifetime τ3 keeps nearly unchanged, while the longest lifetime τ4 shows decrease from 96 ns to 64 ns. Its intensity decreases drastically from 24% to less than 8%. The Doppler broadening S parameter shows also a continuous decrease. Further analysis of the Doppler broadening spectra reveals a decrease in the p-Ps intensity with increasing Fe2O3 content, which rules out the possibility of spin-conversion of positronium. Therefore the decrease of τ4 is most probably due to the chemical quenching reaction of positronium with Fe ions on the surface of the large pores. 相似文献
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The diamond abrasive particles were coated with the TiO2/Al2O3 film by the sol-gel technique. Compared with the uncoated diamonds, the TiO2/Al2O3 film was excellent material for the protection of the diamonds. The results showed that the incipient oxidation temperature of the TiO2/Al2O3 film coated diamonds in air atmosphere was 775 °C, which was higher 175 °C than that of the uncoated diamonds. And the coated diamonds also had better the diamond's single particle compressive strength and the impact toughness than that of uncoated diamonds after sintering at 750 °C. For the vitrified bond grinding wheels, replacing the uncoated diamonds with the TiO2/Al2O3 film coated diamonds, the volume expansion of the grinding wheels decreased from 6.2% to 3.4%, the porosity decreased from 35.7% to 25.7%, the hardness increased from 61.2HRC to 66.5HRC and the grinding ratio of the vitrified bond grinding wheels to carbide alloy (YG8) increased from 11.5 to 19.1. 相似文献
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This paper discusses the effect of N 2 plasma treatment before dielectric deposition on the electrical performance of a Al2O3 /AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor(MISHEMT),with Al2O3 deposited by atomic layer deposition.The results indicated that the gate leakage was decreased two orders of magnitude after the Al2O3 /AlGaN interface was pretreated by N 2 plasma.Furthermore,effects of N 2 plasma pretreatment on the electrical properties of the AlGaN/Al2O3 interface were investigated by x-ray photoelectron spectroscopy measurements and the interface quality between Al2O3 and AlGaN film was improved. 相似文献
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Yunsheng Zhang Aili Wang Min Ren Zhuomin Gu Yumin Liu Yutang Shen Longbao Yu Tingshun Jiang 《Applied Surface Science》2010,257(4):1351-1360
Binary Al2O3/SiO2-coated rutile TiO2 composites were prepared by a liquid-phase deposition method starting from Na2SiO3·9H2O and NaAlO2. The chemical structure and morphology of binary Al2O3/SiO2 coating layers were investigated by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, TG-DSC, Zeta potential, powder X-ray diffraction, and transmission electron microscopy techniques. Binary Al2O3/SiO2 coating layers both in amorphous phase were formed at TiO2 surfaces. The silica coating layers were anchored at TiO2 surfaces via Si-O-Ti bonds and the alumina coating layers were probably anchored at the SiO2-coated TiO2 surfaces via Al-O-Si bonds. The formation of continuous and dense binary Al2O3/SiO2 coating layers depended on the pH value of reaction solution and the alumina loading. The binary Al2O3/SiO2-coated TiO2 composites had a high dispersibility in water. The whiteness and brightness of the binary Al2O3/SiO2-coated TiO2 composites were higher than those of the naked rutile TiO2 and the SiO2-coated TiO2 samples. The relative light scattering index was found to depend on the composition of coating layers. 相似文献
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Interfacial reactions and oxidation behavior of Al2O3 and Al2O3/Al coatings on an orthorhombic Ti2AlNb alloy 总被引:1,自引:0,他引:1
The uniform and dense Al2O3 and Al2O3/Al coatings were deposited on an orthorhombic Ti2AlNb alloy by filtered arc ion plating. The interfacial reactions of the Al2O3/Ti2AlNb and Al2O3/Al/Ti2AlNb specimens after vacuum annealing at 750 °C were studied. In the Al2O3/Ti2AlNb specimens, the Al2O3 coating decomposed significantly due to reaction between the Al2O3 coating and the O-Ti2AlNb substrate. In the Al2O3/Al/Ti2AlNb specimens, a γ-TiAl layer and an Nb-rich zone came into being by interdiffusion between the Al layer and the O-Ti2AlNb substrate. The γ-TiAl layer is chemically compatible with Al2O3, with no decomposition of Al2O3 being detected. No internal oxidation or oxygen and nitrogen dissolution zone was observed in the O-Ti2AlNb alloy. The Al2O3/Al/Ti2AlNb specimens exhibited excellent oxidation resistance at 750 °C. 相似文献
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在研制AlGaN/GaN HEMT器件的基础上,采用ALD法制备了Al2O3 AlGaN/GaN MOSHEMT器件.通过X射线光电子能谱测试表明在AlGaN/GaN异质结材料上成功淀积了Al2O3薄膜.根据对HEMT和MOSHEMT器件肖特基电容、器件输出以及转移特性的测试进行分析发现:所制备的Al2O3薄膜与AlGaN外延层间界面态密度较小,因而MOSHEMT器件呈现出较
关键词:
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ALD
GaN
MOSHEMT 相似文献
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SMA-g-MPEG comb-like polymer is first employed as the dispersant of Al2O3 suspensions in this paper. The comb-like polymer has anionic polycarboxylate backbone, which makes the polymer easily absorbed on the cationic surface of Al2O3 particles; on the other hand, the comb-like polymer has hydrophilic MPEG side chains, which extend into the solution to provide steric repulsion after the comb-like polymer is absorbed on the surface of Al2O3 particles. The adsorption behavior, zeta potential, apparent viscosity, granularity and TEM images of the Al2O3 suspensions using SMA-g-MPEG as dispersant are investigated. The addition of SMA-g-MPEG improves the dispersibility and decreases the apparent viscosity of the Al2O3 suspension observably. The impacts of the length of side chains on the dispersion of Al2O3 suspensions are particularly discussed. The adsorbed molecular number of the dispersant decreased by increasing the length of side chains. The zeta potential of Al2O3 suspension is more negative by using comb-like polymer with shorter side chains. Based on the steric repulsion and adsorbed molecular number, SMA-g-MPEG with moderate length of side chain is found to have the best dispersibility for Al2O3 suspension. 相似文献