Device-level vacuum packaged uncooled microbolometer on a polyimide substrate

Uncooled infrared detectors (IR) on a polyimide substrate have been demonstrated where amorphous silicon (a-Si) was used as the thermometer material. New concepts in uncooled microbolometers were implemented during the design and fabrication, such as the integration of a germanium long-pass optical filter with the device-level vacuum package and a double layer absorber structure. Polyimide was used for this preliminary work towards vacuum-packaged flexible microbolometers. The detectors were fabricated utilizing a carrier wafer and low adhesion strength release layer to hold the flexible polyimide substrate during fabrication in order to increase the release yield. The IR detectors showed a maximum detectivity of 4.54 × 10⁶ cm Hz^1/2/W at a 4 Hz chopper frequency and a minimum noise equivalent power (NEP) of 7.72 × 10⁻¹⁰ W/Hz^1/2 at a biasing power of 5.71 pW measured over the infrared wavelength range of 8–14 μm for a 35 μm × 35 μm detector. These values are comparable to other flexible microbolometers with device-level vacuum packaging which are found in literature.     

脉冲激光沉积法制备(Cu,C)Ba2Ca3Cu4Oy 涂层导体

(Cu,C)Ba2Ca3Cu4Oy 是超导转变温度Tc 约为116 K 的无毒铜氧化物超导材料, 在迄今为止的超导材料中, 高压法制备的(Cu,C)Ba2Ca3Cu4Oy 多晶块材在液氮温区具有最高的不可逆场 Hirr ~ 15 T. 为了实现(Cu,C)Ba2Ca3Cu4Oy 超导材料的规模化制备, 本文利用脉冲激光沉积技术在 LaMnO3/MgO/Y2 O3/Al2 O3/Hastelloy 柔性金属基底上依次外延生长了 LaAlO3 帽子层和(Cu,C)Ba2Ca3Cu4Oy 超导薄膜. X 射线衍射实验结果表明(Cu,C)Ba2Ca3Cu4Oy 薄膜沿a 轴外延生长, 电学输运数据表明(Cu,C)Ba2Ca3Cu4Oy 薄膜的超导转变温度Tc onset 为115K, 零电阻温度Tc0 为52 K, 不可逆场为9 T@35 K. 本文首次报道了(Cu,C)Ba2Ca3Cu4Oy 在柔性金属缓冲层衬底的成功制备, 推动了(Cu,C)Ba2Ca3Cu4Oy 超导材料的实用化进程.     

Fabrication and adhesion performance of gold conductive patterns on silicon substrate by laser sintering

Laser sintering of gold-microparticle ink was examined in this study. Laser-sintered gold conductive patterns were characterized by using scanning electron microscope (SEM), energy-dispersive spectrometer (EDS), cross-cut tape test and destructive bond wire pull tests. The effects of laser power on microstructure and adhesion of gold conductive patterns were investigated. It was found that the microstructure of gold conductive patterns became denser with increase of laser power. The gold conductive patterns treated with laser power of 2 W showed poor adhesiveness of 2B in accordance with ASTM D3359-08. The adhesion level of gold conductive patterns increased to 5B by elevating laser power to 8 W. The adhesion mechanism of gold conductive patterns on silicon substrate was discussed and wire bonding test was also performed on gold conductive patterns. Wire breakage took place at the practical pull strength of around 5 gf.     

Stress impedance effect of FeCoSiB/Cu/FeCoSiB sandwich layers on flexible substrate

FeCoSiB/Cu/FeCoSiB sandwich layers were deposited on flexible substrate to develop flexible stress/strain sensors. The influence of stress on the impedance of the multilayers is reported. The results show that the variation of the impedance increases with the increase in deflection of the free end of the cantilever. A relative change in impedance of 6.4% is obtained in the FeCoSiB(1.5 μm)/Cu(0.25 μm)/FeCoSiB(1.5 μm) sandwich layers at 1 MHz with deflection of 2 mm. The stress impedance effects are sensitive to the frequency of the current and the thickness of both FeCoSiB and Cu layers. The stress impedance effect increases with the increase in the thickness of FeCoSiB or Cu layers. The stress impedance effect increases slightly with the increase in frequency and decreases with the further increase in frequency, which can be understood by the stress and frequency-dependent permeability of magnetic films.     

衬底对Cu(In,Ga)Se2薄膜织构的影响

分别在苏打石灰玻璃、Mo箔、无择优取向的Mo薄膜以及(110)择优取向的Mo薄膜四种不同衬底上,采用共蒸发工艺沉积约2μm厚的Cu(In,Ga)Se2薄膜,用X射线衍射仪测量薄膜的织构,研究衬底对Cu(In,Ga)Se2薄膜织构的影响.在以上四种衬底上沉积的Cu(In,Ga)Se2薄膜的(112)衍射峰强度依次逐渐减弱,(220/204)衍射峰从无到有且强度逐渐增强.在苏打石灰玻璃和Mo箔衬底上的Cu(In,Ga)Se2薄膜具有明显的(112)择优生长,而在(110)取向的Mo薄膜衬底上,Cu(In,Ga)Se2薄膜的织构为(220/204)取向.研究结果表明,只有(110)择优取向的Mo薄膜衬底对Cu(In,Ga)Se2薄膜(220/204)织构的形成有重要影响.     

Ultrawide frequency linewidth of the permeability spectra of FeCoN thin film sputtered on the flexible substrate

Analysis shows that it is possible to make use of dispersed magnetic ripple fields to obtain a wide frequency linewidth of permeability spectra of soft magnetic thin films. As-sputtered FeCoN thin film sputtered on flexible Kapton substrate is studied as an example. It has ultrawide frequency linewidths of its resonance peaks in the permeability spectra, compared to its counterpart deposited on Si substrate. The frequency linewidth of FeCoN on Kapton substrate decreases with external magnetic field, showing a different field dependence from that of FeCoN on Si substrate. The ultrawide frequency linewidth and its decrease with external magnetic field are ascribed to the dispersed magnetic ripple fields caused by the flexible substrate. This work shows that the flexible substrate is effective in obtaining a wide frequency linewidth of the permeability spectra of soft magnetic thin films.     

脉冲激光诱导Cu靶产生发光羽的特性分析

通过在不同的环境气压下拍摄脉冲激光烧蚀金属Cu诱导产生的发光羽,获取了不同区域具有不同颜色特征的发光羽照片.结果发现:发光羽的颜色随环境气压的改变而变化.采用空间分辨光谱技术,测定了激光诱导金属Cu靶产生发光羽辐射强度的空间分布,以及不同烧蚀环境气压对发光羽辐射强度的影响.研究了脉冲激光烧蚀Cu表面诱导发光的动力学过程,建立了可能的发光羽分区模型,对发光羽的不同区域发光粒子的激发机理进行了探讨,并用之定性地解释了所观察的实验现象.结果分析表明:脉冲激光诱导Cu产生的发光羽可以分为三个区域,不同区域的发光机理不同,Cu原子和Cu离子的激发机理不完全相同.     

紫外激光烧蚀Cu产生等离子体辐射特性

通过时间分辨的光谱测量技术,测定了308 nm XeCl紫外激光烧蚀金属Cu在氮气环境中诱导产生等离子体的发射光谱及其强度随时间分布,实验结果表明等离子体辐射光谱线主要由原子光谱线、一价离子光谱线及连续辐射背景光组成,各种光谱线的数目、辐射强度、持续时间不同。结合实验结果对等离子辐射机理进行了探讨,认为电子通过逆韧致辐射获得较高的能量,连续辐射主要来自高能电子的韧致辐射,原子和一价离子的激发主要是通过电子与原子、离子的碰撞传能以及电子与离子的复合产生,并用其定性地解释了所观察的实验现象。     

Laser sintering of green compacts

Green Compact Laser Sintering (GCLS) is a new technique for sintering powder metallurgical components by laser irradiation. After mixing; powders are pressed into a green compact; which can then be sintered by laser irradiation. The properties of powder metallurgical alloys for GCLS and conventional sintering are compared.     

Effect of laser energy, substrate film thickness and bioink viscosity on viability of endothelial cells printed by Laser-Assisted Bioprinting

Biofabrication of three dimensional tissues by Laser-Assisted Bioprinting (LAB) implies to develop specific strategies for assembling the extracellular matrix (ECM) and cells. Possible strategies consist in (i) printing cells onto or in the depth of ECM layer and/or (ii) printing bioinks containing both cells and ECM-like printable biomaterial. The aim of this article was to evaluate combinatorial effects of laser pulse energy, ECM thickness and viscosity of the bioink on cell viability. A LAB workstation was used to print Ea.hy926 endothelial cells onto a quartz substrate covered with a film of ECM mimicking Matrigel™. Hence, effect of laser energy, Matrigel™ film thickness and bioink viscosity was addressed for different experimental conditions (8-24 μJ, 20-100 μm and 40-110 mPa s, respectively). Cell viability was assessed by live/dead assay performed 24 h post-printing. Results show that increasing the laser energy tends to augment the cell mortality while increasing the thickness of the Matrigel™ film and the viscosity of the bioink support cell viability. Hence, critical printing parameters influencing high cell viability have been related to the cell landing conditions and more specifically to the intensity of the cell impacts occurring at the air-ECM interface and at the ECM-glass interface.     

Failure behavior of ITO diffusion barrier between electroplating Cu and Si substrate annealed in a low vacuum

A structure of Cu/ITO(10 nm)/Si was first formed and then annealed at various temperatures for 5 min in a rapid thermal annealing furnace under 10⁻² Torr pressure. In Cu/ITO(10 nm)/Si structure, the ITO(10 nm) film was coated on Si substrate by sputtering process and the Cu film was deposited on ITO film by electroplating technique. The various Cu/ITO(10 nm)/Si samples were characterized by a four-point probe, a scanning electron microscope, an X-ray diffractometer, and a transmission electron microscope. The results showed that when the annealing temperature increases near 600 °C the interface between Cu and ITO becomes unstable, and the Cu₃Si particles begin to form; and when the annealing temperature increases to 650 °C, a good many of Cu₃Si particles about 1 μm in size form and the sheet resistance of Cu/ITO(10 nm)/Si structure largely increases.     

Properties of Cu film and Ti/Cu film on polyimide prepared by ion beam techniques

Cu film and Ti/Cu film on polyimide substrate were prepared by ion implantation and ion beam assisted deposition (IBAD) techniques. Three-dimension white-light interfering profilometer was used to measure thickness of each film. The thickness of the Cu film and Ti/Cu film ranged between 490 nm and 640 nm. The depth profile, surface morphology, roughness, adhesion, nanohardness, and modulus of the Cu and Ti/Cu films were measured by scanning Auger nanoprobe (SAN), atomic force microscopy (AFM), and nanoindenter, respectively. The polyimide substrates irradiated with argon ions were analyzed by scanning electron microscopy (SEM) and AFM. The results suggested that both the Cu film and Ti/Cu film were of good adhesion with polyimide substrate, and ion beam techniques were suitable to prepare thin metal film on polyimide.     

Evaporation of a thin film coated on a substrate induced by a pulsed laser

The two-dimensional Laplace integral transform technique has been applied to get the spatial and temporal temperature distributions in both the molten layer thickness of a thin film coated on a substrate, the still solid part of the thin film of the target and the temperature distribution in the substrate. Also a formula for the time dependence of the evaporated part of the thin film of the target as well as the molten layer thickness of the thin film were obtained. Calculations of the obtained relations were carried out during the irradiation with a pulsed laser. The derivation has taken into account the temperature-dependent absorption coefficient of the irradiated surface and the chemical reaction in the vapor of the thin film. As an illustrative example, computations were carried out on an aluminum thin film coated on a glass substrate.     

Coating of carbon nanotubes on flexible substrate and its adhesion study

The primary goal of this project was to develop a flexible transparent conductor with 100 Ω/sq and 90% transmittance in the wavelength range of 400-700 nm on a flexible substrate. The best result achieved so far was 110 Ω/sq at 88% transmittance using purified single-walled carbon nanotubes (SWNTs) coated on a polyethylene naphthalate (PEN) substrate. The secondary goal was to simplify the overall coating procedure; we successfully reduced the process from five (prior art method) to three steps utilizing a sonication method. We also found that the use of metallic SWNTs significantly improved the conductivity and transmittance compared with the use of mixed SWNTs, i.e., unseparated SWNTs. Furthermore, a possible adhesion mechanism between SWNTs and the surface of PEN was studied; we concluded that a π-π stacking effect and a hydrophobic interaction are the major contributing factors for SWNTs to adhere to the surface of the substrate.     

熔石英表面铜膜污染物诱导损伤实验研究

 在熔石英元件表面溅射一层厚度小于10 nm的金属铜膜污染物,并测试元件的透过率。测试355 nm熔石英元件的激光损伤阈值,并用光学显微镜观测损伤形态。实验结果表明：污染后的熔石英元件的损伤阈值降低20%左右,元件表面的金属污染物薄膜经强激光辐照,在熔石英表面形成很多坑状微损伤,分布不均的热应力导致表面起伏,并有明显的烧蚀现象,导致基底损伤阈值下降。建立的光吸收和热沉积传输模型初步解释污染物膜层导致熔石英元件损伤的机理。     

Magnetic properties of Terfenol-D film on a compliant substrate

Substrate thickness effects on the magnetization and magnetostriction of Terfenol-D films was studied by using a nonlinear constitutive model combined with the Timosheko elastic theory. Results show that characteristics of Terfenol-D films on compliant substrates are different from those of their bulk counterpart. Tunable properties can be obtained by adjusting the film/substrate thickness ratio.     

基片光学特性对薄膜光强透过谱的影响

在考虑基片与空气界面反射率以及基片吸收不能忽略的情况下，对常见的基片上薄膜的光强透过率公式进行了修正，导出了该情况下的透过率公式．以非晶硅薄膜为研究对象，采用模拟计算说明基片光学特性对薄膜光强透过谱的影响．     

Structural investigation of thin tetracene films on flexible substrate by synchrotron X-ray diffraction

Structural properties of tetracene thin films grown by vacuum sublimation on a flexible Mylar^© substrate have been investigated by means of synchrotron X-ray diffraction. The films are polycrystalline and are made up of crystalline domains oriented with the (0 0 l) planes almost parallel to the substrate and completely misoriented around the surface normal. Two crystallographic phases (α and β thin film phases) have been identified. They differ for the d_h k l interplanar spacing, both larger than that of the bulk. As a comparison, results from tetracene films grown on SiO₂ have been reported to investigate the different charge transport properties of films grown on Mylar and on SiO₂ substrates.     

非均匀基底上三维薄膜生长的模拟研究

考虑原子在基底表面的扩散、沿岛周界的扩散和不同层间的扩散以及非均匀基底上表面吸附能分布的各向异性，建立起非均匀基底表面上原子扩散和三维薄膜生长的动力学蒙特卡罗模型.模拟得到在不同生长条件下出现的层状生长、岛状生长和混合生长三种生长模式和相应的多层薄膜生长形貌图.通过统计三维薄膜中原子在各层的分布，计算薄膜的表面粗糙度，得到薄膜生长模式与生长条件之间的关系. 关键词： 薄膜生长 非均匀基底 动力学蒙特卡罗模拟     

非平整基底上受热液膜流动稳定性研究

本文研究了二维黏性流体薄膜沿非平整不均匀加热基底流动时非线性表面波的演化及其流动稳定性.利用长波摄动法推导出非平整线性加热基底上非线性表面波的零阶和一阶演化方程,基于所得演化方程,绘制出正弦波纹基底上液膜的表面波形图,并研究液膜流动的线性稳定性,分析了各无量纲参数对液膜线性稳定性的影响.分析结果表明:在正弦波纹基底上,液膜自由表面随同壁面作相同频率的正弦型波动,且液膜厚度沿流动方向逐渐变小;Marangoni数为稳定影响因素,随Marangoni数的增大,液膜稳定区域增大;Peclet数和倾角θ均为不稳定影响因素,随Peclet数和倾角θ的增大,液膜稳定区域减小;在非平整基底的波峰和波谷处,Peclet数、Marangoni数和倾角θ对稳定性的影响趋势一致,但基底波谷处的液膜稳定区域小于波峰处区域,流动更易失稳.