H2 plasma development of X-ray imaged patterns on plasma-polymerized resists

An X-ray imaged pattern on a plasma-polymerized film was successfully developed by H₂ plasma etching. Plasma-polymerized MMA and 6FBMA were formed by using an inductively coupled argon flow type reactor. An X-ray imaged pattern on the film was attained through a knife-cut window of a gold plate. The X-ray was generated from a Cu target at 20 kV and main wavelength 1.54 Å. The pattern development was performed using a tubular type reactor with parallel plate electrodes. The quality of plasma-polymerized resists in an X-ray lithography was evaluated by comparing it with the conventional polymer in the dry and wet process, and the minimum dose rate for a visible pattern fabrication was measured to be 4.1 J/cm² for both resists in H₂ plasma etching development.     

Analysis of PPMMA films from oxygen plasma using X-ray photoelectron spectroscopy

Plasma polymerized methyl methacrylate (PPMMA) films have been synthesised on silicon substrates in RF glow discharge using oxygen plasma. The electron beam delineation sensitivity of the PPMMA films has been studied systematically by varying oxygen and monomer flow rates. X-ray photoelectron spectroscopy (XPS) analysis clearly illustrates how C/O ratio in the films determines the properties of PPMMA films as electron beam resist. © 1994 John Wiley & Sons, Inc.     

A small-angle X-ray scattering study of bromine-containing latex particles

A small-angle X-ray scattering (SAXS) study of two-stage latices (TSL), composed of polystyrene (PS) and polytribromostyrene (PTBrS), is presented. The analysis of the scattering curves leads to the conclusion that the TSL particles have a concentric core-shell structure. When a PTBrS latex was used as a seed, its particles were overcoated with a PS shell during the second-stage polymerization. However, only a small portion of the seed particles were overcoated with a PTBrS shell when using a PS seed. The size distributions of the TSL and the PTBrS latex particles were determined from the scattering curves, using the method of Indirect Fourier Transformation. The resulting average radii were in good agreement with the values obtained from TEM observations. © 1996 John Wiley & Sons, Inc.     

软X射线显微术Si_3N_4薄膜窗口的研制

介绍了在软Ｘ－射线显微术研究领域中有重要应用的Ｓｉ_３Ｎ_４薄膜窗口的实验室制作方法，并形成一套独特制备工艺，Ｓｉ_３Ｎ_４薄膜窗口的研制成功推动了我国软Ｘ射线显微术研究的发展。     

Preparation of trimethylsilyl group containing copolymer for negative-type photoresists that enable stripped by an alkaline solution

A series of four trimethylsilyl group containing copolymers were synthesized using the solution free-radical copolymerization with azobisisobutyronitrile (AIBN) in 1,4-dioxane at 60 °C. The photoresists were prepared by dissolving copolymer, one of two kind photosensitizer (dimethylaminoethyl methacrylate and diethylaminoethyl methacrylate) and Michler's ketone in tetrahydrofuran (THF). The cyclic maleimide group was responsible for the high thermal stabilities. After irradiation by a deep-ultraviolet light and development with mixed solvent (methyl isobutyl ketone:2-propanol=1:3), the developed patterns showed negative images and exhibited good adhesion to the silicon wafer without using any adhesion promoter. The resolution of the resists was at least 1.75 μm and the oxygen plasma etching rate was 1/6 of hard-baked HPR-204, which can be also used as the top-imaging layer of a bilayer resist for microlithographic application. These photoresists can be stripped by week alkaline solution such as sodium carbonate solution (0.01 wt.%) after exposure.     

Emulsion polymerization of styrene using an alkali-soluble random copolymer as polymeric emulsifier

An alkali-soluble random copolymer (ASR), poly(styrene/α-methylstyrene/acrylic acid), was used as a polymeric emulsifier in the emulsion polymerization of styrene. The calorimetric technique was applied to study the kinetics of emulsion polymerization of styrene using ASR and a conventional ionic emulsifier, sodium dodecyl benzenesulfonate (SDBS). ASR could form aggregates like micelles, and the solubilization ability of the aggregates was dependent on the neutralization degree of ASR. The rate of polymerization in the ASR system was lower than that in the SDBS system. This result can be explained by the creation of a hairy ASR layer around the particle surface, which decreases the diffusion rate of free radicals through this region. Although a decrease in particle size was observed, the rate of polymerization decreased with increasing ASR concentration. The higher the concentration of ASR is, the thicker and denser ASR layer may be, and the more difficult it would therefore be for radicals to reach the particle through this layer of ASR. The rate of polymerization decreased with increasing the neutralization degree of ASR. The aggregates with high neutralization of ASR are less efficient in solubilizing the monomer and capturing initiator radicals than that of the lower neutralization degree, which leads to decrease in rate of polymerization. © 1998 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 36: 2865–2872, 1998     

Synthesis, X-ray structures, and syndiospecific polymerization behavior of styrene of new (pentamethylcyclopentadientyl) titanatranes containing modified tetradentate triethanolamine ligands

A series of monomeric pentamethylcyclopentadienyltitanatranes, [n = 0, 1; n = 1, 2; n = 2, 3], were synthesized by the reaction of Cp∗TiCl₃ with corresponding triethanolamines such as (HOCH₂CH₂)_nN(CH₂CMe₂OH)_{3 − n} (n = 0, L1H₃; n = 1, L2H₃; n = 2, L3H₃), which varied by the number of CMe₂ groups adjacent to an OH functionality from 3 (L1H₃) to 2 (L2H₃) to 1 (L3H₃), in the presence of NEt₃. All complexes were characterized by elemental analysis and solution ¹H and ¹³C{¹H} NMR spectroscopy. Moreover, their solid state structures, which are slightly distorted three-legged piano stool geometry, have been confirmed by single crystal X-ray diffraction analysis. On activation with methylaluminoxane (MAO), these complexes showed good catalytic activity for the polymerization of styrene producing syndiotactic polystyrene (SPS) with high molecular weights. Compounds 1 and 2 bearing more than two pairs of methyl substituents on the side arms of triethanolamines showed the enhanced catalytic activities as the polymerization temperature went up from 50 °C to 110 °C, whereas less bulky complexes 3 and Cp∗Ti(OCH₂CH₂)₃N (4) gave the decreased activities as polymerization temperature rose. Unlike 3 and 4, complexes 1 and 2 in the presence of MAO as a cocatalyst gave SPS with controlled bimodal molecular weight distribution. Bimodal properties were much distinct at low polymerization temperature.     

Optical properties and electronic structure of methylammonium iodocuprate as an X-ray scintillator

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Synthesis of stimuli‐responsive macroazoinitiators and their use as an inistab toward hairy polymer latex particles

Stimuli‐responsive macroazoinitiators with central azo unit have been synthesized by atom transfer radical polymerization (ATRP) of 2‐(dimethylamino)ethyl methacrylate or 2‐(diethylamino)ethyl methacrylate in 2‐propanol at 25 °C. The mean degree of polymerization of the polymer chains besides the azo group was fixed between 25 and 60. ¹H NMR, gel permeation chromatography, UV‐Vis spectrophotometer, and surface tensiometer were used to characterize the stimuli‐responsive macroazoinitiators in terms of their chemical structure, molecular weight, polydispersity, and pH‐responsive behavior, respectively. Eventually, dispersion polymerization of styrene using the poly[2‐(diethylamino)ethyl methacrylate] (PDEA) macroazoinitiator as an inistab (initiator + stabilizer) in 2‐propanol medium was conducted. Near‐monodisperse 98 nm polystyrene (PS) latex particles with pH‐responsive PDEA hair were successfully synthesized. The PS latex particles with the PDEA hair can be dispersed in acidic aqueous media where the PDEA hair was protonated and was solvated, and can be flocculated in basic aqueous media where the PDEA hair was deprotonated and was precipitated. This dispersion‐flocculation cycle was reversible. © 2009 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 47: 3431–3443, 2009     

Particle formation in interval III of the emulsion polymerization of styrene with aerosol‐MA as an emulsifier

Particle nucleation in the seeded emulsion polymerization of styrene in the presence of Aerosol‐MA emulsifier micelles and in the absence of monomer droplets (interval III) was investigated. The seed particles were swollen with different amounts of the styrene monomer before the experiments. A larger number of polymer particles formed in interval III than in the corresponding seeded batch operation in the presence of monomer droplets. The increase in the number of particles could be attributed to the reduced rate of growth of new particles, which retarded the depletion of emulsifier micelles. The number of secondary particles initially increased with the initial polymer weight ratio in the seed particles (w_p0) but decreased at a higher range of w_p0, after reaching a maximum at w_p0 = 0.60, and eventually was reduced to zero. At high values of w_p0 (>0.75), polymerization occurred in the seed particles, whereas few or no new particles were formed despite the presence of micelles. The cessation of particle formation at high conversions was ascertained with a semibatch process in which the neat monomer feed was added to the reaction vessel containing the seed particles and emulsifier micelles. For w_p0 > 0.85, the emulsifier micelles were disintegrated to stabilize the seed particles with no secondary particle formation. The possible reasons for the cessation of particle formation at high w_p0 were examined. The size distribution of secondary particles showed a positive skewness in terms of volume because of the declining rate of growth for particles, together with a low rate of growth for small particles. The distribution breadth of new particles sharpened with increasing w_p0. © 2002 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 40: 1652–1663, 2002     

Controlled/Living Surface‐Initiated ATRP of Antifouling Polymer Brushes from Gold in PBS and Blood Sera as a Model Study for Polymer Modifications in Complex Biological Media

The use of PBS, 10% FBS or 10% CS as media for SI‐ATRP is reported. Controlled/living SI‐ATRP of MeOEGMA in PBS is achieved leading to better control than in water. The livingness is confirmed by chain extension with MeOEGMA or carboxybetaine acrylamide. This technique is successfully adopted for the polymerization of MeOEGMA in 10% FBS or CS as models for complex biological media with reasonable control of the brush growth. All prepared brushes show excellent antifouling properties.

     

Total-Reflection X-ray fluorescence analysis of elements in size-fractionated particulate matter sampled on polycarbonate filters — Composition and sources of aerosol particles in Göteborg,Sweden

This is the first study applying the technique of cold plasma ashing on polycarbonate filters as a preparative step for subsequent elemental analysis of aerosol particles by Total-Reflection X-ray fluorescence. The procedure has been validated by analyzing blanks of the filter material, chemicals used as additives as well as certified standard reference material. The results showed that cold plasma ashing is superior to conventional digestion methods with regard to the ease of sample preparation and contamination. A PIXE cascade impactor was used to collect size-fractionated aerosol particles in 9 size classes ranging from 16 to 0.06 µm aerodynamic diameter at an urban and a suburban site in Göteborg, Sweden. Filter segments loaded with the aerosol particles were cut out and fixed on Quartz carriers. After adding 10 ng of Ga as internal standard the samples were dried, digested by cold plasma ashing and analyzed by Total-Reflection X-ray fluorescence. The analysis of aerosol particles showed that elemental concentrations at both the urban and the suburban site in Göteborg were low compared to central Europe. More and concurrent sampling of size-fractionated particles is required to identify local sources of trace elements in the urban area of Göteborg.     

Free‐radical polymerization of styrene with p‐nitrobenzyl triphenyl phosphonium ylide as an initiator

The free‐radical polymerization of styrene with p‐nitrobenzyl triphenyl phosphonium ylide as an initiator in dioxane at 80 ± 1 °C in a dilatometer under a nitrogen atmosphere for 150 min resulted in a syndiotactic polymer, as evidenced by IR, ¹H NMR, and ¹³C NMR spectroscopy. A ¹H NMR spectrum showed methylene protons as triplets; ¹³C NMR signals of the phenyl ipso carbons were used for the determination of the tacticity. The system followed ideal kinetics. Gel permeation chromatography data were used evaluate the weight‐average molecular weight. The overall activation energy was 47 kJ/mol. Electron spin resonance spectroscopy confirmed the initiation by the phenyl radical obtained by the dissociation of the ylide and the free‐radical mode of polymerization. Differential scanning calorimetry studies showed the glass‐transition temperature of the polymer to be 342 K. © 2005 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 43: 6524–6533, 2005     

Application of energy dispersive X-ray fluorescence spectrometry as multielemental analysis to determine the elemental composition of crumb rubber samples

The elemental content of different rubber samples was analyzed using different analytical methods (inductively coupled atomic emission spectroscopy and non-polarized energy dispersive X-ray fluorescent spectroscopy). A new application of energy dispersive X-ray spectrometry as an analytical method for the determination of elemental content of rubber samples was investigated. Control analyses were also carried out to compare the results by ICP-AES. In one hand four samples contained same quality of elements (Mg, Si, P, S, Ca, Fe, Zn), while another four samples were without phosphorous. On the other hand there were significant differences in the ratio of C/H in the case of each sample. Based on the results, it was concluded that the X-ray spectrometry as an analytical method is well-applicable to determine the elemental composition of rubber samples, but the calibration is a key part of the analysis. A good correlation was observed between the different methods, but the correlation was the function of characteristic of matrices. Significant matrix effect from the presence of phosphor was observed in the case of some samples, while the change of C/H ratio could not result notable matrix effect.     

Polymerization of styrene with tetramethylthiuram disulfide as an initiator in the presence of 2,2,6,6‐tetramethyl‐1‐piperidinyloxy

The bulk polymerization of styrene was investigated with tetramethylthiuram disulfide (TMTD) as an initiator in the presence of 2,2,6,6‐tetramethyl‐1‐piperidinyloxy (TEMPO) at 123 °C. The polymerization proceeded in a controlled/living way; that is, the polymerization rate was first‐order with respect to the monomer concentration, and the molecular weight increased linearly with conversion. The molecular weights of the polymers obtained were close to the theoretical values, and the molecular weight distributions were relatively low (weight‐average molecular weight/number‐average molecular weight = 1.1–1.3). The rate of polymerization with TMTD as an initiator was faster than that with benzoyl peroxide, and the rate was independent of the initial concentration of TMTD in the presence of TEMPO. The obtained polystyrene was functionalized with ultraviolet‐light‐sensitive ? SC(S)N(CH₃)₂ groups, which was characterized with ¹H NMR spectroscopy. © 2004 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 43: 543–551, 2005     

Thermosensitive polymer brush‐supported 4‐N,N‐dialkylaminopyridine on silica particles as catalyst for hydrolysis of an activated ester in aqueous buffers: Comparison of activity with linear polymer‐supported version and effect of LCST transition

We report on the synthesis of a thermosensitive polymer brush‐supported 4‐N,N‐dialkylaminopyridine catalyst and the comparison of its catalytic activity with the corresponding linear polymer‐supported version in the hydrolysis of p‐nitrophenyl acetate (NPA) as well as the effect of lower critical solution temperature (LCST) transition on catalytic activity. The polymer brushes were synthesized from initiator‐functionalized silica particles by surface‐initiated atom transfer radical polymerization of methoxytri(ethylene glycol) methacrylate and 2‐(N‐methyl‐N‐(4‐pyridyl)amino)ethyl methacrylate in the presence of a free initiator. Dynamic light scattering studies showed that the onset temperatures of the LCST transition of polymer brushes in pH 7.52 and 7.82 buffers were 42 and 38 °C, respectively. Under the same reaction conditions, the net initial rate of the hydrolysis of NPA catalyzed by hairy particles was 70–80% of that catalyzed by the free copolymer at the temperature below the LCST of polymer brushes. With further increasing the temperature above the LCST, the plot of logarithm of net initial rate versus inverse temperature exhibited a shift for the reactions catalyzed by hairy particles and leveled off or decreased slightly in the case of using the free copolymer as catalyst, presumably because the structures of the aggregates of hairy particles and free copolymer chains were different. © 2009 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 47: 2853–2870, 2009     

A new rhodium complex with a nitrogen‐containing bis(phosphine oxide) ligand as an efficient catalyst for the hydroformylation of styrene

A new rhodium complex with a nitrogen‐containing bis(phosphine oxide) ligand has been synthesized. The complex was applied to hydroformylation of styrene and displayed high activity and regioselectivity towards the branched aldehyde, which was found to be higher than those of the tertiary bis(phosphine) analogue. Copyright © 2006 John Wiley & Sons, Ltd.     

Synthesis and characterization of Zr(IV) and Y(III) complexes with monocyclopentadienyl ligands containing an additional site tethered by a coordinating 2,6-pyridine bridge. X-ray crystal structures of the zirconium complexes

A new monocyclopentadienyl ligand containing an additional site tethered by a coordinating 2,6-pyridine unit has been prepared, rac-2-(1′-hydroxy-2′,2′-dimethylpropyl)-6-(1″,1″-dimethyl-cyclopentadienylmethyl) pyridine dilithium salt, LLi₂ (rac-4) that is analogous to the ligands present in CGC. After reacting the dilithium salt of the ligand with ZrCl₄ in a molar ratio of 1:1 in THF the complex LZrCl₂·THF (rac-5) was obtained which forms an insoluble oligomeric species after the loss of THF upon purification. From the mater liquor two crystalline species of the formula LHZrCl₃ (rac-6) and LH₂ZrCl₄·THF (rac-7) were isolated, whose X-ray crystal structures are reported. The reaction of LLi₂ with Y(OTf)₃ afforded the probably dimeric species [LYOTf]₂ (rac-8) from which the complex [LY(CH₂Si(CH₃)₃)]₂ (rac-9) was obtained after reaction with LiCH₂Si(CH₃)₃.     

New insights from X-ray photoelectron spectroscopy into the chemistry of covalent enzyme immobilization, with glutamate dehydrogenase (GDH) on silicon dioxide as an example

A three-step process for immobilization of glutamate dehydrogenase (GDH) on the surface of silicon dioxide has been studied by X-ray photoelectron spectroscopy (XPS). The enzyme layer was deposited on the silicon dioxide surface after first exposing the surface to 3-aminopropyltriethoxysilane (3-APTS) and reacting the silylated surface with glutaraldehyde (GA). Fine XPS analysis, performed after each step of the chemical procedure, revealed unknown details of the step-by-step construction of the enzyme layer under different experimental conditions.     

The case of a Cd2Cu2 complex containing an apparently C3-symmetric ligand: Erroneous ligand-structure assignment by X-ray diffraction data analysis

A simplified synthesis of a previously reported Cd₂Cu₂ complex 4 was developed in order to have a more readily available source of 1,3,5-tris(trifluoromethyl)-cyclohexane-cis,cis-1,3,5-triol 1, a unique tridentate ligand, only tentatively identified elsewhere. Attempts to liberate the ligand from 4 resulted in the sole formation of 2,4,6-tris(trifluoromethyl)-tetrahydropyran-cis,cis-2,4,6-triol (2); no traces of 1 were detected. A newly conducted X-ray analysis of complex 4 led to diffraction data that could be explained either by the previously reported structure for 4 or by the statistically disordered structure 5, containing ligand 2 rather than 1. Whereas refinement of both models led to equivalent merit factors, mass spectral data and elemental analysis of the crystals revealed unequivocally the sole presence of the tetrahydropyran derivative within the complex and proved thus the erroneous structure assignment 4 previously published for compound 5.