激光等离子体诊断用Wolter型X射线显微镜的设计

围绕着稠密等离子体硬X射线成像诊断,提出了一种基于阿贝正弦条件的Wolter型X射线显微镜的光学系统设计。详细介绍了Wolter显微镜的结构特点和设计方法,进行了参数优化,定量分析了包括物距、放大倍数、掠入射角和双曲面镜镜长在内的初始结构参数对物镜性能的影响。由光线追迹可以得出,在约±260 μm的视场范围内分辨率优于1 μm;在±460 μm范围内优于3 μm。有效视场可达约1 mm,几何集光立体角约为6.1×10-5sr。同时,该系统具备平响应系统特性,在mm级的视场范围内,系统响应效率的一致性优于93.7%。     

适用于激光聚变实验的短焦距高放大倍率Wolter显微镜设计

围绕内爆压缩及阻滞阶段相关物理实验的诊断需求,提出了一种满足阿贝正弦条件的短焦距高放大倍率Wolter-Ⅲ型X射线显微镜的光学设计。详细介绍了Wolter-Ⅲ型显微镜的结构特点和设计方法,与Wolter-Ⅰ型相比可以通过将主平面向靠近物点方向移动的方式减小系统焦距,从而获得更大的放大倍数,实现显微镜与探测器的像质匹配,提高诊断系统的空间分辨。由光线追迹可以得出,在±190 μm的视场范围内,空间分辨率优于3 μm;在±240 μm范围内分辨率优于5 μm;在±300 μm范围内分辨率优于8 μm,几何集光立体角约为5×10?6 sr。     

Micro x-ray small-angle scattering with synchrotron radiation

Abstract

Three small-angle scattering cameras based on mirror/monochromator optics, a circular Bragg-Fresnel (BF) lens, and a microcollimation system combined with a double-focusing mirror have been tested for microfocusing applications. In order to reach a focal spot less than or equal to 10 μm. a microcollimation system provides a flexible solution for medium-resolution applications. When using a glass capillary as a collimation system, a minimum s-value of 5·10^?2 nm^?1 was attained. Scanning small-angle x-ray scattering (SAXS) patterns from a poly(tetramethyl-p-silphenylene)-siloxane spherulite and a 40-μm polyethyl-eneterephthalate fiber were obtained in a few seconds per pattern with a 4 μm diameter beam at a wavelength of λ = 0.095 nm.     

超高分辨光学相干层析成像技术与材料检测应用

本文报道了一种超高分辨率谱域光学相干层析成像(SD-OCT)系统. 该系统基于超连续谱激光光源并截取部分光谱作为宽带光源, 其中心波长为665 nm, 光谱半高全宽(FWHM) 230 nm. 系统轴向分辨率0.9 μm, 轴向扫描速率28600行/秒, 横向分辨率3.9 μm, 横向视场1 mm, 最大成像深度0.6 mm(空气中). 利用研制的超高分辨率SD-OCT系统, 对不同型号的工业砂纸精细结构进行了成像, 并与普通SD-OCT的成像结果进行对比, 充分展示了研制系统在材料无损检测中优势.     

X-ray diffraction microscopy of magnetic structures

We report the first proof-of-principle experiment of iterative phase retrieval from magnetic x-ray diffraction. By using the resonant x-ray excitation process and coherent x-ray scattering, we show that linearly polarized soft x rays can be used to image both the amplitude and the phase of magnetic domain structures. We recovered the magnetic structure of an amorphous terbium-cobalt thin film with a spatial resolution of about 75 nm at the Co L3 edge at 778 eV. In comparison with soft x-ray microscopy images recorded with Fresnel zone plate optics at better than 25 nm spatial resolution, we find qualitative agreement in the observed magnetic structure.     

观瞄仪目标发生器准直投影系统的设计

针对空间标准动态目标发生器的设计指标要求,对卡塞格林R C系统进行了改进,通过在第2镜和像面之间加入一片双曲面镜,设计完成了焦距为1 600 mm、相对孔径为1∶1.2、视场角为1°、工作波段在0.4 μm~0.7 μm和8 μm~12 μm的共轴三反射光学系统。设计结果表明:该系统弥散斑RMS小于5 μm,在可见光波段与远红外波段相应的空间频率处,此共轴三反系统的调制传递函数值均大于0.7,接近衍射极限,满足系统对成像质量的要求。     

Single-shot soft x-ray laser-induced ablative microstructuring of organic polymer with demagnifying projection

We report on a single-shot micropatterning of an organic polymer achieved by ablation with demagnifying projection using a Ne-like Zn 21.2 nm soft x-ray laser. A nickel mesh with a period of 100 microm was approximately 10x demagnified and imprinted on poly(methyl methacrylate) via direct ablation. The quality of the ablated microstructure was found to be mainly dependent on the quality of the projected mask. This first demonstration (to our knowledge) of single-shot projection, single-step lithography illustrates the potential of soft x-ray lasers for the direct patterning of materials with a resolution scalable down to submicrometer domain.     

Design of axisymmetric multi-mirror grazing incidence system to increase the numerical aperture of neutron and X-ray microscopes

An axisymmetric multi-mirror system for neutron and X-ray microscopes is proposed to increase their numerical aperture and collection efficiency. A Wolter type-I mirror is used as the basis of the multi-mirror system at grazing incidence. The addition of an even number of hyperboloid mirrors to the Wolter type-I mirror can satisfy both an equal optical path length and Abbe’s sine condition. The numerical aperture increases in proportion to the number of mirrors. The optical parameters of the system with four tandem mirrors are calculated for neutrons and X-rays with a wavelength of 0.4 nm by assuming that the average grazing angle of incidence is 5.4 mrad and the magnification is 10. The inner diameters of the mirrors are limited to <10 mm considering the total length of the optical system. Tolerance of off-axis distance was calculated using a ray-tracing computer simulation. Ray tracing shows that a blur size <14 nm will be possible at an off-axis displacement of 10 μm.     

交叉非对称型Czerny-Turner光谱仪光学系统设计

根据Czerny-Turner结构光谱仪工作原理,以便携式微型光学系统为设计目标,设计了一种光谱范围为200900nm的交叉非对称型Czerny-Turner光谱仪光学系统.通过分辨率、光谱范围等设计要求确定光谱仪大致结构后,引入初级像差对初始结构进行进一步优化.首次提出将球差约束条件与光阑面选取相结合,设计流程确定准直镜通光口径、光栅初始尺寸及聚焦镜中心波长对应口径,继而结合彗差约束条件,确定球面镜离轴角,并基于几何光学确定聚焦镜初始通光口径的方法.利用ZEMAX软件对初始参量进行模拟优化,并采用自主研制的样机进行光谱测量,分析结果表明,该光学系统能够在狭缝宽度为25μm,光栅常数为1.667μm/line条件下,实现中心波长分辨率优于1nm,边缘波长分辨率优于1.5nm.     

High resolution 3D x-ray diffraction microscopy

We have imaged a 2D buried Ni nanostructure at 8 nm resolution using coherent x-ray diffraction and the oversampling phasing method. By employing a 3D imaging reconstruction algorithm, for the first time we have experimentally determined the 3D structure of a noncrystalline nanostructured material at 50 nm resolution. The 2D and 3D imaging resolution is currently limited by the exposure time and the computing power, while the ultimate resolution is limited by the x-ray wavelengths. We believe these results pave the way for the development of atomic resolution 3D x-ray diffraction microscopy.     

太阳极紫外成像光谱仪光学系统设计与分析

针对太阳极紫外成像光谱仪的应用目的与工作环境,设计了一种太阳极紫外成像光谱仪的光学系统.该系统由望远系统、狭缝、光栅与探测器组成.望远系统采用离轴WolterⅡ型结构,入射光掠入射进入系统,具有光谱范围宽、稳定性高、克服恶劣空间环境能力强等优点.扫描镜采用平面反射镜,成像质量不随扫描角的改变而改变.分光光栅采用超环面3 600lines/mm变间距光栅,与超环面等间距光栅相比,具有成像质量高、光谱分辨率高、缩短系统长度的优势.工作波段为17.0～21.0nm,可满足探索温度在5.8≤log T≤6.3区间的宁静日冕的需要.视场为1 228″×2 400″,空间分辨率达到0.8arc second/pixel,光谱分辨率约为0.001 98nm/pixel,总长度不超过2.5m.计算了望远系统的理论有效面积,给出了望远系统的成像质量与实际的视场.系统整体的成像质量、光栅的谱线弯曲与谱带弯曲,均满足实际应用要求.     

软x射线近贴显微技术

软x射线近贴显微技术不但可使活的生物样品成象,分辨率高于光学显微镜,而且人为的样品准备程序在该技术中都可避免。本文描述了用高功率激光打靶产生的等离子体作为软x射线源而进行的近贴显微研究,并得到了分辨率好于1μm的结果。     

X光分幅相机-平面镜配接方法研究

利用X光谱仪用平面镜备件以及实验室常用五维调节架,设计了X光平面镜与X光分幅相机配接的探索方案,并对系统调节中各元件调节误差带来的影响进行了一定的分析,详细描述了系统的瞄准调节方法和过程.利用激光打靶实验,对X光平面镜与X光分幅相机的配接方法进行了检验.实验过程和结果表明,该方法系统结构和实施都较为简单,可以比较容易地在分幅相机微带上获得经平面镜反射的靶目标针孔像,实现～50 ps的时间分辨、10～20 μm的空间分辨及几十倍的能量分辨.     

Holographic imaging with a nanometer resolution using compact table-top EUV laser

Holographic 2D/3D imaging with nanometer resolution using short wavelength extreme ultraviolet (EUV) light is presented in this paper. Gabor’s holograms were recorded with a highly coherent table top EUV laser with different numerical apertures demonstrating ultimately a spatial resolution of 46+/−2 nm, comparable with the illumination wavelength, in 2D holographic imaging. Three dimensional images were obtained from a single high numerical aperture hologram recorded in a high resolution photoresist and numerically reconstructed at different image planes, allowing numerical optical sectioning with a lateral resolution ∼170 nm and depth resolution of 2.4 μm. The holograms were recorded in a high resolution photoresist and digitized with an atomic force microscope. To assess the spatial resolution of the numerical reconstructions of the holograms a correlation method was used. The algorithm allows for simultaneous estimation of the resolution and the feature size of the image under analysis.     

Submicrometer hard X‐ray focusing using a single‐bounce ellipsoidal capillary combined with a Fresnel zone plate

A single‐bounce capillary with an ellipsoidal shape has been used for two‐step focusing in combination with a Fresnel zone plate (FZP). The FZP serves as a first microfocusing element and produces a demagnified micrometer image of the source, before the elliptical capillary makes a last final compression of the beam. With 15 keV X‐rays from the European Synchrotron Radiation Facility BM5 bending magnet, the two‐step demagnification system produced a focus of about 250 nm with a gain of more than 1000. The use of an ellipsoidal capillary as a micro‐mirror under off‐axis illumination using micro‐prefocusing optics might open up new opportunities in nanofocusing developments.     

一种光栅型成像光谱仪光学系统设计

 成像光谱仪是一种“图谱合一”的光学遥感仪器。从光栅型成像光谱仪的使用要求出发,利用Zemax软件设计了一种光栅型成像光谱仪光学系统。其中,前置望远物镜采用反射式结构,传统的卡塞格林结构在主次镜均采用非球面时校正像差的能力依然有限,设计时采用改进后的卡塞格林结构对像差进行校正,最终设计的望远镜头传函在50 lp/mm处达到0.5,场曲控制在0.078以内,且不存在畸变。针对光谱成像系统通常采用的基于平面光栅的Czerny-Turner结构由于像差校正能力有限、成像质量较差不能满足仪器的使用要求。采用基于凸面光栅的光谱成像系统,该系统结构紧凑、可实现宽波段内像差的同时校正。最终设计的光谱成像系统光谱分辨率<5 nm,MTF在50 lp/mm时升至0.75。将前置望远物镜与光谱成像系统根据匹配原则进行组合优化后光栅型成像光谱仪系统点列图RMS半径随波长的变化均小于0.2,波长的80%的能量集中在Φ6 μm范围内,波长各视场在特征频率50 lp/mm处的光学传递函数均大于0.5。整个光学系统具有结构简单、像差校正能力强、结构尺寸较小的优点。     

超短脉冲激光瞄准装置光学系统设计

为了提高超短脉冲激光的瞄准精度,基于自准直原理提出瞄准装置光学系统。以670 nm光纤耦合激光器为光源,设计指示光准直、扩束光学系统,准直光的不平行度达到3.2,设计焦距为350 mm,相对孔径1/5,离轴量50 mm的主激光离轴抛物面镜,其成像质量达到衍射极限,基于准直束光学系统和离轴抛物面镜,设计可适应670 nm和800 nm两种波长的20和100的瞄准和监测成像光学系统。提出一种小孔准直的安装调试方法,以指示光进行实验验证,结果表明:设计的光学系统成像光斑均匀,其物方分辨率达到4.1 m。     

紫外宽光谱大相对孔径光学系统设计

现有大部分紫外光学镜头的工作带宽较窄,紫外镜头的材料相对较少,镜头的紫外色差校正困难,导致其应用适应性降低.采用负正透镜交叠分布与类双高斯对称式结构形式,并利用熔石英材料和氟化钙材料本身的宽光谱透过性,设计了一种兼具大相对孔径、宽视场和高分辨率的紫外宽光谱光学系统.该系统的工作波长范围为240 nm～360 nm,紫外...     

极紫外投影光刻原理装置的集成研究

论述了光刻技术发展的历程，趋势和极紫外投影光刻技术的特性，并介绍了极紫外投影光刻原理装置的研制工作，该装置由激光等离子体光源,掠入射椭球聚光镜，透射掩模，施瓦茨微缩投影物镜及相应的真空系统组成，其工作波长为13nm，在直径为0．1mm的像方视场内设计分辨率优于0．1um。     

Subwavelength optical imaging through a metallic nanorod array

We propose a subwavelength imaging system without a lens or a mirror but with an array of metallic nanorods. The near-field components of dipole sources were plasmonically transferred through the rod array to reproduce the source distribution in the other side. We calculated the field distribution at the different planes of imaging process using the finite-difference time-domain algorithm and found that the spatial resolution was 40 nm given by the rod size and spacing. A typical configuration is a hexagonal arrangement of silver rods of 50 nm height and 20 nm diameter. We also show that the image formation highly depends on the coherence and the polarization of the source distribution and the source-array distance.