Acoustic energy harvesting using an electromechanical Helmholtz resonator

This paper presents the development of an acoustic energy harvester using an electromechanical Helmholtz resonator (EMHR). The EMHR consists of an orifice, cavity, and a piezoelectric diaphragm. Acoustic energy is converted to mechanical energy when sound incident on the orifice generates an oscillatory pressure in the cavity, which in turns causes the vibration of the diaphragm. The conversion of acoustic energy to electrical energy is achieved via piezoelectric transduction in the diaphragm of the EMHR. Moreover, the diaphragm is coupled with energy reclamation circuitry to increase the efficiency of the energy conversion. Lumped element modeling of the EMHR is used to provide physical insight into the coupled energy domain dynamics governing the energy reclamation process. The feasibility of acoustic energy reclamation using an EMHR is demonstrated in a plane wave tube for two power converter topologies. The first is comprised of only a rectifier, and the second uses a rectifier connected to a flyback converter to improve load matching. Experimental results indicate that approximately 30 mW of output power is harvested for an incident sound pressure level of 160 dB with a flyback converter. Such power level is sufficient to power a variety of low power electronic devices.     

Helmholtz水声换能器弹性壁液腔谐振频率研究

针对传统Helmholtz水声换能器设计中刚性壁假设的局限性,将Helmholtz腔体的弹性计入到液腔谐振频率计算中,实现低频弹性Helmholtz水声换能器液腔谐振频率精确设计.基于细长圆柱壳腔体的低频集中参数模型,导出了腔体弹性引入的附加声阻抗表达式,得到了弹性壁条件下Helmholtz水声换能器等效电路图,给出了考虑了末端修正的弹性壁Helmholtz共振腔液腔谐振频率计算公式.利用ANSYS软件建立了算例模型,仿真分析了不同材质、半径、长度时的Helmholtz共振腔液腔谐振频率.结果对比表明弹性理论值与仿真值符合得很好,相比起传统的刚性壁理论计算结果,本文的弹性壁理论得出的液腔谐振频率值有所降低,与真实情况更加接近.本文的结论可以为精确设计低频弹性Helmholtz水声换能器提供理论支持.     

Electroacoustic absorbers: bridging the gap between shunt loudspeakers and active sound absorption

The acoustic impedance at the diaphragm of an electroacoustic transducer can be varied using a range of basic electrical control strategies, amongst which are electrical shunt circuits. These passive shunt techniques are compared to active acoustic feedback techniques for controlling the acoustic impedance of an electroacoustic transducer. The formulation of feedback-based acoustic impedance control reveals formal analogies with shunt strategies, and highlights an original method for synthesizing electric networks ("shunts") with positive or negative components, bridging the gap between passive and active acoustic impedance control. This paper describes the theory unifying all these passive and active acoustic impedance control strategies, introducing the concept of electroacoustic absorbers. The equivalence between shunts and active control is first formalized through the introduction of a one-degree-of-freedom acoustic resonator accounting for both electric shunts and acoustic feedbacks. Conversely, electric networks mimicking the performances of active feedback techniques are introduced, identifying shunts with active impedance control. Simulated acoustic performances are presented, with an emphasis on formal analogies between the different control techniques. Examples of electric shunts are proposed for active sound absorption. Experimental assessments are then presented, and the paper concludes with a general discussion on the concept and potential improvements.     

Suppression of Helmholtz resonance using inside acoustic liner

When a Helmholtz resonator is exposed to grazing flow, an unstable shear layer at the opening can cause the occurrence of acoustic resonance under appropriate conditions. In this paper, in order to suppress the flow-induced resonance, the effects of inside acoustic liners placed on the side wall or the bottom of a Helmholtz resonator are investigated. Based on the one-dimensional sound propagation theory, the time domain impedance model of a Helmholtz resonator with inside acoustic liner is derived, and then combined with a discrete vortex model the resonant behavior of the resonator under grazing flow is simulated. Besides, an experiment is conducted to validate the present model, showing significant reduction of the peak sound pressure level achieved by the use of the side-wall liners. And the simulation results match reasonably well with the experimental data. The present results reveal that the inside acoustic liner can not only absorb the resonant sound pressure, but also suppress the fluctuation motion of the shear layer over the opening of the resonator. In all, the impact of the acoustic liners is to dampen the instability of the flow-acoustic coupled system. This demonstrates that it is a convenient and effective method for suppressing Helmholtz resonance by using inside acoustic liner.     

水下圆柱形Helmholtz共振器的声学特性分析

理论分析了水下圆柱形Helmholtz共振器的声学特性. 综合考虑壁面弹性和辐射阻抗的影响,基于电-声类比的基本原理,建立了较为完善的水下圆柱形Helmholtz共振器的低频集中参量模型. 利用电路分析的基本方法,得到了系统的输入阻抗和声压传递函数表达式. 仿真分析了主要结构参数对共振器声学特性的影响,得出了一些有意义的结论. 在充水驻波罐中对自制的Helmholtz共振器进行了测量,并对实验结果进行了详细地误差分析. 去除压电水听器对测量结果的影响后,实验与仿真结果基本一致,从而验证了理论分析的正确性. 关键词： Helmholtz共振器 共振频率 传递函数 辐射阻抗     

Air-coupled MUMPs capacitive micromachined ultrasonic transducers with resonant cavities

This work reports performance improvements of air-coupled capacitive micromachined ultrasonic transducers (CMUTs) using resonant cavities. In order to perform this work, we have designed and manufactured a CMUT employing multi-user microelectromechanical systems (MEMS) processes (MUMPs). The transducer was designed using Helmholtz resonator principles. This was characterised by the dimensions of the cavity and several acoustic ports, which had the form of holes in the CMUT plate. The MUMPs process has the advantage of being low cost which allows the manufacture of economic prototypes. In this paper we show the effects of the resonant cavities and acoustic ports in CMUTs using laser Doppler vibrometry and acoustical measurements. We also use Finite Element (FE) simulations in order to support experimental measurements. The results show that it is possible to enhance the output pressure and bandwidth in air by tuning the resonance frequency of the plate (f_p) with that of the Helmholtz resonator (f_H). The experimental measurements show the plate resonance along with an additional resonance in the output pressure spectrum. This appears due to the effect of the new resonant cavities in the transducer. FE simulations show an increase of 11 dB in the output pressure with respect to that of a theoretical vacuum-sealed cavity MUMPs CMUT by properly tuning the transducer. The bandwidth has been also analyzed by calculating the mechanical Q factor of the tuned CMUT. This has been estimated as 4.5 compared with 7.75 for the vacuum-sealed cavity MUMPs CMUT.     

Underwater tunable organ-pipe sound source

A highly efficient frequency-controlled sound source based on a tunable high-Q underwater acoustic resonator is described. The required spectrum width was achieved by transmitting a linear frequency-modulated signal and simultaneously tuning the resonance frequency, keeping the sound source in resonance at the instantaneous frequency of the signal transmitted. Such sound sources have applications in ocean-acoustic tomography and deep-penetration seismic tomography. Mathematical analysis and numerical simulation show the Helmholtz resonator's ability for instant resonant frequency switching and quick adjustment of its resonant frequency to the instantaneous frequency signal. The concept of a quick frequency adjustment filter is considered. The discussion includes the simplest lumped resonant source as well as the complicated distributed system of a tunable organ pipe. A numerical model of the tunable organ pipe is shown to have a form similar to a transmission line segment. This provides a general form for the principal results, which can be applied to tunable resonators of a different physical nature. The numerical simulation shows that the "state-switched" concept also works in the high-Q tunable organ pipe, and the speed of frequency sweeping in a high-Q tunable organ pipe is analyzed. The simulation results were applied to a projector design for ocean-acoustic tomography.     

Tunable bulk acoustic wave resonators with the induced piezoelectric effect in a ferroelectric

An electromechanical model of the piezoelectric effect induced in an acoustic resonator based on a ferroelectric film under the action of a dc or weak ac voltage is developed. The basic equation is obtained by expansion of the free energy in a series with respect to the electric induction and the mechanical deformation. The system of electromechanical equations for variable components of the induction and the mechanical deformation involves all linear terms along with the component of the electrostriction nonlinear with respect to the mechanical deformation. These electromechanical equations made it possible to obtain a one-dimensional approximation for the effective parameters of the material: the piezoelectric modulus and the elastic modulus as a function of the strength of the electric field applied to the acoustic layer. Expressions for the controlled electromechanical coupling coefficient and resonance frequencies of the tunable acoustic resonator are found. It is shown that the most significant parameter responsible for the tuning is the nonlinear electros-triction coefficient M, whose magnitude and sign were evaluated from the available experimental data.     

Improving low-frequency sound absorption of micro-perforated panel absorbers by using mechanical impedance plate combined with Helmholtz resonators

The traditional Micro-perforated plate (MPP) is a kind of clean and non-polluting absorption structure in the middle and high frequency and has been widely used in the field of noise control. However, the sound absorption performance is dissatisfied at low frequencies when the air-cavity depth is restricted. In this paper, a mechanical impedance plate (MIP) is introduced into the traditional MPP structure and a Helmholtz resonator is attached to the MIP. Mechanical impedance plate (MIP) provides a good absorption at low frequency by using mechanism of mechanical resonance and the acoustic energy is dissipated in the form of heat with viscoelastic material. Helmholtz resonator can fill in the defect of the poor absorption effect between the Micro-perforated plate (MPP) and the mechanical impedance plate (MIP). The acoustic impedance of the proposed sound absorber is investigated by using acoustic electric analogy method and impedance transfer method. The influence of the tube’s length of Helmholtz resonator and the number of Helmholtz resonator on the sound absorption is studied. The corresponding results are in agreement with the theoretical calculation and prove that the composite structure has the characteristics of improving the low frequency sound absorption property.     

腔壁弹性对水下小型圆柱形亥姆霍兹共振器共振频率的影响

理论和实验研究了腔壁弹性对水下小型圆柱形亥姆霍兹共振器共振频率的影响.基于电-声类比理论,建立了小型共振器的简化模型,利用电路分析方法得到了便于计算的共振频率一般表达式.分别仿真分析了共振器壁面厚度和材料对共振频率的影响,得到了不同尺寸的小型共振器的近似刚性条件.在充水驻波罐中对不同壁厚、不同材料的小型圆柱形亥姆霍兹共振器的共振频率进行了测量,实验结果较好地验证了理论分析和近似刚性条件的正确性.所得结果对小型圆柱形亥姆霍兹共振器的设计和水下应用具有较好的参考价值. 关键词： 亥姆霍兹共振器 共振频率 传递函数 辐射阻抗     

基于可调频亥姆霍兹共振器的封闭空间噪声自适应半主动控制

针对实际中声场激励频率可能发生变化的情况,研究采用自适应频率可调的亥姆霍兹共振器吸声器来跟踪激扰频率从而控制封闭空间噪声。建立了封闭声腔与亥姆霍兹共振器耦合的频域模型与时域控制模型,并给出了三种频率调谐控制算法,即亥姆霍兹共振器开口处声压幅值最小和内部声压幅值最大,以及判断内部声压幅值和开口处声压幅值的点积值趋零(点积值法)。理论分析和数值计算结果表明点积值法调频效果明显优于其它两种算法。采用并设计一种颈部面积可调的可调频亥姆霍兹共振器,利用点积值调频算法进行了单频和带宽信号激励下封闭空间噪声控制仿真和单频激励下实验研究,结果表明:点积值调频算法具有较好的频率调节性能和调节精度,并取得了理想的噪声控制效果,验证了理论模型正确性及调频算法的有效性。      

Electrical Control of the Frequencies of a Fabry–Perot Acoustic Resonator

The effect electronic tuning has on the frequency of the acoustic resonance of an acousto-optic modulator intended for active laser mode locking is studied theoretically and experimentally. The problem of exciting a Fabri–Perot acoustic resonator with a plate-like piezoelectric transducer is solved in the approximation of plane acoustic waves, with allowance for the real parameters of the HF generator and the matching elements of the transducer and the generator. Expressions for the basic electrical and acoustic parameters are obtained. Theoretical analysis confirms the frequency shift effect of acoustic resonances, observed earlier experimentally upon varying the matching electrical elements. The experiment is performed using an acousto-optic quartz cell and a lithium niobate transducer.     

The impact of the neck material on the sound absorption performance of Helmholtz resonators

Helmholtz resonators with sound absorption materials filling the neck may have an improved sound absorption capacity. In this work, parallel perforated ceramics with different perforation diameters were installed into the neck of a Helmholtz resonator to improve its acoustic impedance to simultaneously achieve a better acoustic absorption coefficient and a wider absorption bandwidth. An experimental system was built to investigate the effect of the perforation diameters on the sound absorption performance of the resonator. It is found that nonlinear effects near the resonance frequency affect the resonator?s neck mouth impedance and further its sound absorption performance significantly. For frequency range 50–500 Hz, a model of the neck mouth impedance is developed based on a revised Forchheimer relationship. The experimental results are in good agreement with the theoretical model.     

An ultra-thin acoustic metasurface with multiply resonant units

In this paper, we propose an ultra-thin acoustic metasurface constructed of multiply resonant units to manipulate reflected wavefront. As a counterpart to the Helmholtz resonator (with monopolar resonance) and membrane-type resonator (with dipolar resonance), the multiply resonator are used in metamaterials to induce strong quadrupolar resonance. Here we use the multiply resonator as a new kind of building blocks to make acoustic metasurfaces. The used multiply resonant unit is composed of solid materials, and the acoustic metasurface can work in a water background. We demonstrate that the proposed acoustic metasurface achieves good performance in anomalous reflection, focusing, and carpet cloaking. The thickness of the acoustic metasurface is about two orders of magnitude smaller than the acoustic wavelength in water. A design of unit group is further proposed to avoid the phase discretization becoming too fine in such a long-wavelength condition.     

Theoretical analysis of a quartz-enhanced photoacoustic spectroscopy sensor

Quartz-enhanced photoacoustic spectroscopy (QEPAS) sensors are based on a recent approach to photoacoustic detection which employs a quartz tuning fork as an acoustic transducer. These sensors enable detection of trace gases for air quality monitoring, industrial process control, and medical diagnostics. To detect a trace gas, modulated laser radiation is directed between the tines of a tuning fork. The optical energy absorbed by the gas results in a periodic thermal expansion which gives rise to a weak acoustic pressure wave. This pressure wave excites a resonant vibration of the tuning fork thereby generating an electrical signal via the piezoelectric effect. This paper describes a theoretical model of a QEPAS sensor. By deriving analytical solutions for the partial differential equations in the model, we obtain a formula for the piezoelectric current in terms of the optical, mechanical, and electrical parameters of the system. We use the model to calculate the optimal position of the laser beam with respect to the tuning fork and the phase of the piezoelectric current. We also show that a QEPAS transducer with a particular 32.8 kHz tuning fork is 2–3 times as sensitive as one with a 4.25 kHz tuning fork. These simulation results closely match experimental data.     

On the adjustment of Helmholtz resonators

A Helmholtz resonator is placed in a room with distinct acoustic modes, and is tuned to one of the corresponding resonant frequencies. The optimal resonator damping ratio is investigated, as a goal-dependent value. For example, minimizing reverberation time requires a different damping ratio from minimizing the sound pressure level. The optimum damping values for a Helmholtz resonator are analytically computed, and then verified by means of experimentation. Furthermore, a construction is introduced which allows for a fine adjustable setting for the eigenfrequency and the damping ratio of the resonator.     

Definition and measurement of the normalized electrical impedance of lossy piezoelectric resonators for ultrasonic transducers

Relevant equivalent circuit parameters and values of material constants of a piezoelectric resonator can be determined from measurements of its electrical input impedance as a function of frequency. The complex electrical impedance curves and the associated critical frequencies are the basis of this characterization by the piezoelectric resonance method. In this paper, the previously introduced concept of normalized electrical impedance of the lossy resonator, extended to include piezoelectric losses, is applied to the analysis of the effects of different types of intrinsic losses on peak values, bandwidths and characteristic frequencies. The resulting impedance patterns depend solely on the electromechanical coupling coefficient and the loss tangents, providing a useful tool for the analysis of low-Q resonators. The normalized impedance is experimentally evaluated from the basic data provided by an HP 4194A impedance analyser by means of specifically developed ASP programs.     

弯曲圆盘驱动的双Helmholtz共振腔换能器

使用双面同相振动的弯曲圆盘换能器驱动双Helmholtz共振腔,既放大了弯曲圆盘换能器弯曲共振频率以下频段的声输出,又利用两个Helmholtz共振腔的同相声源辐射模型实现了在Helmholtz共振频率处的"∞"字形垂直指向性,实现了低频指向性声发射。阐述了换能器实现"∞"字形低频指向性发射的机理,研究了腔体长度、金属圆片厚度及弯曲圆盘边缘简支厚度等关键结构参数对Helmholtz共振频率的影响,求解了换能器的发送电压响应、指向性等参数。依据仿真结果制作了实验样机,在消声水池中进行了电声性能测试。测试结果显示,指向性形状及液腔共振频率与仿真结果基本相符。这种由弯曲圆盘驱动的双Helmholtz共振腔水声换能器为实现水声换能器小尺寸、低频指向性发射提供了一种技术手段。      

一维亥姆霍兹共振腔声子晶体中缺陷模式的实验研究

基于亥姆霍兹共振腔单元设计并制作了一种一维局域共振型声子晶体, 针对结构中存在点缺陷的情况, 进行了实验研究. 实验结果表明, 由于点缺陷的存在, 局域共振型声禁带中出现了缺陷模式, 并且在缺陷单元周围引起了能量的局域现象, 与理论结果符合较好. 缺陷单元从两个不同的方向趋近于完美单元时, 缺陷模式分别按照不同的规律变化, 但是越靠近禁带边缘, 所局域的能量就越多. 另外, 当缺陷单元共振频率小于完美单元共振频率时, 局域能量主要集中在声波导内; 反之, 局域能量则主要集中在共振腔内. 本研究对设计新型低频声滤波装置及高声强集中装置具有一定意义. 关键词： 亥姆霍兹共振腔 声子晶体 缺陷模式 能量局域化     

体声波力传感器灵敏度的微分-综合分析法

为了分析基于应力/应变效应的体声波(BAW)力传感器的敏感机理、准确计算其灵敏度,提出了一种用于BAW力传感器灵敏度分析的微分-综合分析法。该方法借鉴了微积分的原理,在Mason等效电路模型中将一个完整的BAW谐振器替换为多个谐振器微元的并联,从而将谐振器有源区面积A上应力/应变场的有限元计算结果与压电薄膜材料的力学特性、谐振器微元的电声学特性关联起来;最后,在射频电路仿真软件中进行等效电路的综合,得到整个BAW谐振器在应力/应变场作用下的阻抗特性曲线及其串/并联谐振频率。当BAW谐振器微元的划分足够细密时,获得的灵敏度分析结果将足够精确。为了论证该方法的原理,给出了一个直观的校核案例。以一个嵌入式FBAR结构的四梁BAW加速度计表头为例,介绍了该方法用于BAW力传感器灵敏度分析的详细过程。虽然案例中只讨论了一种应力/应变型BAW力传感器的单一力敏机理,但该方法具有普适性。并且,当谐振器微元小到接近其压电材料晶格的尺度时,就能与压电薄膜的力-声-电特性的第一性原理计算结果关联起来,实现从微观材料特性到介观器件物理的多尺度计算。