Theoretical analysis of 2D laser angle sensor and several design parameters

Having adopted several sets of new technology and techniques, such as cube-corner prism of higher refractive index, orthogonal holographic grating, non-linear compensation, and fringe fractionization, etc., we have developed a new type of laser angle sensor that can be used to measure two-dimensional angle of moving target. The sensor has high sensitivity, high precision and longer measuring range compared with the original sensor, and its measuring range will achieve ±35°, while its minimum resolution angle is 0.004°. The experimental results show that the measuring error is not greater than ±0.01°. In this paper, several design parameters and measuring results for 2D laser angle sensor are given.     

激光加速度传感器的理论研究

提出了一种新型加速度传感器的设计理论。该传感器设计以角锥棱镜作为惯性摆，利用光学干涉原理，可以实现对运动物体的二维加速度测量。对该传感器进行了系统的理论研究，给出了二维加速度激光传感器设计参量选取的一般规律，并给出了实验的初步结果。     

结构现场可调的点激光精密测量系统

为了实现激光传感器测头可以根据现场条件来实时改变入射角度,建立了结构可调的点激光测量系统。建立了相机的针孔模型,利用张正友标定算法得到该相机模型的内部参数,定义点激光测量系统中的光心角,推导出利用像点坐标和相机内部参数实时求取光心角公式。建立了点激光测量系统的数学模型,引入点激光测量系统的结构参数:基线距和基准角,利用零平面和两个基准面标定系统结构参数。利用标定得到的系统结构参数进行实时的逆向工程在线测量。实验结果表明:测量系统量程为75mm时,该标定算法最大标定误差≤0.02mm,点激光测量系统的测量误差≤0.06mm,达到精密测量的要求。     

A novel active optical approach for acceleration measurement based on a Y-shaped cavity dual-frequency laser

A novel active optical approach for acceleration measurement based on a Y-shaped cavity dual-frequency laser is presented and demonstrated. Applied acceleration causes a change in the refractivity of sensing gas in one of the two cavities, resulting in a beat frequency variation between two orthogonal polarized lights. As a result, this approach produces a modulation of beat frequency strictly proportional to the input acceleration. Preliminary experiments with a 632.8 nm Y-shaped cavity He–Ne dual-frequency laser confirm the validity of the laser sensor. The experimental results show that the laser sensor in this approach characterizes a nearly linear response to the input acceleration, which is a projection of gravitational acceleration. The experimental values of the scale factors are mostly in good agreement with theoretical ones. By optimizing the optical and geometrical parameters of the laser sensor, an acceleration measurement resolution of 10^?5–10^?6 gravitational acceleration (within ±5 g measurement range) could be expected. Furthermore, we investigate the principle about the sign of the scale factor in detail, and propose a simple but efficient method to distinguish the direction of the acceleration acted on the laser sensor.     

声表面波梁式加速度传感器的优化设计

为获得传感器的优化设计,对一种声表面波梁式加速度传感器敏感机理进行了研究。从声波波动方程出发,结合有限元分析以及微扰理论对加速度作用力作用下声表面波传播特性进行分析,以此构建梁式声表面波加速度传感器敏感机理的理论模型,特别分析了压电梁材料及几何结构、振子质量对传感响应的贡献以确定传感器优化的几何参数。为验证理论分析结果,实验研制了基于ST-X石英悬臂梁结构的差分振荡式声表面波加速度传感器,并利用精密振动台对所研制传感器性能进行评价。实验结果显示,在给定加速度测试范围内,采用ST-X石英梁并延长梁长度、降低梁厚度以及采用较大的阵子质量将有效的改善传感器检测灵敏度,在±2 g范围内加速度灵敏度可达27 k Hz/g,且实验结果很好的验证了理论模型。     

激光位移传感器的光学系统设计

针对目前国内自主研制的激光位移传感器精度低,测量范围小等问题,提出了一种采用光学设计软件预先仿真整个激光位移传感器光学系统的方法。在分析系统各部分的光学特性的基础上,结合具体要求设计了一个激光位移传感器的光学系统,其工作范围为（50±10）mm。采用系统分割的方法,将整个光学系统分为两部分进行设计,第一部分是激光束的整形透镜,要求在有效的工作范围内得到小而均匀的出射光斑,设计结果表明,在测量范围内,光斑大小能够控制在10-1mm量级;另一部分是被测面散射光接收的成像物镜,该系统的特点是物面和像面相对于光轴都有一定的角度,实验结果表明其成像满足Scbeimpflug条件。     

Laser Doppler vibrometry based on self-mixing effect

In this paper, a simple, compact and low cost laser Doppler vibrometer is presented. It is simply composed of a laser diode (9 mm in diameter, 2 g of weight, emitting at 825 nm) and by a two-lens optical system designed to focus the laser radiation on the vibrating target. This sensor can measure target velocity. The working principle is based on the self-mixing effect that occurs in a semiconductor laser diode when the emitted radiation is back reflected toward the cavity and then re-introduced inside. The target velocity is calculated measuring the frequency of the peak of the spectrum of the signal generated by a photodiode mounted on the back facet of the laser diode. In this article, the design and the realisation of the vibrometer is reported. The self-mixing vibrometer has been calibrated in the range 0–300 mm/s, using a rotating disk covered with white paper. The effect of the angle of measurement and target distance are reported. Finally, the sensor has been compared with a commercial laser Doppler vibrometer using a vibrating surface as a target.     

20～1250Hz光纤激光加速度传感系统设计

为了实现高灵敏度、宽频响应的光纤型加速度传感器,以光纤激光器作为加速度传感器的传感元件,建立了光纤激光加速度传感系统,并对该系统的传感原理、灵敏度和谐振频率等性能进行了分析和实验。采用竖直式加速度传感器结构,结构中的传感组件主要由质量块和中空的细钢管组成,光纤激光器受预应力作用后粘接在钢管内部,在加速度作用下,钢管产生的应变引起光纤激光器的应变和折射率发生改变,导致光纤激光器的出射波长随之发生改变,然后使用干涉解调技术检测出波长的动态变化,即可获得波长中包含的加速度振幅和频率信息。实验结果表明,在20~1 250 Hz频段内,竖直式光纤激光加速度传感器的灵敏度约为-126.2 d B[参考值1 rad/(μm/s~2)],频响曲线的波动幅度在±1.9 d B范围内,加速度响应动态范围为77.46~170.26 d B[500 Hz频点,参考值1μm/(s~2·Hz1/2)],加速度分辨率优于0.01 m/s~2。     

一种新的激光车辙深度测量方法研究

车辙深度测量通常使用共梁式多路激光测距传感器测量路面多个离散点,由多个测量点组成的断面信息计算车辙深度,因横向采样点间距宽,导致测量误差较大。提出了一种新的激光车辙深度测量方法,采用线激光器和三维(3D)相机组合集成测量路面3D断面,通过3D断面解算车辙深度。3D相机以一定夹角采集激光器投射在路面的线结构光图像,获取路面的3D断面数据,对断面数据通过拉依达准则进行异常值剔除,再进行旋转、平移和模型识别,最终计算路面左右轮迹和最大车辙深度。实际证明,数据重复性和相关性都达到98%以上,与传统方法相比较,该方法采样间距小、测量精度高、成本低、通用性强,具有广阔的使用推广价值。     

Theory and analysis of phase sensitivity-tunable optical sensor based on total internal reflection

This study presents a theory of a phase sensitivity-tunable optical sensor based on total-internal reflection (TIR). This investigation attempts to design a phase sensitivity-tunable optical sensor consisting of an isosceles right-angle prism, some quarter- and half-wave plates, and a Mach-Zehnder interferometer. When the azimuth angles of the quarter-wave plates are chosen properly, the final phase difference of the two interference signals are associated with the azimuth angle of the fast axis of the half-wave plates, thus creating the controllable phase sensitivity. Numerical analysis demonstrates that the high phase measuring sensitivity and the small measuring range, and the low phase measuring sensitivity and the wide measuring range can be performed by selecting the suitable azimuth angle of the half-wave plates. The feasibility of the measuring method was demonstrated by the experiment results. The sensor could be applied in various fields, such as chemical, biological, biochemical sensing, and precision machinery measurement.     

同时测量扭转角度和扭转方向的侧漏光子晶体光纤扭转传感器

基于所研制的侧漏型光子晶体光纤,提出并构建了出一种同时检测扭转角度 和扭转方向的高灵敏度Sagnac干涉仪型光纤扭转传感器.顺时针扭转时, 传感器传输谱向短波长方向偏移;逆时针扭转,向长波长方向偏移. 对传感器扭转特性的实验研究结果表明,构成Sagnac干涉仪的侧漏型光子晶体光纤的长度, 对扭转敏感系数和扭转角度测量范围起着决定性作用.当光纤长度较短时, 扭转传感器具有较大的扭转灵敏度,但扭转角度测量范围较小;光纤长度增加时,扭转灵敏度减小, 扭转角度测量范围增大.当构成Sagnac干涉仪的侧漏型光子晶体光纤长度为14.85 cm时, 传感器的扭转敏感系数可达到0.9354 nm/(°),扭转角度测量范围为-90°—90°; 光纤长度为32 cm时,最大扭转敏感系数降为0.2132 nm/(°), 扭转角度测量范围扩展至-180°—180°. 采用二维测量矩阵法可以有效排除温度对扭转角度的测量的影响. 关键词： 光纤传感器 侧漏型光子晶体光纤 扭转传感器 Sagnac干涉仪     

激光三角法中工作角对系统灵敏度的影响

通过推导激光三角测量系统的灵敏度公式,分析了光学结构参数对系统灵敏度的影响,主要包括被测表面起伏量、成像系统的放大倍率与工作角。建立表面粗糙度的激光三角测量系统,重点针对工作角对灵敏度的影响关系进行实验研究。结果显示,较大的工作角能够获得更高的系统灵敏度。但是当工作角较大时,需考虑工作角与系统放大倍率对灵敏度的综合影响,并保证光接收器上的光强大于其灵敏度。对于文中采用的测量系统,最高的系统灵敏度所对应的工作角约为70°左右。     

红外地球敏感器扫描镜摆角激光动态测试方法

为解决扫描镜摆角实时动态非接触测量问题,基于激光检测技术和CCD探测技术,提出一种红外地球敏感器扫描镜摆角激光动态测试方法,并研制了扫描镜摆角动态测试系统,其可实现扫描镜的摆动频率、零位角、幅值、峰峰值平均等参量的动静态激光非接触测量。介绍了系统的组成和总体结构,着重对扫描镜摆角动态测量理论和大视场、大相对孔径特殊线性扫描光学系统的设计方法进行了分析与探讨,通过建立系统的数学模型,解决了测量数据误差修正与图形处理问题。对测量系统的精度进行了验证,结果表明系统的摆角测量范围为0~±12°,分辨力为0.01°,动静态测量精度优于±0.04°。     

Delay self-heterodyne measurement of narrow linewidth laser frequency drift characteristic

Resonator integrated optic gyro (RIOG), which employs narrow linewidth laser, is a high-accuracy inertial rotation sensor based on the Sagnac effect. The performance of RIOG is greatly affected by the frequency drift of narrow linewidth laser. A simple, effective method to measure the relative frequency drift of narrow linewidth laser based on delayed self-heterodyne technique is proposed in this paper. The measurement range and sensitivity can easily be satisfied by setting the length difference of the fiber segments between two interferometer arms. The relationship between the length difference and the frequency drift is derived based on the given principle of measuring the relative frequency drift. Then the laser frequency drift measuring setup is established and the experiment results demonstrate that a center frequency drift rate is less than 2 MHz/6.7 s under the room-temperature. Moreover, the measuring setup is applied to test the modulation coefficient of piezoelectric-transducer (PZT), and the modulation coefficient of 9.62 MHz/V is obtained, which satisfies the requirements of RIOG closed-loop operation.     

弯曲增敏型光纤曲率传感器机理的研究

近年国外出现一种直接检测弯曲的低成本光纤曲率传感器,采用弯曲增敏技术提高光纤对弯曲的灵敏度。这种传感器的线性范围宽,能区分正向弯曲和负向弯曲,在测量较大弯曲变形的场合更具优势;并且适合埋入结构内部检测,通过转换还可测量轴向应变。然而其传感机理方面的研究仍处于探索阶段。通过分析光辐射度余弦定律理论、回音壁光线理论、沟槽角度理论等国内外对该传感器机理的研究成果,并基于平面波导的光散射损耗理论,提出了光纤曲率传感器的机理。指出弯曲引起光纤敏感区表面散射损耗的改变是导致光传输损耗改变的原因;推导出损耗与光纤弯曲半径、表面特性、光纤结构参量关系的数学模型,并通过实验验证了模型的有效性。     

基于CCD传感的激光粒度测试技术研究

颗粒测试在工业生产和科学研究中涉及的领域非常广泛,常用的颗粒粒度及其分布的测试方法是激光粒度测试法,其具有测试精度高、测量速度快、重复性好和可测粒径范围宽等突出优点。CCD传感器有灵敏度高、分辨率高、噪声小和较大的动态范围等优点,其作为激光粒度仪的探测器提高光强分辨率的应用已经很普遍了。为提高测量精度,通过对CCD传感技术的研究,应用图像处理的方法来设计光电探测器,搭建了基于米氏散射原理的激光粒度测试系统。实验结果表明,用CCD传感器采集光散射图像,再对图像进行处理,D50与D10误差在6%之内,D90误差在1%之内,降低了测量的重复误差。     

大量程激光位移传感器的成像系统设计

为了解决目前国内自主研发的激光位移传感器基准工作距离短和测量范围小的问题,设计了一种适用于远距离测量的大量程激光位移传感器成像光学系统。基于激光三角测量原理,结合具体使用要求计算了大量程激光位移传感器的性能指标和成像光学系统的设计参数。选择5片式透镜结构作为系统的初始结构,利用光学设计软件对大量程激光位移传感器成像光学系统进行了仿真,完成了系统优化和性能分析,实现了基准工作距离为1 000 mm、量程为±500 mm、分辨率为0.4 mm的大量程激光位移传感器成像系统设计。结果表明,在测量范围±500 mm内,系统均可以满足成像质量要求。该激光位移传感器成像系统具有工作距离远、测量量程大、结构简单的特点,可满足1 000 mm远距离处大量程范围的测量使用要求。     

Packaging and Characteristics of a Tapered Fiber Sensor for Refractive-Index Measurements

In this study, we demonstrate the design and fabrication of a tapered fiber sensor with a sensing application based on a new (high-sensitivity) package. We study the effect of various geometric parameters such as the uniform segment diameter, the uniform segment length, and the incident angle of the optical wave on the tapered fiber sensor sensitivity for evanescent sensing. Our study shows that high sensitivity of the tapered fiber can be realized by optimizing its parameters. In addition, we design a novel packaging of a tapered-fiber sensor, which can efficiently ensure a uniform stress and reduce the cross sensitivity caused by stress in liquid detection using a tapered fiber sensor. We report the experimental results obtained using this tapered fiber sensor for refractive-index measurements. As the refractive index of liquids varies from 1.417 to 1.423, the measurement results show that the refractive-index sensitivity of the tapered fiber sensor is as high as 4860 nm/RIU.     

基于飞秒激光加工的微纳高温光纤振动传感器

报道了一种基于飞秒激光加工的微纳高温振动传感器。通过熔接形成单模光纤-空芯光纤-单模光纤的结构,利用单模光纤和空芯光纤在熔接面形成的菲涅尔反射,构成外腔式法布里-珀罗干涉仪(EFPI)。用飞秒激光烧蚀空芯光纤,形成悬臂梁结构。末端的单模光纤作为质量块,在受到振动时带动悬臂梁振动,使悬臂梁产生微弯,进而使EFPI腔长发生变化。实验结果表明,传感器的工作区域为20~300Hz,在100Hz时,0~3.01g范围内测得加速度分辨率为5×10-4 g,加速度响应灵敏度为129.6nm/g。传感器受温度影响小,腔长的温度交叉响应仅为0.225nm/℃,传感器可耐950℃高温冲击。     

利用4400系统构造具有光学多道分析功能的信号处理系统

基于4400系统,通过引入光电二极管列阵作为传感器,构造了具有光学多道分析功能的信号处理系统。利用该系统对实际的激光空间分布进行了描绘,给出了高斯场分布的相应参数。通过进一步观测p偏振光在K9玻璃上下表面反射光强比(γ)的角度调制曲线,获得了玻璃表面层的光学参数。实验结果表明,该系统测量精度高,可应用在激光时间信号及空间场分布的表征与测量领域。