激光诱导应力波测量薄膜界面强度研究进展

薄膜界面强度是影响多层薄膜装置性能的重要参数。激光诱导应力波技术是在可控制和非接触条件下定量测量薄膜界面强度最有效的技术之一。在采用高强度应力波短脉冲加载实现界面层裂的同时，通过光学测量薄膜自由面瞬态位移，并利用应力波理论计算得到临界界面强度。通过精确控制试样几何形状及尺寸，包括拉伸、剪切和复合型在内的各种界面加载模式都可以实现。本文对激光诱导应力波测量薄膜界面强度研究进展进行了综述，并特别强调了不同加载模式的实现方法，高强度超薄薄膜的界面测量技术，以及如何通过辨别薄膜自由面瞬态位移光学干涉信号中的某些特殊性征来实时判断和测量界面的层裂。     

Tensile and mixed-mode strength of a thin film-substrate interface under laser induced pulse loading

Laser induced stress waves are used to characterize intrinsic interfacial strength of thin films under both tensile and mixed-mode conditions. A short-duration compressive pulse induced by pulsed-laser ablation of a sacrificial layer on one side of a substrate is allowed to impinge upon a thin test film on the opposite surface. Laser-interferometric measurements of test film displacement enable calculation of the stresses generated at the interface. The tensile stress at the onset of failure is taken to be the intrinsic tensile strength of the interface. Fused-silica substrates, with their negative nonlinear elasticity, cause the compressive stress wave generated by the pulse laser to evolve a decompression shock, critical for generation of the fast fall times needed for significant loading of surface film interfaces. By allowing the stress pulse to mode convert as it reflects from an oblique surface, a high amplitude shear wave with rapid fall time is generated and used to realize mixed-mode loading of thin film interfaces. We report intrinsic strengths of an aluminum/fused silica interface under both tensile and mixed-mode conditions. The failure mechanism under mixed-mode loading differs significantly from that observed under pure tensile loading, resulting in a higher interfacial strength for the mixed-mode case. Inferred strengths are found to be independent, as they should be, of experimental parameters.     

多晶薄膜X-射线衍射

作者在普通X-射线衍射仪上实施了样品倾斜X-射线衍射(STD)技术,不需要专用薄膜附件(TFA)也能很好地进行薄膜结构的测定,并且给出其衍射能量方程和方位角方程,从而使理论、实验和结构解析结合为一体。目前,应用该技术已经成功地解决了一些其它简便方法所无法解决的诸如物相纵向分布变化测量等问题。本文还通过几种摩擦学用膜的测定结果阐明了该技术的应用及功能。     

溶胶-凝胶法制备的ZrO_2薄膜的摩擦学性能研究

在 Si(10 0 )基片上制备晶态 Zr O2 薄膜 ,考察了薄膜的摩擦学性能和摩擦磨损机制 .结果表明 :在低负荷 (0 .5 N )下 ,Zr O2 薄膜与 GCr15钢球和 Si3N4陶瓷球对摩时具有优良的抗磨减摩性能 ,在滑动 5 0 0 0次时的摩擦系数分别为0 .14和 0 .13;但随着负荷和滑动速度的增大 ,薄膜的耐磨寿命降低 ,摩擦系数增大 .采用扫描电子显微镜对薄膜磨痕表面形貌进行观察分析 ,发现在较低负荷和滑动速度条件下 ,Zr O2 薄膜的磨损机制为轻微擦伤 ;而在相对较高的负荷和滑动速度条件下 ,其磨痕表面呈现塑性变形 ,严重擦伤和断裂剥落特征     

掺杂不同钛含量氮化锆薄膜的制备

采用非平衡磁控溅射技术制备含不同钛含量的氮化锆（Zr-Ti—N）复合薄膜材料，并研究薄膜基本特性及其摩擦磨损性能．结果表明：随着Ti含量增加，Zr—Ti—N薄膜硬度有所提高；在Ti含量为18．7at．％时，薄膜的硬度达到最大值2483HK0.025；当添加16．5at．％Ti时，硬度值略有降低，但临界载荷最高，耐磨性最佳．     

Quantitative characterization of the interfacial adhesion of Ni thin film on steel substrate: A compression-induced buckling delamination test

A compression-induced buckling delamination test is employed to quantitatively characterize the interfacial adhesion of Ni thin film on steel substrate. It is shown that buckles initiate from edge flaws and surface morphologies exhibit symmetric, half-penny shapes. Taking the elastoplasticity of film and substrate into account, a three-dimensional finite element model for an edge flaw with the finite size is established to simulate the evolution of energy release rates and phase angles in the process of interfacial buckling-driven delamination. The results show that delamination propagates along both the straight side and curved front. The mode II delamination plays a dominant role in the process with a straight side whilst the curved front experiences almost the pure mode I. Based on the results of finite element analysis, a numerical model is developed to evaluate the interfacial energy release rate, which is in the range of 250–315 J/m² with the corresponding phase angle from −41° to −66°. These results are in agreement with the available values determined by other testing methods, which confirms the effectiveness of the numerical model.     

Mechanical Fatigue Measurement via a Vibrating Cantilever Beam for Self-Supported Thin Solid Films

In this paper, we develop a novel experimental apparatus, referred to as the resonant frequency device, and establish methodology to measure the fatigue properties of thin solid films. Arranging thin-film strips of our specimens into the mechanical setting of a cantilever beam and using state-of-the-art piezo actuators to generate oscillation at the clamp of the cantilever, we create a system suitable for studying the material properties of the cantilever, such as Young's modulus, fatigue and possibly, loss tangent. Deformation of the cantilever is our controlled variable in the present study, and measured with fiber-optic probes pointed at the specimen and at the piezo driver. Stress is calculated from relative deformation of the cantilever specimen with respect to the piezo actuator via a photograph of the cantilever under vibration with a curve fitting method. A LabView computer program is developed for the fatigue tests to accurately count number of cycles applied on the specimens, and a feedback mechanism is adopted to maintain displacement during the tests. Here, we present our experimental setup, procedure and theoretical models for material-property extraction. For small displacement, the two-dimensional Euler–Bernoulli beam theory is adopted. With large displacement, the system behaves as the Duffing oscillator due to geometrical nonlinearity. In addition, some experimental observations of the piezo actuators and fiber optics are reported. The method is applied to evaluate the fatigue properties of nanolayered copper-niobium composites and significant increase in the fatigue endurance limit compared to the constituent materials in the bulk form is noted.     

Problem of Low-frequency Localized Oscillations in a Thin Film with Growing Islands

Influence of localization waves to islands growing on a thin film is investigated. The film is modelled as a fluid layer covered by an inertial surface with the variable density of mass and surface tension. Mathematically, the problem is reduces to analysis of a system of non-linear equations describing the growth of island nuclei and wave propagation in the films. The existence of trapped modes for the corresponding frequency-domain problem is established. We show that for large time wave localization near islands gives some contribution in the increase of the velocity of island growth.     

Morphology of Liquid Drops and thin Films on a Solid Surface with Sinusoidal Microstructures

Surface microstructures of solid materials play a significant role in various wetting and dewetting phenomena. In the present paper, the effect of micro- and nano-structures of a substrate surface on the morphology and evolution of liquid droplets and thin films is examined. The governing equations satisfied by droplets and films on a sinusoidal surface are derived by considering van der Waals force, surface tension, gravity and hydrostatic pressure. The morphologies of both liquid droplets and thin films are numerically simulated under various characteristic sizes of roughness. It is found that the droplet shapes show a significant dependence upon the characteristic sizes of substrate microstructures. A thin liquid film on a hydrophilic substrate may have a horizontal surface or replicate the substrate morphology, depending on the wavelength of roughness.The project supported by the National Natural Science Foundation of China (10525210, 10121202) and the Ministry of Education of China.The English text was polished by Keren Wang.     

薄膜材料微观力学行为的有限元分析

采用有限元法对材料表面改性层和薄膜材料在显微压入过程中的力学行为进行了计算机模拟。从所得的载荷与压入深度的关系曲线、压痕周围应力、应变场的大小和形状分布曲线等为依据，对在超显微硬度测试中基底材料及界面层的影响进行了详细的讨论，并得出：为排除基底材料的影响，通常规定压入深度（Ｄ）不得超过膜厚（ｔ）的１０～２０％的规则并不适用于所有薄膜系统。测试时，允许的Ｄ／ｔ的临界比值将随薄膜系统不同而异。对软膜硬基底系统而言，由于压头下的塑性应变区更多的是沿膜层的横向扩展，故Ｄｃ／ｔ允许大于上述规定值，而对硬膜软基底系统而言，则由于压头下的塑性应变区很容易扩展到基底材料中去，其Ｄｃ／ｔ值将小于上述规定值。     

双磁场IMPS粒子速度测试系统

动载下材料横向行为的直接实时测量,对于全面了解材料响应及其机理有重要意义。本文介绍了自行研制的双磁电磁ＩＭＰＳ粒子速度测试系统的工作原理、结构性能及初步实验结果。该装置基于Ｆａｒａｄａｙ电磁感应定律,可实时测量多点斜碰撞产生的纵向和横向质点速度波形,从而解决了压剪炮试验中的ｓ波测量问题。     

固液润湿性对流体动压润滑薄膜的影响

利用自行开发的微型面接触润滑油膜测量系统,研究了固液润湿性对流体动压润滑油膜厚度的影响.试验中以静止的微型滑块平面和旋转的光学透明圆盘平面形成润滑副.固液的润湿性通过接触角判定,不同材料的微滑块平面和润滑液体形成不同的界面.在保持载荷和面接触楔形角不变的条件下对油膜厚度-速度关系进行了测量.结果表明:对于固液润湿性强的界面,形成的油膜厚度与经典润滑理论有较好的一致性;当固液润湿性明显降低时,测量得到的油膜厚度减小.对于试验中观察到的界面效应,应用界面滑移理论进行了初步分析.     

Nanomechanical Property and Nanowear Measurements for Sub-10-nm Thick Films in Magnetic Storage

In the magnetic storage industry, thin film carbon overcoats play a critical role in reducing magnetic and physical spacing between the recording slider and the rotating disk so that the information stored per unit area is maximized. Thin film carbon overcoats have been improved such that they exhibit higher hardness with lower thickness of few nanometers and still being able to perform reliably. In this paper, nanoindentation and nanoscratch techniques to measure nanomechanical properties, namely hardness, elastic modulus and shear strength of thin solid films were presented along with a recently developed high resolution force transducer. Nanowear behavior characterization techniques were also examined and were applied to commercially available magnetic disks to characterize their wear behavior. It was shown that the properties and wear behavior of sub-10-nm thick film carbon overcoats were reliably measured. These techniques could be applied to different thin solid films on substrates, and they are not restricted to magnetic storage systems.     

均布荷载下钢筋混凝土梁剪切破坏的研究

对于剪切破坏的梁，本文提出平截面假定的适用范围，并将它用于研究钢筋混凝土梁的抗剪性能，建立了适用于均布荷载下钢筋混凝土简支梁抗剪强度计算的理论模型，并对此进行了实验验证。此模型可推广到任意分布荷载。     

弹塑性波计算中的光滑粒子法

采用改进的光滑粒子法 ,对脉冲应力载荷下板中弹塑性一维应变波的传播进行了数值计算 ,比较了人工粘性法和通量修正法处理冲击波间断面的效果。结果表明 ,改进的光滑粒子法在应力波数值计算中有良好的精度。     

Evaporation of Falling and Shear-Driven Thin Films on Smooth and Grooved Surfaces

One of the most important tasks in development of modern gas turbine combustors is the reduction of NO_x emissions. An effective way to reduce the NO_x emission is using the lean premixed prevaporization (LPP) concept. An important phenomenon taking place in LPP chambers is the evaporation of thin fuel films. To increase the fuel evaporation rate, the use of microstructured walls has been suggested. The wall microstructures make use of the capillary forces to evenly distribute the liquid fuel over the wall, so that the appearance of uncontrolled dry patches can be avoided. Moreover, the wall structures promote the thin film evaporation characterized by ultra-high evaporation rates. An experimental setup was built for the investigation of thin liquid films falling down on the outer surface of vertical tubes with either a smooth or structured surface. In the first testing phase water is used, fuel like liquids will be used later on. The thin film can be heated from both sides, by hot oil flowing inside the tube, and by hot compressed air flowing in co-current direction to the thin film. The film is partly evaporated along the flow. Results for the wavy film structure at different Reynolds numbers are reported. For theoretical investigations a model describing the hydrodynamics and heat transfer due to evaporation of the gravity- and shear-driven undisturbed liquid film on structured surfaces was developed. For low Reynolds numbers or low liquid mass fluxes the wall surface is only partly covered with liquid and the heat transfer is shown to be governed by the evaporation of the ultra-thin film in the vicinity of the three-phase contact line. A numerical model for the solution of a two-dimensional free-surface flow of a liquid film over a structured wall was also developed. The Navier–Stokes equations are solved using the Volume of Fluid (VOF) technique. The energy equation is included in the model. The model is verified by comparison with data from the literature showing favorable agreement. In particular, the proposed model predicts the formation of capillary waves observed in the experiments. The model is used to investigate the flow of liquid on a structured wall. This calculation is the first step towards the modeling of a three-dimensional wavy flow of a gravity- and shear-driven film along a wall with longitudinal grooves. It is found that due to the Marangoni effect, a circulating flow arises within the cavity, thereby leading to an enhancement in the evaporation rate.     

制备透射电镜用表面膜薄膜样品的新方法

本文提出了一种用机械研磨和离子减薄技术制备透射电镜用薄膜样品的新方法,并且成功地将其应用于磨损表面氧化膜的结构分析,指出在铸铁油润滑磨损过程中于氧化磨损状态下磨损表面氧化膜系由Fe_3O_4均相所组成。     

Mixed-mode interfacial adhesive strength of a thin film on an anisotropic substrate

The mixed-mode interfacial adhesion strength between a gold (Au) thin film and an anisotropic passivated silicon (Si) substrate is measured using laser-induced stress wave loading. Test specimens are prepared by bonding a fused silica (FS) prism to the back side of a 〈1 0 0〉 Si substrate with a thin silicon nitride (Si_xN_y) passivation layer deposited on the top surface. A high-amplitude stress wave is developed by pulsed laser ablation of a sacrificial absorbing layer on one of the lateral surfaces of the FS prism. Due to the negative non-linear elastic properties of the FS, the compressive stress wave evolves into a decompression shock with fast fall time. Careful selection of the incident angle between the pulse and the FS/Si interface generates a mode-converted shear wave in refraction, subjecting the Si_xN_y/Au thin film interface to dynamic mixed-mode loading, sufficient to cause interfacial fracture. A detailed analysis of the anisotropic wave propagation combined with interferometric measurements of surface displacements enables calculation of the interfacial stresses developed under mixed-mode loading. The mixed-mode interfacial strength is compared to the interfacial strength measured under purely tensile loading.     

用侧向力显微镜对不同非晶态GeSbTe薄膜的摩擦性能研究

采用侧向力显微镜研究了磁控溅射方法制备的GeSbTe薄膜在大气环境中的纳米级摩擦性能,考虑了相对湿度、扫描速度及表面粗糙度对其摩擦性能的影响,对比不同成分的GeSbTe薄膜的摩擦特性.结果表明:在相对湿度较大时,扫描速度对针尖和GeSbTe薄膜之间的摩擦力影响很大;在其它条件相同、外加载荷较大时,同一载荷下的摩擦力与表面粗糙度呈线性关系,但在外加载荷较小的情况下,二者呈现非线性变化规律;相对湿度对Ge2Sb2Te5薄膜和针尖的粘附力影响较GeSb2Te4薄膜弱,且粘附力使得摩擦系数减小;在同一相对湿度下,由于薄膜成分的变化导致硬度不同,其对薄膜的摩擦性能也有一定影响.     

端头带有质量块的悬臂梁在冲击载荷下的两种剪切失效模型

剪切失效是强动载荷作用下结构失效的重要模式。本文给出了计及梁的转动惯量时端头带有质量块的悬臂梁结构受到冲击载荷作用后发生剪切失效的无量纲判据。分析表明，在初始速度间断面上是否发生剪切失效取决于质量块初始动能和质量块尺寸与梁厚之比，而与梁的长度无关。梁的转动惯量对于剪切失效具有不可忽略的影响。