磁控溅射制备Ni/Ti多层膜表面粗糙度

采用磁控溅射方法制备了周期数分别为10,30,50和75的Ni/Ti多层膜,利用X射线掠入射反射测量了多层膜表面和界面的状态,并用原子力显微镜测量了多层膜的表面粗糙度,研究了不同周期数的Ni/Ti多层膜表面粗糙度的变化规律。结果表明:Ni/Ti多层膜表面粗糙度随着膜层数增加而增加,当Ni/Ti多层膜的周期数从10变化到75时,其表面粗糙度由0.80 nm增大到1.69 nm。实验数据拟合表明:Ni/Ti多层膜表面粗糙度与周期数成3次方关系;但在周期数较小时,粗糙度与周期数成线性关系。     

聚酰亚胺薄膜表面粗糙度的影响因素

 采用热蒸发气相沉积聚合方法（VDP）制备了聚酰亚胺(PI)薄膜,研究了设备、衬底温度、升温过程和单体配比因素对PI薄膜表面形貌的影响。利用干涉显微镜和扫描电镜对薄膜表面形貌进行了分析;利用原子力显微镜测定了薄膜表面粗糙度。结果表明：设定蒸发源-衬底距离为74 cm时可成连续膜;蒸发源采用一段升温和多段升温时,膜表面均方根粗糙度分别为291.23 nm和61.99 nm;采用细筛网可防止原料的喷溅;均苯四甲酸二酐和4,4′-二氨基二苯醚（PMDA和ODA）单体沉积速率比值为0.9∶1时,膜表面均方根粗糙度值可减小至3.30 nm;沉积衬底温度保持30 ℃左右时,膜表面均方根粗糙度为4.01 nm, 随温度的上升,膜表面质量会逐渐变差。     

单晶Si表面离子束溅射沉积Co纳米薄膜的研究

采用离子束溅射沉积法，在单晶Si基片上制备了不同厚度(1—100nm)的Co纳米薄膜.利用原子力显微镜、X射线光电子能谱(XPS)仪和X射线衍射仪对不同厚度的Co纳米薄膜进行了分析和研究.结果表明：当薄膜厚度为1—10nm时，沉积颗粒形态随薄膜厚度增加将由二维生长的细长胞状过渡到多个颗粒聚集成的球状.当膜厚大于10nm时，小颗粒球聚集成大颗粒球，颗粒球呈现三维生长状态.表面粗糙度随膜厚的增加呈现先增加后减小的趋势，在膜厚为3nm时出现极值.XPS全程宽扫描和窄扫描显示：薄膜表面的元素成分为Co，化学态分别 关键词： 离子束沉积 纳米薄膜 X射线光电子能谱 X射线衍射     

Fe/Al混合膜的PLD法制备及表面分析

 采用脉冲激光气相沉积（PLD）技术制备了Fe/Al混合膜,测量了该混合膜的光电子能谱（XPS）,并采用原子力显微镜（AFM）、扫描电子显微镜（SEM）对Fe/Al混合膜作了表面分析。结果表明：Fe/Al混合膜的表面粗糙度对衬底温度有明显的依赖性, 随着衬底温度的升高,薄膜的表面逐渐变得平滑,膜层变得致密,在200 ℃衬底温度下制得了均方根（rms）粗糙度为0.154 nm、具有原子尺度光滑性的Fe/Al混合膜, 膜中Fe和Al分布比较均匀,其成分比约为1∶3,同时XPS分析也表明Fe/Al混合膜暴露在空气中后表面形成了Al₂O₃和FeO氧化层。     

PLD方法制备的纳米Fe/Al薄膜的结构及应力分析

 采用PLD方法制备了Fe/Al合金薄膜，研究了Fe/Al合金薄膜的物相、结构、应力等。研究表明薄膜的沉积速率随着衬底温度的升高而降低。原子力显微镜（AFM）图像显示，薄膜表面平整、致密且光滑，均方根粗糙度小于1 nm。等离子体发射谱（ICP）表明Fe/Al原子比为1∶1。X射线小角衍射（XRD）分析表明薄膜中的物相是Al_0.5Fe_0.5，Al_0.5Fe_0.5晶体具有简单立方结构(SC)，晶格常数为0.297 nm，平均晶粒尺寸为81.74 nm，平均微畸变为0.007 6。     

不同射频输入功率下制备的氟化类金刚石碳膜疏水性研究

以高纯石墨作靶、氩气（Ar）和三氟甲烷（CHF₃）为源气体,用反应磁控溅射法在不同射频功率下制备了氟化类金刚石碳（F-DLC）膜,并对其疏水性进行研究.双蒸水液滴与膜表面接触角的测试结果表明,所制备薄膜表面的最大水接触角可达115°左右.通过原子力显微镜获得的薄膜表面AFM图谱、拉曼光谱以及傅里叶变换红外光谱探讨了影响薄膜的疏水性的因素.结果表明,薄膜的疏水性与薄膜的表面粗糙度和表面键结构直接相关,表面粗糙度越大,疏水性越好,但与薄膜中的F含量和sp³/sp²的比值并未呈单调增加或减小的对应关系.射频输入功率影响着薄膜的沉积速率,与薄膜表面粗糙度、薄膜中芳香环单核的比例以及薄膜表面的键结构（F的接入方式）直接相关. 关键词： 疏水性 反应磁控溅射 氟化类金刚石膜 射频功率     

低能Kr+离子束诱导蓝宝石晶体实验研究

使用微波回旋共振离子源制备蓝宝石(A向)自组织纳米结构,研究不同入射角度下Kr+离子束刻蚀蓝宝石表面形成的自组织纳米结构及其形成过程.采用等离子体与离子束刻蚀设备在不同入射角度下对蓝宝石样品表面进行刻蚀并通过Taylor Surf CCI2000非接触式表面测量仪和原子力显微镜分别对刻蚀后的蓝宝石样品的刻蚀速率及表面形貌进行分析.研究表明:当离子束能量为400eV,加速电压为200V,离子束流密度为310μA/cm2时,小角度入射下,蓝宝石样品表面出现纵向尺度较小的有序点状纳米结构;随着入射角度的增加,样品表面形成条纹状纳米结构,30°时形成短程有序且纵横比为0.87的条纹状结构;入射角度继续增加,纵向高度减小直至纳米结构消失;当角度达到60°附近,蓝宝石表面又出现条纹状结构,70°时形成了短程有序且纵横比为1.07的条纹状结构.自组织纳米结构的形成先以"岛状"形式出现,随后岛上生长出条纹状纳米结构,随着刻蚀时间的增加,岛状条纹结构纵向尺度增大且有序性增强,纳米结构的横向周期不变.     

溅射功率对直流磁控溅射Ti膜结构的影响

 采用直流磁控溅射方法制备了纯Ti膜，研究了不同功率下Ti膜的沉积速率、表面形貌及晶型结构，并对其应力进行了研究。研究表明：薄膜的沉积速率随溅射功率的增加而增加，当溅射功率为20 W时，原子力显微镜(AFM)图像显示Ti膜光洁、致密，均方根粗糙度最小可达0.9 nm。X射线衍射(XRD)分析表明薄膜的晶体结构为六方晶型，Ti膜应力先随溅射功率增大而增大，在60 W时达到最大值（为945.1 MPa），之后随溅射功率的增大有所减小。     

Ti/Ti-类金刚石多层膜的制备与表征

采用电子回旋共振-化学气相沉积结合中频磁控溅射的真空镀膜技术, 以99.99%Ti为靶材, 乙炔为碳源制备了Ti/Ti-类金刚石(DLC)多层膜. 利用X射线衍射仪、扫描电子显微镜、X射线光电子能谱仪 对Ti/Ti-DLC多层膜进行了相结构、组织、成分及形态分析. 采用显微硬度仪、摩擦磨损仪、表面粗糙度仪对Ti/Ti-DLC多层膜进行了力学性能考察. 结果表明: Ti/Ti-DLC多层膜中主要含有TiC晶相; Ti层和Ti-DLC层中未出现柱状晶体生长模式, 分层中均以岛状模式生长; 当调制周期Λ≤ 50 nm时, 分层结构变模糊; 调制周期Λ对Ti/Ti-DLC多层膜的复合硬度、摩擦系数、表面形貌、表面粗糙度都有影响, 当调制周期Λ较小时表现出纳米增硬效应, 表面出现大颗粒, 表面粗糙度和摩擦系数均变大.     

低温外延生长平整ZnO薄膜

在较低温度下实现平整ZnO薄膜的生长有利于ZnO的可控p型掺杂以及获得陡峭异质界面。本文使用分子束外延方法,采用a面蓝宝石为衬底,在450 ℃下生长了一系列ZnO薄膜样品。在富氧生长的条件下,固定氧流量不变,通过调节锌源温度来改变锌束流,以此调控生长速率。样品的生长速率为40~100 nm/h。通过扫描电镜（SEM）表征发现：在高锌束流的生长条件下,样品表面有很多不规则的颗粒;降低锌的供应量后,样品表面逐渐平整。原子力显微镜（AFM）测试结果表明：样品的均方根表面粗糙度（RMS）只有0.238 nm,接近于原子级平整度。这种平整表面的获得得益于较低的生长速率,以及ZnO外延薄膜与a面蓝宝石衬底之间小的晶格失配。     

Self-Assembled CNT-Polymer Hybrids in Single-Walled Carbon Nanotubes Dispersed Aqueous Triblock Copolymer Solutions

We have carried out scanning electron microscopy (SEM), differential scanning calorimetry (DSC), small angle X-ray scattering (SAXS), electrical conductivity, and ¹H NMR studies as a function of temperature on single-walled carbon nanotubes (SWCNTs) dispersed aqueous triblock copolymer (P123) solutions. The single-walled carbon nanotubes in this system aggregate to form bundles, and the bundles aggregate to form net-like structures. Depending on the temperature and phases of the polymer, this system exhibits three different self-assembled CNT-polymer hybrids. We find CNT-unimer hybrid at low temperatures, CNT-micelle hybrid at intermediate temperatures wherein the polymer micelles are adsorbed in the pores of the CNT nets, and another type of CNT-micelle hybrid at high temperatures wherein the polymer micelles are adsorbed on the surface of the CNT bundles. Our DSC thermogram showed two peaks related to these structural changes in the CNT-polymer hybrids. Temperature dependence of the ¹H NMR chemical shifts of the molecular groups of the polymer and the AC electrical conductivity of the composite also showed discontinuous changes at the temperatures at which the CNT-polymer hybrid’s structural changes are seen. Interestingly, for a higher CNT concentration (0.5 wt.%) in the system, the aggregated polymer micelles adsorbed on the CNTs exhibit cone-like and cube-like morphologies at the intermediate and at high temperatures respectively.     

Controllable Preparation of Hierarchical ZnO Nanocages and its Oxygen Vacancy through the Nanoscale Kirkendall Process

The synthesis of ZnO with tailorable shapes and point defects is important for its potential applications. Here, a facile approach is demonstrated to prepare ZnO nanocages with controllable porous shell structures though sintering a Zn‐based cyanide‐bridged coordination polymer under different temperatures. The transformation of ZnCP microspheres into ZnO nanocages is based on two types of nanoscale Kirkendall effect, which are related to low temperature solid–solid interfacial oxidation and high temperature solid–gas interfacial reaction, respectively. At low temperature (around 300 °C) and before the ZnCP decomposition, the novel “hierarchical ZnO bigger nanocages embedded with smaller nanocages with 10 nm nanocrystals” can be generated. By contrast, when coming to the total decomposition of ZnCP at 800 °C, ZnO nanocages with significantly increased sizes and large cavities are generated, and large amounts of oxygen vacancies (V_O) are created at the same time, leading to the dramatic increased luminescence intensities of the UV peak due to V_O at 540 nm. Thus, the luminescence intensities versus defect concentration in the prepared ZnO nanocages can also be controlled by tuning the sintering temperatures.     

Peculiarities of the initial stage of growth of niobium-based nanostructures on a Si(111)-7 × 7 surface

The initial stage of growth of nanoislands prepared by thermal deposition of niobium on the reconstructed surface of Si(111)-7 × 7 in ultrahigh vacuum is experimentally investigated. The morphological and electrophysical properties of niobium-based nanostructures are studied by means of low-temperature scanning tunneling microscopy and spectroscopy. It is found that upon the deposition of niobium on a substrate at room temperature, clusters and nanoislands are formed on the silicon surface, having a characteristic lateral size of 10 nm with the metallic type of tunneling conductivity at low temperatures. Upon the deposition of niobium on a heated substrate, quasi-one-dimensional (1D) and quasi-two-dimensional (2D) structures with typical lateral dimensions of up to 200 nm and three-dimensional pyramidal islands with semiconducting type of tunneling conductivity at low temperatures are formed.     

Self-Organization Phenomena in a Cryogenic Gas Discharge Plasma: Formation of a Nanoparticle Cloud and Dust–Acoustic Waves

The dusty plasma structures in a glow discharge of helium in a tube cooled by superfluid helium at a temperature of 1.6 K and higher have been studied experimentally. The bimodal dust plasma formed by clouds of polydisperse cerium dioxide particles and polymer nanoparticles has been analyzed. We have observed wave oscillations in the cloud of polymer nanoparticles (with a size up to 100 nm), which existed in a narrow temperature range from 1.6 to 2.17 K. Vortices have been observed in the dusty plasma structures at helium temperatures.     

Molecular dynamics simulations of hydrogen adsorption/desorption by palladium decorated single-walled carbon nanotube bundle

Utilising molecular dynamics simulations, the hydrogen molecules adsorption isotherms of the (8,?0) palladium decorated single-walled carbon nanotube (SWNT) were obtained. The hydrogen adsorption was studied on the external, interstial and internal surfaces of the SWNT bundle at several temperatures ranging from 77 to 400?K. The results were compared with the bare single-walled carbon nanotube bundle under the same conditions. The decorated carbon nanotube bundle hydrogen adsorption was significantly higher than that of the bare one. The hydrogen desorption and readsorption were studied using temperature as the readsorption/desorption variable. The rate constants were calculated for the hydrogen desorption at different temperatures. The calculated decorated SWNT bundle hydrogen desorption activation energy was higher than that for the bare SWNT bundle. The calculated activation energies for the hydrogen desorption in both nanotube bundles specified the temperature dependency of hydrogen desorption.     

The phase behaviour of single polyethylene chains with and without fixing one end

The phase behaviour of a single polyethylene chain is studied by using molecular dynamics simulations. A free chain and a chain with fixing one end are considered here, since the atomic force microscope （AFM） tip can play a significant role in polymer crystallization in experiment. For a free chain, it is confirmed in our calculation that the polymer chain exhibits an extended coil state at high temperatures, collapses into a condensed state at low temperatures, i.e. the coil-to-globule transition that is determined by a high temperature shoulder of the heat capacity curve, and an additional liquid-to-solid transition that is described by a low temperature peak of the same heat curve. These results accord with previous studies of square-well chains and Lennard-Jones homopolymers. However, when one of the end monomers of the same chain is fixed the results become very different, and the chain cannot reach an extended coil-like state as a free chain does at high temperatures, i.e. there exists no coil-to-globule-like transition. These results may provide some insights into the influence of AFM tip when it is used to study the phase behaviour of polymer chains. If the interaction force between AFM tip and polymer monomers is strong, some monomers or one of them can be seen as being fixed by the tip, which is similar to our simulation model, and it is also found that AFM tip could induce polymer crystallization.     

A siloxane polymer lightwave circuit on ceramic substrate applicable to ultrafast optoelectronic multi-chip-modules

Technique for integrating optical waveguide circuits on electrical circuits is developed toward the application to opto-electronic multi-chip modules (O/E-MCM), which enables one to handle ultrafast lightwave pulses and electrical signals on a common circuit board. We use ceramic material as the substrate of O/E-MCM having a multi-layer structure. A siloxane polymer is utilized to form low loss optical waveguides on ceramic substrates by low temperature processes. The waveguide has shown high transparency around 1310 nm. The group velocity dispersion has been measured and shown to become almost zero at wavelength of 1310 nm and about 0.4 fs/cm nm at 1550 nm. An optical circuit has been formed on simple electrical circuit consisting of a thermometer film resistance layer. A Mach–Zehnder interferometer optical switch exhibiting the waveguide extinction ratio of 30 dB, control power of 5 mW, and switching speed of 6 ms has been demonstrated. Thermal management characteristics also have been demonstrated successfully. This single-mode optical waveguide can thus be formed readily on ceramic substrates involving electrical circuit layers; this result confirms its applicability to O/E-MCM.     

Vanadium nanoclusters on Si(1 1 1) 7 × 7 surface studied by scanning tunneling microscopy

The size distribution and shape transition of self-assembled vanadium silicide clusters on Si(1 1 1) 7 × 7 have been investigated by scanning tunneling microscopy. Nanoclusters were formed by submonolayer vanadium deposition at room temperature followed by subsequent annealing (solid phase epitaxy - SPE). At room temperature, initially V-nanoclusters are formed which occupy sites avoiding the corner hole parts of the unit cells in the Si(1 1 1) 7 × 7 surface. Upon annealing, strong metal-silicon reaction occur leading to the formation of vanadium silicide nanoclusters. As a function of temperature, both, flat (2D) and three dimensional (3D) clusters have been obtained. After annealing at temperatures around 900 K many faceted clusters are created, whereas at higher annealing temperature, around 1300 K, predominantly 3D clusters are formed. The size distribution of SPE grown clusters could be well controlled in the range of 3-10 nm. The cluster size depends on the annealing temperature as well as on the initial vanadium coverage. Based on high resolution STM images a structure model for one kind of vanadium disilicide clusters exposing atomically flat surfaces was proposed.     

冷动力喷涂法制备钨和钨合金涂层 及其涂层的计算模拟

采用冷动力喷涂法以纯钨和钨-镍-铁合金为原料在铜合金基体上制备了钨涂层和钨-镍-铁涂层. 研究了冷喷涂过程中钨粉粒径、喷涂距离等因素对涂层性能的影响. 用扫描电子显微镜分析了涂层的表面、断面微观结构, 并用原子力显微镜测量了涂层的粗糙度. 此外, 计算了冷喷涂过程中粉末颗粒的实际速度, 并采用有限元分析软件ANSYS/LS-DYNA模拟了冷喷涂过程中颗粒撞击基体时的变形情况.     

Cavity formation during water entry of heated spheres

We experimentally study the cavity formation when heated spheres impact onto water at low and high subcooling.The observations present that the formation and appearance of the cavity are affected by the boiling modes and the heat transfer intensity. In the nucleate-boiling regime, a rough cavity can be formed at a rather low impact velocity, while at the same velocity, the cavity formed in the film-boiling regime may have a very smooth interface with a stable vapor layer around the sphere. We discuss the effects of the impact speed, water and sphere temperatures on the stability of the vapor layer. For low subcooled water, the stable vapor layer will be disturbed when increasing the impact velocity, leading to a disturbed cavity. For high subcooled water, the film boiling has a particular boiling model in which the vapor layer around the sphere cannot keep its stability. In this particular film-boiling regime, no cavities can be formed at low impact velocities and only broken cavities can be formed at high impact velocities.