微柱状CsI闪烁薄膜热蒸发生长工艺

采用真空热蒸发法在石英玻璃基片上制备了具有特殊微柱状结构的碘化铯闪烁薄膜。运用扫描电子显微镜、X射线衍射仪和荧光光谱仪分别对碘化铯薄膜的形貌、结构及发光性能等进行了表征与分析。结果表明：在基片温度为260 ℃、沉积速率为3 nm·s-1时,所生长的碘化铯薄膜具有理想的微柱形貌、沿（110）晶面的择优取向和良好的透射性能;紫外光激发下,发射主峰为 438 nm,X射线激发下,发射主峰为315 nm,说明短波段发射峰需要的激发能量较高,而长波段发射峰对紫外光激发更为敏感。     

用电子束热蒸发技术制备ZnO薄膜

本文报道了用电子束热蒸发技术制备ZnO薄膜,薄膜具有（002）取向,通过电子扫描显微镜确认晶粒大小在150nm左右,现有的薄膜在525nm处有强的光致发光。     

柱状ZnO阵列薄膜的生长及其发光特性

采用一种设备简单、原料低廉的新型方法，在镀有ZnO先驱薄膜的(0001)蓝宝石上利用水热 法制备出了柱状ZnO阵列薄膜.用扫描电镜(SEM)，X射线衍射(XRD)对样品的形貌和结构进行 了表征，结果显示ZnO薄膜为柱状阵列，基于蓝宝石衬底沿c轴择优生长，且(0004)摇摆曲线 半高宽度(FWHM)约为1.8°.此ZnO阵列薄膜具有很强的紫外发射光谱(PL). 关键词： 柱状ZnO阵列薄膜 水热法 (0001)蓝宝石 PL谱     

倾斜式生长ZnS纳米柱状薄膜及其透射性能的研究

采用倾斜式生长的方法,在本底真空为3×10-4 Pa,生长率为0.2 nm·s-1的条件下,通过改变衬底的法线方向与入射粒子流的夹角α,在ITO导电玻璃衬底上制备了ZnS纳米薄膜。在α=80°和85°时,样品的Ｘ射线衍射谱证实了不同倾斜角时所制备薄膜中均有纳米ZnS晶体形成,扫描电子显微镜(SEM)图像显示,所形成的薄膜均呈现出了柱状结构,并且倾斜角为85°时所得到的纳米柱直径大于80°时所得结果;在α=0°时,相应测量结果表明,虽然在不同衬底上也形成了纳米ZnS晶体薄膜,但并未见柱状结构,而是形成了一层均匀且致密的薄膜。对两种薄膜结构的生长动力学过程作了分析。ITO衬底上薄膜的透射光谱表明ZnS柱状薄膜能够提高可见光的透过率,因此对柱状ZnS纳米薄膜的研究将有利于提高电致发光器件的发光效率。     

热蒸发法Zn／ZnO叶状微米结构自组装生长及其发光特性

采用热蒸发法在ZnO缓冲层覆盖着Si衬底上合成了2D叶状的Zn晶枝结构,Zn的晶枝长度约为几十微米,厚度约为200nm,随后Zn晶枝在O2的气氛下热处理,在晶枝表面获得纤细、均匀的ZnO纳米线。晶枝按照无催化、自组装、汽相生长模式生长,晶枝最快生长方向是沿着载气气流的方向释放凝固潜热,XRD分析结果结果显示了Zn纳米线具有六角纤锌矿结构,Zn/ZnO的发光谱显示,在380nm处有一弱的UV近带边发射和中心在505nm处的强绿光发射,绿光发射归因于施主/受主对之间的辐射跃迁。     

热蒸发YbF3薄膜的机械特性

 实验研究了热蒸发YbF₃薄膜在大气中的应力和附着力。利用Veeco干涉仪,测试了各种工艺条件下单层YbF₃薄膜的应力。结果发现:YbF₃薄膜的残余应力为张应力,热应力在残余应力中的比重较大;沉积方式对薄膜应力的影响不大;薄膜应力在大气中有一个释放的过程。热处理后,YbF₃薄膜应力增大。     

热蒸发法制备的球棒状氧化锌晶体的形貌及生长过程

在不用催化剂的条件下,通过热蒸发锌粉的方法,一种新颖的球棒状的氧化锌纳米结构被沉积在硅基片上.每一根球棒状的氧化锌纳米棒("纳米球棒")由三部分构成,分别是六边形"球棒头"、"球棒把手"以及一个连接过渡的部分.高分辨率透射电镜和选区电子衍射结果表明,纳米棒呈单晶特性,沿着[0001]方向择优生长.根据对实验结果的分析,纳米球棒的生长过程可以利用气-固生长机制进行解释,合理地提出其生长模型.     

温度条件对反应电子束蒸发制备TiO2薄膜结构和性能的影响

研究基片温度(120～300 ℃)和热处理温度(400℃)对电子束蒸发TiO₂薄膜的结构和光学性能的影响.XRD分析表明,在120 ℃, 200 ℃和300 ℃的普通玻璃基片上采用电子枪加热蒸发制备的TiO₂薄膜具有非晶态结构,沉积态薄膜经过400 ℃保温1 h的热处理后得到的相为具有(004)取向的锐钛矿相,晶粒大小在3.6～8.1 nm之间.透射谱分析表明,薄膜的折射率随着基片温度的升高而增加;热处理后,薄膜的折射率也相应提高,其原因来自于薄膜的晶化.     

热沉积法制备纳米二硫化钼薄膜及其光电特性研究

以M oS2粉末为原料,以氩气为携载气体,在400～600℃温度范围内利用热蒸发方法在硅衬底表面制备了不同厚度的M oS2薄膜．利用X射线衍射和扫描电子显微镜分析了M oS2薄膜的结构和表面形貌,发现M oS2薄膜由多晶M oS2粒子组成,颗粒均匀,平均纳米颗粒尺寸约为60 nm ．利用紫外可见光光谱仪测量了其吸收特性,发现样品在720 nm附近有很强的吸收．应用霍尔效应和伏安法研究了M oS2/Si样品的接触特性和电子的运输特性,发现该异质结具有良好的整流特性,即正向电压下电流随电压呈指数增长,而在反向偏压下漏电流很小,电子迁移率可达到6．730×102 cm2/（V · s）．实验结果表明MoS2薄膜具有良好的电学特性,可用来制备晶体管和集成电路等器件．     

基于微蒸发腔制冷的大功率激光二极管制冷组件

利用节流的高压冷却介质在微蒸发腔内相变吸热,设计了一种用于大功率激光二极管制冷的封装组件。该组件采用高热导的无氧铜,用精密线切割、化学腐蚀等技术制作微蒸发腔,再通过自制的焊接设备完成制冷组件的封装。按照大功率激光二极管条的发热模型,理论上对微蒸发腔制冷组件的温度分布进行了数值模拟,结果与60 W激光二极管条的散热实验符合较好,得到制冷剂流量为23 m L/min时的热阻为0.289℃/W。     

热蒸发与离子束溅射制备LaF3薄膜的光学特性

研究了钼舟热蒸发工艺和离子束溅射方法制备的单层LaF₃薄膜的特性。首先,采用分光光度计测量了LaF₃薄膜的透射率和反射率光谱,使用不同模型拟合得出薄膜的折射率和消光系数。然后,采用应力仪测量了加热和降温过程中LaF₃薄膜的应力-温度曲线。最后,采用X射线衍射仪测试了薄膜的晶体结构。实验结果表明,热蒸发制备的LaF₃（RH LaF₃）存在折射率的不均匀性,在193 nm,其折射率和消光系数分别为1.687和5×10^-4,而离子束溅射制备的LaF₃（IBS LaF₃）折射率和消光系数分别为1.714和9×10^-4。两种薄膜表现出相反的应力状态,RH LaF₃薄膜具有张应力,而IBS LaF₃具有压应力,退火之后其压应力减小。热蒸发制备的MgF₂/LaF₃减反膜在193 nm透过率为99.4%,反射率为0.04%,离子束溅射制备的AlF₃/LaF₃减反膜透过率为99.2%,反射率为0.1%。     

Structural and optoelectronic properties of antimony tin sulphide thin films deposited by thermal evaporation techniques

Thin films of SnSb₂S₄ have been prepared on glass substrate by using thermal evaporation techniques. The films were annealed in argon gas at low pressure in sealed glass ampoules at 85 °C, 150 °C, 275 °C and 325 °C. XRD of the films reveal that the low temperature annealed films are poly crystalline while the as deposited films and high annealed films are in amorphous states. There is no adequate variation in the photoconductivity response of the amorphous and crystalline phases. The transmittance of the films is low and having no transmittance below 740 nm. The band gap calculated by ellipsometry technique is in the range of 1.82–3.1 eV. The films have n-type conductivity but the film annealed at 325 °C show p-type conductivity.     

Pulsed laser treatment of gold and black gold thin films fabricated by thermal evaporation

The effect of pulsed laser treatment of metal, and metal blacks, was studied. Gold and black gold thin films were fabricated by thermal evaporation of gold in a vacuum and nitrogen atmosphere respectively. Black gold films were grown in a nitrogen atmosphere at pressures of 200 Pa and 300 Pa. UV pulsed laser radiation (λ = 266 nm, τ = 4 ns), with fluence ranging from 1 mJ·cm⁻² to 250 mJ·cm⁻² was used for the film treatment in a vacuum and nitrogen atmosphere. The nitrogen pressure was varied up to 100 kPa. Surface structure modifications were analyzed by optical microscopy, atomic force microscopy (AFM) and scanning electron microscopy (SEM). Energy dispersive X-ray spectroscopy (EDX) was used for chemical characterization of the samples. A significant dependence of the film optical and structural properties on laser treatment conditions (laser fluence, ambient pressure and number of applied pulses) was found. The threshold for observable damage and initiation of changes of morphology for gold and black gold surfaces was determined. Distinct modifications were observed for fluences greater than 106 mJ·cm⁻² and 3.5 mJ·cm⁻² for the gold and black gold films respectively. Absorbtivity of the black gold film is found to decrease with an increase in the number of laser pulses. Microstructural and nanostructural modifications after laser treatment of the black gold film were observed. EDX analysis revealed that no impurities were introduced into the samples during both the deposition and laser treatment.      

Optical inhomogeneity of ZnS films deposited by thermal evaporation

Zinc sulfide (ZnS) films with optical thickness (reference wavelength is 620 nm) ranging from 310 to 1240 nm were deposited on quartz substrates at room temperature by a thermal evaporation system. The structure and morphology of the films were investigated by X-ray diffraction, atomic force microscopy, respectively. The optical properties of the films were determined by in situ transmittance measurements and wideband spectra photometric measurements, respectively. The experimental results show that the films exhibit cubic structure, and the intensity of the (2 2 0) diffraction peak enhances with the increase of optical thickness. Surface grain size and surface roughness increase monotonously with increasing film thickness. Refractive indices and extinction coefficients calculated by in situ transmittance measurements are well consistent with those calculated by wideband spectra photometric measurements. Both the refractive index and packing density of the film increase as the increase of film thickness, which confirms the film is positive inhomogeneous and has an expanding columnar structure. Extinction coefficients of the films increase with increasing film thickness, which results from the increase of surface roughness.     

强磁场对真空蒸镀制取Te薄膜的影响

采用强磁场下物理气相沉积方法,在单晶硅、玻璃板和聚乙烯（PET）基片上真空蒸发制取Te膜.结果显示在三种不同的基片上生长Te膜时,4 T强磁场能够加快Te膜的形核长大,增大Te膜的颗粒尺度,使晶粒〈011〉方向取向性增强. 关键词： 真空蒸镀 强磁场 晶面取向 Te薄膜     

电阻热蒸发镀膜与电子束蒸发镀膜对纳米球刻蚀方法制备二维银纳米阵列结构的影响

在使用纳米球刻蚀法制备二维银纳米点阵的过程中,使用不同的镀膜方法在同样的模板上得到了不同形貌的银纳米阵列结构.使用电阻热蒸发镀膜方法获得了六角排列的银纳米三角形阵列结构,使用电子束蒸发镀膜方法则获得了六角排列的银纳米环阵列结构.研究表明,沉积纳米粒子的粒径、表面纳米曲率效应和热能是形成不同结构形貌的纳米阵列结构的关键因素. 关键词： 银纳米阵列 电阻热蒸发 电子束蒸发 纳米球刻蚀     

基底温度对电子束蒸发制备氧化铝薄膜的影响

为了考察基底温度对氧化铝薄膜折射率以及沉积厚度的影响情况,在不同基底温度环境下,通过离子辅助电子束蒸发方式,在玻璃基底上制备了同一Tooling因子条件下所监测到相同厚度的Al2O3薄膜,利用分光光度计测量光谱透过率,依据光学薄膜相关理论,计算了基底温度在25℃～300℃范围内获得的膜层实际物理厚度为275.611 nm～348.447 nm,以及膜层折射率的变化。通过对实验结果的数值计算和曲线模拟,给出了基底温度对于薄膜的折射率和实际厚度的影响情况。