Characterization of ALCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

The atomic layer chemical vapor deposition (ALCVD) deposited Al₂O₃ and ZrO₂ films were investigated by ex situ X-ray photoelectron spectroscopy. The thickness dependence of band gap and valence band alignment was determined for these two dielectric layers. For layers thicker than 0.9 nm (Al₂O₃) or 0.6 nm (ZrO₂), the band gaps of the Al₂O₃ and ZrO₂ films deposited by ALCVD are 6.7±0.2 and 5.6±0.2 eV, respectively. The valence band offsets at the Al₂O₃/Si and ZrO₂/Si interface are determined to be 2.9±0.2 and 2.5±0.2 eV, respectively. Finally, the escape depths of Al 2p in Al₂O₃ and Zr 3p3 in ZrO₂ are 2.7 and 2.0 nm, respectively.     

Optical Properties of Bi2O3-TeO2-B2O3 Glasses

Glasses of the Bi₂O₃-TeO₂-B₂O₃ ternary system were developed and their linear and nonlinear optical properties were investigated. The absorption edges of these glasses were found to be 367-384 nm with a good transmittance in visible wavelength, although they exhibit the refractive indices as high as 1.98-2.12 at 633 nm. The absorption edges are quite steep and they are analyzed by the Urbach theory. The obtained Urbach energies of these glasses are 73-79 meV which are comparable to silica glasses. The high refractive index and its glass composition dependency are discussed according to the basics of the electronic polarizability and optical basicity. The high third order nonlinear susceptibility χ⁽³⁾ = 2.0 × 10^− 12 esu at 800 nm was also obtained in the 36Bi₂O₃-18TeO₂-46B₂O₃ glass.     

Characterisation of ALCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

Al₂O₃ and ZrO₂ mixtures for gate dielectrics have been investigated as replacements for silicon dioxide aiming to reduce the gate leakage current and reliability in future CMOS devices. Al₂O₃ and ZrO₂ films were deposited by atomic layer chemical vapor deposition (ALCVD) on HF dipped silicon wafers. The growth behavior has been characterized structurally and electrically. ALCVD growth of ZrO₂ on a hydrogen terminated silicon surface yields films with deteriorated electrical properties due to the uncontrolled formation of interfacial oxide while decent interfaces are obtained in the case of Al₂O₃. Another concern with respect to reliability aspects is the relatively low crystallization temperature of amorphous high-k materials deposited by ALCVD. In order to maintain the amorphous structure at high temperatures needed for dopant activation in the source drain regions of CMOS devices, binary Al/Zr compounds and laminated stacks of thin Al₂O₃ and ZrO₂ films were deposited. X-ray diffraction and transmission electron microscope analysis show that the crystallization temperature can be increased dramatically by using a mixed oxide approach. Electrical characterization shows orders of leakage current reduction at 1.1-1.7 nm of equivalent oxide thickness. The permittivity of the deposited films is determined by combining quantum mechanically corrected capacitance voltage measurements with structural analysis by transmission electron microscope, X-ray reflectivity, Rutherford backscattering, X-ray photoelectron spectroscopy, and inductively coupled plasma optical emission spectroscopy. The k-values are discussed with respect to formation of interfacial oxide and possible silicate formation.     

The dielectric behavior of a thermoelectric treated B2O3-Li2O-Nb2O5 glass

A transparent glass with the composition 60B₂O₃-30Li₂O-10Nb₂O₅ (mol%) was prepared by the melt-quenching technique. Glass-ceramics, containing LiNbO₃ ferroelectric crystallites, were obtained by heat-treatment (HT) above 500 °C, with and without the presence of an external electric field. The dielectric properties of the glass and glass-ceramic were investigated, as a function of temperature (270-315 K), in the 10 mHz-32 MHz frequency range. The presence of an external electric field, during the heating process, improves the formation of LiNbO₃ crystallites. The rise of the treatment temperature and the applied field, during the heat-treatment, leads to a decrease in the dc electric conductivity (σ_dc), indicating a decrease of the charge carriers number. The dielectric permittivity (ε′) values (300 K;1 kHz) are between 16.25 and 18.83, with the exception of the 550 °C HT sample that presents a ε′ value of 11.25. An electric equivalent circuit composed by an R in parallel with a CPE element was used to adjust the dielectric data. The results reflect the important role carried out by the heat-treatment and the electric field during the HT in the electric properties of glass-ceramics.     

EPR study of RLi2O.V2O5, RNa2O.V2O5, RCaO.V2O5, and RBaO.V2O5 modified vanadate glass systems

Experimental EPR spectra in several modified vanadate glass systems reveal hyperfine structure (hfs) lines whose widths vary with the molar ratio of modifier to vanadium pentoxide, R. In the RNa₂O.V₂O₅ system, for example, hfs lines show no resolution at low R values (near 0.1); by contrast, these lines exhibit dramatic narrowing as R approaches 0.5. In the model proposed here, this narrowing is due to an increase in hopping time for small polarons associated with V⁴⁺ ions in these systems. Increases in polaron hopping times are accompanied by increases in electron spin-spin relaxation times T₂'s, and, an associated narrowing of EPR linewidths. Experiments confirm that spectral widths are limited by electron T₂'s due to the fact that EPR linewidths do not vary with temperature down to 4.2 K. Resolved spectra in RNa₂O.V₂O₅ at R = 0.5 reveal a hyperfine coupling parameter of 0.0177 ± 0.0008 T, corresponding to an upper-limit polaron hopping frequency of 487 ± 20 MHz. By similar analyses, the systems of RCaO.V₂O₅, RBaO.V₂O₅, and RLi₂O.V₂O₅ exhibit comparable polaron hopping frequencies limits of 480 ± 20 MHz, 469 ± 20 MHz, and 468 ± 20 MHz, respectively, when R is near 1.0. In addition to the relaxation effects discussed here, results of modeling of resolved spectra to obtain hyperfine coupling constants A_|| and A_┴, and g_┴ values g_|| and g_┴ are presented and discussed.     

Effects of Nb2O5 Replacement by Er2O3 on elastic and structural properties of 75TeO2-(10 − x)Nb2O5-15ZnO-(x)Er2O3 glass

Tellurite 75TeO₂-(10 − x)Nb₂O₅-15ZnO-(x)Er₂O₃; (x = 0.0-2.5 mol%) glass system with concurrent reduction of Nb₂O₅ and Er₂O₃ addition have been prepared by melt-quenching method. Elastic properties together with structural properties of the glasses were investigated by measuring both longitudinal and shear velocities using the pulse-echo-overlap technique at 5 MHz and Fourier Transform Infrared (FTIR) spectroscopy, respectively. Shear velocity, shear modulus, Young's modulus and Debye temperature were observed to initially decrease at x = 0.5 mol% but remained constant between x = 1.0 mol% to x = 2.0 mol%, before increasing back with Er₂O₃ addition at x = 2.5 mol%. The initial drop in shear velocity and related elastic moduli observed at x = 0.5 mol% were suggested to be due to weakening of glass network rigidity as a result of increase in non-bridging oxygen (NBO) ions as a consequence of Nb₂O₅ reduction. The near constant values of shear velocity, elastic moduli, Debye temperature, hardness and Poisson's ratio between x = 0.5 mol% to x = 2.0 mol% were suggested to be due to competition between bridging oxygen (BO) and NBO ions in the glass network as Er₂O₃ gradually compensated for Nb₂O₅. Further addition of Er₂O₃ (x > 2.0 mol%) seems to further reduce NBO leading to improved rigidity of the glass network causing a large increase of ultrasonic velocity (v_L and v_S) and related elastic moduli at x = 2.5 mol%. FTIR analysis on NbO₆ octahedral, TeO₄ trigonal bipyramid (tbp) and TeO₃ trigonal pyramid (tp) absorption peaks confirmed the initial formation of NBO ions at x = 0.5 mol% followed by NBO/BO competition at x = 0.5-2.0 mol%. Appearance of ZnO₄ tetrahedra and increase in intensity of TeO₄ tbp absorption peaks at x = 2.0 mol% and x = 2.5 mol% indicate increase in formation of BO.     

Bioactive glasses in the system CaO-B2O3-P2O5: Preparation, structural study and in vitro evaluation

Glasses in the system x B₂O₃(1 − x) [y CaO P₂O₅], (x = 0, 0.1, 0.2, 0.3, y = 2, 2.6, 3, 4, 5) have been prepared by fast quenching of high temperature melts. The presence of B₂O₃ affected the glass forming ability, allowing the preparation of calcium phosphate glasses with y ? 2.6. The structure of glasses was analyzed by μ-Raman and infrared spectroscopy. The analysis indicated that the glass network is dominated by highly charged species from phosphate tetrahedra with 3 (pyro) or 4 (ortho) NBOs, while the boron atoms are incorporated mainly in 3 coordinated sites in the form of B∅₃ or B∅₂O⁻ units. A small fraction of units was also evident from the spectra analysis of glasses with high CaO content. All calcium borophosphate glasses exhibited bioactivity after soaking in SBF solution within a few days. This was observed by μ-Raman and SEM microscopy, while XRD patterns clearly revealed growth of hydroxyapatite phase. The presence of boron in the glass network has a catalytic effect at favoring bioactivity of the otherwise bioinert calcium phosphate glasses.     

Dielectric analysis of tungsten-phosphoniobate 20A2O-30WO3 -10Nb2O5 -40P2O5 (A = Li, Na) glass-ceramics

New phosphate glasses of the quaternary system A₂O-Nb₂O₅-WO₃-P₂O₅, where X = Li and Na were prepared by the melt-quenching method. The introduction of WO₃ in the glass composition was based on the proposal of analysing the effect of the diminishing of the molar amount of the alkaline oxide and thus decreasing the molar ratio between network modifiers and network formers (M/F).In the present work we present the preparation of 20A₂O-30WO₃-10Nb₂O₅-40P₂O₅ (A = Li, Na) transparent glasses. These glasses were heat-treated in air, at 550 °C and 650 °C for 4 h. The structure of the obtained samples was studied by X-ray powder diffraction (XRD) and Raman spectroscopy and the morphology by scanning electron microscopy (SEM). The dc (σ_dc), ac (σ_ac) conductivity and dielectric spectroscopy measurements were performed in the function of the temperature and were related with the structural changes of the glass structures.     

Spectroscopic properties of Er-doped Na2O-Sb2O3-B2O3-SiO2 glasses

Spectroscopic properties of Er³⁺-doped Na₂O-Sb₂O₃-B₂O₃-SiO₂ glasses have been investigated for developing 1.5-μm broadband fiber amplifiers. An intense 1.5-μm near infrared emission with a broad full width at half maximum (FWHM) of 88 nm has been obtained for Er³⁺-doped 5Na₂O-20Sb₂O₃-35B₂O₃-40SiO₂ glass upon excitation with a 980 nm laser diode. The obtained emission cross-section of the ⁴I_13/2 → ⁴I_15/2 transition and the lifetime of the ⁴I_13/2 level of Er³⁺ ions are 6.8 × 10⁻²¹ cm² and 0.36 ms, respectively. It is noted that the product of the emission cross-section and the FWHM of the glass, σ_e × FWHM, is as great as 598.4 × 10⁻²¹ cm² nm, which is comparable or higher than that of Er³⁺-doped bismuth-based and tellurite-based glasses. These special optical properties encourage in identifying them as important materials for potential applications in high performance optics and optical communication networks.     

Tunneling in sub-5 nm La2O3 films deposited by E-beam evaporation

We investigate the leakage current in ultrathin (sub-5 nm) La₂O₃ dielectric films deposited on n-Si (1 0 0) substrates by electron-beam evaporation and annealed in situ in ultra-high vacuum conditions. We show that simple tunneling models both for the direct and Fowler-Nordheim conduction regimes can accurately reproduce the measured current-voltage characteristics over a wide voltage range. In the latter regime, it is shown the importance of considering the series resistance effect to account for the shape of the characteristics. We propose a method to obtain the series resistance’s value based on the linearization of the Fowler-Nordheim plot. Some experimental features in combination with an exploratory analysis of the fitting parameters seem to indicate that the current flow through the structure is mostly localized, which is attributed to the existence of thickness non-uniformities in the oxide layer. In addition, we show that the application of electrical stress creates traps or defects within the insulator that leads to a progressive increase of the leakage current and to a change of the dominant conduction mechanism at the lowest biases.     

Phase separation and crystallization in the system SiO2-Al2O3-P2O5-B2O3-Na2O glasses

The phase separation and crystallization behavior in the system (80 − X)SiO₂ · X(Al₂O₃ + P₂O₅) · 5B₂O₃ · 15Na₂O (mol%) glasses was investigated. Glasses with X = 20 and 30 phase separated into two phases, one of which is rich in Al₂O₃-P₂O₅-SiO₂ and forms a continuous phase. Glasses containing a larger amount of Al₂O₃-P₂O₅ (X = 40 and 50) readily crystallize and precipitates tridymite type AlPO₄ crystals. It is estimated that the phase separation occurs forming continuous Al₂O₃-P₂O₅-SiO₂ phase at first, and then tridymite type AlPO₄ crystals precipitate and grow in this phase. Highly transparent glass-ceramics comparable to glass can be successfully obtained by controlling heat treatment precisely. The crystal size and percent crystallinity of these transparent glass-ceramics are 20-30 nm and about 50%, respectively.     

Structure and growth morphology of Gd2O3-doped CeO2 thin films

Gd₂O₃-doped CeO₂ (Gd_0.1Ce_0.9O_1.95, GDC) thin films were synthesized on (1 0 0) Si single crystal substrates by a reactive radio frequency magnetron sputtering technique. Structures and surface morphologies were characterized by X-ray diffraction (XRD), Atomic Force Microscopy (AFM) and one-dimensional power spectral density (1DPSD) analysis. The XRD patterns indicated that, in the temperature range of 200–700 °C, f.c.c. structured GDC thin films were formed with growth orientations varying with temperature—random growth at 200 °C, (2 2 0) textures at 300–600 °C and (1 1 1) texture at 700 °C. GDC film synthesized at 200 °C had the smoothest surface with roughness of R_rms=0.973 nm. Its 1DPSD plot was characterized with a constant part at the low frequencies and a part at the high frequencies that could be fitted by the f^−2.4 power law decay. Such surface feature and scaling behavior were probably caused by the high deposition rate and random growth in the GDC film at this temperature. At higher temperatures (300–700 °C), however, an intermediate frequency slope (−γ₂≈−2) appeared in the 1DPSD plots between the low frequency constant part and the high frequency part fitted by f⁻⁴ power law decay, which indicated a roughing mechanism dominated by crystallographic orientation growth that caused much rougher surfaces in GDC films (R_rms>4 nm).     

Structure and properties of glasses in ZnO-P2O5-TeO2 system

Glasses in the ternary ZnO-P₂O₅-TeO₂ system were prepared and studied in two compositional series (100 − x)[0.5ZnO-0.5P₂O₅]-xTeO₂ (X-series) and 50ZnO-(50 − y)P₂O₅-yTeO₂ (Y-series) within the concentration range of x = 0-60 and y = 0-40 mol% TeO₂. Their structure was studied by Raman and ³¹P MAS NMR spectroscopies. The incorporation of TeO_x units into the structural network is associated with the depolymerisation of phosphate chain structure as revealed by both methods. At a high TeO₂ content isolated PO₄ tetrahedra are formed in the structure of glass series Y, while diphosphate O₃P-O-PO₃ groups are present in the structure of the glass series X. In the structure of glass series Y tellurium atoms form predominantly TeO₃ trigonal pyramids, whereas in the X glass series TeO₄ trigonal bipyramids prevail in the glass structure. The addition of TeO₂ to the parent zinc metaphosphate glass results in a decrease of glass transition temperature in both compositional series associated with the replacement of stronger P―O bonds by weaker Te―O bonds.     

Electrical conductivity of NbN-SiO2 films obtained by ammonolysis of Nb2O5-SiO2 sol-gel derived coatings

The studies of electrical conductivity of NbN-SiO₂ films are reported. To obtain these films, sol-gel derived xNb₂O₅-(100 − x)SiO₂ (where x = 100, 90, 80, 70, 60, 50 mol%) coatings were nitrided at 1200 °C. The nitridation process leads to the formation of some disordered structures, with NbN metallic grains dispersed in insulating SiO₂ matrix. The structure of the samples was studied using X-ray diffraction (XRD) and atomic force microscopy (AFM). The electrical conductivity was measured with the conventional four-terminal method in the temperature range from 5 to 280 K. The superconducting transition was not observed even for the sample that does not contain silica. All the samples exhibit negative temperature coefficient of resistivity. The results of conductivity versus temperature may be described on the grounds of a model proposed for a weakly disordered system.     

Thermo-optic properties of B2O3 doped Li2O-Al2O3-SiO2 glass-ceramics

Reduction in the temperature coefficient of the optical path length, dS/dT of Li₂O-Al₂O₃-SiO₂ glass-ceramics with near-zero thermal expansion coefficient was attempted using control of the temperature coefficient of electronic polarizability, ?, and the thermal expansion coefficient, α. The dS/dT value of 2.6 mol% B₂O₃-doped glass-ceramic was 12.5  × 10⁻⁶/°C, which was 0.9 ×  10⁻⁶/°C smaller than that of B₂O₃-free glass-ceramic. On the other hand, reduction in dS/dT through B₂O₃ doping was not confirmed in precursor glasses. Results showed that reduction in dS/dT of the glass-ceramic through B₂O₃ doping is caused by the reduction in ?. The reduction in ? from B₂O₃ doping was probably attributable to numerical reduction in non-bridging oxide ions with larger ? value by the concentration of boron ions in the residual glass phase. In addition, application of hydrostatic pressure during crystallization was effective to inhibit precipitation of β-spodumene solid solution, which thereby decreases dS/dT. The dS/dT value of B₂O₃-doped glass-ceramic crystallized under 196 MPa was 11.7 ×  10⁻⁶/°C. That value was slightly larger than that of silica glass. The α value of this glass-ceramic was smaller than that of silica glass.     

Spectral properties of PbO-P2O5 glasses

The optical absorption spectra of xPbO-(100 − x) P₂O₅ glasses where x = 5, 10, 15, 20, 25, and 30 is reported. The spectral absorption of these glasses was measured in the spectral range 300-900 nm at room temperature. Optical absorption spectra show that the absorption edge has a tail extending towards lower energies. The edge shifts nearly linearly towards higher energies with increasing PbO content. The degree of the edge shift was found to depend on the PbO content and is mostly related to the structural rearrangement and the relative concentrations of the glass basic units. The optical energy gap increases, from 2.55 to 3.05 eV by increasing PbO content from 5 to 30 mol%. The width of the localized states is decreased by increasing PbO content.     

Structure and electrical conductivity of new Li2O-CeO2-B2O3 glasses

Fourier transformation infrared spectra, density and DC electrical conductivity of 30Li₂O · xCeO₂⋅(70 − x)B₂O₃ glasses, where x ranged between 0 and 15 mol%, have been investigated. The results suggested that CeO₂ plays the role of network modifier up to 7.5 mol%. At higher concentrations it plays a dual role; where most of ceria plays the role of network former. The density was observed to increase with increasing CeO₂ content. The effect on density of the oxides in the glasses investigated is in the succession: B₂O₃ < Li₂O < CeO₂. Most of CeO₂ content was found to be associated with B₂O₃ network to convert BO₃ into B O₄⁻ units. The contribution of Li⁺ ions in the conduction process is much more than that due to small polarons. The conductivity of the glasses is mostly controlled by the Li⁺ ions concentration rather than the activation energy for CeO₂ > 5 mol%. Lower than 5 mol% CeO₂ the conductivity is controlled by both factors. The dependence of W on BO₄⁻ content supports the idea of ionic conduction in these glasses.     

Structural study of PbO-MoO3-P2O5 glasses by Raman and NMR spectroscopy

Glasses in the ternary system PbO-MoO₃-P₂O₅ were prepared in three compositional series (100 − x)[0.5PbO-0.5P₂O₅]-xMoO₃ (A), 50PbO-yMoO₃-(50 − y)P₂O₅ (B) and (50 − z)PbO-xMoO₃-50P₂O₅ (C) and their structure was studied by Raman and ³¹P NMR spectroscopies. In the compositional series (100 − x)[0.5PbO-0.5P₂O₅]-xMoO₃ homogeneous glasses were prepared in the concentration region of 0-70 mol% MoO₃. Their glass transition temperature increases with increasing MoO₃ content having a maximum at x = 50 mol% MoO₃. ³¹P MAS NMR spectra reveal that in the glass series (A) the incorporation of MoO₃ results in the shortening of phosphate chains and gradual transformation Q² units into Q² and Q⁰ units, prevailing in glasses with a high MoO₃ content. Octahedral structural units MoO₆ dominate in most glass compositions and they are present also in the structure of Pb(MoO₂)₂(PO₄)₂ compound corresponding to the glass composition 50Pb(PO₃)₂-50MoO₃. The analysis of Raman spectra of glasses of the (B) series with a high MoO₃ content showed the transformation of octahedral MoO₆ units into tetrahedral MoO₄ units.     

Fabrication and properties of novel low-melting glasses in the ternary system ZnO-Sb2O3-P2O5

Glasses in the ternary system ZnO-Sb₂O₃-P₂O₅ were investigated as potential alternatives to lead based glasses for low temperature applications. The glass-forming region of ZnO-Sb₂O₃-P₂O₅ system has been determined. Structure and properties of the glasses with the composition (60 − x)ZnO-xSb₂O₃-40P₂O₅ were characterized by infrared spectra (IR), differential thermal analysis (DTA) and X-ray diffraction (XRD). The results of IR indicated the role of Sb³⁺ as participant in glass network structure, which was supported by the monotonic and remarkable increase of density (ρ) and molar volume (V_M) with increasing Sb₂O₃ content. Glass transition temperature (T_g) and thermal stability decreased, and coefficient of thermal expansion (α) increased with the substitution of Sb₂O₃ for ZnO in the range of 0-50 mol%. XRD pattern of the heat treated glass containing 30 mol% Sb₂O₃ indicated that the structure of antimony-phosphate becomes dominant. The improved water durability of these glasses is consistent with the replacement of easily hydrated phosphate chains by corrosion resistant P-O-Sb bonds. The glasses containing ?30 mol% Sb₂O₃ possess lower T_g (<400 °C) and better water durability, which could be alternatives to lead based glasses for practical applications with further composition improvement.     

One-step fabrication of Fe2O3/Ag core-shell composite nanoparticles at low temperature

The Fe₂O₃/Ag core-shell composite nanoparticles were successfully prepared via a simple method at low temperature. X-ray diffraction data revealed the formation of core-shell composite nanoparticles, with Fe₂O₃ as the core and silver as the shell. The results from the transmission electron microscopy and scan electron microscopy further indicated that the composite nanoparticles were spherical with a core diameter and shell thickness of 26.0 nm and 13.5 nm, respectively. Magnetic measurements showed that the composite nanoparticles exhibited a typical ferromagnetic behavior, a specific saturation magnetization of 0.95 emu/g and an intrinsic coercivity of 104.0 Oe at room temperature. For a standard two-probe analysis at room temperature, the composite nanoparticles showed a typical conductive behavior and its conductivity was about 3.41 S/m. Moreover, this present synthesis method of Fe₂O₃/Ag core-shell composite nanoparticles shows an easy processing and does not need high-temperature calcining to attain the final product, which can be applied in a variety of areas, including catalysis, medicine, photonics, and new functional device assemblies.